MEMS deformable mirror with integrated black silicon aperture

Abstract

This paper describes a method to integrate a black aperture around a MEMS deformable mirror. Silicon grass (black silicon) is etched on the areas surrounding the mirror membrane to absorb and scatter light. This eliminates specular reflection of light from the silicon substrate around the mirror, increasing optical contrast during imaging. The design, fabrication process, and performance of this integrated aperture are presented.