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2023 IEEE International Reliability Physics Symposium (IRPS)最新文献

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GHz Cycle-to-Cycle Variation in Ultra-scaled FinFETs: From the Time-Zero to the Aging States 超尺度finfet的GHz周期变化:从时间零到老化状态
2023 IEEE International Reliability Physics Symposium (IRPS) Pub Date : 2023-03-01 DOI: 10.1109/IRPS48203.2023.10118068
Y. Qu, Chu Yan, Xinwei Yu, Yaru Ding, Yi Zhao
{"title":"GHz Cycle-to-Cycle Variation in Ultra-scaled FinFETs: From the Time-Zero to the Aging States","authors":"Y. Qu, Chu Yan, Xinwei Yu, Yaru Ding, Yi Zhao","doi":"10.1109/IRPS48203.2023.10118068","DOIUrl":"https://doi.org/10.1109/IRPS48203.2023.10118068","url":null,"abstract":"Through tremendous experimental data, this study focuses on the cycle-to-cycle variation (CCV) in ultra-scaled FinFETs at the GHz circuit speed, which is an urgent demand for the reliability community but has seldom been reported so far. The random occupancy of traps and interface states behind CCV was investigated with the different switching speeds and full ${V_{G}, V_{D}}$ bias space. Moreover, we observed the CCV degradation during hot carrier degradation (HCD) and further explored its mechanism based on statistical datasets. This CCV study during HCD is helpful for the reliability variability-aware device/circuit co-design in advanced technology nodes.","PeriodicalId":159030,"journal":{"name":"2023 IEEE International Reliability Physics Symposium (IRPS)","volume":"3 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114269856","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
A Physics-based Model for Long Term Data Retention Characteristics in 3D NAND Flash Memory 三维NAND闪存长期数据保留特性的物理模型
2023 IEEE International Reliability Physics Symposium (IRPS) Pub Date : 2023-03-01 DOI: 10.1109/IRPS48203.2023.10118096
Rashmi Saikia, Aseer Ansari, Souvik Mahapatra
{"title":"A Physics-based Model for Long Term Data Retention Characteristics in 3D NAND Flash Memory","authors":"Rashmi Saikia, Aseer Ansari, Souvik Mahapatra","doi":"10.1109/IRPS48203.2023.10118096","DOIUrl":"https://doi.org/10.1109/IRPS48203.2023.10118096","url":null,"abstract":"Charge loss mechanisms during Data retention (DR) in GAA 3D NAND devices, Inter-cell charge loss of electrons in the Charge Trap Layer (CTL), and In-cell charge loss of electrons from tunnel oxide are modeled and analyzed using a physics-based Activated Barrier Double Well Thermionic Emission (ABDWT) model. The measured data retention characteristics for Solid Pattern (SP), of various distribution, sigma $(sigma)$ of the lower tail of the Cell Voltage Distribution (CVD) has been studied and modeled for various temperatures and programming levels (PL). Checkered pattern (CP) measured long-term data retention characteristics at various temperatures and program levels are modeled for both the loss components. 10 years projection is extrapolated across temperature and programing levels.","PeriodicalId":159030,"journal":{"name":"2023 IEEE International Reliability Physics Symposium (IRPS)","volume":"79 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122393770","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
ESD Avalanche Diodes Degradation in EOS Regime ESD雪崩二极管在EOS环境下的退化
2023 IEEE International Reliability Physics Symposium (IRPS) Pub Date : 2023-03-01 DOI: 10.1109/IRPS48203.2023.10118321
H. Sarbishaei, V. Vashchenko
{"title":"ESD Avalanche Diodes Degradation in EOS Regime","authors":"H. Sarbishaei, V. Vashchenko","doi":"10.1109/IRPS48203.2023.10118321","DOIUrl":"https://doi.org/10.1109/IRPS48203.2023.10118321","url":null,"abstract":"Degradation of ESD avalanche diodes breakdown voltage (BV) characteristics in electrical overstress (EOS) regimes is observed and studied in BCD process technology. Both walk-in and walk-out effects are studied as a function of device structure parameters. It was shown that, in constant current avalanche stress regime, the level and direction of BV degradation can be controlled by changing the RESURF poly plate. High current breakdown TLP characteristics have been analyzed for the same phenomena","PeriodicalId":159030,"journal":{"name":"2023 IEEE International Reliability Physics Symposium (IRPS)","volume":"27 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131446331","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Unique Lattice Temperature Dependent Evolution of Hot Electron Distribution in GaN HEMTs on C-doped GaN Buffer and its Reliability Consequences c掺杂GaN缓冲液中GaN hemt中热电子分布的独特晶格温度依赖演化及其可靠性后果
2023 IEEE International Reliability Physics Symposium (IRPS) Pub Date : 2023-03-01 DOI: 10.1109/IRPS48203.2023.10118255
R. R. Chaudhuri, Vipin Joshi, Amratansh Gupta, Tanmay Joshi, R. Malik, Mehak Ashraf Mir, Sayak Dutta Gupta, M. Shrivastava
{"title":"Unique Lattice Temperature Dependent Evolution of Hot Electron Distribution in GaN HEMTs on C-doped GaN Buffer and its Reliability Consequences","authors":"R. R. Chaudhuri, Vipin Joshi, Amratansh Gupta, Tanmay Joshi, R. Malik, Mehak Ashraf Mir, Sayak Dutta Gupta, M. Shrivastava","doi":"10.1109/IRPS48203.2023.10118255","DOIUrl":"https://doi.org/10.1109/IRPS48203.2023.10118255","url":null,"abstract":"Through this work, a unique substrate temperature dependent evolution of hot electron distribution is reported in GaN HEMTs on C-doped GaN buffer, and its reliability consequences are discussed. With rise in substrate temperature, significant rise in hot electron concentration, its energy, and interaction with buffer traps is observed at the drain edge, in contrast to an expected reduction in hot electron population. A mechanism based on carrier de-trapping and transport to drain is proposed and experimentally validated.","PeriodicalId":159030,"journal":{"name":"2023 IEEE International Reliability Physics Symposium (IRPS)","volume":"56 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133722836","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Current Injection Effect on ESD Behaviors of the Parasitic Bipolar Transistors inside P+/N-well diode 电流注入对P+/ n阱二极管内寄生双极晶体管ESD行为的影响
2023 IEEE International Reliability Physics Symposium (IRPS) Pub Date : 2023-03-01 DOI: 10.1109/IRPS48203.2023.10118073
Hui Wang, Pengyu Lai, Zhongren Chen
{"title":"Current Injection Effect on ESD Behaviors of the Parasitic Bipolar Transistors inside P+/N-well diode","authors":"Hui Wang, Pengyu Lai, Zhongren Chen","doi":"10.1109/IRPS48203.2023.10118073","DOIUrl":"https://doi.org/10.1109/IRPS48203.2023.10118073","url":null,"abstract":"The utilization of parasitic bipolar structures inside a typical P+/N-well as an additional electrostatic discharge (ESD) path is explored. The optimization on the lateral PNP (LPNP) is discussed. Device transmission line pulse (TLP) characterizations and technology computer aided design (TCAD) simulations by Silvaco have been performed to investigate the stand-alone LPNP ESD performance and effects of the base current injection on ESD behaviors of parasitic bipolar transistors.","PeriodicalId":159030,"journal":{"name":"2023 IEEE International Reliability Physics Symposium (IRPS)","volume":"109 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114243488","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Stress Migration of Aluminum Backside Interconnect in Xtacking® 铝背面互连在xtack®中的应力迁移
2023 IEEE International Reliability Physics Symposium (IRPS) Pub Date : 2023-03-01 DOI: 10.1109/IRPS48203.2023.10117817
Kang Yang, Suhui Yang, Yan Ouyang, Sheng-Chieh Yang, Kun Han, Yi He
{"title":"Stress Migration of Aluminum Backside Interconnect in Xtacking®","authors":"Kang Yang, Suhui Yang, Yan Ouyang, Sheng-Chieh Yang, Kun Han, Yi He","doi":"10.1109/IRPS48203.2023.10117817","DOIUrl":"https://doi.org/10.1109/IRPS48203.2023.10117817","url":null,"abstract":"Backside (BS) interconnects has shown significant advantages in 3D integral circuits for tackling the technology scaling induced frontside (FS) back-end-of-line (BEOL) routing congestion and RC delay challenge. As a representative BS interconnects architecture, Xtacking ® 1.0 & 2.0 innovated by YMTC employs one Al metal layer at backside of memory cell wafer as BS interconnect routing for signal transfer. In this paper, we exploit the effect of silicon substrate to stress migration (SM) reliability of such Al BS interconnects, and offer several process approaches by film stack or film behavior optimization to improve SM performance of Al interconnects with the assistance of numerical simulation. An index of RSM is proposed to reveal the statistic SM performance. Combining experiments and simulation result, a positive relationship is found between hydrostatic stress in numerical simulation and RSM, and it brings a quantitative solution for SM in numerical simulation.","PeriodicalId":159030,"journal":{"name":"2023 IEEE International Reliability Physics Symposium (IRPS)","volume":"78 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123606661","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Impact of gate stack processing on the hysteresis of 300 mm integrated WS2 FETs 栅极堆叠处理对300mm集成WS2场效应管迟滞的影响
2023 IEEE International Reliability Physics Symposium (IRPS) Pub Date : 2023-03-01 DOI: 10.1109/IRPS48203.2023.10117803
L. Panarella, B. Kaczer, Q. Smets, D. Verreck, T. Schram, D. Cott, D. Lin, S. Tyaginov, I. Asselberghs, C. J. L. Rosa, G. Kar, V. Afanas’ev
{"title":"Impact of gate stack processing on the hysteresis of 300 mm integrated WS2 FETs","authors":"L. Panarella, B. Kaczer, Q. Smets, D. Verreck, T. Schram, D. Cott, D. Lin, S. Tyaginov, I. Asselberghs, C. J. L. Rosa, G. Kar, V. Afanas’ev","doi":"10.1109/IRPS48203.2023.10117803","DOIUrl":"https://doi.org/10.1109/IRPS48203.2023.10117803","url":null,"abstract":"The low quality of gate dielectrics deposited on 2D channels and the resulting poor reliability of 2D FETs are major issues that need to be addressed as a high priority. In this work, we compare 300 mm integrated dual-gate WS2 FETs with two different interlayers (SiOx and AlOx) in the top HfO2 -based gate stack by means of hysteresis measurements. The collected data enable the extraction of essential properties of defects in the gate oxide, which are commonly recognized as the main cause of instability of 2D FETs. In particular, the hysteresis width is evaluated as a function of the measurement sweep rate in order to investigate the time constants of the dominant defects in both interlayers. Finally, a new measurement-simulation scheme to extract the energy distribution of defects causing hysteresis is proposed. We observe that defects in AlOx-capped devices have slower capture/emission time constants and much lower energy density approaching the conduction band minimum of the channel than those in SiOx. Therefore, A1Ox reduces hysteresis and improves reliability compared to SiOx.","PeriodicalId":159030,"journal":{"name":"2023 IEEE International Reliability Physics Symposium (IRPS)","volume":"5 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129229945","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Reliability of Memristive Devices for High-Performance Neuromorphic Computing: (Invited Paper) 用于高性能神经形态计算的记忆器件的可靠性:(特邀论文)
2023 IEEE International Reliability Physics Symposium (IRPS) Pub Date : 2023-03-01 DOI: 10.1109/IRPS48203.2023.10118214
Yue Xi, Xinyi Li, Junhao Chen, Ruofei Hu, Qingtian Zhang, Zhi-Nian Jiang, Feng Xu, Jianshi Tang
{"title":"Reliability of Memristive Devices for High-Performance Neuromorphic Computing: (Invited Paper)","authors":"Yue Xi, Xinyi Li, Junhao Chen, Ruofei Hu, Qingtian Zhang, Zhi-Nian Jiang, Feng Xu, Jianshi Tang","doi":"10.1109/IRPS48203.2023.10118214","DOIUrl":"https://doi.org/10.1109/IRPS48203.2023.10118214","url":null,"abstract":"With the rich internal ion dynamics, memristor-based neuromorphic computing emerges as a non-von Neumann computing paradigm to mimic biological neural networks and achieve high energy efficiency. However, to implement large-scale memristive neural networks, the reliability issue of memristive devices, including artificial synapse, dendrite, and soma, should be properly addressed. In this paper, recent works investigating the physical mechanisms and optimizations of memristive device reliability are presented. In particular, the relaxation effect of $boldsymbol{text{HfO}_{mathrm{x}}}$ -based artificial synapse is alleviated by using a ternary oxide as the thermal enhance layer, the device yield of $boldsymbol{text{TiO}_{mathrm{x}^{-}}}$ based artificial dendrite is improved by proper material selection and interface engineering, and the device variability of $boldsymbol{text{NbO}_{mathrm{x}}}$ -based artificial soma is reduced by nitrogen doping. Furthermore, a bio-inspired dendritic neural network with these three fundamental memristive devices is constructed and simulated to analyze the influence of device reliability. Using these optimized devices, the classification accuracy of the street-view house number dataset can be improved by up to $sim$ 60%. The quantitative requirements of device reliability metrics are also provided as a guideline for future neuromorphic system design and implementation.","PeriodicalId":159030,"journal":{"name":"2023 IEEE International Reliability Physics Symposium (IRPS)","volume":"65 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129424733","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Double-sided Row Hammer Effect in Sub-20 nm DRAM: Physical Mechanism, Key Features and Mitigation sub - 20nm DRAM中的双面排锤效应:物理机制、主要特征和缓解
2023 IEEE International Reliability Physics Symposium (IRPS) Pub Date : 2023-03-01 DOI: 10.1109/IRPS48203.2023.10117677
Longda Zhou, Jie Li, Zheng Qiao, P. Ren, Zixuan Sun, Jianping Wang, Blacksmith Wu, Zhigang Ji, Runsheng Wang, Kanyu Cao, Ru Huang
{"title":"Double-sided Row Hammer Effect in Sub-20 nm DRAM: Physical Mechanism, Key Features and Mitigation","authors":"Longda Zhou, Jie Li, Zheng Qiao, P. Ren, Zixuan Sun, Jianping Wang, Blacksmith Wu, Zhigang Ji, Runsheng Wang, Kanyu Cao, Ru Huang","doi":"10.1109/IRPS48203.2023.10117677","DOIUrl":"https://doi.org/10.1109/IRPS48203.2023.10117677","url":null,"abstract":"The double-sided row hammer (rh) effect at the silicon level for sub-20 nm dynamic random access memory (DRAM) is systematically investigated for the first time. Based on 3D TCAD simulation, the impacts of capacitive crosstalk and electron migration are investigated. The latter with trap assistance is found the dominant mechanism behind the enhancement of 1 failure and the alleviation of 0 failure for double-sided rh. Moreover, rh dependences on data pattern, timing parameters and technology nodes are compared under different rh conditions. A trade-off of retention time (tret) between 1 failure and 0 failure should be considered when suppressing the double-sided rh effect. With the co-optimization of key process parameters, tret for double-sided rh-induced 1 failure can be improved by 220 times.","PeriodicalId":159030,"journal":{"name":"2023 IEEE International Reliability Physics Symposium (IRPS)","volume":"13 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128513678","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Write-error-rate of Spin-Transfer-Torque MRAM (Invited) 自旋-传递-扭矩MRAM的写错误率(应邀)
2023 IEEE International Reliability Physics Symposium (IRPS) Pub Date : 2023-03-01 DOI: 10.1109/IRPS48203.2023.10117666
D. Worledge
{"title":"Write-error-rate of Spin-Transfer-Torque MRAM (Invited)","authors":"D. Worledge","doi":"10.1109/IRPS48203.2023.10117666","DOIUrl":"https://doi.org/10.1109/IRPS48203.2023.10117666","url":null,"abstract":"Embedded Spin-Transfer Torque Magnetoresistive Random Access Memory (STT-MRAM) is now a standard foundry offering for embedded non-volatile memory applications at the 28 nm node and below, where it replaces embedded Flash, due to lower development costs. The switch from in-plane to perpendicularly magnetized magnetic materials enabled reliable operation and a scaling path. Write-error-rate is the key reliability challenge for STT-MRAM. While due to fundamental physics, write-error-rate of STT-MRAM can be engineered to meet even aggressive product specifications.","PeriodicalId":159030,"journal":{"name":"2023 IEEE International Reliability Physics Symposium (IRPS)","volume":"20 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124998388","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
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