2006 International Conference on MEMS, NANO, and Smart Systems最新文献

Complete Analysis of a Novel Fully Symmetric Decoupled Micromachined Gyroscope 一种新型全对称解耦微机械陀螺仪的完整分析

2006 International Conference on MEMS, NANO, and Smart Systems Pub Date : 2006-12-01 DOI: 10.1109/ICMENS.2006.348212

A. Sharaf, S. Sedky, S. Habib

{"title":"Complete Analysis of a Novel Fully Symmetric Decoupled Micromachined Gyroscope","authors":"A. Sharaf, S. Sedky, S. Habib","doi":"10.1109/ICMENS.2006.348212","DOIUrl":"https://doi.org/10.1109/ICMENS.2006.348212","url":null,"abstract":"This paper reports on a novel fully symmetric decoupled micromachined gyroscope (FSDMG). The proposed sensor has five masses, electrostatically driven to primary mode oscillation, and senses, capacitively, the output signal. The new structure achieves complete decoupling between drive and sense modes to minimize the mechanical crosstalk, thanks to the intermediate mass and decoupling beams. The fully symmetric structure helps to lower the zero rate output of the sensor. The manufacturing asymmetry can be overcome by four sets of adjustable electrodes surrounding the outer frame. Drive and sense amplitudes, mechanical and electrical sensitivities, quality factor and approximated bandwidth are extracted analytically and results are confirmed using finite element analysis (FEA). The designed sensor shows drive and sense modes resonance frequencies of 6391 Hz and 6393 Hz respectively; the frequency mismatch is lower than 0.03%. The drive and sense capacitance are 0.098 pF and 0.23 pF respectively. The FEA using ANSYS shows drive and sense frequency of 6187and 6199 Hz respectively for only 0.2% mismatch in resonance frequency. The output signal achieves 70 nm amplitude for 1 deg/s input rotation rate, which results in 0.83 aF change in the sense capacitance. The numerical value of both the mechanical and electrical sensitivities are 0.07 mum/(deg/s) and 17.5 mV/(deg/s) respectively","PeriodicalId":156757,"journal":{"name":"2006 International Conference on MEMS, NANO, and Smart Systems","volume":"132 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2006-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114485751","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 6

A New Design of a Current-mode Wheatstone Bridge Using Operational Floating Current Conveyor 一种基于可操作浮流输送机的电流型惠斯通电桥的新设计

2006 International Conference on MEMS, NANO, and Smart Systems Pub Date : 2006-12-01 DOI: 10.1109/ICMENS.2006.348213

Y. Ghallab, Wael Badawy

引用次数: 13

Behavioral Modeling of RF-MEMS Disk Resonator RF-MEMS圆盘谐振器的行为建模

2006 International Conference on MEMS, NANO, and Smart Systems Pub Date : 2006-12-01 DOI: 10.1109/ICMENS.2006.348209

M. El-Shafie, M. Sakr, H. F. Ragai

引用次数: 2

Determining the Required Pulses for Controlling the Operation of Electrostatic MEMS Converters 确定控制静电MEMS变换器工作所需的脉冲

2006 International Conference on MEMS, NANO, and Smart Systems Pub Date : 2006-12-01 DOI: 10.1109/ICMENS.2006.348210

M. Salem, M. Salem, A. Zekry, H. F. Ragai

引用次数: 7

Mechanical Strain Measurements Using Semiconductor Piezoresistive Material 用半导体压阻材料测量机械应变

2006 International Conference on MEMS, NANO, and Smart Systems Pub Date : 2006-12-01 DOI: 10.1109/ICMENS.2006.348204

A. Mohammed, W. Moussa, E. Lou

引用次数: 10

SoC - what are our technology futures? SoC——我们技术的未来是什么?

2006 International Conference on MEMS, NANO, and Smart Systems Pub Date : 2006-12-01 DOI: 10.1109/ICMENS.2006.348201

G. Jullien

{"title":"SoC - what are our technology futures?","authors":"G. Jullien","doi":"10.1109/ICMENS.2006.348201","DOIUrl":"https://doi.org/10.1109/ICMENS.2006.348201","url":null,"abstract":"Many of us discovered that we were working in System-on-Chip technology by default! The technology to put hundreds of millions of transistors on a monolithic CMOS digital chip became available over the past few years; we adopted it and became de facto SoC researchers. However, as SoC has come on stream we have also started to see cracks appearing in the technology. 3rd order effects ofjust a few years ago have become predominant problems, and previous performance predictions have been shown to be false. This talk will undoubtedly produce more questions than answers, but, as an interested observer of the technologies we play with in our sand box, I will try to ponder on some of the issues - and muse on how those amongst us, who normally only observe, can also play a role in defining and exploring promising future technologies. Brief Bio: Graham Jullien holds the iCORE Chair in Advanced Technology Information Processing Systems, and is the Director of the ATIPS Laboratories, in the Department of Electrical and Computer Engineering at the University of Calgary. His long-term research interests are in the areas of Integrated Circuits (including SoC), VLSI Signal Processing, Computer Arithmetic, High Performance Parallel Architectures, and Number Theoretic Techniques. Since taking up his chair position at Calgary in 2001, he has expanded his research interests to include security systems, nano-electronic technologies and biomedical systems. He is currently involved, along with his colleagues, in developing an Integration Laboratory cluster to explore next generation integrated microsystems. Dr.","PeriodicalId":156757,"journal":{"name":"2006 International Conference on MEMS, NANO, and Smart Systems","volume":"689 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2006-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116094420","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

System on Chip (SOC) design pressures reach critical point 片上系统(SOC)设计压力达到临界点

2006 International Conference on MEMS, NANO, and Smart Systems Pub Date : 2006-12-01 DOI: 10.1109/ICMENS.2006.348200

Hazem ElTahawy

引用次数: 0

Flow Field Visualization by Micro-PIV in an X-shaped Microfluidic Channel with Two Streams 双流x型微流控通道的微piv流场可视化

2006 International Conference on MEMS, NANO, and Smart Systems Pub Date : 2006-12-01 DOI: 10.1109/ICMENS.2006.348203

Jin‐Cherng Shyu, Falin Chen

引用次数: 1

Growth of Grains Effect on Boron Diffusion in Heavily Implanted Polycrystalline silicon Thin Films 晶粒生长对硼在重注入多晶硅薄膜中扩散的影响

2006 International Conference on MEMS, NANO, and Smart Systems Pub Date : 2006-12-01 DOI: 10.1109/ICMENS.2006.348207

S. Abadli, F. Mansour

引用次数: 0

Analysis and Modeling of RF-MEMS Disk Resonator RF-MEMS圆盘谐振器的分析与建模

2006 International Conference on MEMS, NANO, and Smart Systems Pub Date : 2006-12-01 DOI: 10.1109/ICMENS.2006.348208

M. Sakr, M. El-Shafie, H. F. Ragai

引用次数: 5