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2019 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)最新文献

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MEMS Rate Integrating Gyroscope with Temperature Corrected Virtual Rotation 具有温度校正虚旋转的MEMS速率积分陀螺仪
2019 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2019-04-01 DOI: 10.1109/ISISS.2019.8739625
T. Tsukamoto, Shuji Tanaka
{"title":"MEMS Rate Integrating Gyroscope with Temperature Corrected Virtual Rotation","authors":"T. Tsukamoto, Shuji Tanaka","doi":"10.1109/ISISS.2019.8739625","DOIUrl":"https://doi.org/10.1109/ISISS.2019.8739625","url":null,"abstract":"In this paper, a method to improve the long term stability of a virtually rotated rate integrating gyroscope (RIG) is reported. The fluctuation in the virtual rotation rate causes the angle instability. The virtual rotation rate is estimated from the resonant frequency of the gyroscope structure. Using the proposed method, the RIG could operate over than 7 hrs with the bias instability as small as 2.5°/hr and the angle random walk as small as $0.002^o/mathrm{s}^{0.5}$.","PeriodicalId":162724,"journal":{"name":"2019 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"122 21 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114472107","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
Integrated Temperature Sensor for Temperature Compensation of Inertial Sensors 集成式温度传感器用于惯性传感器的温度补偿
2019 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2019-04-01 DOI: 10.1109/ISISS.2019.8739559
O. Kaya, Talha Köse, K. Azgın
{"title":"Integrated Temperature Sensor for Temperature Compensation of Inertial Sensors","authors":"O. Kaya, Talha Köse, K. Azgın","doi":"10.1109/ISISS.2019.8739559","DOIUrl":"https://doi.org/10.1109/ISISS.2019.8739559","url":null,"abstract":"This study reports a novel dual-resonator integrated temperature sensor for temperature compensation on inertial sensors. The proposed temperature sensor eliminates the need of a TCXO or OCXO time base for accurate frequency-based temperature determination. Moreover, the sensor structure eliminates the effects of aging related shifts of the nominal frequency of counter reference. In addition, it is capable of short-term error mitigation, improving bias stability of MEMS based inertial sensors.","PeriodicalId":162724,"journal":{"name":"2019 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"31 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132784015","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Analysis and Design of Super-Sensitive Stacked (S3) Resonators for Low-Noise Pitch/Roll Gyroscopes 用于低噪声螺距/滚转陀螺仪的超灵敏堆叠(S3)谐振器的分析与设计
2019 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2019-04-01 DOI: 10.1109/ISISS.2019.8739757
Ali Darvishia, K. Najafi
{"title":"Analysis and Design of Super-Sensitive Stacked (S3) Resonators for Low-Noise Pitch/Roll Gyroscopes","authors":"Ali Darvishia, K. Najafi","doi":"10.1109/ISISS.2019.8739757","DOIUrl":"https://doi.org/10.1109/ISISS.2019.8739757","url":null,"abstract":"We report a novel stacked balanced resonator structure and present the design of MEMS pitch/roll gyroscopes that utilize this stacked resonator. In this structure, two similar device layers are stacked, thus providing a balanced vertical resonator with significantly reduced anchor loss for out-of-plane (Le., the plane where the two resonators are attached) motion. Reducing the anchor loss allows one to increase the thickness of resonator layers, which leads to smaller thermoelastic dissipation and larger effective mass. A large-scale model of a stacked resonator is fabricated and tested, which proves that out-of-plane $Q$ can be improved by $>50times$ when resonators are stacked. The design of a new stacked pitch/roll gyroscope is also presented and our analysis shows that this novel design could potentially provide noise of $sim 1.5times 10^{-10circ}/surd mathrm{hr}$.","PeriodicalId":162724,"journal":{"name":"2019 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"86 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129857228","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Micro Acceleration Measurement System Based On Highly-Sensitive Tunnel Magneto-Resistance Sensor 基于高灵敏度隧道磁阻传感器的微加速度测量系统
2019 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2019-04-01 DOI: 10.1109/ISISS.2019.8739736
Lu Gao, Xiang Xu, Suiqiong Li, Dacheng Xu, Yingfei Yao
{"title":"Micro Acceleration Measurement System Based On Highly-Sensitive Tunnel Magneto-Resistance Sensor","authors":"Lu Gao, Xiang Xu, Suiqiong Li, Dacheng Xu, Yingfei Yao","doi":"10.1109/ISISS.2019.8739736","DOIUrl":"https://doi.org/10.1109/ISISS.2019.8739736","url":null,"abstract":"The design, implementation and characterization of a micro acceleration measurement system based on highly-sensitive tunnel magneto-resistance (TMR) sensor is presented in this paper. The proposed micro-system provides a new way to develop high-precision accelerometer. The measurement system was constructed with a “force-magnetic-electric” coupling structure and fabricated using MEMS based micro-fabrication process. The basic structure of the micro-system was designed based a silicon micro-cantilever, which could convert the acceleration force to the change of the magnetic field. A TMR sensor was used to precisely measure the magnetic field. The whole system was fabricated and packaged into a micro-chip to improve measurement resolution. The experimental results show that this micro-system could achieve measurement resolution of $pmb{17.35mu mathrm{g}/sqrt{mathrm{H}}mathrm{z}}$ at 1Hz within $pmb{pm 1.6mathrm{g}}$ range.","PeriodicalId":162724,"journal":{"name":"2019 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"37 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114110252","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Design Space Exploration of Hemi-Toroidal Fused Quartz Shell Resonators 半环形熔融石英壳谐振器的设计空间探索
2019 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2019-04-01 DOI: 10.1109/ISISS.2019.8739447
M. Asadian, Yusheng Wang, R. Noor, A. Shkel
{"title":"Design Space Exploration of Hemi-Toroidal Fused Quartz Shell Resonators","authors":"M. Asadian, Yusheng Wang, R. Noor, A. Shkel","doi":"10.1109/ISISS.2019.8739447","DOIUrl":"https://doi.org/10.1109/ISISS.2019.8739447","url":null,"abstract":"This paper discusses the selection of parameters for the geometry of micro glass-blown hemi-toroidal Fused Quartz (FQ) resonators. Comprehensive Finite Element (FE) simulations were performed to explore the design space of the shell resonators, focusing on frequency scaling of the operational resonance mode and the spurious resonance modes (tilt, rocking, out-of-plane, and torsional), as a function of shell geometry. It was demonstrated that a separation between resonance frequencies and mode-ordering can be achieved through optimization of the shell geometry at the different range of frequencies.","PeriodicalId":162724,"journal":{"name":"2019 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"54 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116971870","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 6
Sensor Fusion For Land Vehicle Localization Using Inertial MEMS and Odometry 基于惯性MEMS和里程计的陆地车辆定位传感器融合
2019 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2019-04-01 DOI: 10.1109/ISISS.2019.8739427
Aleksandr Mikov, A. Panyov, V. Kosyanchuk, I. Prikhodko
{"title":"Sensor Fusion For Land Vehicle Localization Using Inertial MEMS and Odometry","authors":"Aleksandr Mikov, A. Panyov, V. Kosyanchuk, I. Prikhodko","doi":"10.1109/ISISS.2019.8739427","DOIUrl":"https://doi.org/10.1109/ISISS.2019.8739427","url":null,"abstract":"The paper presents a sensor fusion module based on Error State Kalman Filter (ESKF) for land vehicle localization using inertial MEMS and odometry. The module fuses inputs from the Inertial Measurement Unit (IMU), On-Board Diagnostics (OBD), and GNSS to provide a vehicle trajectory estimate in real-time. Based on multiple field tests the mean circular error was 30 meters after 16 minutes of drive without GNSS signal (or 7 centimeters after 30 seconds) with average speed of 11 meters per second, which was in agreement with a theoretical estimate based on the IMU with 1 °/hr bias instability.","PeriodicalId":162724,"journal":{"name":"2019 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"8 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124199456","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 15
Quaternion-based Complementary Filter for Aiding in the Self-Alignment of the MEMS IMU 辅助MEMS IMU自对准的四元数互补滤波器
2019 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2019-04-01 DOI: 10.1109/ISISS.2019.8739728
Haifeng Xing, Zhiyong Chen, Chengbin Wang, Meifeng Guo, Rong Zhang
{"title":"Quaternion-based Complementary Filter for Aiding in the Self-Alignment of the MEMS IMU","authors":"Haifeng Xing, Zhiyong Chen, Chengbin Wang, Meifeng Guo, Rong Zhang","doi":"10.1109/ISISS.2019.8739728","DOIUrl":"https://doi.org/10.1109/ISISS.2019.8739728","url":null,"abstract":"Herein, an effective self-alignment method for MEMS IMUs (MIMUs) on swing bases is proposed. The self-alignment of MIMUs is generally considered impossible, and other sensors are often necessary to provide initial heading information. In addition, the traditional north-seeking algorithm is no longer applicable for MIMUs on swing bases. This study proposes continuous rotation of the MIMU in the horizontal plane, which is referred to as carouseling to suppress the bias effect on the heading error, and then the use of quaternion-based complementary filtering and inertial space gravity-based alignment to achieve the self-alignment of the MIMU on the swing base. The of pitch, roll, and heading obtained using this approach were 0.006°, 0.004°, and 0.84°, respectively, verifying the effectiveness of this method.","PeriodicalId":162724,"journal":{"name":"2019 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"PP 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126436308","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 8
Modeling of Nonlinear Oscillations of Doped Lamé-mode MEMS Silicon Resonator 掺杂lam<s:1>模MEMS硅谐振器的非线性振荡建模
2019 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2019-04-01 DOI: 10.1109/ISISS.2019.8739289
P. Rajai, Nabeel Khan, M. Ahamed
{"title":"Modeling of Nonlinear Oscillations of Doped Lamé-mode MEMS Silicon Resonator","authors":"P. Rajai, Nabeel Khan, M. Ahamed","doi":"10.1109/ISISS.2019.8739289","DOIUrl":"https://doi.org/10.1109/ISISS.2019.8739289","url":null,"abstract":"Doped silicon MEMS resonators provide an attractive alternate to quartz for frequency reference applications with promising frequency stability, high Q-factor, lower cost and lower size. However, lower size and high Q-factor requires operating with large deformations and higher power, which often induces nonlinear regimes and nonlinear frequency shifts. In this paper, we present an analytical modeling approach to capture the nonlinear dynamics by predicting the nonlinear elastic constants of doped Lame-mode silicon resonator. We investigated the impact of various doping level on both linear and nonlinear frequency response of a single crystal resonator in Lame-mode.","PeriodicalId":162724,"journal":{"name":"2019 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"2 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129124398","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 5
Investigation of Scale Factor versus Frequency for a Bulk Wave Diffraction Gyroscope 体波衍射陀螺仪比例因子随频率变化的研究
2019 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2019-04-01 DOI: 10.1109/ISISS.2019.8739429
V. Pinrod, B. Davaji, A. Lal
{"title":"Investigation of Scale Factor versus Frequency for a Bulk Wave Diffraction Gyroscope","authors":"V. Pinrod, B. Davaji, A. Lal","doi":"10.1109/ISISS.2019.8739429","DOIUrl":"https://doi.org/10.1109/ISISS.2019.8739429","url":null,"abstract":"We report on an investigation of the scale factor versus carrier frequency of a bulk-wave diffraction-based wave gyroscope. This result indicates that the mechanism of gyroscope operation, and path to optimization, requires the study of the wave excitation, and propagation, and can be studied by studying the operation at the many different resonance frequencies. Scale factor was measured at different high-overtone resonance modes to study frequency dependent of gyroscopic response. The effect of electrode drive configuration was investigated and optical interferometry is used to identify existence of shear and bulk waves. The scale factor increases with frequency on one receive IDT, while corresponds in general to the SAW response of the second IDT pair.","PeriodicalId":162724,"journal":{"name":"2019 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"193 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121061617","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Near-Navigation Grade Tuning Fork MEMS Gyroscope 近导航级音叉MEMS陀螺仪
2019 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2019-04-01 DOI: 10.1109/ISISS.2019.8739669
D. Endean, K. Christ, Patrick Duffy, Eugene Freeman, M. Glenn, M. Gnerlich, Burgess R. Johnson, Jacob Weinmann
{"title":"Near-Navigation Grade Tuning Fork MEMS Gyroscope","authors":"D. Endean, K. Christ, Patrick Duffy, Eugene Freeman, M. Glenn, M. Gnerlich, Burgess R. Johnson, Jacob Weinmann","doi":"10.1109/ISISS.2019.8739669","DOIUrl":"https://doi.org/10.1109/ISISS.2019.8739669","url":null,"abstract":"We report performance results on a MEMS out-of-plane gyroscope suitable for platform stabilization. Angle random walk (ARW) less than 0.006 deg/rt-hr and median bias stabilities over temperature of 0.2 deg/hr have been achieved. Sensor bandwidth as characterized by drive and sense mode frequency separation is $> 700$ Hz allowing system level bandwidth greater than 300 Hz. The HG6900 IMU will integrate these sensors and serve platform stabilization applications in a 259 cm3 volume.","PeriodicalId":162724,"journal":{"name":"2019 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"22 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126242042","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 24
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