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2013 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale最新文献

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High-energy electron beam lithography process simulation 高能电子束光刻工艺模拟
2013 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale Pub Date : 2013-08-01 DOI: 10.1109/3M-NANO.2013.6737408
Q. Gan, Zaifa Zhou, Jiang-Yong Pan
{"title":"High-energy electron beam lithography process simulation","authors":"Q. Gan, Zaifa Zhou, Jiang-Yong Pan","doi":"10.1109/3M-NANO.2013.6737408","DOIUrl":"https://doi.org/10.1109/3M-NANO.2013.6737408","url":null,"abstract":"In this paper, we present the model of electron beam lithography. This model includes elastic cross section, inelastic cross section, energy-loss rate model and etch rate model. For elastic cross section, Rutherford cross section and Browning's Mott cross section are adopted. For inelastic cross section, Moller cross section and Gryzinsky cross section are used. To calculate energy-loss rate, we use different forms of Bethe formulas. The etch rate model is used to calculate the etch rate. The simulation is implemented with Monte Carlo method for PMMA resist. Various development profiles are obtained through the simulation.","PeriodicalId":120368,"journal":{"name":"2013 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale","volume":"84 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115331738","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Molecular simulation of metal-ZnO contact in ZnO piezoelectric nanogenerator ZnO压电纳米发电机中金属-ZnO接触的分子模拟
2013 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale Pub Date : 2013-08-01 DOI: 10.1109/3M-NANO.2013.6737434
Y. Lei, Y. Leng
{"title":"Molecular simulation of metal-ZnO contact in ZnO piezoelectric nanogenerator","authors":"Y. Lei, Y. Leng","doi":"10.1109/3M-NANO.2013.6737434","DOIUrl":"https://doi.org/10.1109/3M-NANO.2013.6737434","url":null,"abstract":"A molecular dynamics model has been developed to study the interfacial sliding dynamics in piezoelectric nanogenerator in atomic force microscope experiment. The molecular system includes a vertical semiconductor ZnO (0001) nanowire supported by a substrate and a Pt (111) metal tip. Simulation results show that the dynamic process of the Pt (111) tip sliding over the (0001) top surface of the ZnO nanowire, from the tensile side to the compressive side of the nanowire due to its lateral bending, involves the shear off of one monolayer of Pt atoms and the subsequent relaxation of the Pt (111) surface. However, no atomic inter-penetration or material transfer between the metal tip and the semiconductor material was observed. The calculated piezoelectric potential distribution due to the polarization of nanowire under bending is similar to the result derived from the continuum theory approach.","PeriodicalId":120368,"journal":{"name":"2013 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale","volume":"7 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128860796","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Temperature effect of vapor-phase self-assembled monolayer for anti-sticking layers used in UV-embossing uv压花防粘层气相自组装单层的温度效应
2013 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale Pub Date : 2013-08-01 DOI: 10.1109/3M-NANO.2013.6737449
Nan Liu, Lining Sun, Peng Jin, Jie Lin, Jiubin Tan
{"title":"Temperature effect of vapor-phase self-assembled monolayer for anti-sticking layers used in UV-embossing","authors":"Nan Liu, Lining Sun, Peng Jin, Jie Lin, Jiubin Tan","doi":"10.1109/3M-NANO.2013.6737449","DOIUrl":"https://doi.org/10.1109/3M-NANO.2013.6737449","url":null,"abstract":"An optimizing method of vapor-phase depositing anti-adherence layer in UV-embossing through controlling temperature is proposed to enhance the quality of demolding process. Experimental results show that, under low deposited temperature, the quality of anti-adherence layer is better than that under high temperature. Under low temperature, the contact angle of water, methylene iodide, and formamide is 119°, 101°, and 105°, and surface free energy is 8.5mJ/m2, which is similar to its ideal value. Film thickness is equal to its molecule length. XPS experiments mean that monolayer under low temperature is more orderly than that under high temperature. And crack character of low temperature is also better than that of high temperature.","PeriodicalId":120368,"journal":{"name":"2013 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale","volume":"5 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125547407","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Dynamic analysis of an XY positioning table XY定位工作台的动态分析
2013 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale Pub Date : 2013-08-01 DOI: 10.1109/3M-NANO.2013.6737416
Fujun Wang, C. Liang, Z. Ma, Xingyu Zhao, Yanling Tian, Dawei Zhang
{"title":"Dynamic analysis of an XY positioning table","authors":"Fujun Wang, C. Liang, Z. Ma, Xingyu Zhao, Yanling Tian, Dawei Zhang","doi":"10.1109/3M-NANO.2013.6737416","DOIUrl":"https://doi.org/10.1109/3M-NANO.2013.6737416","url":null,"abstract":"The dynamic modeling and analysis of a novel XY positioning table are presented in this paper. The XY table is directly driven by two linear voice coil motors (LVCMs), and X-and Y-axes motion decoupling is realized by using a novel flexible decoupling mechanism. Considering the characteristics of XY table, the dynamic model of X- and Y-axes servomechanisms are established through bond graph method, respectively, and then the state space equations are derived. The result of dynamic analysis can provide important information for the controller design.","PeriodicalId":120368,"journal":{"name":"2013 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale","volume":"617 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122697190","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 7
Comprehensive optimization of pid-type closed-loop MEMS accelerometer system pid型闭环MEMS加速度计系统的综合优化
2013 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale Pub Date : 2013-08-01 DOI: 10.1109/3M-NANO.2013.6737429
M. Ma, Zhong-he Jin, Shi-chang Hu, Hui-Jie Zhu, Zhongyi Zhu, Yidong Liu
{"title":"Comprehensive optimization of pid-type closed-loop MEMS accelerometer system","authors":"M. Ma, Zhong-he Jin, Shi-chang Hu, Hui-Jie Zhu, Zhongyi Zhu, Yidong Liu","doi":"10.1109/3M-NANO.2013.6737429","DOIUrl":"https://doi.org/10.1109/3M-NANO.2013.6737429","url":null,"abstract":"The paper introduces specific ways of optimizing Proportional-Integral-Derivative (PID) type closed-loop Microelectromechanical System (MEMS) accelerometer system performance under fixed boundaries. Parameters tuning is applied to enhancing loop gain, under which configuration the tested Total Noise Equivalent Acceleration (TNEA) is around 3.2ug-√Hz @10Hz with bandwidth over 200Hz. This result is approaching this system's performance limit.","PeriodicalId":120368,"journal":{"name":"2013 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale","volume":"22 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132012332","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Transition metal doped metal oxide nanostructures synthesized by arc discharge method 电弧放电法合成过渡金属掺杂金属氧化物纳米结构
2013 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale Pub Date : 2013-08-01 DOI: 10.1109/3M-NANO.2013.6737418
F. Fang, J. Kennedy, J. Futter, A. Markwitz, E. Manikandan
{"title":"Transition metal doped metal oxide nanostructures synthesized by arc discharge method","authors":"F. Fang, J. Kennedy, J. Futter, A. Markwitz, E. Manikandan","doi":"10.1109/3M-NANO.2013.6737418","DOIUrl":"https://doi.org/10.1109/3M-NANO.2013.6737418","url":null,"abstract":"Doping metal oxides with metallic impurities has been the subject of previous studies for enhanced sensing performance. In this paper, we present a review on syntheses of transition metal doped metal oxide nanostructures using arc discharge method. Tungsten oxide was doped with Palladium, Scandium and Vanadium, respectively. Nickel was chosen to dope Zinc oxide by arc discharge method. It is demonstrated that dopants not only change the morphology of metal oxide nanostructures but also help to achieve an improved electrical conductivity. Because it is easy to tailor the morphology by adjusting the arc discharge parameters and dopant can be prescribed in the preparation of the anode material, the arc discharge is considered to be a fast and inexpensive synthesis method for doping which can be used to produce high quality doped metal oxide nanostructures for chemical sensing measurements.","PeriodicalId":120368,"journal":{"name":"2013 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale","volume":"11 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128086599","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
A paper-based microfluidic device for multiplexed electrochemical detection of biomarkers 一种用于生物标志物多路电化学检测的纸基微流控装置
2013 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale Pub Date : 2013-08-01 DOI: 10.1109/3M-NANO.2013.6737405
Chen Zhao, Xinyu Liu
{"title":"A paper-based microfluidic device for multiplexed electrochemical detection of biomarkers","authors":"Chen Zhao, Xinyu Liu","doi":"10.1109/3M-NANO.2013.6737405","DOIUrl":"https://doi.org/10.1109/3M-NANO.2013.6737405","url":null,"abstract":"Paper-based microfluidic devices have emerged as simple yet powerful platforms for performing low-cost analytical tests. This paper reports a microfluidic paper-based electrochemical biosensor array for multiplexed detection of disease markers. Different from existing paper-based electrochemical biosensors, our device includes an array of eight electrochemical sensors and utilizes a custom-made, handheld electrochemical reader (potentiostat) for signal readout. The biosensor array can detect several analytes in a sample solution and produce multiple measurement data for each analyte from a single run. Using the device, we demonstrate simultaneous detection of three disease-relevant metabolic biomarkers (glucose, lactate, and uric acid), with analytical performance comparable to that of the existing commercial and paper-based platforms. The paper-based biosensor array and the electrochemical reader will enable the acquisition of high-density, statistically-meaningful diagnostic information at the point of care in a rapid and cost-efficient way.","PeriodicalId":120368,"journal":{"name":"2013 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale","volume":"39 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133272021","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Automated mechanical characterization of 2D materials using SEM based visual servoing 基于视觉伺服的二维材料的自动机械表征
2013 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale Pub Date : 2013-08-01 DOI: 10.1080/15599612.2013.879501
S. Zimmermann, Tobias Tiemerding, Tie Li, Wenrong Wang, Yuelin Wang, S. Fatikow
{"title":"Automated mechanical characterization of 2D materials using SEM based visual servoing","authors":"S. Zimmermann, Tobias Tiemerding, Tie Li, Wenrong Wang, Yuelin Wang, S. Fatikow","doi":"10.1080/15599612.2013.879501","DOIUrl":"https://doi.org/10.1080/15599612.2013.879501","url":null,"abstract":"This paper presents an automated handling approach of two-dimensional nanomaterials using a robotic setup inside a high-resolution scanning electron microscope. Applying image processing of the visual feedback provided by the electron microscope, a fully automated sequence is developed to align a robotic driven force sensor with sub micrometer accuracy and to conduct nanoindentation measurements on a periodically perforated substrate. As an example, this automated sequence is utilized to examine the mechanical properties of a few-layer graphene membrane. The results of the mechanical characterization are compared to Raman spectroscopy data. The paper discusses the advantages and restrictions of this technique and responds to further application scenarios.","PeriodicalId":120368,"journal":{"name":"2013 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale","volume":"2381 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130481603","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 38
Mechanical design and optimization of a suspension of multi-function sensing probes 多功能传感探头悬架的机械设计与优化
2013 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale Pub Date : 2013-08-01 DOI: 10.1109/3M-NANO.2013.6737399
Yanling Tian, J. Tian
{"title":"Mechanical design and optimization of a suspension of multi-function sensing probes","authors":"Yanling Tian, J. Tian","doi":"10.1109/3M-NANO.2013.6737399","DOIUrl":"https://doi.org/10.1109/3M-NANO.2013.6737399","url":null,"abstract":"Multi-function probing systems are of significant importance for characterization of surface properties and in situ surface topography at the micro and nanometer level. This paper presents the mechanical design and parameter optimization of the flexure-based suspension system for multi-function sensing probes. By evaluating several topological structures, the proposed threefold-symmetric beam shows the best results and is therefore preferred. Finite Element Analysis is adopted to perform the parameter optimization due to its high accuracy in modeling complex compliant systems. The FEM analysis shows that the proposed threefold-symmetric beam assembly has a working range in excess of 20 μm in Z axis, with a linear stiffness of 750 N/m in Z axis and a natural frequency of 426 Hz in Z axis. The proposed threefold-symmetric beam has wide potentials in multi-function sensing probing applications.","PeriodicalId":120368,"journal":{"name":"2013 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale","volume":"9 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121417485","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
A survey on assistive chair and related integrated sensing techniques 辅助椅及相关集成传感技术综述
2013 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale Pub Date : 2013-08-01 DOI: 10.1109/3M-NANO.2013.6737398
Hang Lu, Dayou Li, J. Oyekan, C. Maple
{"title":"A survey on assistive chair and related integrated sensing techniques","authors":"Hang Lu, Dayou Li, J. Oyekan, C. Maple","doi":"10.1109/3M-NANO.2013.6737398","DOIUrl":"https://doi.org/10.1109/3M-NANO.2013.6737398","url":null,"abstract":"This paper presents a survey of the current approaches of sit-to-stand assistive chairs. Sitting in a chair and standing up from a seated position are common activities performed by humans on a daily basis. However, older people often encounter difficulties with these activities. The difficulties may cause substantial decreasing of the elderly mobility, leading to inactive participation in society and increasing the risk of chronic diseases that may cause premature death. Therefore, assisting older people to overcome these difficulties has significance for their independent living and active ageing. The assistive devices can be allocated in terms of market available ones and experimental prototypes. Both classes of these devices are discussed in this survey. We also discuss sensing techniques that are currently used with experimental prototypes in addition to those that could be used and build a high level taxonomy of sensing techniques. Following from this survey, a chair capable of delivering assistance-as-needed is proposed.","PeriodicalId":120368,"journal":{"name":"2013 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale","volume":"7 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129957908","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 6
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