IEEE open journal of ultrasonics, ferroelectrics, and frequency control最新文献

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Beamformer Fusion Using Deep Learning for 3-D Ultrasound Imaging With Sparse Arrays 基于深度学习的稀疏阵列三维超声成像波束形成融合
IF 2.9
IEEE open journal of ultrasonics, ferroelectrics, and frequency control Pub Date : 2026-01-01 Epub Date: 2026-04-10 DOI: 10.1109/OJUFFC.2026.3682664
Edoardo Bosco;Mohamed Tamraoui;Jean-Baptiste Jacquet;Hervé Liebgott;Adrian Basarab;Giulia Matrone
{"title":"Beamformer Fusion Using Deep Learning for 3-D Ultrasound Imaging With Sparse Arrays","authors":"Edoardo Bosco;Mohamed Tamraoui;Jean-Baptiste Jacquet;Hervé Liebgott;Adrian Basarab;Giulia Matrone","doi":"10.1109/OJUFFC.2026.3682664","DOIUrl":"https://doi.org/10.1109/OJUFFC.2026.3682664","url":null,"abstract":"Sparse 2D arrays offer a cost-effective solution for 3D ultrasound imaging but suffer from limited image quality due to increased sidelobe and grating lobe artifacts, as well as reduced contrast. Traditional beamforming techniques are unable to consistently balance artifact suppression with speckle preservation. In this study we investigate the linear combination of different beamformer outputs to enhance sparse-array 3D imaging. A 3D encoder-decoder convolutional neural network was trained to predict a set of spatially varying weights for volumes generated by delay-and-sum (DAS), coherence-factor (CF) and a combination of filtered delay-multiply-and-sum (FDMAS) and CF. The model was trained exclusively on simulated phantoms with diverse echogenic structures and evaluated on a subset of simulated and experimental data. Results show that the proposed method achieves improved contrast and target detectability, while preserving speckle texture and producing smooth transitions between inclusions and surrounding tissue.","PeriodicalId":73301,"journal":{"name":"IEEE open journal of ultrasonics, ferroelectrics, and frequency control","volume":"6 ","pages":"167-171"},"PeriodicalIF":2.9,"publicationDate":"2026-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=11479319","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"148171991","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Application of Synchronized Swept-Sine Technique in CMUT Characterization Using Laser-Doppler Vibrometry 同步扫描正弦技术在激光多普勒振动仪CMUT表征中的应用
IF 2.9
IEEE open journal of ultrasonics, ferroelectrics, and frequency control Pub Date : 2026-01-01 Epub Date: 2026-03-18 DOI: 10.1109/OJUFFC.2026.3694078
Tönnis Trittler;Sören Köble;Julian Kober;Marco Kircher;Johannes Fankhänel;Cornelius Kühnöl;Paul-Henry Franz Koop;Richard Nauber;Henning Heuer;Moritz Herzog
{"title":"Application of Synchronized Swept-Sine Technique in CMUT Characterization Using Laser-Doppler Vibrometry","authors":"Tönnis Trittler;Sören Köble;Julian Kober;Marco Kircher;Johannes Fankhänel;Cornelius Kühnöl;Paul-Henry Franz Koop;Richard Nauber;Henning Heuer;Moritz Herzog","doi":"10.1109/OJUFFC.2026.3694078","DOIUrl":"https://doi.org/10.1109/OJUFFC.2026.3694078","url":null,"abstract":"Capacitive Micromachined Ultrasonic Transducers (CMUTs) provide a path to mass-produced cost-efficient transducers for clinical imaging and wearables. However, their inherent nonlinearities, especially at high excitation voltages, can degrade performance and image quality. This requires fast non-contact characterization of individual CMUT transducers directly on a wafer. This work demonstrates the first application of the Synchronized Swept-Sine Technique (SST) in Laser-Doppler Vibrometry (LDV) for comprehensive characterization of CMUTs on individual cell level. In the SST, the extraction of both linear and nonlinear harmonic transfer functions from a single measurement is possible by excitation with an exponential chirp and application of an inverse filter. Using a scanning LDV system, we characterized individual cells in a 64-cell CMUT array (<inline-formula> <tex-math>$50~{mu }$ </tex-math></inline-formula> m diameter) across a 1...16 MHz frequency range in both air and oil. The method reveals quantitative spectral data, including resonance at 6.4 MHz and second-harmonic distortion at −11.8 dB relative to the fundamental for the investigated CMUT. Results demonstrate significant cell-to-cell variations in harmonic transfer functions and reveal nonlinear behavior even in non-excited cells due to inter-cell acoustic coupling. These findings establish SST-LDV as a powerful complementary technique to electrical impedance measurements. The method provides spatially resolved mechanical insights that are crucial for the development of CMUTs, model validation, and potentially, quality control in high-throughput MEMS manufacturing.","PeriodicalId":73301,"journal":{"name":"IEEE open journal of ultrasonics, ferroelectrics, and frequency control","volume":"6 ","pages":"156-162"},"PeriodicalIF":2.9,"publicationDate":"2026-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=11522980","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"148003662","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Wafer Bonding Defect Detection With Coded Ultrasound Array Imaging and Fourier Domain Analysis 基于编码超声阵列成像和傅立叶域分析的晶圆键合缺陷检测
IF 1.8
IEEE open journal of ultrasonics, ferroelectrics, and frequency control Pub Date : 2026-01-01 Epub Date: 2026-08-18 DOI: 10.1109/OJUFFC.2026.3724592
Bingze Dai;Yang Leng;Shiqi Yang;Wei-Ning Lee
{"title":"Wafer Bonding Defect Detection With Coded Ultrasound Array Imaging and Fourier Domain Analysis","authors":"Bingze Dai;Yang Leng;Shiqi Yang;Wei-Ning Lee","doi":"10.1109/OJUFFC.2026.3724592","DOIUrl":"https://doi.org/10.1109/OJUFFC.2026.3724592","url":null,"abstract":"The continuous drive for miniaturization and 3D integration in the semiconductor industry necessitates uncompromising quality in wafer bonding. Scanning Acoustic Microscopy (SAM) is a benchmark for detecting micron-scale bonding defects, but its point-by-point scanning mechanism imposes a throughput bottleneck, rendering it unsuitable for large-area wafer inspection. This paper introduces a high-throughput inspection method that integrates high-frequency (30 MHz) ultrasound array imaging with coded plane wave transmissions adapted from medical imaging. Our approach employs a Cascaded Dual-Polarity Wave (CDW) excitation scheme to reduce frequency-dependent attenuation, thereby improving the signal-to-noise ratio (SNR) without compromising inspection speed. We also investigate unique spectral fingerprints of defects through Fourier domain analysis, improving detectability in sub-optimal SNR conditions where conventional time-domain signals are obscured. The proposed method was evaluated using k-Wave simulations and validated via experiments on custom-fabricated patterned wafers. Results demonstrated that our array-based approach increased inspection throughput by more than an order of magnitude compared to conventional SAM. Furthermore, Fourier analysis identified distinct defect signatures at specific resonant frequencies. This work underscores the feasibility of a viable ultrasound array imaging method for rapid and noise-robust in-line quality control in semiconductor manufacturing.","PeriodicalId":73301,"journal":{"name":"IEEE open journal of ultrasonics, ferroelectrics, and frequency control","volume":"6 ","pages":"226-231"},"PeriodicalIF":1.8,"publicationDate":"2026-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=11658700","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"148928321","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Adaptive Spatio-Temporal Phase Retrieval for Ultra-Short Pulse Wavefront Shaping 超短脉冲波前整形的自适应时空相位反演
IF 2.9
IEEE open journal of ultrasonics, ferroelectrics, and frequency control Pub Date : 2026-01-01 Epub Date: 2026-06-02 DOI: 10.1109/OJUFFC.2026.3699295
Oz Shaul;Tali Ilovitsh
{"title":"Adaptive Spatio-Temporal Phase Retrieval for Ultra-Short Pulse Wavefront Shaping","authors":"Oz Shaul;Tali Ilovitsh","doi":"10.1109/OJUFFC.2026.3699295","DOIUrl":"https://doi.org/10.1109/OJUFFC.2026.3699295","url":null,"abstract":"Beam shaping of ultra-short pulses is essential for medical ultrasound, where single-cycle excitations are required to achieve high axial resolution and improve frame rate. Conventional methods, such as the Gerchberg–Saxton (GS) algorithm or more recent deep learning approaches, are generally effective for continuous-wave excitation but may exhibit reduced performance under single-cycle conditions, particularly for multi-foci patterns. In diagnostic imaging, high frame rate is critical for applications demanding rapid scanning. In this context, multi-line transmission (MLT) leverages beam shaping to synthesize multiple simultaneous foci, thereby increasing frame rate. In parallel, structured illumination methods for super-resolution and acoustical holography likewise depend on actively shaping single-cycle pulses to produce controlled patterns, highlighting the need for precise short-pulse beam shaping. To address this challenge, we introduce the spatio-temporal adaptive reconstruction (STAR) algorithm, which performs active beam shaping directly in the time domain by integrating the generalized angular spectrum method (GASM) into an iterative optimization scheme. STAR enforces constraints on both the transducer and focal planes, enabling accurate control of single-cycle excitations. Simulations showed that STAR consistently outperformed GS for multi-foci patterns. For example, in a four-foci configuration, STAR achieved a correlation of 0.80 compared to 0.64 for GS, with significantly improved uniformity across focal peaks. Resolution analysis demonstrated that STAR reduced the minimum distinguishable foci spacing from 1.09 mm with GS to 0.87 mm. Experimental hydrophone measurements confirmed these improvements. Across multi-foci patterns, STAR produced more distinct and balanced foci compared to those observed with GS. These results demonstrate that STAR provides robust and efficient active beam shaping of single-cycle pulses, maintaining accuracy across different depths and frequencies for diagnostic applications.","PeriodicalId":73301,"journal":{"name":"IEEE open journal of ultrasonics, ferroelectrics, and frequency control","volume":"6 ","pages":"172-187"},"PeriodicalIF":2.9,"publicationDate":"2026-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=11547176","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"148236421","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Preliminary Study on an Anti-Aliasing Approach for the Phase-Sensitive Motion Estimator 相敏运动估计器抗混叠方法的初步研究
IF 2.9
IEEE open journal of ultrasonics, ferroelectrics, and frequency control Pub Date : 2026-01-01 Epub Date: 2026-04-14 DOI: 10.1109/OJUFFC.2026.3683639
Hideyuki Hasegawa;Masaaki Omura;Ryo Nagaoka;Kozue Saito
{"title":"Preliminary Study on an Anti-Aliasing Approach for the Phase-Sensitive Motion Estimator","authors":"Hideyuki Hasegawa;Masaaki Omura;Ryo Nagaoka;Kozue Saito","doi":"10.1109/OJUFFC.2026.3683639","DOIUrl":"https://doi.org/10.1109/OJUFFC.2026.3683639","url":null,"abstract":"The autocorrelation method is widely used to estimate axial velocities in medical ultrasound imaging, such as color flow imaging, owing to its computational simplicity and robustness. However, its applicability is significantly limited by aliasing, whereby velocities exceeding the Nyquist limit are wrapped and may appear with reversed polarity. In this study, we propose an alternative approach in which the phases of received echo signals at multiple frequencies are analyzed using the Fourier transform. By evaluating the slope of the phase spectrum across frequencies, the target velocity corresponding to the displacement between successive transmissions can be estimated with increased tolerance to aliasing. Phase unwrapping becomes feasible as long as the phase difference between adjacent frequency components remains less than <inline-formula> <tex-math>$boldsymbol {pi }$ </tex-math></inline-formula>, providing a theoretical basis for the proposed method. Consequently, the proposed phase-spectrum approach extends the aliasing limit compared with the conventional autocorrelation method, which relies only on the phase at the ultrasonic center frequency. A proof-of-concept numerical simulation clearly demonstrated a significant extension of the aliasing limit. In addition, the feasibility of the method was evaluated through an in vivo measurement of the human carotid artery, in which echo signals were acquired using non-steered single-angle plane wave imaging. While the conventional autocorrelation method exhibited clear aliasing effects, the proposed method successfully corrected velocity estimates with opposite polarity, thereby improving the applicability of blood flow assessment.","PeriodicalId":73301,"journal":{"name":"IEEE open journal of ultrasonics, ferroelectrics, and frequency control","volume":"6 ","pages":"122-126"},"PeriodicalIF":2.9,"publicationDate":"2026-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=11481111","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"147795987","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Nitrogen-Pressure Dependence of Coherent Population Trapping Signal Characteristics in Microfabricated Rubidium Vapor Cells 微制铷蒸气电池中相干居群捕获信号特性的氮压依赖性
IF 1.8
IEEE open journal of ultrasonics, ferroelectrics, and frequency control Pub Date : 2026-01-01 Epub Date: 2026-10-01 DOI: 10.1109/OJUFFC.2026.3739231
Shun Kiyose;Masahiro Fukuoka;Yusuke Odagiri;Satoshi Hatano;Shigeyoshi Goka;Motoaki Hara;Yoshikazu Hirai
{"title":"Nitrogen-Pressure Dependence of Coherent Population Trapping Signal Characteristics in Microfabricated Rubidium Vapor Cells","authors":"Shun Kiyose;Masahiro Fukuoka;Yusuke Odagiri;Satoshi Hatano;Shigeyoshi Goka;Motoaki Hara;Yoshikazu Hirai","doi":"10.1109/OJUFFC.2026.3739231","DOIUrl":"https://doi.org/10.1109/OJUFFC.2026.3739231","url":null,"abstract":"Controlling buffer-gas conditions in vapor cells is essential for frequency stabilization and atomic-clock performance. This study investigated the dependence of coherent population trapping (CPT) signal characteristics on nitrogen (N<inline-formula> <tex-math>${}_{2}$ </tex-math></inline-formula>) buffer-gas pressure in micro-fabricated vapor cells containing natural-abundance rubidium (Rb) generated from Rb azide (RbN<inline-formula> <tex-math>${}_{3}$ </tex-math></inline-formula>) for chip-scale atomic clocks. A wafer-level fabrication method enabling individual control of N2 pressure was developed by inkjet patterning of RbN3 and subsequent krypton fluoride (KrF) excimer laser decomposition. An increasing N2 pressure was found to reduce the CPT linewidth and cause a significant decrease in the signal amplitude, which resulted in monotonic degradation in the CPT figure of merit with higher pressures. A CPT-based laser frequency stabilization method that locked the laser wavelength to the CPT resonance peak yielded significantly larger signal amplitudes than a conventional absorption-based method in the low-pressure regime below 8 kPa. These results show that CPT performance in micro-fabricated Rb vapor cells is more restricted by the signal amplitude rather than the linewidth. They also offer practical buffer-gas design guidelines for enhancing short-term frequency stability in chip-scale atomic clocks.","PeriodicalId":73301,"journal":{"name":"IEEE open journal of ultrasonics, ferroelectrics, and frequency control","volume":"6 ","pages":"281-292"},"PeriodicalIF":1.8,"publicationDate":"2026-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=11718789","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"149131222","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Robust Transducer–Reflector Distance Control in Acoustic Levitation 声悬浮鲁棒传感器-反射器距离控制
IF 2.9
IEEE open journal of ultrasonics, ferroelectrics, and frequency control Pub Date : 2026-01-01 Epub Date: 2026-04-02 DOI: 10.1109/OJUFFC.2026.3679991
Jan Helge Dörsam;Sven Suppelt;Alexander A. Altmann;Jun Liu;Chuanchao Xu;Christoph Haugwitz;Tomislav Maric;Dieter Bothe;Mario Kupnik
{"title":"Robust Transducer–Reflector Distance Control in Acoustic Levitation","authors":"Jan Helge Dörsam;Sven Suppelt;Alexander A. Altmann;Jun Liu;Chuanchao Xu;Christoph Haugwitz;Tomislav Maric;Dieter Bothe;Mario Kupnik","doi":"10.1109/OJUFFC.2026.3679991","DOIUrl":"https://doi.org/10.1109/OJUFFC.2026.3679991","url":null,"abstract":"Acoustic levitation enables contactless manipulation for applications in containerless processing in chemistry and materials science. Single-transducer levitators, consisting of an ultrasonic transducer and a reflector, offer a minimal hardware configuration but require precise control of the transducer–reflector distance <inline-formula> <tex-math>$H$ </tex-math></inline-formula>. We propose a distance stabilization system based on a motorized linear stage and a precision balance that measures the acoustic radiation force (ARF) as a time-averaged, surface-integrated force magnitude on the reflector. Because ARF versus <inline-formula> <tex-math>$H$ </tex-math></inline-formula> exhibits extremely narrow resonance peaks, micrometer-scale deviations markedly reduce force and destabilize levitation. In practice, high-power transducers are actively kept at resonance using resonance frequency tracking (RFT). As the tracked frequency changes, the wavelength changes as well and the optimal distance <inline-formula> <tex-math>$H$ </tex-math></inline-formula> shifts. We introduce a two-stage control strategy in order to robustly stabilize <inline-formula> <tex-math>$H$ </tex-math></inline-formula>. First, a physics-informed, one-sided adaptive hill climb algorithm locates the cavity resonance. Second, a physics-informed extremum-seeking controller maintains the experimentally determined resonance distance despite drift and disturbances, using only the absolute ARF feedback. Long-term validation at node index <inline-formula> <tex-math>$n$ </tex-math></inline-formula>  <inline-formula> <tex-math>$text {=}$ </tex-math></inline-formula> 5 confirmed that ARF remained within the 95% tolerance bound for two hours, ensuring stable levitation. Performance was limited by the balance, mainly due to its internal averaging time. This occasionally caused convergence to local maxima or temporary loss of track during object insertion. The strategy presented enables robust, long-duration operation of acoustic levitators.","PeriodicalId":73301,"journal":{"name":"IEEE open journal of ultrasonics, ferroelectrics, and frequency control","volume":"6 ","pages":"107-111"},"PeriodicalIF":2.9,"publicationDate":"2026-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=11471825","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"147696713","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Cross Hyper-Beamforming 交叉Hyper-Beamforming
IF 2.9
IEEE open journal of ultrasonics, ferroelectrics, and frequency control Pub Date : 2026-01-01 Epub Date: 2026-03-18 DOI: 10.1109/OJUFFC.2026.3694627
Chun-Hsien Chiang;Meng-Lin Li
{"title":"Cross Hyper-Beamforming","authors":"Chun-Hsien Chiang;Meng-Lin Li","doi":"10.1109/OJUFFC.2026.3694627","DOIUrl":"https://doi.org/10.1109/OJUFFC.2026.3694627","url":null,"abstract":"Delay-and-sum beamformation (DAS) is the most common image reconstruction algorithm for ultrasound imaging. Its predictability, robustness, and low computational complexity make it a compromising algorithm even with lateral resolution being diffraction-limited and high sidelobe levels. Hyper-beamformation (HBF) has recently been proposed to improve lateral resolution with computational complexity similar to DAS. Besides, an integration of HBF and plane-wave compounding (HBF-PWC) has been proposed for ultrafast imaging. However, HBF-PWC might create a false-peak artifact when two-point targets were closely spaced, hindering its lateral-resolution improvement and making it only suitable for application with sparse data, i.e., ultrasound localization microscopy. In this study, we propose a novel beamforming algorithm–cross hyper-beamforming (XHBF), cross-compounding plane wave channel data from two opposite transmitting angles, and thereby creating a narrower hyper-beam, which removes the false-peak artifact in HBF-PWC and dramatically improves the resolvability when separating closely spaced point targets while retaining low computational complexity comparable to DAS. We also explore the fact that XHBF can significantly suppress grating-lobe artifacts.","PeriodicalId":73301,"journal":{"name":"IEEE open journal of ultrasonics, ferroelectrics, and frequency control","volume":"6 ","pages":"163-166"},"PeriodicalIF":2.9,"publicationDate":"2026-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=11523466","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"148171951","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Physics-Informed Eigen-Solution Neural Networks for Ultra-Fast Simulation and Optimization of Multimodal MEMS Ultrasonic Arrays 多模态MEMS超声阵列超快速仿真与优化的物理信息特征解神经网络
IF 1.8
IEEE open journal of ultrasonics, ferroelectrics, and frequency control Pub Date : 2026-01-01 Epub Date: 2026-09-17 DOI: 10.1109/OJUFFC.2026.3734815
Jiapeng Xu;Gabriele Schrag;Zhou da;Yong Wang;Alexander Shatalov;Alessandro Stuart Savoia;Tingzhong Xu
{"title":"Physics-Informed Eigen-Solution Neural Networks for Ultra-Fast Simulation and Optimization of Multimodal MEMS Ultrasonic Arrays","authors":"Jiapeng Xu;Gabriele Schrag;Zhou da;Yong Wang;Alexander Shatalov;Alessandro Stuart Savoia;Tingzhong Xu","doi":"10.1109/OJUFFC.2026.3734815","DOIUrl":"https://doi.org/10.1109/OJUFFC.2026.3734815","url":null,"abstract":"Micro-electromechanical (MEMS) ultrasonic arrays play a critical role in various modern ultrasonic technologies, yet predicting their frequency response and inter-element coupling becomes increasingly difficult as array size and modal complexity grow. We present physics-informed eigen-solution neural networks that provide fast, scalable predictions of such array behavior, including the acoustic coupling between elements. The framework decomposes the array problem into cell-level and eigenmode subproblems, assigning the fundamental component — eigenvalue computation — to physics-informed neural networks. Because the relevant eigenmodes arise from a geometry-defined time-harmonic eigenvalue problem, the networks learn modal parameters accurately and achieve validation errors far lower than non-physics-based models. These learned eigen-solutions drive an analytical equivalent-circuit model that, when GPU-accelerated, delivers two to three orders of magnitude speedup and scales to arrays with more than 1,000 cells—well beyond the feasibility of conventional finite-element simulations. Measurements on a fabricated cell using digital holographic microscopy validate the predicted eigenmodes, and large-scale geometry sweeps demonstrate rapid identification of designs with improved acoustic performance. To facilitate further research, an open-access simulation software is provided via GitHub, offering a data-efficient and scalable methodology for the ultra-fast design and optimization of next-generation multi-eigenmode MEMS ultrasonic transducers.","PeriodicalId":73301,"journal":{"name":"IEEE open journal of ultrasonics, ferroelectrics, and frequency control","volume":"6 ","pages":"265-280"},"PeriodicalIF":1.8,"publicationDate":"2026-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=11695239","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"149131223","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Negative Corona Poling of PZT/PZT Sol–Gel Composite Films Under High Humidity for On-Site Fabrication 高湿条件下PZT/PZT溶胶-凝胶复合膜的负电晕极化
IF 1.8
IEEE open journal of ultrasonics, ferroelectrics, and frequency control Pub Date : 2026-01-01 Epub Date: 2026-08-06 DOI: 10.1109/OJUFFC.2026.3721400
Mako Tanaka;Kei Nakatsuma;Makiko Kobayashi
{"title":"Negative Corona Poling of PZT/PZT Sol–Gel Composite Films Under High Humidity for On-Site Fabrication","authors":"Mako Tanaka;Kei Nakatsuma;Makiko Kobayashi","doi":"10.1109/OJUFFC.2026.3721400","DOIUrl":"https://doi.org/10.1109/OJUFFC.2026.3721400","url":null,"abstract":"This study proposes a nitrogen-spraying corona discharge poling method for on-site poling of sol–gel composite piezoelectric films under high-humidity conditions. Particular focus was placed on negative corona discharge, which is more sensitive to humidity but offers superior high-temperature performance. A <inline-formula> <tex-math>$50~mu $ </tex-math></inline-formula> m-thick lead zirconate titanate (PZT)/PZT sol–gel composite film was fabricated on a 3 mm-thick titanium substrate, and its poling behavior was evaluated under three environmental conditions: low humidity, high humidity, and high humidity with nitrogen gas spraying. For comparison, positive-corona poling was conducted under the same conditions. The results showed that ozone generation increased under high humidity without nitrogen, and negative poling yielded a very low piezoelectric coefficient (<inline-formula> <tex-math>${d}_{{33}} {=} 0.2$ </tex-math></inline-formula> pC/N) with no observable ultrasonic response. In contrast, nitrogen spraying effectively suppressed ozone formation and enabled stable poling, achieving a performance comparable to that under low humidity (<inline-formula> <tex-math>${d}_{{33}}{=} 41.8$ </tex-math></inline-formula> pC/N). Dielectric measurements also confirmed that, under nitrogen spraying, the relative permittivity and dielectric loss remained within the typical range for well-poled films.","PeriodicalId":73301,"journal":{"name":"IEEE open journal of ultrasonics, ferroelectrics, and frequency control","volume":"6 ","pages":"242-247"},"PeriodicalIF":1.8,"publicationDate":"2026-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=11643915","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"149034343","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
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