pid型闭环MEMS加速度计系统的综合优化

2013 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale Pub Date : 2013-08-01 DOI:10.1109/3M-NANO.2013.6737429

M. Ma, Zhong-he Jin, Shi-chang Hu, Hui-Jie Zhu, Zhongyi Zhu, Yidong Liu

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引用次数: 1

摘要

介绍了在固定边界下优化比例-积分-导数(PID)型闭环微机电系统加速度计系统性能的具体方法。参数调整应用于增强环路增益，在此配置下，测试的总噪声等效加速度(TNEA)约为3.2ug-√Hz @10Hz，带宽超过200Hz。这个结果接近系统的性能极限。

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Comprehensive optimization of pid-type closed-loop MEMS accelerometer system

The paper introduces specific ways of optimizing Proportional-Integral-Derivative (PID) type closed-loop Microelectromechanical System (MEMS) accelerometer system performance under fixed boundaries. Parameters tuning is applied to enhancing loop gain, under which configuration the tested Total Noise Equivalent Acceleration (TNEA) is around 3.2ug-√Hz @10Hz with bandwidth over 200Hz. This result is approaching this system's performance limit.

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2013 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale

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