Mechanical Strain Measurements Using Semiconductor Piezoresistive Material

In this article, the design of a MEMS-based strain sensor has been introduced. This design has high sensitivity, low power consumption compared with the commercially available thin-foil strain gauges, and high absolute resolution. All of these are at high signal stability over a wide temperature range. The piezoresistivity theory, the microfabrication process flow and the finite element simulation have been introduced to provide guidelines for the sensor design process