{"title":"用于高光谱系统的线性步进微执行器","authors":"H. Mehner, Csaba Endrody, M. Hoffmann","doi":"10.1109/OMN.2014.6924597","DOIUrl":null,"url":null,"abstract":"We present an electrostatic inch-worm stepping drive for optical filter alignment in hyperspectral imaging systems requiring a large displacement range of about 140 μm and a step size of 10 μm. The shifted pinhole filter greatly improves the optical resolution of an innovative hyperspectral imaging system [1]. The fabrication is based on SOI (silicon on insulator) technology. The pinhole array is separately mounted into the driving frame.","PeriodicalId":161791,"journal":{"name":"2014 International Conference on Optical MEMS and Nanophotonics","volume":"325 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2014-10-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":"{\"title\":\"Linear stepping microactuator for hyperspectral systems\",\"authors\":\"H. Mehner, Csaba Endrody, M. Hoffmann\",\"doi\":\"10.1109/OMN.2014.6924597\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"We present an electrostatic inch-worm stepping drive for optical filter alignment in hyperspectral imaging systems requiring a large displacement range of about 140 μm and a step size of 10 μm. The shifted pinhole filter greatly improves the optical resolution of an innovative hyperspectral imaging system [1]. The fabrication is based on SOI (silicon on insulator) technology. The pinhole array is separately mounted into the driving frame.\",\"PeriodicalId\":161791,\"journal\":{\"name\":\"2014 International Conference on Optical MEMS and Nanophotonics\",\"volume\":\"325 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2014-10-16\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"2\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2014 International Conference on Optical MEMS and Nanophotonics\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/OMN.2014.6924597\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2014 International Conference on Optical MEMS and Nanophotonics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/OMN.2014.6924597","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Linear stepping microactuator for hyperspectral systems
We present an electrostatic inch-worm stepping drive for optical filter alignment in hyperspectral imaging systems requiring a large displacement range of about 140 μm and a step size of 10 μm. The shifted pinhole filter greatly improves the optical resolution of an innovative hyperspectral imaging system [1]. The fabrication is based on SOI (silicon on insulator) technology. The pinhole array is separately mounted into the driving frame.
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