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IEEE SENSORS 2014 Proceedings最新文献

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Flexible thermal MEMS flow sensor based on Cu on polyimide substrate 基于Cu -聚酰亚胺基板的柔性热MEMS流量传感器
IEEE SENSORS 2014 Proceedings Pub Date : 2014-12-15 DOI: 10.1109/ICSENS.2014.6985025
S. Shibata, Yosuke Niimi, M. Shikida
{"title":"Flexible thermal MEMS flow sensor based on Cu on polyimide substrate","authors":"S. Shibata, Yosuke Niimi, M. Shikida","doi":"10.1109/ICSENS.2014.6985025","DOIUrl":"https://doi.org/10.1109/ICSENS.2014.6985025","url":null,"abstract":"A flexible thermal flow sensor based on a Cu on polyimide (COP) substrate was developed for the first time. It has an advantage in that it can be mounted on non-planar surfaces, and, through having a low resistance, it can embed an electrical feed into the COP substrate. Metal film working as a flow sensing element was formed on a thin polyimide membrane produced by sacrificial etching. Flow sensing characteristics, such as the calibration curve and response waveform, were successfully obtained. The relationship between the sensor output and flow rate closely matched the calibration curve derived by King's law. The obtained response times of both rising and falling were 0.50 s and 0.67 s, respectively.","PeriodicalId":13244,"journal":{"name":"IEEE SENSORS 2014 Proceedings","volume":"8 1","pages":"424-427"},"PeriodicalIF":0.0,"publicationDate":"2014-12-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"90165160","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 15
Introduction to time-of-flight imaging 介绍飞行时间成像
IEEE SENSORS 2014 Proceedings Pub Date : 2014-12-15 DOI: 10.1109/ICSENS.2014.6985072
E. Charbon
{"title":"Introduction to time-of-flight imaging","authors":"E. Charbon","doi":"10.1109/ICSENS.2014.6985072","DOIUrl":"https://doi.org/10.1109/ICSENS.2014.6985072","url":null,"abstract":"Time-of-flight imaging is a subset of imaging science interested in the detection of the time-of-flight of certain waves, usually light, to reconstruct the position of objects in a 3D scene. Optical time-of-flight imagers have existed for decades, but it is only with the introduction of solid-state sensors with fast (global) shutters, that they have become compact and prone to mass-production. In these sensors, light propagation can be frozen in time and space and its time-of-flight can be evaluated on the pixel-by-pixel basis to accurately reconstruct 3D scenes and volumes. Applications include gaming, gesture recognition, and virtual keyboards for short-range cameras, security, 3D video monitoring, and robotic operation for medium-range cameras, safety and pedestrian avoidance for long-range cameras, and LIDAR telemetry and landscape monitoring for ultra-long-range cameras. Also based on similar concepts are non-vision applications, such as time-of-flight positron emission tomography, fluorescence lifetime imaging microscopy, and time-resolved optical coherent tomography, to name a few.","PeriodicalId":13244,"journal":{"name":"IEEE SENSORS 2014 Proceedings","volume":"538 ","pages":"610-613"},"PeriodicalIF":0.0,"publicationDate":"2014-12-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"91520665","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 11
Annular multifrequency piezoelectric array for enhanced wideband ultrasonic response 环形多频压电阵列增强宽带超声响应
IEEE SENSORS 2014 Proceedings Pub Date : 2014-12-15 DOI: 10.1109/ICSENS.2014.6984943
J. Topete, T. Álvarez-Arenas
{"title":"Annular multifrequency piezoelectric array for enhanced wideband ultrasonic response","authors":"J. Topete, T. Álvarez-Arenas","doi":"10.1109/ICSENS.2014.6984943","DOIUrl":"https://doi.org/10.1109/ICSENS.2014.6984943","url":null,"abstract":"This paper presents the main results of a research carried out to achieve ultrasonic piezoelectric transducers with a bandwidth larger than that of present devices. The design is based on a kerfless multifrequency annular array, which is machined out of a 1-3 connectivity piezocomposite disk. The elements of the array are designed so that they present a different resonant frequency and the individual frequency bands of the elements overlap to furnish an overall response that approximate to the sum of the individual responses. A two elements array is presented: a central disk and a external ring with centre frequencies of 0.55 and 0.25 MHz, respectively. The transducer is designed for water immersion and is tested in pulse-echo. Bandwidth of the final design extends from 0.19 MHz up to 0.98 MHz, with a 6dB relative bandwidth close to 130%.","PeriodicalId":13244,"journal":{"name":"IEEE SENSORS 2014 Proceedings","volume":"115 1","pages":"102-105"},"PeriodicalIF":0.0,"publicationDate":"2014-12-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"80806809","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
CMOS 0.18 µm standard process capacitive MEMS high-Q oscillator with ultra low-power TIA readout system CMOS 0.18µm标准工艺电容式MEMS高q振荡器，超低功耗TIA读出系统
IEEE SENSORS 2014 Proceedings Pub Date : 2014-12-15 DOI: 10.1109/ICSENS.2014.6985149
F. Kuo, C. Chang, K. Wen
{"title":"CMOS 0.18 µm standard process capacitive MEMS high-Q oscillator with ultra low-power TIA readout system","authors":"F. Kuo, C. Chang, K. Wen","doi":"10.1109/ICSENS.2014.6985149","DOIUrl":"https://doi.org/10.1109/ICSENS.2014.6985149","url":null,"abstract":"This paper presents the first monolithic ultra-low power MEMS oscillator that can be manufactured in the ASIC compatible standard CMOS process and monolithically integrated with TIA circuitry. It is designed for high Q value and moderate motional impedance under strict design constraints of the standard fabrication process. A high gain ultra-low power sustaining TIA amplifier circuit is compactly integrated with the resonator structure on a single die for low-power 32 kHz clock generation. The proposed 1.69μW MEMS oscillator can be embedded in common SoC applications monolithically to provide clock sources.","PeriodicalId":13244,"journal":{"name":"IEEE SENSORS 2014 Proceedings","volume":"49 1","pages":"911-914"},"PeriodicalIF":0.0,"publicationDate":"2014-12-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"76014776","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
Enhancement of ultrasound generated by evanescent light in confined geometry 在受限几何空间中由倏逝光产生的超声增强
IEEE SENSORS 2014 Proceedings Pub Date : 2014-12-15 DOI: 10.1109/ICSENS.2014.6985069
I. Matsuya, K. Matozaki, Yuki Takahashi, I. Ihara
{"title":"Enhancement of ultrasound generated by evanescent light in confined geometry","authors":"I. Matsuya, K. Matozaki, Yuki Takahashi, I. Ihara","doi":"10.1109/ICSENS.2014.6985069","DOIUrl":"https://doi.org/10.1109/ICSENS.2014.6985069","url":null,"abstract":"This paper demonstrates a new approach for generating ultrasound, utilizing evanescent light. Evanescent light generated during total internal reflection at the prism surface, is utilized for generating ultrasound in aluminum specimen. It has been found that ultrasound can be generated in the aluminum specimen only by evanescent light. The amplitudes of ultrasound generated by evanescent light were unexpectedly nine times larger than the ones generated by direct laser irradiation. These results indicate that the possibility of a novel ultrasound pulse-echo transducer with near-field optics for measuring objects smaller than the wavelength of light.","PeriodicalId":13244,"journal":{"name":"IEEE SENSORS 2014 Proceedings","volume":"14 1","pages":"598-601"},"PeriodicalIF":0.0,"publicationDate":"2014-12-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"79416836","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Fabrication of ultra-thin silicon stress sensor chips with high flexibility and high sensitivity 高柔性、高灵敏度超薄硅应力传感器芯片的研制
IEEE SENSORS 2014 Proceedings Pub Date : 2014-12-15 DOI: 10.1109/ICSENS.2014.6985241
Pai Zhao, Ning Deng, Zheyao Wang
{"title":"Fabrication of ultra-thin silicon stress sensor chips with high flexibility and high sensitivity","authors":"Pai Zhao, Ning Deng, Zheyao Wang","doi":"10.1109/ICSENS.2014.6985241","DOIUrl":"https://doi.org/10.1109/ICSENS.2014.6985241","url":null,"abstract":"We propose a method for fabrication of ultra-thin stress chips (UTSC) by dicing before thinning method on chip-scale level, discuss attributes of UTSC, and report their applications in bio-medical areas, including pulse monitoring and orthodontic force measurement. Using an edge protection method and a wafer transfer technology, silicon stress sensor chips with size of 2 mm× 2 mm fabricated using CMOS technology have been reconfigured as a virtual wafer and thinned from 350 μm to 35 μm. The thinned individual chips have been laminated with a flexible polyimide substrate and wire-bonded to the electric interconnects embedded in the polyimide substrate. Measurement results show that the sensitivity of the UTSC is about 70 times larger than that of metal strain gauge. The flexibility and the high sensitivity of the UTSC enable the measurement of human wrist pulse and orthodontic force in 1:1 teeth model. These preliminary results demonstrate a possible solution for sensor integration on flexible substrates using dicing before thinning.","PeriodicalId":13244,"journal":{"name":"IEEE SENSORS 2014 Proceedings","volume":"86 6 1","pages":"1268-1271"},"PeriodicalIF":0.0,"publicationDate":"2014-12-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"78601399","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Implantable catheter flow sensor with legs in air passage for laboratory animal 实验动物植入式带腿导管气流传感器
IEEE SENSORS 2014 Proceedings Pub Date : 2014-12-15 DOI: 10.1109/ICSENS.2014.6984981
T. Yamada, R. Ono, T. Matsuyama, M. Matsushima, T. Kawabe, M. Shikida
{"title":"Implantable catheter flow sensor with legs in air passage for laboratory animal","authors":"T. Yamada, R. Ono, T. Matsuyama, M. Matsushima, T. Kawabe, M. Shikida","doi":"10.1109/ICSENS.2014.6984981","DOIUrl":"https://doi.org/10.1109/ICSENS.2014.6984981","url":null,"abstract":"An implantable catheter flow sensor with legs for measuring the breathing characteristics of disease-model animals was developed. The unique feature of this sensor is the use of legs to fix the sensor to the inside wall surface of the air passage without preventing ciliary motion. Differently shaped legs were fabricated by application of a heat shrinkable tube. Prototype sensors was inserted into tubes with inner diameters ranging from 2.4 to 2.7 mm and successfully anchored to the inside surface by the legs. An evaluation of the relationship between the sensor output and the flow rate demonstrated that the sensor output against the flow rate obeyed King's law. The sensor output variation with different inner tube diameters was suppressed to less than 3%.","PeriodicalId":13244,"journal":{"name":"IEEE SENSORS 2014 Proceedings","volume":"30 1","pages":"253-256"},"PeriodicalIF":0.0,"publicationDate":"2014-12-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"74103646","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
Investigation of polymer deposition techniques on a Solidly Mounted Resonator arrays for vapour sensing 用于蒸汽传感的固体谐振器阵列聚合物沉积技术的研究
IEEE SENSORS 2014 Proceedings Pub Date : 2014-12-15 DOI: 10.1109/ICSENS.2014.6984968
Farah Al-Naimi, Malcolm Spain, P. Helfenstein, Taepyeong Kim, Yong-Won Lee, Si Hoon Lee, G. Rughoobur, L. Garcia-Gancedo, A. Flewitt
{"title":"Investigation of polymer deposition techniques on a Solidly Mounted Resonator arrays for vapour sensing","authors":"Farah Al-Naimi, Malcolm Spain, P. Helfenstein, Taepyeong Kim, Yong-Won Lee, Si Hoon Lee, G. Rughoobur, L. Garcia-Gancedo, A. Flewitt","doi":"10.1109/ICSENS.2014.6984968","DOIUrl":"https://doi.org/10.1109/ICSENS.2014.6984968","url":null,"abstract":"In this work we fabricate and test arrays of Solidly Mounted Resonators (SMRs), which are normally used in RF filters, to make gravimetric vapour sensing system. Each of the SMRs in the array are made to be chemically sensitive using commercially available polymers deposited on the active areas of the resonators using three different deposition techniques, namely needle dispensing, spraying and inkjet printing. Of the three methods, it was found that inkjet printing is the most effective as it can be used with a wide variety of solutions deposited with a good degree of accuracy. Three solvent vapours were used to test chips with polymers deposited using the 3 techniques and the selectivity results are shared.","PeriodicalId":13244,"journal":{"name":"IEEE SENSORS 2014 Proceedings","volume":"236 1","pages":"202-205"},"PeriodicalIF":0.0,"publicationDate":"2014-12-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"72563563","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Thermal method of gas separation with micro-pores 微孔气体分离热法
IEEE SENSORS 2014 Proceedings Pub Date : 2014-12-15 DOI: 10.1109/ICSENS.2014.6985124
S. Nakaye, H. Sugimoto, N. Gupta, Y. Gianchandani
{"title":"Thermal method of gas separation with micro-pores","authors":"S. Nakaye, H. Sugimoto, N. Gupta, Y. Gianchandani","doi":"10.1109/ICSENS.2014.6985124","DOIUrl":"https://doi.org/10.1109/ICSENS.2014.6985124","url":null,"abstract":"A method of gas separation that exploits thermal transpiration across micro-pores is proposed. The structure of the separation element is comprised simply of a porous membrane and one channel along each of the two surfaces of the membrane. A temperature and pressure difference is applied across the membrane. This paper reports the first experiments that show binary mixtures of noble gases can be separated by the proposed method. Up to 15% mole percentage variation is observed using 30×30 mm2 sized mixed cellulose ester porous membrane with 45K temperature difference and 2kPa pressure difference. The experimental results match well with numerical results reported previously. Using numerical simulations, it is also shown for the first time that a concentration variation can be induced using the same structure while providing only a temperature difference.","PeriodicalId":13244,"journal":{"name":"IEEE SENSORS 2014 Proceedings","volume":"232 1","pages":"815-818"},"PeriodicalIF":0.0,"publicationDate":"2014-12-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"72752580","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 8
A novel smart prodder with sensor feedback for material recognition in Humanitarian Demining applications 一种具有传感器反馈的新型智能探针，用于人道主义排雷应用中的材料识别
IEEE SENSORS 2014 Proceedings Pub Date : 2014-12-15 DOI: 10.1109/ICSENS.2014.6985115
S. Baglio, L. Cantelli, F. Giusa, G. Muscato, A. Noto
{"title":"A novel smart prodder with sensor feedback for material recognition in Humanitarian Demining applications","authors":"S. Baglio, L. Cantelli, F. Giusa, G. Muscato, A. Noto","doi":"10.1109/ICSENS.2014.6985115","DOIUrl":"https://doi.org/10.1109/ICSENS.2014.6985115","url":null,"abstract":"In this work a smart prodder, capable to give information about the material of a touched unknown object, is presented. The recognition process is based on the analysis of the interaction between a sensing unit and the object. The surface of the object is excited by a piezoelectric actuator and its response measured with another piezoelectric sensor. A prototype has been designed and built and experimental trials have been performed.","PeriodicalId":13244,"journal":{"name":"IEEE SENSORS 2014 Proceedings","volume":"87 1","pages":"779-782"},"PeriodicalIF":0.0,"publicationDate":"2014-12-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"74542095","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
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