2020 Joint Conference of the IEEE International Frequency Control Symposium and International Symposium on Applications of Ferroelectrics (IFCS-ISAF)最新文献_第3页

Narrowing Laser Linewidth Using Modulation Transfer Spectroscopy 利用调制转移光谱学缩小激光线宽

2020 Joint Conference of the IEEE International Frequency Control Symposium and International Symposium on Applications of Ferroelectrics (IFCS-ISAF) Pub Date : 2020-07-01 DOI: 10.1109/IFCS-ISAF41089.2020.9234945

Haosen Shang, Tongyun Zhang, Xiaolei Guan, D. Pan, Jingbiao Chen, Tiantian Shi, Jun Pan, Chunlai Li, G. Hu, Jin He

引用次数: 1

On Using UTC/UTCr for GNSS-GNSS Time Offset Monitoring 关于使用UTC/UTCr进行GNSS-GNSS时间偏移监测

2020 Joint Conference of the IEEE International Frequency Control Symposium and International Symposium on Applications of Ferroelectrics (IFCS-ISAF) Pub Date : 2020-07-01 DOI: 10.1109/IFCS-ISAF41089.2020.9234881

P. Bogdanov, A. Druzhin, T. Primakina

引用次数: 1

Low-Phase Noise Microwave Generation using Self-Stabilized $f_{text{ceo}}$-Free Comb 使用自稳定的$f_{text{ceo}}$ free梳子产生低相位噪声微波

2020 Joint Conference of the IEEE International Frequency Control Symposium and International Symposium on Applications of Ferroelectrics (IFCS-ISAF) Pub Date : 2020-07-01 DOI: 10.1109/IFCS-ISAF41089.2020.9234935

J. Cahill, T. Mahmood, Patrick G. Sykes, Weimin Zhou, M. Cich, R. Wilk, S. Mueller, F. Rohde, C. Menyuk

引用次数: 0

Fabrication of <111>c-oriented (K0.5Na0.5)NbO3 Single Crystal by Solid-State Cyrstal Growth Method 固态晶体生长法制备c取向(K0.5Na0.5)NbO3单晶

2020 Joint Conference of the IEEE International Frequency Control Symposium and International Symposium on Applications of Ferroelectrics (IFCS-ISAF) Pub Date : 2020-07-01 DOI: 10.1109/IFCS-ISAF41089.2020.9234830

I. Fujii, S. Ueno, S. Wada

引用次数: 1

Characterization of AlScN on CMOS CMOS上AlScN的表征

2020 Joint Conference of the IEEE International Frequency Control Symposium and International Symposium on Applications of Ferroelectrics (IFCS-ISAF) Pub Date : 2020-07-01 DOI: 10.1109/IFCS-ISAF41089.2020.9234939

Yutong Liu, J. Kuo, B. Davaji, V. Gund, A. Lal, J. Sharma, Navab Singh

{"title":"Characterization of AlScN on CMOS","authors":"Yutong Liu, J. Kuo, B. Davaji, V. Gund, A. Lal, J. Sharma, Navab Singh","doi":"10.1109/IFCS-ISAF41089.2020.9234939","DOIUrl":"https://doi.org/10.1109/IFCS-ISAF41089.2020.9234939","url":null,"abstract":"In this paper, the bulk-wave excitation and sense properties of solidly mounted AlScN and AlN bulk-wave transducers itegrated onto CMOS substrates is presented. The AlN is fabricated at Silterra Malaysia, and the Al0.85Sc0.15N transducer is fabricated at the Institute of Microelectronics (IME), both on top of Global Foundries (GF) 180nm CMOS wafers. The transducers are deposited on a $725mu m$ silicon substrate with the CMOS Back End of Line (BEOL) between the piezoelectric stack and the substrate silicon. In the continuous mode testing, the transducer is driven by a network analyzer to obtain the impedance response. We extracted the HBAR quality factor, electromechanical coupling, and the figure of merit from the impedance magnitude and phase. The composite quality factor of the AlN is found to be 17.4% higher than the AlScN, while the composite electromechanical coupling coefficient of the AlScN is 13% higher than the AlN. The larger electromechnaical coupling is useful for pulse response of the transducers used in ultrasonic imaging and sensing applications. In the pulsed mode testing, the transducer is driven by a 60 ns wide RF pulse packet with the carrier frequency swept from 700 MHz to 3 GHz, and the return is signal is used to calculate the transmit/receive transfer function. For the specific thin film stacks tested here, the voltage gain of the AlN and AlScN is comparable. The work also indicates the need for stack optimization to fully utilize the higher AlScN electromechanical coupling.","PeriodicalId":6872,"journal":{"name":"2020 Joint Conference of the IEEE International Frequency Control Symposium and International Symposium on Applications of Ferroelectrics (IFCS-ISAF)","volume":"07 1","pages":"1-5"},"PeriodicalIF":0.0,"publicationDate":"2020-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"86014434","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 4

A Study of Quality Factor in SAW Resonators for SAW Gyroscope Applications SAW陀螺仪用SAW谐振器的品质因子研究

2020 Joint Conference of the IEEE International Frequency Control Symposium and International Symposium on Applications of Ferroelectrics (IFCS-ISAF) Pub Date : 2020-07-01 DOI: 10.1109/IFCS-ISAF41089.2020.9234885

A. Mahmoud, T. Mukherjee, G. Piazza

{"title":"A Study of Quality Factor in SAW Resonators for SAW Gyroscope Applications","authors":"A. Mahmoud, T. Mukherjee, G. Piazza","doi":"10.1109/IFCS-ISAF41089.2020.9234885","DOIUrl":"https://doi.org/10.1109/IFCS-ISAF41089.2020.9234885","url":null,"abstract":"This paper is the first to investigate the quality factor (Q) in surface acoustic wave (SAW) resonators for SAW gyroscopes (SAWG) applications. This constitutes the first analytical and experimental evaluation of SAW loss mechanisms for orthogonal crystal symmetric Y-cut ±45° direction relative to Z-axis on both Lithium Niobate (LN) and Lithium Niobate on Insulator substrate (LNOI). This study demonstrates the ability to minimize the radiation, diffraction, beam steering and bulk scattering loss while exciting the SAW resonators with extremely thick tungsten electrodes (> 2% of acoustic wavelength), which are required to maximize the SAWG sensitivity. This investigation results in SAW devices exhibiting $Q_{total}$ approaching 15,000 and more than 14 × higher than conventional designs. This approach is the first step towards understanding and eliminating the sources of losses in SAWG, enabling the development of a new generation of high-performance MEMS SAW-based gyroscopes with high sensitivity and stability.","PeriodicalId":6872,"journal":{"name":"2020 Joint Conference of the IEEE International Frequency Control Symposium and International Symposium on Applications of Ferroelectrics (IFCS-ISAF)","volume":"32 1","pages":"1-3"},"PeriodicalIF":0.0,"publicationDate":"2020-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"78100783","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 1

Use of Artificial Intelligence in Classification and Monitoring of VHF Signals in a Software Based Instrumentation System 在基于软件的仪器系统中应用人工智能对甚高频信号进行分类和监测

2020 Joint Conference of the IEEE International Frequency Control Symposium and International Symposium on Applications of Ferroelectrics (IFCS-ISAF) Pub Date : 2020-07-01 DOI: 10.1109/IFCS-ISAF41089.2020.9234858

R. Ciocan

引用次数: 0

Stability Budget for Thermal Calcium-Beam Optical Clock 热钙束光钟的稳定性预算

2020 Joint Conference of the IEEE International Frequency Control Symposium and International Symposium on Applications of Ferroelectrics (IFCS-ISAF) Pub Date : 2020-07-01 DOI: 10.1109/IFCS-ISAF41089.2020.9234909

Bryan Hemingway, T. G. Akin, Jennifer A. Taylor, Steven Eric Peil

引用次数: 0

A Sub-mW/Pixel Zero-Bias CMUT-in-CMOS Receiver Front-End with TiN Electrode 一种带TiN电极的亚毫瓦/像素级零偏置cmos接收机前端

2020 Joint Conference of the IEEE International Frequency Control Symposium and International Symposium on Applications of Ferroelectrics (IFCS-ISAF) Pub Date : 2020-07-01 DOI: 10.1109/IFCS-ISAF41089.2020.9234860

Tzu-Hsuan Hsu, Ming-Huang Li, A. Zope, Sheng-Shian Li

引用次数: 0

A High-$k_{t}{}^{2}$ Switchable Ferroelectric Al0.7Sc0.3N Film Bulk Acoustic Resonator 高-$k_{t}{}^{2}$可开关铁电Al0.7Sc0.3N薄膜体声谐振器

2020 Joint Conference of the IEEE International Frequency Control Symposium and International Symposium on Applications of Ferroelectrics (IFCS-ISAF) Pub Date : 2020-07-01 DOI: 10.1109/IFCS-ISAF41089.2020.9234831

Jialin Wang, Mingyo Park, S. Mertin, T. Pensala, F. Ayazi, A. Ansari

{"title":"A High-$k_{t}{}^{2}$ Switchable Ferroelectric Al0.7Sc0.3N Film Bulk Acoustic Resonator","authors":"Jialin Wang, Mingyo Park, S. Mertin, T. Pensala, F. Ayazi, A. Ansari","doi":"10.1109/IFCS-ISAF41089.2020.9234831","DOIUrl":"https://doi.org/10.1109/IFCS-ISAF41089.2020.9234831","url":null,"abstract":"This work demonstrates the hysteresis behavior and temperature characterization of an AlScN Film bulk acoustic resonator (FBAR) with ∼30% $text{Sc}/(text{Al}+text{Sc})$ ratio. Operating at ∼3 GHz, the as-fabricated FBAR exhibits a record high effective electromechanical coupling ($k_{t}{}^{2}$) of 18% with a mechanical quality factor ($Q_{m}$) of 328. The polarization of the FBAR can be switched from N-polar to Al-polar by using a triangular-wave signal with a peak voltage of −350 V, applied for 6 seconds at 1 kHz across a 900 nm-thick Al0.7Sc0.3N film. It is shown that the polarization switching of AlScN film not only changes the polarity of the piezoelectric coefficient (e33), but also changes the series resistance of the metal-ferroelectric-metal (MFM) stack and leads to an effective “switching” of the FBAR. The frequency response of the switchable FBAR is investigated after polarization switching during 4 cycles and at elevated temperatures up to 600 K.","PeriodicalId":6872,"journal":{"name":"2020 Joint Conference of the IEEE International Frequency Control Symposium and International Symposium on Applications of Ferroelectrics (IFCS-ISAF)","volume":"38 1","pages":"1-3"},"PeriodicalIF":0.0,"publicationDate":"2020-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"80010598","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 6