Journal of Optical Microsystems最新文献_第4页

Two-photon polymerization as a potential manufacturing tool for biomimetic engineering of complex structures found in nature 双光子聚合作为一种潜在的制造工具，在自然界中发现复杂结构的仿生工程

Journal of Optical Microsystems Pub Date : 2022-07-01 DOI: 10.1117/1.JOM.2.3.031203

G. Zyla, A. Kovalev, C. Esen, A. Ostendorf, S. Gorb

{"title":"Two-photon polymerization as a potential manufacturing tool for biomimetic engineering of complex structures found in nature","authors":"G. Zyla, A. Kovalev, C. Esen, A. Ostendorf, S. Gorb","doi":"10.1117/1.JOM.2.3.031203","DOIUrl":"https://doi.org/10.1117/1.JOM.2.3.031203","url":null,"abstract":"Abstract. We report on the successful use of three-dimensional (3D) printing by two-photon polymerization to engineer optimized hierarchically composed surface structures at the micro- and nanoscale. The hierarchical composition of the printed structures was inspired by those found on the upper wing surface of blue-winged butterflies from the genus Morpho. In this way, the nanostructures and blue coloration of the organisms was mimicked, but less iridescence was achieved for biomimetic surfaces. Like the biological surface structures, the ones printed exhibited disorders characteristics. As a result, the blue colors generated by biomimetic structures displayed angle-insensitive optical properties similar to those of the Morpho wings. In addition, the great design freedom and simple workflow of the 3D printing technique enabled the fabrication of different structures at the microscale without modifying the dimension of the substructures at the nanoscale. Thus, it was possible to set the direction in which angle-insensitive coloration appeared to an observer. The morphology of biological and biomimetic surface structures was analyzed and compared using scanning electron microscopy. The optical properties of biological and engineered specimens were determined using angle-resolved spectroscopy. Furthermore, the coloration of biomimetic surfaces and the upper wing surface of Morpho butterfly was studied in different liquids. The results were compared, and potential application for biomimetic surfaces was discussed.","PeriodicalId":127363,"journal":{"name":"Journal of Optical Microsystems","volume":"52 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2022-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"117041297","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 3

Special Section Guest Editorial: Biomimetic Optical Microsystems 特邀嘉宾评论:仿生光学微系统

Journal of Optical Microsystems Pub Date : 2022-07-01 DOI: 10.1117/1.JOM.2.3.031201

Y. Song, Cunjiang Yu, Gil Ju Lee

引用次数: 0

Arrayed silicon-based concave microlens fabricated by single mask ultraviolet-photolithography and dual-step KOH etching 单掩模紫外光刻和双步KOH蚀刻制备硅基凹微透镜

Journal of Optical Microsystems Pub Date : 2022-04-01 DOI: 10.1117/1.JOM.2.2.023501

Bo Zhang, Taige Liu, Zhe Wang, Wen-Ben Huang, Chai Hu, Kewei Liu, Mingce Chen, Jiashuo Shi, Xinyu Zhang

{"title":"Arrayed silicon-based concave microlens fabricated by single mask ultraviolet-photolithography and dual-step KOH etching","authors":"Bo Zhang, Taige Liu, Zhe Wang, Wen-Ben Huang, Chai Hu, Kewei Liu, Mingce Chen, Jiashuo Shi, Xinyu Zhang","doi":"10.1117/1.JOM.2.2.023501","DOIUrl":"https://doi.org/10.1117/1.JOM.2.2.023501","url":null,"abstract":"Abstract. Background: As an important optical element, concave microlens arrays are utilized in many applications. How to fabricate a mass of concave microlens arrays efficiently at a low cost is a key problem to be solved. Aim: We propose a method of fabricating a concave microlens array based on single mask ultraviolet (UV)-photolithography and dual-step potassium hydroxide (KOH) etching, which has proven to be efficient. Approach: An arrayed silicon-based concave microlens utilized in the infrared wavelength range was designed and fabricated based on single mask UV-photolithography and dual-step KOH etching. Combining the computation simulation and the evolving microstructural mechanism based on the silicon anisotropic corrosion characteristics in a common KOH solution with several control factors such as the solution concentration, temperature, and corrosion period, an arrayed concave microlens with a spherical profile over a silicon wafer with the required crystal orientation was simulated, designed, and fabricated effectively. Results: Both the scanning electron microscopy and the surface profile measurements indicate that the fabricated concave microlens arrays present a high filling-factor of more than 80% and a small surface roughness with a root mean square value in several tens of nanometer scale. The common optical measurements demonstrate that the fabricated silicon-based concave microlens presents a good infrared beam divergence performance. Conclusions: The method highlights the prospect of the industrial production of large-area silicon-based concave microlens arrays for infrared beam shaping and control light applications.","PeriodicalId":127363,"journal":{"name":"Journal of Optical Microsystems","volume":"2 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2022-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130359970","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 1

Large-area narrowband Fabry–Pérot interferometers for long-wavelength infrared spectral sensing 用于长波长红外光谱传感的大面积窄带法布里-帕姆罗干涉仪

Journal of Optical Microsystems Pub Date : 2022-04-01 DOI: 10.1117/1.JOM.2.2.023502

G. S. Gill, M. Zawierta, D. Tripathi, A. Keating, G. Putrino, K. Silva, L. Faraone, M. Martyniuk

{"title":"Large-area narrowband Fabry–Pérot interferometers for long-wavelength infrared spectral sensing","authors":"G. S. Gill, M. Zawierta, D. Tripathi, A. Keating, G. Putrino, K. Silva, L. Faraone, M. Martyniuk","doi":"10.1117/1.JOM.2.2.023502","DOIUrl":"https://doi.org/10.1117/1.JOM.2.2.023502","url":null,"abstract":"Abstract. This paper presents a proof-of-concept for microelectromechanical system (MEMS)-based fixed cavity Fabry–Pérot interferometers (FPIs) operating in the long-wavelength infrared (LWIR, 8 to 12 μm) region. This work reports for the first time on the use of low-index BaF2 thin films in combination with Ge high-index thin films for such applications. Extremely flat and stress-free ∼3-μm-thick free-standing distributed Bragg reflectors (DBRs) are also presented in this article, which were realized using thick lift-off of a trilayer structure fabricated using Ge and BaF2 optical layers. A peak-to-peak flatness was achieved for free-standing surface micromachined structures within the range of 10 to 20 nm across large spatial dimensions of several hundred micrometers. Finally, the optical characteristics of narrowband LWIR fixed cavity FPIs are also presented with a view toward the future realization of tunable wavelength MEMS-based spectrometers for spectral sensing. The measured optical characteristics of released FPIs agree with the modeled optical response after taking into consideration the fabrication-induced imperfections in the free-standing top DBR such as an average tilt of 15 nm and surface roughness of 25 nm. The fabricated FPIs are shown to have a linewidth of ∼110 nm and a suitable peak transmittance value of ∼50 % , which meets the requirements for their utilization in tunable MEMS-based LWIR spectroscopic sensing and imaging applications requiring spectral discrimination with narrow linewidth.","PeriodicalId":127363,"journal":{"name":"Journal of Optical Microsystems","volume":"11 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2022-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127156078","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 1

Ge/BaF2 thin-films for surface micromachined mid-wave and long-wave infrared reflectors 用于表面微加工中波和长波红外反射器的Ge/BaF2薄膜

Journal of Optical Microsystems Pub Date : 2022-01-03 DOI: 10.1117/1.JOM.2.1.011002

G. S. Gill, D. Tripathi, A. Keating, G. Putrino, K. Silva, M. Martyniuk, L. Faraone

{"title":"Ge/BaF2 thin-films for surface micromachined mid-wave and long-wave infrared reflectors","authors":"G. S. Gill, D. Tripathi, A. Keating, G. Putrino, K. Silva, M. Martyniuk, L. Faraone","doi":"10.1117/1.JOM.2.1.011002","DOIUrl":"https://doi.org/10.1117/1.JOM.2.1.011002","url":null,"abstract":"Abstract. High performance distributed Bragg reflectors (DBRs) are key elements to achieving high finesse MEMS-based Fabry–Pérot interferometers (FPIs). Suitable mechanical parameters combined with high contrast between the refractive indices of the constituent optical materials are the main requirements. In this paper, Germanium (Ge) and barium fluoride (BaF2) optical thin-films have been investigated for mid-wave infrared (MWIR) and long-wave infrared (LWIR) filter applications. Thin-film deposition and fabrication processes were optimised to achieve mechanical and optical properties that provide flat suspended structures with uniform thickness and maximum reflectivity. Ge-BaF2-Ge 3-layer solid-material DBRs have been fabricated that matched the predicted simulation performance, although a degradation in performance was observed for wavelengths beyond 10 μm that is associated with optical absorption in the BaF2 material. Ge-Air-Ge 3-layer air-gap DBRs, in which air rather than BaF2 served as the low refractive index layer, were realized to exhibit layer flatness at the level of 10 to 20 nm across lateral DBR dimensions of several hundred micrometers. Measured DBR reflectance was found to be ≳90 % over the entire wavelength range of the MWIR band and for the LWIR band up to a wavelength of 11 μm. Simulations based on the measured DBR reflectance indicates that MEMS-based FPIs are able to achieve a peak transmission of ≳90 % over the entire MWIR band and up to 10 μm in the LWIR band, with a corresponding spectral passband of ≲50 nm in the MWIR and <80 nm in the LWIR.","PeriodicalId":127363,"journal":{"name":"Journal of Optical Microsystems","volume":"36 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2022-01-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129222848","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 2

Review of lens-assisted beam steering methods 透镜辅助光束引导方法综述

Journal of Optical Microsystems Pub Date : 2022-01-03 DOI: 10.1117/1.JOM.2.1.011003

S. Spector

引用次数: 6

Histogram formation and noise reduction in biaxial MEMS-based SPAD light detection and ranging systems 基于mems的双轴SPAD光探测和测距系统的直方图形成和降噪

Journal of Optical Microsystems Pub Date : 2022-01-01 DOI: 10.1117/1.JOM.2.1.011005

Roman Burkard, M. Ligges, A. Merten, T. Sandner, R. Viga, A. Grabmaier

{"title":"Histogram formation and noise reduction in biaxial MEMS-based SPAD light detection and ranging systems","authors":"Roman Burkard, M. Ligges, A. Merten, T. Sandner, R. Viga, A. Grabmaier","doi":"10.1117/1.JOM.2.1.011005","DOIUrl":"https://doi.org/10.1117/1.JOM.2.1.011005","url":null,"abstract":"Abstract. In many applications, there is a great demand for reliable, small, and low-cost three-dimensional imaging systems. Promising systems for applications such as automotive applications as well as safe human robotic collaboration are light detection and ranging (lidar) systems based on the direct time-of-flight principle. Especially for covering a large field of view or long-range capabilities, the previously used polygon-scanners are replaced by microelectromechanical systems (MEMS)-scanners. A more recent development is to replace the typically used avalanche photodiodes with single-photon avalanche diodes (SPADs). The combination of both technologies into a MEMS-based SPAD lidar system promises a significant performance increase and cost reduction compared with other approaches. To distinguish between signal and background/noise photons, SPAD-based detectors have to form a histogram by accumulating multiple time-resolved measurements. In this article, a signal and data processing method is proposed, which considers the time-dependent scanning trajectory of the MEMS-scanner during the histogram formation. Based on known reconstruction processes used in stereo vision setups, an estimate for an accumulated time-resolved measurement is derived, which allows to classify it as signal or noise. In addition to the theoretical derivation of the signal and data processing, an implementation is experimentally verified in a proof-of-concept MEMS-based SPAD lidar system.","PeriodicalId":127363,"journal":{"name":"Journal of Optical Microsystems","volume":"17 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2022-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116746840","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 1

Resonating AlN-thin film MEMS mirror with digital control 数字控制的铝薄膜MEMS谐振镜

Journal of Optical Microsystems Pub Date : 2022-01-01 DOI: 10.1117/1.JOM.2.1.011006

Konsta Ruotsalainen, D. Morits, O. Ylivaara, J. Kyynäräinen

{"title":"Resonating AlN-thin film MEMS mirror with digital control","authors":"Konsta Ruotsalainen, D. Morits, O. Ylivaara, J. Kyynäräinen","doi":"10.1117/1.JOM.2.1.011006","DOIUrl":"https://doi.org/10.1117/1.JOM.2.1.011006","url":null,"abstract":"Abstract. Piezoelectrically actuated resonant micromirrors were designed to meet the light detection and ranging (LiDAR) system requirements. Key features were a 3-mm mirror aperture, a 40-deg field of view, and a 50-Hz refresh rate. The presented micromirror provides biaxial symmetrical beam steering with ±12.7 deg mechanical tilt angle, resulting in a 50-deg field of view with an adjustable Lissajous XY-scanning pattern for a forward-looking LiDAR system. The mirrors were fabricated using silicon on insulator wafers, and actuation was based on piezoelectric aluminium nitride thin film. The mirrors were vacuum packaged for high-quality factor resonator operation. The device design contained eight separate piezoelectric aluminium nitride elements arranged as differential pairs for each axis, where each actuator was equipped with a sensing element providing a mechanically coupled electrical feedback signal. The piezoelectric elements connected as actuators required only minimal power and were directly compatible with CMOS low-voltage logic, which eases integration to driving digital systems. The sense elements are used to monitor phase, amplitude, and frequency. A digital control system connected to each of these elements provides accurate frequency and phase control of independent orthogonal resonators, permitting control of the X and Y amplitudes and the refresh rate of the Lissajous pattern.","PeriodicalId":127363,"journal":{"name":"Journal of Optical Microsystems","volume":"10 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2022-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123916676","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 4

System integration of hybrid assembled large aperture Micro Scanner Array for fast scanning LiDAR sensors 用于快速扫描激光雷达传感器的混合装配大孔径微扫描仪阵列的系统集成

Journal of Optical Microsystems Pub Date : 2022-01-01 DOI: 10.1117/1.JOM.2.1.011004

T. Sandner, T. Grasshoff, Wolf-Dietrich Owe, A. Herrmann, M. Wildenhain, M. Schwarzenberg, J. Grahmann

{"title":"System integration of hybrid assembled large aperture Micro Scanner Array for fast scanning LiDAR sensors","authors":"T. Sandner, T. Grasshoff, Wolf-Dietrich Owe, A. Herrmann, M. Wildenhain, M. Schwarzenberg, J. Grahmann","doi":"10.1117/1.JOM.2.1.011004","DOIUrl":"https://doi.org/10.1117/1.JOM.2.1.011004","url":null,"abstract":"Abstract. We present the design and system integration of a hybrid MEMS scanning mirror (MSM) array developed for real-time three-dimensional imaging with a panoramic optical field of view (FOV) of 360 deg × 60 deg (horizontal × vertical). The pulsed time-of-flight light detection and ranging (LiDAR) system targets a distance measurement range of 100 m with a video-like frame rate of 10 Hz. The fast vertical scan axis is realized by a synchronous scanning MSM array with large receiver aperture. It increases the scanning rate to 3200 Hz, which is four times faster in comparison with state-of-the-art fast macroscopic polygon scanning systems used in current LiDAR systems. A hybrid assembly of frequency selected scanner elements was chosen instead of a monolithic MEMS array to guaranty high yield of MEMS fabrication and a synchronous operation of all resonant MEMS elements at 1600 Hz with large FOV of 60 deg. The hybrid MSM array consists of a separate emitting mirror for laser scanning of the target and 22 reception elements resulting in a large reception aperture of Deff = 23 mm. All MSM are driven in parametric resonance to enable a fully synchronized operation of all individual MEMS scanner elements. Therefore, piezoresistive position sensors are integrated inside the MEMS chip, used for position feedback of the driving control. We focus on the MEMS system integration including the microassembly of multiple MEMS scanning elements using micromechanical self-alignment. We present technical details to meet the narrow tolerance budgets for (i) microassembly and (ii) synchronous driving of multiple MEMS scanner elements.","PeriodicalId":127363,"journal":{"name":"Journal of Optical Microsystems","volume":"41 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2022-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131106026","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 1

Evaluation of robustness against external vibrations for long-range MEMS lidar with one-dimensional resonant micromirror 一维谐振微镜远程MEMS激光雷达抗外部振动鲁棒性评价

Journal of Optical Microsystems Pub Date : 2022-01-01 DOI: 10.1117/1.JOM.2.1.011007

H. W. Yoo, David Brunner, M. Macho, L. Niedermueller, Angel Jurado Devesa, Leonhard Kormann, G. Schitter

{"title":"Evaluation of robustness against external vibrations for long-range MEMS lidar with one-dimensional resonant micromirror","authors":"H. W. Yoo, David Brunner, M. Macho, L. Niedermueller, Angel Jurado Devesa, Leonhard Kormann, G. Schitter","doi":"10.1117/1.JOM.2.1.011007","DOIUrl":"https://doi.org/10.1117/1.JOM.2.1.011007","url":null,"abstract":"Abstract. We describe the verification of a long-range one-dimensional (1D) scanning micro-electro-mechanical systems (MEMS) lidar specifically considering the robustness against external vibration influences. The 1D scanning MEMS lidar exploits a multichannel horizontal line laser to scan the scene vertically for a 10 deg × 11 deg horizontal and vertical field of view at a frame rate of up to 29 Hz. To evaluate the robustness against vibrations, a vibration evaluation setup is developed to apply a wideband vibration based on the automotive standard LV124. The vibration tests are performed in three conditions open loop without control and two phase-locked loops (PLLs) with default and high gain settings. The test results demonstrate that vibration can cause wobbly distortion along the scan angle in the open loop case and the PLLs can suppress effectively this influence in the mean and standard deviation of the standard point to surface error up to 69.3% and 90.0%, respectively. This verifies the benefits of the MEMS mirror control, ensuring stable point cloud measurements under vibrations in harsh automotive environments.","PeriodicalId":127363,"journal":{"name":"Journal of Optical Microsystems","volume":"12 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2022-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129164045","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 2