RF-MEMS圆盘谐振器的分析与建模

2006 International Conference on MEMS, NANO, and Smart Systems Pub Date : 2006-12-01 DOI:10.1109/ICMENS.2006.348208

M. Sakr, M. El-Shafie, H. F. Ragai

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引用次数: 5

摘要

本文对MEMS圆盘谐振器进行了分析和建模。描述磁盘运行的主要参数是质量因子、固有频率和等效质量。本文得到了圆盘谐振器不同振动模式下材料的频率与泊松比的关系和圆盘谐振器等效质量的一般方程。生成的模型可以用任何合适的语言(如systemC、verilog-AMS或VHDL-AMS)进行编码。通过ANSYS对模型进行了验证

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Analysis and Modeling of RF-MEMS Disk Resonator

This paper presents the analysis and modeling of MEMS disk resonator. The main parameters that describe the operation of the disk are the quality factor, natural frequency and equivalent mass. In this work the frequency relation versus Poisson's ratio of the material and a general equation for the equivalent mass of disk resonator are obtained for different vibration modes of the disk resonator. The resulting model is formulated such that it can be coded by any suitable language such as systemC, verilog-AMS or VHDL-AMS. The model is verified by ANSYS

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2006 International Conference on MEMS, NANO, and Smart Systems

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