A Virtual Feedback Assistance System for Remote Operation of a 3DOF Micromanipulator in Micro-Nanorobotic Manipulation

Abstract

Manipulation in micro or nanoscale with robotic manipulators under observation of electron microscopes is a widely used strategy for fabrication of nanodevices and nanoscale material property characterization. These types of manipulation systems can handle the relatively larger scale of objects. However, the complexity of manipulation increases highly for 3D manipulation. Since the manipulation system consists of multiple components including manipulator, microscope, and also some end-effector tools, a proper offline visualization of the system is necessary for operation. Therefore, we propose a web-based virtual interface between the user and the actual manipulator operated under digital microscope initially. It gives the operator 3D positional feedback from the virtual model by mapping data read during remote operation. The same interface is used for remote operation of the manipulator within the SEM chamber and a manipulation task is performed.