Dynamic analysis of an XY positioning table

Abstract

The dynamic modeling and analysis of a novel XY positioning table are presented in this paper. The XY table is directly driven by two linear voice coil motors (LVCMs), and X-and Y-axes motion decoupling is realized by using a novel flexible decoupling mechanism. Considering the characteristics of XY table, the dynamic model of X- and Y-axes servomechanisms are established through bond graph method, respectively, and then the state space equations are derived. The result of dynamic analysis can provide important information for the controller design.