2014 International Conference on Optical MEMS and Nanophotonics最新文献

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Trapping nano-sized particle by waveguide-coupled gold bowtie plasmonic tweezers 波导耦合金领结等离子体镊子捕获纳米粒子
2014 International Conference on Optical MEMS and Nanophotonics Pub Date : 2014-10-16 DOI: 10.1109/OMN.2014.6924600
Pin-Tso Lin, I-Chang Lin, Heng-Yi Chu, T. Lu, Po-Tsung Lee
{"title":"Trapping nano-sized particle by waveguide-coupled gold bowtie plasmonic tweezers","authors":"Pin-Tso Lin, I-Chang Lin, Heng-Yi Chu, T. Lu, Po-Tsung Lee","doi":"10.1109/OMN.2014.6924600","DOIUrl":"https://doi.org/10.1109/OMN.2014.6924600","url":null,"abstract":"Under the efficient and compact coupling from optical waveguide, the field highly enhanced and concentrated around gap of gold bowtie structure can trap nano-particle precisely with very strong optical forces compared with most nanophotonic tweezers.","PeriodicalId":161791,"journal":{"name":"2014 International Conference on Optical MEMS and Nanophotonics","volume":"34 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-10-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124322308","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
MEMS deformable mirror with integrated black silicon aperture 集成黑硅孔径的MEMS变形镜
2014 International Conference on Optical MEMS and Nanophotonics Pub Date : 2014-10-16 DOI: 10.1109/OMN.2014.6924529
Tianbo Liu, D. Dickensheets
{"title":"MEMS deformable mirror with integrated black silicon aperture","authors":"Tianbo Liu, D. Dickensheets","doi":"10.1109/OMN.2014.6924529","DOIUrl":"https://doi.org/10.1109/OMN.2014.6924529","url":null,"abstract":"This paper describes a method to integrate a black aperture around a MEMS deformable mirror. Silicon grass (black silicon) is etched on the areas surrounding the mirror membrane to absorb and scatter light. This eliminates specular reflection of light from the silicon substrate around the mirror, increasing optical contrast during imaging. The design, fabrication process, and performance of this integrated aperture are presented.","PeriodicalId":161791,"journal":{"name":"2014 International Conference on Optical MEMS and Nanophotonics","volume":"97 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-10-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121294157","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Silicon nitride cavity optomechanical transducers 氮化硅腔光机械换能器
2014 International Conference on Optical MEMS and Nanophotonics Pub Date : 2014-10-16 DOI: 10.1109/OMN.2014.6924503
M. Davanco, K. Grutter, Yuxiang Liu, V. Aksyuk, K. Srinivasan
{"title":"Silicon nitride cavity optomechanical transducers","authors":"M. Davanco, K. Grutter, Yuxiang Liu, V. Aksyuk, K. Srinivasan","doi":"10.1109/OMN.2014.6924503","DOIUrl":"https://doi.org/10.1109/OMN.2014.6924503","url":null,"abstract":"Planar fabrication technology has enabled the demonstration of on-chip systems in which interacting nanophotonic and nanomechanical resonators are directly integrated within a common platform. Such devices can be used for a variety of purposes in sensing, precision measurement, and signal transduction. Here, we review different nanocavity optomechanical systems that we are developing in thin film, stoichiometric Si3N4, in which mechanical modes with frequencies ranging from a few MHz to a few GHz are coupled to the optical modes of structures such as microdisk and photonic crystal cavities.","PeriodicalId":161791,"journal":{"name":"2014 International Conference on Optical MEMS and Nanophotonics","volume":"64 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-10-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123372614","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Reflective infrared quarter-wave plate using silicon nanostructures 采用硅纳米结构的反射红外四分之一波片
2014 International Conference on Optical MEMS and Nanophotonics Pub Date : 2014-10-16 DOI: 10.1109/OMN.2014.6924589
W. Nakagawa, E. Keeler, S. Rydberg, Carol L. Baumbauer, Jesse Lee, Kyle Gray, D. Dickensheets
{"title":"Reflective infrared quarter-wave plate using silicon nanostructures","authors":"W. Nakagawa, E. Keeler, S. Rydberg, Carol L. Baumbauer, Jesse Lee, Kyle Gray, D. Dickensheets","doi":"10.1109/OMN.2014.6924589","DOIUrl":"https://doi.org/10.1109/OMN.2014.6924589","url":null,"abstract":"The design, fabrication, and characterization of a reflective quarter-wave plate operating at 1550 nm wavelength are presented. This device consists of a subwavelength-period grating in silicon with an evaporated gold coating, and is compatible with standard fabrication processes.","PeriodicalId":161791,"journal":{"name":"2014 International Conference on Optical MEMS and Nanophotonics","volume":"24 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-10-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"117058526","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Optical propulsion and sorting of microparticles on silicon nitride strip waveguides 氮化硅条波导上的光推进与微粒分选
2014 International Conference on Optical MEMS and Nanophotonics Pub Date : 2014-10-16 DOI: 10.1109/OMN.2014.6924585
S. A. Khan, Chia-Ming Chang, C. Jan, E. Scouros, A. Ellerbee, O. Solgaard
{"title":"Optical propulsion and sorting of microparticles on silicon nitride strip waveguides","authors":"S. A. Khan, Chia-Ming Chang, C. Jan, E. Scouros, A. Ellerbee, O. Solgaard","doi":"10.1109/OMN.2014.6924585","DOIUrl":"https://doi.org/10.1109/OMN.2014.6924585","url":null,"abstract":"This paper describes the direct implementation of the sorting of differently sized glass particles on the surface of silicon nitride strip waveguides due to different propulsion speeds that can be controlled by varying the optical input power. The high refractive index contrast (Δn ~0.52 as compared to silicon oxide) allows for strong light confinement in waveguides of sub-micron thickness (180nm). The use of a tapered fiber increases coupling efficiency and allows us to achieve a guided power of 24mW with 320mW of input power.","PeriodicalId":161791,"journal":{"name":"2014 International Conference on Optical MEMS and Nanophotonics","volume":"10 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-10-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122023910","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Linear stepping microactuator for hyperspectral systems 用于高光谱系统的线性步进微执行器
2014 International Conference on Optical MEMS and Nanophotonics Pub Date : 2014-10-16 DOI: 10.1109/OMN.2014.6924597
H. Mehner, Csaba Endrody, M. Hoffmann
{"title":"Linear stepping microactuator for hyperspectral systems","authors":"H. Mehner, Csaba Endrody, M. Hoffmann","doi":"10.1109/OMN.2014.6924597","DOIUrl":"https://doi.org/10.1109/OMN.2014.6924597","url":null,"abstract":"We present an electrostatic inch-worm stepping drive for optical filter alignment in hyperspectral imaging systems requiring a large displacement range of about 140 μm and a step size of 10 μm. The shifted pinhole filter greatly improves the optical resolution of an innovative hyperspectral imaging system [1]. The fabrication is based on SOI (silicon on insulator) technology. The pinhole array is separately mounted into the driving frame.","PeriodicalId":161791,"journal":{"name":"2014 International Conference on Optical MEMS and Nanophotonics","volume":"325 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-10-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114807091","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Low-temperature gold-gold bonding using argon and hydrogen gas mixture atmospheric-pressure plasma treatment for optical microsystems 用氩气和氢气混合常压等离子体处理光学微系统的低温金-金键合
2014 International Conference on Optical MEMS and Nanophotonics Pub Date : 2014-10-16 DOI: 10.1109/OMN.2014.6924607
E. Higurashi, Michitaka Yamamoto, So Ikeda, T. Suga, R. Sawada
{"title":"Low-temperature gold-gold bonding using argon and hydrogen gas mixture atmospheric-pressure plasma treatment for optical microsystems","authors":"E. Higurashi, Michitaka Yamamoto, So Ikeda, T. Suga, R. Sawada","doi":"10.1109/OMN.2014.6924607","DOIUrl":"https://doi.org/10.1109/OMN.2014.6924607","url":null,"abstract":"Room temperature bonding of semiconductor chips with Au thin film to coined Au stud bumps with smooth surfaces (Ra: 1.3 nm) using Ar+H2 atmospheric-pressure plasma activation was demonstrated in ambient air. Die shear strength was high enough to exceed the strength requirement of MIL-STD-883F, method 2019 (×2). The measured results of light-currentvoltage characteristics of laser diode chips and dark current of photodiode chips indicated no degradation after bonding. By applying this technique, miniaturized polarization sensors were fabricated.","PeriodicalId":161791,"journal":{"name":"2014 International Conference on Optical MEMS and Nanophotonics","volume":"20 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-10-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130633832","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Enlightening the world 启迪世界
2014 International Conference on Optical MEMS and Nanophotonics Pub Date : 2014-10-16 DOI: 10.1109/OMN.2014.6924509
D. Payne
{"title":"Enlightening the world","authors":"D. Payne","doi":"10.1109/OMN.2014.6924509","DOIUrl":"https://doi.org/10.1109/OMN.2014.6924509","url":null,"abstract":"The great success of optical fibres in telecommunications has generated numerous applications in a number of related fields, such as sensing, biophotonics and high-power lasers. The topic remains extraordinarily buoyant and new materials, structure and applications emerge unabated. The talk will review recent developments and explore future possibilities.","PeriodicalId":161791,"journal":{"name":"2014 International Conference on Optical MEMS and Nanophotonics","volume":"203 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-10-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122145319","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
Electrothermally actuated MEMS terahertz metamaterial 电热驱动MEMS太赫兹超材料
2014 International Conference on Optical MEMS and Nanophotonics Pub Date : 2014-10-16 DOI: 10.1109/OMN.2014.6924588
C. Ho, Prakash Pitchappa, Yu‐Sheng Lin, Chengkuo Lee
{"title":"Electrothermally actuated MEMS terahertz metamaterial","authors":"C. Ho, Prakash Pitchappa, Yu‐Sheng Lin, Chengkuo Lee","doi":"10.1109/OMN.2014.6924588","DOIUrl":"https://doi.org/10.1109/OMN.2014.6924588","url":null,"abstract":"We present the design, simulation, fabrication and characterization of a continuously tunable Omega-ring teratahertz metamaterial. The tunability of metamaterial is obtained by integrating electrothermal actuator where higher tuning range, larger stroke and enhanced repeatability are possible. The maximum achieved tuning range for the resonant frequency is around 0.30 THz for the input power of 500 mW.","PeriodicalId":161791,"journal":{"name":"2014 International Conference on Optical MEMS and Nanophotonics","volume":"179 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-10-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129597375","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Polarization-resolved strong coupling of fine-structure split excitons and microcavities 精细结构分裂激子与微腔的极化分辨强耦合
2014 International Conference on Optical MEMS and Nanophotonics Pub Date : 2014-10-16 DOI: 10.1109/OMN.2014.6924582
Yi-Shan Lee, Sheng-Di Lin
{"title":"Polarization-resolved strong coupling of fine-structure split excitons and microcavities","authors":"Yi-Shan Lee, Sheng-Di Lin","doi":"10.1109/OMN.2014.6924582","DOIUrl":"https://doi.org/10.1109/OMN.2014.6924582","url":null,"abstract":"We investigate the fine-structure split excitons strongly coupled to photons in a micropillar by using the polarization-resolved micro-photoluminescence. Different coupling strengths are probed for the two excitons coupled respectively to the two polarized fundamental cavity modes. The orientation of energy states for both upper and lower exciton-polaritons is found rotating with the coupling due to the misorientation of exciton dipoles with the cavity modes. The polarization properties of this coherently exciton-photon coupling will also be presented.","PeriodicalId":161791,"journal":{"name":"2014 International Conference on Optical MEMS and Nanophotonics","volume":"78 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-10-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129399059","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
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