XY定位工作台的动态分析

2013 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale Pub Date : 2013-08-01 DOI:10.1109/3M-NANO.2013.6737416

Fujun Wang, C. Liang, Z. Ma, Xingyu Zhao, Yanling Tian, Dawei Zhang

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引用次数: 7

摘要

本文对一种新型XY定位工作台进行了动力学建模和分析。XY工作台由两个线性音圈电机(lvcm)直接驱动，采用一种新颖的柔性解耦机构实现x轴和y轴运动解耦。考虑到XY表的特点，通过键合图法分别建立了X轴和y轴伺服机构的动力学模型，并推导了状态空间方程。动态分析的结果可以为控制器的设计提供重要信息。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Dynamic analysis of an XY positioning table

The dynamic modeling and analysis of a novel XY positioning table are presented in this paper. The XY table is directly driven by two linear voice coil motors (LVCMs), and X-and Y-axes motion decoupling is realized by using a novel flexible decoupling mechanism. Considering the characteristics of XY table, the dynamic model of X- and Y-axes servomechanisms are established through bond graph method, respectively, and then the state space equations are derived. The result of dynamic analysis can provide important information for the controller design.

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2013 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale

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