Sensors and Actuators最新文献_第3页

A design overview of an eccentric-motion electrostatic microactuator (the wobble motor) 偏心运动静电微执行器(摆动电机)的设计概述

Sensors and Actuators Pub Date : 1989-11-15 DOI: 10.1016/0250-6874(89)87096-9

S.C. Jacobsen, R.H. Price, J.E. Wood, T.H. Rytting, M. Rafaelof

{"title":"A design overview of an eccentric-motion electrostatic microactuator (the wobble motor)","authors":"S.C. Jacobsen, R.H. Price, J.E. Wood, T.H. Rytting, M. Rafaelof","doi":"10.1016/0250-6874(89)87096-9","DOIUrl":"10.1016/0250-6874(89)87096-9","url":null,"abstract":"<div><p>A description is given of the design, fabrication and analysis of an electrostatically-driven micro-actuator in which a planetary-motion rotor rolls inside a cylindrically shaped stator cavity. The design has four primary advantages: (1) the motor geometry and the rolling motion enable very small gaps to be achieved, which are accurate and stable, and across which electrostatic forces act, leading to high forces on the rotor; (2) relative motion is achieved by rolling rather than sliding, thus obviating the concern over internal friction; (3) higher output torques can be traded for lower rotor speeds, due to immediate planetary reduction; and (4) the power output should be higher than for systems constructed using two-dimensional silicon fabrication approaches, since woble motor lengths are not limited by such fabrication methods. The stator segment recruitment logic can range from simple, open-loop stepping to full servo-controlled commutation using rotor position sensors.</p><p>Two-dimensional analytical and finite-element simulations that estimate motor torque generated by electrostatic fields have been used to determine the influece of: (1) rotor and stator radii; (2) stator segment angular width and position with respect to the contact point; and (3) dielectric properties and dimensions (e.g., insulator thickness on rotor) of motor materials. Dynamic modelling is being used in the comparison of predicted and observed motor behavior, and for the study of the effects of stator segment recruitment logic.</p><p>A number of eccentric-motion micromotors constructed via different fabrication techniques, have been operated. Electro-discharge machining (EDM) is the fabrication method of choice for the prototypes presently used for experimental studies. Typical rotor diameters for the EDM motor are about 500 μm, with lengths of 500 μm. Motor operation has been achieved with commutation rates in excess of 120 000 r.p.m.</p></div>","PeriodicalId":101159,"journal":{"name":"Sensors and Actuators","volume":"20 1","pages":"Pages 1-16"},"PeriodicalIF":0.0,"publicationDate":"1989-11-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.1016/0250-6874(89)87096-9","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"77742906","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 86

Laterally Driven Polysilicon Resonant Microstructures 横向驱动多晶硅谐振微结构

Sensors and Actuators Pub Date : 1989-11-15 DOI: 10.1016/0250-6874(89)87098-2

William C. Tang, Tu-Cuong H. Nguyen, Roger T. Howe

引用次数: 0

IC-processed electrostatic micromotors 集成电路处理静电微电机

Sensors and Actuators Pub Date : 1989-11-15 DOI: 10.1016/0250-6874(89)87100-8

Long-Shen Fan, Yu-Chong Tai, Richard S. Muller

引用次数: 24

Harmonic electrostatic motors 谐波静电电动机

Sensors and Actuators Pub Date : 1989-11-15 DOI: 10.1016/0250-6874(89)87097-0

W. Trimmer, R. Jebens

引用次数: 36

Resonant-structure Micromotors: Historical Perspective and Analysis 谐振结构微电机:历史展望与分析

Sensors and Actuators Pub Date : 1989-11-15 DOI: 10.1016/0250-6874(89)87105-7

Albert P. Pisano

引用次数: 21

Selective chemical vapor deposition of tungsten for microelectromechanical structures 微机电结构用钨的选择性化学气相沉积

Sensors and Actuators Pub Date : 1989-11-15 DOI: 10.1016/0250-6874(89)87110-0

N.C. Macdonald, L.Y. Chen, J.J. Yao, Z.L. Zhang, J.A. McMillan, D.C. Thomas, K.R. Haselton

{"title":"Selective chemical vapor deposition of tungsten for microelectromechanical structures","authors":"N.C. Macdonald, L.Y. Chen, J.J. Yao, Z.L. Zhang, J.A. McMillan, D.C. Thomas, K.R. Haselton","doi":"10.1016/0250-6874(89)87110-0","DOIUrl":"10.1016/0250-6874(89)87110-0","url":null,"abstract":"<div><p>A selective chemical vapor deposition (CVD) tungsten process is used to fabricate three-dimensional micromechanical structures on a silicon substrate. Patterned structures are formed in silicon dioxide trenches by selective nucleation and growth of tungsten from the bottom of the trench. Examples are shown for selective growth of tungsten on single-crystal silicon, on thin films of silicon and on silicon-implanted, silicon dioxide layers. This high deposition-rate selective CVD tungsten process had been used to fabricate tungsten micromechanical structures greater than 4 μm thick. Tungsten patters with features of 0.3 μm × 0.3 μm in 0.6 μm of tungsten are fabricated using electron beam lithography. As an example of an electromechnical structure, cantilever beams have been fabricated to make micromechanical tweezers that move in two dimensions by the application of potential differences between the beams (lateral motion), and between the beams and the silicon substrate (vertical motion). Tungsten microtweezers 200 μm in length with a cross-section of 2.7 μm × 2.5 μm closed with an applied voltage of less than 150 V.</p></div>","PeriodicalId":101159,"journal":{"name":"Sensors and Actuators","volume":"20 1","pages":"Pages 123-133"},"PeriodicalIF":0.0,"publicationDate":"1989-11-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.1016/0250-6874(89)87110-0","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"81014444","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 48

Mechanical property measurements of thin films using load-deflection of composite rectangular membranes 用复合矩形膜的载荷偏转法测量薄膜的机械性能

Sensors and Actuators Pub Date : 1989-11-15 DOI: 10.1016/0250-6874(89)87111-2

Osamu Tabata, Ken Kawahata, Susumu Sugiyama, Isemi Igarashi

引用次数: 424

Process Integration for active polysilicon resonant microstructures 主动多晶硅谐振微结构的工艺集成

Sensors and Actuators Pub Date : 1989-11-15 DOI: 10.1016/0250-6874(89)87112-4

Michael W. Putty, Shih-Chia Chang, Roger T. Howe, Andrew L. Robinson, Kensald D. Wise

引用次数: 57

Normally closed microvalve and mircopump fabricated on a silicon wafer 在硅片上制造的常闭微阀和微泵

Sensors and Actuators Pub Date : 1989-11-15 DOI: 10.1016/0250-6874(89)87114-8

Masayoshi Esashi, Shuichi Shoji, Akira Nakano

引用次数: 135

Accelerometer systems with self-testable features 具有自我测试功能的加速度计系统

Sensors and Actuators Pub Date : 1989-11-15 DOI: 10.1016/0250-6874(89)87113-6

Henry V. Allen, Stephen C. Terry, Diederik W. De Bruin

{"title":"Accelerometer systems with self-testable features","authors":"Henry V. Allen, Stephen C. Terry, Diederik W. De Bruin","doi":"10.1016/0250-6874(89)87113-6","DOIUrl":"10.1016/0250-6874(89)87113-6","url":null,"abstract":"<div><p>In recent years, substantial effort has been devoted to the design and fabrication of a new class of silicon sensors, the accelerometer. A number of companies have been working in the area to produce, for the first time, an accelerometer that is substantially more cost effective and with higher performance than previously possible. Careful electromechanical design and micromachining process development has allowed silicon accelerometers to be fabricated in volume.</p><p>Two questions that arise in ultra-high reliability applications, such as safe-and-arming, are whether the aceelerometer is free and working and whether the device is broken. A unique solution to these questions has been designed and implemented in a piezoresistive accelerometer; this approach allows the device to be tested by electrostatic deflection of the mass. A number of key advantages result from this configuration. Even though the spring constants of the device may vary from unit to unit or over temperature, and even though the piezoresistive coefficients vary over temperature, as long as the voltage and initial separation gap are held constant, the output will be proportional to a given acceleration. Applications for the self-testing technique are in temperature compensation, testability and uni-directional force-balance applications.</p><p>This approach of building testability into the sensor bridges the gap between the open-loop sensors now in production and the much more complex closed-loop force-balance devices.</p></div>","PeriodicalId":101159,"journal":{"name":"Sensors and Actuators","volume":"20 1","pages":"Pages 153-161"},"PeriodicalIF":0.0,"publicationDate":"1989-11-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.1016/0250-6874(89)87113-6","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"83815704","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 132