RF-MEMS圆盘谐振器的行为建模

2006 International Conference on MEMS, NANO, and Smart Systems Pub Date : 2006-12-01 DOI:10.1109/ICMENS.2006.348209

M. El-Shafie, M. Sakr, H. F. Ragai

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引用次数: 2

摘要

本文通过驱动其等效电路模型，建立了RF-MEMS圆盘谐振器的行为模型。该模型在前两种径向轮廓模式下运行，并用ANSYS对结果进行了验证。利用谐振器模型设计了一个皮尔斯振荡器，以演示该模型在振荡器上的性能。介绍了振荡器的频率噪声和相位噪声等性能

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Behavioral Modeling of RF-MEMS Disk Resonator

This paper presents behavioral modeling of RF-MEMS disk resonator through driving its equivalent circuit model. The model is operating in the first two radial contour modes and the results were verified with ANSYS. A Pierce oscillator utilizing the resonator model is designed to demonstrate the performance of the model on the oscillator. The oscillator performance like frequency and phase noise is presented

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2006 International Conference on MEMS, NANO, and Smart Systems

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