IEEE open journal of ultrasonics, ferroelectrics, and frequency control最新文献

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Origin, Development, and Applications of Air-Coupled Broadband Ultrasounds for the Study of Tissues and Water Relations in Plant Leaves: A Review 用于研究植物叶片组织和水分关系的空气耦合宽带超声波的起源、发展和应用:综述
IEEE open journal of ultrasonics, ferroelectrics, and frequency control Pub Date : 2024-07-24 DOI: 10.1109/OJUFFC.2024.3433316
Lola Fariñas;Domingo Sancho-Knapik;José J. Peguero-Pina;Eustaquio Gil-Pelegrín;Tomás E. Gómez Álvarez-Arenas
{"title":"Origin, Development, and Applications of Air-Coupled Broadband Ultrasounds for the Study of Tissues and Water Relations in Plant Leaves: A Review","authors":"Lola Fariñas;Domingo Sancho-Knapik;José J. Peguero-Pina;Eustaquio Gil-Pelegrín;Tomás E. Gómez Álvarez-Arenas","doi":"10.1109/OJUFFC.2024.3433316","DOIUrl":"https://doi.org/10.1109/OJUFFC.2024.3433316","url":null,"abstract":"This paper reviews the origin, development and use of air-coupled ultrasonic techniques for the study of plant leaf tissues and their water relations. The two techniques proposed so far are included: Non-Contact Resonant Ultrasound Spectroscopy and Non-Resonant Time Domain Transmittance. While both are completely non-invasive, non-destructive and fast, the former has been used to determine water potential, turgor loss point and differential behavior of various leaf tissues, and has been extensively tested for different species, both in vivo and ex vivo in parallel with in-field experiments; while the latter has recently been proposed as a universal technique that can be applied to plant leaves regardless of the possibility of exciting thickness resonances.","PeriodicalId":73301,"journal":{"name":"IEEE open journal of ultrasonics, ferroelectrics, and frequency control","volume":"4 ","pages":"77-88"},"PeriodicalIF":0.0,"publicationDate":"2024-07-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=10608179","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"141965502","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Determination of Elastic Parameters of Thin Layers Used in Paintings by Air-Coupled Ultrasound Transmission Measurements Under Varying Incidence 在不同入射率下通过空气耦合超声波透射测量确定绘画所用薄层的弹性参数
IEEE open journal of ultrasonics, ferroelectrics, and frequency control Pub Date : 2024-06-14 DOI: 10.1109/OJUFFC.2024.3413604
Victor Takahashi;Michaël Lematre;Jérôme Fortineau;Marc Lethiecq
{"title":"Determination of Elastic Parameters of Thin Layers Used in Paintings by Air-Coupled Ultrasound Transmission Measurements Under Varying Incidence","authors":"Victor Takahashi;Michaël Lematre;Jérôme Fortineau;Marc Lethiecq","doi":"10.1109/OJUFFC.2024.3413604","DOIUrl":"https://doi.org/10.1109/OJUFFC.2024.3413604","url":null,"abstract":"Paintings are intricate structures made up of multiple layers of materials that possess different properties and thicknesses. Due to their fragility, they can be damaged by exposure to various environmental factors such very large amplitude vibrations, as well as temperature and humidity variations. Restorers use various techniques such as raking light, x-rays, infrared, and UV to gather information about the condition of the artwork. Unlike these methods, ultrasonic techniques use elastic waves and can thus provide information about the mechanical properties of the materials and their interfaces. The goal of this work is twofold. First, it consists in numerically analyzing the sensitivity of elastic parameters of painting layers through their influence on the acoustic transmission coefficient and dispersion curves. Then, an experimental device is set up to confirm some of these results by the determination of the values of the elastic parameters of the constituent layers of paintings. To this aim, we have developed an original association of numerical and experimental methods for characterization and determination of the layer elastic parameters of some materials used in paintings. A matrix stiffness model associated to a genetic algorithm are used for the numerical study and optimization process between the theoretical transmission coefficient and the experimental one. Then, focused Air-Coupled Transducers (ACTs) in conjunction with a rotary motor are used to perform measurements of transmitted signal amplitude on several components used in paintings under various angles of incidence. Our results concerning the determination of elastic parameters values on various materials including plexiglass (PMMA), acrylic paint, varnish, gesso and wood, taken as single plates, and bi-layered structures, are strongly supported by theoretical results obtained using the matrix stiffness model.","PeriodicalId":73301,"journal":{"name":"IEEE open journal of ultrasonics, ferroelectrics, and frequency control","volume":"4 ","pages":"126-139"},"PeriodicalIF":0.0,"publicationDate":"2024-06-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=10558716","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142377117","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Equivalent Circuit Modeling of Air-Coupled Laterally Actuated Electrostatic Bulk-Mode MEMS 空气耦合侧向致动静电体模微机电系统的等效电路建模
IEEE open journal of ultrasonics, ferroelectrics, and frequency control Pub Date : 2024-06-12 DOI: 10.1109/OJUFFC.2024.3413603
Tony Merrien;Pierre Didier;Emmanuelle Algré
{"title":"Equivalent Circuit Modeling of Air-Coupled Laterally Actuated Electrostatic Bulk-Mode MEMS","authors":"Tony Merrien;Pierre Didier;Emmanuelle Algré","doi":"10.1109/OJUFFC.2024.3413603","DOIUrl":"https://doi.org/10.1109/OJUFFC.2024.3413603","url":null,"abstract":"In this paper, a linear lumped-element equivalent circuit model (ECM) for ultrasonic laterally transduced electrostatic bulk-mode air-coupled resonant micro-electro-mechanical systems (MEMS) is described. A single-crystal silicon (SCS) square plate with T-shaped tethers is considered as the geometry of interest with a one-sided electrostatic actuation. This type of sensor can be used for sensitive mass sensing of airborne particles and possesses a large active surface with in-plane vibration modes in the ultrasonic frequency range. Firstly, the eigensolutions and eigenvectors of the problem are obtained using analytical equations and compared with finite-element modeling (FEM) solutions. Secondly, using modal analysis, the number of degrees of freedom is reduced and individual solutions are provided for each vibration mode, leading to various effective masses, stiffnesses and dampings. The first order Taylor expansion of both the electrical current equation and the electrostatic force applied on the resonator allows one to obtain expressions for the additional stiffness and the electro-mechanical transformation coefficient linked to the membrane actuation. Based on theses results, single-input single output (SISO) equivalent circuits are established using electro-mechanical and Butterworth-Van Dyke (BVD) approaches. Electrical admittance simulations resulting from different in-plane vibration modes are proven to be in excellent agreement with FEM simulations. Finally, a numerical mass sensing application is described to evaluate the relevance of both the model and the resonator design to act as a microbalance. The proposed model can be used to design, predict, analyze and optimize the behavior of highly sensitive air-coupled ultrasonic bulk-mode SCS MEMS for various physical applications.","PeriodicalId":73301,"journal":{"name":"IEEE open journal of ultrasonics, ferroelectrics, and frequency control","volume":"4 ","pages":"63-76"},"PeriodicalIF":0.0,"publicationDate":"2024-06-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=10555284","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"141439401","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Sound Speed and Virtual Source Correction in Synthetic Transmit Focusing 合成发射聚焦中的声速和虚拟声源校正
IEEE open journal of ultrasonics, ferroelectrics, and frequency control Pub Date : 2024-06-10 DOI: 10.1109/OJUFFC.2024.3411578
Anders Emil Vrålstad;Ole Marius Hoel Rindal;Tore Grüner Bjåstad;Svein-Erik Måsøy
{"title":"Sound Speed and Virtual Source Correction in Synthetic Transmit Focusing","authors":"Anders Emil Vrålstad;Ole Marius Hoel Rindal;Tore Grüner Bjåstad;Svein-Erik Måsøy","doi":"10.1109/OJUFFC.2024.3411578","DOIUrl":"https://doi.org/10.1109/OJUFFC.2024.3411578","url":null,"abstract":"In beamforming, retrospective change in sound speed and recalculation of focusing delays is attractive both for improving image quality and for using it in an iterative image quality optimization process. Modifying the speed of sound retrospectively for focused transmits is challenging because the transmit focus position is a function of sound speed error. The virtual source model is a common way to calculate the transmit focusing delays where using the correct transmit focus position is imperative. In this paper, we provide the methods necessary to perform a retrospective sound-speed correction by compensating the receive grid and by calculating the effective transmit focus needed to perform proper synthetic transmit focusing. To evaluate the efficacy of our method, we simulate wave propagation and measure the resolution of in vitro images using both phased and curvilinear arrays. The results of the suggested virtual source estimation method match the simulated wave propagation for multiple F-numbers and both positive and negative sound speed errors. We compare beamformed images using correct/incorrect sound speeds and correct/incorrect virtual source positions. The results demonstrate that the Corrected Virtual Source (CVS) method generates artifact-free images with superior quality compared to images with incorrect sound speed. Furthermore, the image beamformed with the correct sound speed, but incorrect virtual source position, exhibits image artifacts and inferior focusing quality compared to the CVS image.","PeriodicalId":73301,"journal":{"name":"IEEE open journal of ultrasonics, ferroelectrics, and frequency control","volume":"4 ","pages":"52-62"},"PeriodicalIF":0.0,"publicationDate":"2024-06-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=10552357","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"141435309","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Air-Coupled Lamb Wave Testing of Buried Air-Voids in Foam-Filled Sandwich Panels 泡沫填充夹芯板中埋设空气实体的空气耦合 Lamb 波测试
IEEE open journal of ultrasonics, ferroelectrics, and frequency control Pub Date : 2024-06-05 DOI: 10.1109/OJUFFC.2024.3410169
Christoph Haugwitz;Andre Reinartz;Jan-Helge Dörsam;Sonja Wismath;Gianni Allevato;Jan Hinrichs;Paulina Gorol;Annalena Kühn;Thomas Hahn-Jose;Jörg Lange;Mario Kupnik
{"title":"Air-Coupled Lamb Wave Testing of Buried Air-Voids in Foam-Filled Sandwich Panels","authors":"Christoph Haugwitz;Andre Reinartz;Jan-Helge Dörsam;Sonja Wismath;Gianni Allevato;Jan Hinrichs;Paulina Gorol;Annalena Kühn;Thomas Hahn-Jose;Jörg Lange;Mario Kupnik","doi":"10.1109/OJUFFC.2024.3410169","DOIUrl":"https://doi.org/10.1109/OJUFFC.2024.3410169","url":null,"abstract":"Sandwich panels, composed of two steel faces and a rigid foam core, are an inexpensive and lightweight option for construction industry. However, voids can form in the foam core during the manufacturing process. This paper uses ultrasonic testing to detect such voids in the foam core of sandwich panels, buried a few millimeters below the surface. The testing setup employs both air-coupled and non-contact ultrasonic testing. Different frequencies are investigated for their influence on the detection capabilities. Two air-coupled experimental setups are constructed, one at 40kHz and the other one at 200kHz. Artificial defects are carved into the sandwich panel at different depths. The results are compared to a simulation. We found that detecting buried voids in these sandwich panels is feasible. The 40-kHz setup has a larger penetration depth of 14mm, while the 200-kHz setup has a smaller penetration depth of 2.5mm. The 200-kHz setup shows a better contrast, i.e. the amplitude at the defect increases by 27% compared to 6% with the 40-kHz setup. These methods enable air-coupled, non-contact ultrasonic testing of buried defects in sandwich panels. They have the potential to be integrated into production lines, contributing to improved material efficiency and quality control for these sandwich panels.","PeriodicalId":73301,"journal":{"name":"IEEE open journal of ultrasonics, ferroelectrics, and frequency control","volume":"4 ","pages":"150-159"},"PeriodicalIF":0.0,"publicationDate":"2024-06-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=10549941","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142447031","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Theoretical Validation of a Single-Channel Air-Coupled PMUT With Multi-Frequency Operation for Compressed 3D Spatial Sensing 用于压缩三维空间传感的多频单通道空气耦合 PMUT 的理论验证
IEEE open journal of ultrasonics, ferroelectrics, and frequency control Pub Date : 2024-03-31 DOI: 10.1109/OJUFFC.2024.3408138
Tingzhong Xu;Zhongjie Zhang;Rodrigo Tumolin Rocha;Liang Zeng;Chunlei Xu
{"title":"Theoretical Validation of a Single-Channel Air-Coupled PMUT With Multi-Frequency Operation for Compressed 3D Spatial Sensing","authors":"Tingzhong Xu;Zhongjie Zhang;Rodrigo Tumolin Rocha;Liang Zeng;Chunlei Xu","doi":"10.1109/OJUFFC.2024.3408138","DOIUrl":"https://doi.org/10.1109/OJUFFC.2024.3408138","url":null,"abstract":"This paper proposes a new 3D spatial sensing approach via compressed sensing (CS) by using a single-channel air-coupled piezoelectric micromachined ultrasonic transducer (PMUT) operated with multi-frequency. Our study focuses on a single-channel transducer with a PMUT array composed of several diaphragms with different radius sizes. It is known that small variations in the radius size can cause distinct transmission signals of all diaphragms that are excited by the same excitation signal. In this way, the acoustic field distribution of a region of interest (ROI) can be distorted especially in the direction perpendicular to the wave propagation, which could help to obtain more distinctive information about the scatterers at different locations in any 3D ROI. Therefore, a compressed 3D spatial sensing approach is proposed and used for acquiring measurements of the designed single-channel transducer. The information of any object in a 3D ROI can be mapped onto a collection of basis functions constructed via the nearly mutual orthogonal echo signals from all scatterers in the ROI. Furthermore, the proposed approach is verified with simulated acoustic measurements obtained from the established PMUT equivalent circuit model and the K-Wave acoustic propagation model via an obstacle-sensing application. Based on the sparsity nature of objects in the ROI, the reconstruction of 2D/3D images of objects can be accomplished via a CS-based algorithm. The obtained image reconstruction results show that the proposed approach allows not only for detecting localization but also for reconstructing descriptive features of an object.","PeriodicalId":73301,"journal":{"name":"IEEE open journal of ultrasonics, ferroelectrics, and frequency control","volume":"4 ","pages":"37-51"},"PeriodicalIF":0.0,"publicationDate":"2024-03-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=10545345","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"141333959","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Underwater Analyte Sensing Using a Phononic Crystal Waveguide-Based Interferometric Acoustic Spectrometer 基于声子晶体波导干涉声学光谱仪的水下分析物传感
IEEE open journal of ultrasonics, ferroelectrics, and frequency control Pub Date : 2024-03-08 DOI: 10.1109/OJUFFC.2024.3397248
Delfino Reyes;Hyeonu Heo;Ángel M. Martínez-Argüello;Yasuhisa Fujita;Purnima B. Neogi;Arup Neogi
{"title":"Underwater Analyte Sensing Using a Phononic Crystal Waveguide-Based Interferometric Acoustic Spectrometer","authors":"Delfino Reyes;Hyeonu Heo;Ángel M. Martínez-Argüello;Yasuhisa Fujita;Purnima B. Neogi;Arup Neogi","doi":"10.1109/OJUFFC.2024.3397248","DOIUrl":"https://doi.org/10.1109/OJUFFC.2024.3397248","url":null,"abstract":"This work introduces a 2D PnC-based acoustic spectrometer capable of analyzing small solution volumes (<inline-formula> <tex-math>$25~mu $ </tex-math></inline-formula>l) in aqueous environments with significative accuracy and reliability, thus addressing key limitations in current acoustic spectroscopic techniques. Optimally introducing rows of defects into the PnC structure enables guided acoustic modes to propagate at desired frequencies within the bandgap. We construct an acoustic interferometer to leverage the properties of acoustic cavities within these waveguides, which can configure and modulate wave propagation. Our approach involves harnessing the interference between acoustic waves in the two arms of a defects-based waveguide within a PnC, one arm containing an analyte cavity-holder. We demonstrate that the presence of an analyte (sucrose solutions at various concentrations) induces alterations in the acoustic properties of the cavity, leading to observable shifts in transmission characteristics of the propagating acoustic modes. We achieve exceptional spectral resolution through experimentation, facilitating highly sensitive acoustic sensing even with small analyte volumes (<inline-formula> <tex-math>$lt 25~mu $ </tex-math></inline-formula>l). We utilize finite element method simulations to validate our findings and predict spectral shifts resulting from modified acoustic interference. Additionally, we provide a phenomenological description using tight-binding models. Notably, our approach surpasses conventional PnC sensors like Mach-Zehnder interferometers by overcoming challenges associated with analyte uniformity.","PeriodicalId":73301,"journal":{"name":"IEEE open journal of ultrasonics, ferroelectrics, and frequency control","volume":"4 ","pages":"216-226"},"PeriodicalIF":0.0,"publicationDate":"2024-03-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=10522781","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142976175","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Universal REFoCUS Beamforming With Spatial Weighting 带空间加权的通用 REFoCUS 波束成形
IEEE open journal of ultrasonics, ferroelectrics, and frequency control Pub Date : 2024-03-08 DOI: 10.1109/OJUFFC.2024.3398595
Anders Emil Vrålstad;Magnus Dalen Kvalevåg;Ole Marius Hoel Rindal;Svein-Erik Måsøy
{"title":"Universal REFoCUS Beamforming With Spatial Weighting","authors":"Anders Emil Vrålstad;Magnus Dalen Kvalevåg;Ole Marius Hoel Rindal;Svein-Erik Måsøy","doi":"10.1109/OJUFFC.2024.3398595","DOIUrl":"https://doi.org/10.1109/OJUFFC.2024.3398595","url":null,"abstract":"REFoCUS (Retrospective Encoding For Conventional Ultrasound Sequences) offers great flexibility by enabling synthetic aperture beamforming from conventional ultrasound sequences. This flexibility is beneficial for many aspects in medical ultrasound beamforming, including e.g. combination of different transmit waves, distributed sound speed estimation and common-midpoint gathers. REFoCUS beamforming also has image quality comparable to state-of-art methods such as Retrospective Transmit Beamforming (RTB). However, the previously published implementations of REFoCUS do not address clutter from sidelobes and grating lobes present in the data before the recovery. This reduces image quality due to potentially strong sidelobes and grating lobes, particularly when using REFoCUS in combination with micro-beamforming and matrix array probes. Recordings from micro-beamforming probes may thus not be compliant with the existing REFoCUS methods. We propose to solve the sidelobes and grating lobe issues by introducing a reformulation of REFoCUS that performs multistatic data recovery and beamforming in the time domain, allowing spatial weighting to remove clutter and noise. Spatial weighting is based on common beamforming principles and incorporates element directivity, dynamic F-number, beam geometry weighting, and grating lobe suppression. We also discuss how aperture sampling affects beamforming with REFoCUS. Spatially Weighted REFoCUS (SWR) and critical sampling of the transmit aperture show suppression of receive grating lobes in an in vivo setting with two different micro-beamforming matrix-array probes, leading to an increase in gCNR contrast from 0.44 to 0.96 in a fetal image and from 0.39 to 0.89 in a cardiac image.","PeriodicalId":73301,"journal":{"name":"IEEE open journal of ultrasonics, ferroelectrics, and frequency control","volume":"4 ","pages":"15-26"},"PeriodicalIF":0.0,"publicationDate":"2024-03-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=10525686","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"141084871","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Development of an Air-Coupled Piezoelectric Micromachined Ultrasonic Transducer Using Sol-Gel PZT Thin Film for Fast-Prototyping 利用溶胶凝胶 PZT 薄膜开发空气耦合压电微机械超声波传感器,实现快速原型制作
IEEE open journal of ultrasonics, ferroelectrics, and frequency control Pub Date : 2024-03-06 DOI: 10.1109/OJUFFC.2024.3397630
Ya-Han Liu;Hsiao-Chi Lin;Chih-Ying Li;Chien-Lun Kao;Han-Jen Hsu;Yeong-Her Wang;Chih-Hsien Huang
{"title":"Development of an Air-Coupled Piezoelectric Micromachined Ultrasonic Transducer Using Sol-Gel PZT Thin Film for Fast-Prototyping","authors":"Ya-Han Liu;Hsiao-Chi Lin;Chih-Ying Li;Chien-Lun Kao;Han-Jen Hsu;Yeong-Her Wang;Chih-Hsien Huang","doi":"10.1109/OJUFFC.2024.3397630","DOIUrl":"https://doi.org/10.1109/OJUFFC.2024.3397630","url":null,"abstract":"This study demonstrated the first air-coupled pMUT using sol-gel PZT thin film that could deliver ultrasonic waves to mid-air. First, the deposition conditions for making PZT thin film with high remanent polarization were determined. Then, air-coupled pMUTs with resonance frequencies close to 40 kHz were designed using the circular plate model. According to the design, pMUTs with radii measuring \u0000<inline-formula> <tex-math>$600~mu $ </tex-math></inline-formula>\u0000m to \u0000<inline-formula> <tex-math>$775~mu $ </tex-math></inline-formula>\u0000m were fabricated to evaluate the acoustic output pressure. Among these, the pMUT with the \u0000<inline-formula> <tex-math>$725~mu $ </tex-math></inline-formula>\u0000m radius achieved a maximum sound pressure output of 4.42 Pa at 3 cm above when driven with 10 Vpp, and the resonance frequency was 40.48 kHz. Finally, the output pressure of a phased array consisting of sol-gel PZT-based pMUTs with a \u0000<inline-formula> <tex-math>$725~mu $ </tex-math></inline-formula>\u0000m radius was calculated using the k-Wave toolbox. The output pressure of the \u0000<inline-formula> <tex-math>$11times 11$ </tex-math></inline-formula>\u0000 pMUT array reached 365.62 Pa when focused at 3 cm above it. This result revealed that the output pressure of the proposed pMUT array could fulfill the requirement for most mid-air ultrasound applications.","PeriodicalId":73301,"journal":{"name":"IEEE open journal of ultrasonics, ferroelectrics, and frequency control","volume":"4 ","pages":"27-36"},"PeriodicalIF":0.0,"publicationDate":"2024-03-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=10521570","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"141084766","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Studying the Effects of Mutual Acoustic Impedance on the Performance of Polymer-Based CMUTs 研究互声阻抗对聚合物基 CMUT 性能的影响
IEEE open journal of ultrasonics, ferroelectrics, and frequency control Pub Date : 2024-02-29 DOI: 10.1109/OJUFFC.2024.3371913
Martin Angerer;Jonas Welsch;Carlos D. Gerardo;Nicole V. Ruiter;Edmond Cretu;Robert Rohling
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