2018 International Conference on Manipulation, Automation and Robotics at Small Scales (MARSS)最新文献_第2页

Automated SEM-Guided AFM Scan with Dynamically Varied Scan Speed 自动sem引导AFM扫描与动态变化的扫描速度

2018 International Conference on Manipulation, Automation and Robotics at Small Scales (MARSS) Pub Date : 2018-07-01 DOI: 10.1109/MARSS.2018.8481201

Jun Chen, J. Gel, Brandon K. Chen, Zheng Gong, Chao Zhou, Chaoyang Shi, Changhai Ru, Huayan Pu, Yan Peng, Shaorong Xie, Yu Sun

{"title":"Automated SEM-Guided AFM Scan with Dynamically Varied Scan Speed","authors":"Jun Chen, J. Gel, Brandon K. Chen, Zheng Gong, Chao Zhou, Chaoyang Shi, Changhai Ru, Huayan Pu, Yan Peng, Shaorong Xie, Yu Sun","doi":"10.1109/MARSS.2018.8481201","DOIUrl":"https://doi.org/10.1109/MARSS.2018.8481201","url":null,"abstract":"Ahstract- For imaging nano-scaled samples, atomic force microscopy (AFM) and scanning electron microscopy (SEM) represent two complementary imaging techniques. In a hybrid SEM-AFM system, a compact AFM is installed inside the high vacuum chamber of an SEM, where SEM provides largely 2D imaging and material compositions of a sample while AFM is capable of complementarily measuring 3D topography of the sample. Although SEM can achieve real-time imaging (e.g., 20 Hz), AFM scan can take minutes to generate an image, demanding strategies for speeding up AFM measurement. In existing hybrid SEM-AFM systems, SEM and AFM measurements are made independently. This paper presents, for the first time, a technique of using SEM nanoscopic imaging to guide the scan speed of AFM imaging. The dynamic variation of AFM scan speed is based on features identified in SEM imaging. Information/features are extracted from real-time SEM images and quantitated using local entropy and other metrics. The generated feature metric map is used to produce a speed map for varying AFM scan speed at each position on the sample. Experiments were conducted with a new SEM-compatible AFM instrument we recently developed, as the test bed of the SEM-guided AFM scan technique. The results for the samples measured in this work demonstrate that time savings of this technique, compared to traditional AFM scan using a constant speed, were up to 66% with equivalent imaging accuracy obtained with traditional fine scan. With the same time cost of traditional fast scan, the SEM -guided AFM scan technique had an accuracy improvement of 47%.","PeriodicalId":118389,"journal":{"name":"2018 International Conference on Manipulation, Automation and Robotics at Small Scales (MARSS)","volume":"36 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132671269","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 3

Movable Nanowire Laser on Silicon Photonic Crystal Using Atomic Force Microscopy 用原子力显微镜观察硅光子晶体上的可移动纳米线激光器

2018 International Conference on Manipulation, Automation and Robotics at Small Scales (MARSS) Pub Date : 2018-07-01 DOI: 10.1109/MARSS.2018.8481227

M. Takiguchi, A. Yokoo, M. D. Birowosuto, M. Notomi

引用次数: 0

Table of contents - full papers 目录-全文

2018 International Conference on Manipulation, Automation and Robotics at Small Scales (MARSS) Pub Date : 2018-07-01 DOI: 10.1109/marss.2018.8481191

N. Jiao, S. Tung, G. Gu, E. Choi, Byungjeon Kang, L. Masson, P. Lambert

引用次数: 0

A Virtual Feedback Assistance System for Remote Operation of a 3DOF Micromanipulator in Micro-Nanorobotic Manipulation 微纳机器人操作中三维微机械臂远程操作虚拟反馈辅助系统

2018 International Conference on Manipulation, Automation and Robotics at Small Scales (MARSS) Pub Date : 2018-07-01 DOI: 10.1109/MARSS.2018.8481220

Ujjal Dey, C. Jacob, Supriti Sen, C. S. Kumar, Meher Wan

引用次数: 2

Improving Acquisition Time in Scanning Microwave Microscopy by Undersampling the Scan Area 利用扫描区域欠采样提高扫描微波显微镜的采集时间

2018 International Conference on Manipulation, Automation and Robotics at Small Scales (MARSS) Pub Date : 2018-07-01 DOI: 10.1109/MARSS.2018.8481148

M. Wieghaus, O. Haenssler, S. Fatikow

引用次数: 0

Composite Nanotools with Shape Memory Effect for Nanostructures Assembly 纳米结构组装中具有形状记忆效应的复合纳米工具

2018 International Conference on Manipulation, Automation and Robotics at Small Scales (MARSS) Pub Date : 2018-07-01 DOI: 10.1109/MARSS.2018.8481173

A. Orlov, S. A. Zybtsev, Peter V. Lcga, V. Pokrovskii, A. Frolov, V. Koledov

引用次数: 0

Proceedings of MARSS 2018 2018年MARSS会刊

2018 International Conference on Manipulation, Automation and Robotics at Small Scales (MARSS) Pub Date : 2018-07-01 DOI: 10.1109/marss.2018.8481171

引用次数: 0

Bioinspired Ionic Soft Actuator Based on Core-Shell-Structured Bacterial Cellulose Membrane 基于核壳结构细菌纤维素膜的仿生离子软致动器

2018 International Conference on Manipulation, Automation and Robotics at Small Scales (MARSS) Pub Date : 2018-07-01 DOI: 10.1109/MARSS.2018.8481151

Fan Wang, Minghui Nan, Sunghoon Cho, Chang-sei Kim, Jong-Oh Park, Eunpyo Choi

{"title":"Bioinspired Ionic Soft Actuator Based on Core-Shell-Structured Bacterial Cellulose Membrane","authors":"Fan Wang, Minghui Nan, Sunghoon Cho, Chang-sei Kim, Jong-Oh Park, Eunpyo Choi","doi":"10.1109/MARSS.2018.8481151","DOIUrl":"https://doi.org/10.1109/MARSS.2018.8481151","url":null,"abstract":"Bioinspired soft actuators have received burgeoning interest because of their applications in future electronic devices including soft robots, soft haptic devices, human-friendly flexible wearable devices, and biomedical robots. Here, a biofriendly soft actuator was newly designed based on core-shell-structured bacterial cellulose membrane, which was fabricated by homogeneously depositing polypyrrole nanoparticles on the surface of TEMPO-Oxidized bacterial cellulose (TOBC) nanofibers via a chemical polymerization method. The proposed soft actuator under both harmonic and step electrical inputs showed relatively large bending mechanical deformation, fast response time, and good long-term durability in air condition, which was due to the enhanced electrochemical properties of TOBC-Polypyrrole membrane, resulting from its highly porous structure and high conductivity. Therefore, the designed TOBC-Polypyrrole actuator can be a strong candidate for bioinspired actuating devices such as, soft and wearable electronics, and active biomedical devices.","PeriodicalId":118389,"journal":{"name":"2018 International Conference on Manipulation, Automation and Robotics at Small Scales (MARSS)","volume":"45 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132279383","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 1

[Copyright notice] (版权)

2018 International Conference on Manipulation, Automation and Robotics at Small Scales (MARSS) Pub Date : 2018-07-01 DOI: 10.1109/marss.2018.8481226

引用次数: 0

Miniature Robot with Actuators Based on CU-AL-NI Shape Memory Single Crystals 基于CU-AL-NI形状记忆单晶的微型机器人作动器

2018 International Conference on Manipulation, Automation and Robotics at Small Scales (MARSS) Pub Date : 2018-07-01 DOI: 10.1109/MARSS.2018.8481198

S. Pulnev, A. Chikiryaka, V. Nikolaev, A. Priadko

引用次数: 0