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2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)最新文献

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50O-terminated ALN MEMS filters based on lamb wave resonators 基于lamb波谐振器的50端端ALN MEMS滤波器
2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) Pub Date : 2015-06-21 DOI: 10.1109/TRANSDUCERS.2015.7181340
J. Liang, H. Zhang, D. Zhang, H. Zhang, W. Pang
{"title":"50O-terminated ALN MEMS filters based on lamb wave resonators","authors":"J. Liang, H. Zhang, D. Zhang, H. Zhang, W. Pang","doi":"10.1109/TRANSDUCERS.2015.7181340","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2015.7181340","url":null,"abstract":"This paper reports on an implementation of an ultra-miniature 140 MHz narrowband filter based on aluminum nitride (AlN) Lamb wave resonators (LWRs). First, a design principle for ladder type LWR filters is presented. The fabricated device, cascaded with an inductor-capacitor network, is well matched to 50 ohm and shows a remarkably high performance. Further, the filter is monolithically integrated with a pair of on-chip capacitors and only the inductors are needed, thus involving much simpler circuits and size savings. The final filter shows a low pass-band insertion loss (IL) of 2.78 dB and steep filter skirts and occupies much smaller areas than its surface acoustic wave counterpart in the intermediate frequency band.","PeriodicalId":6465,"journal":{"name":"2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2015-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"78446761","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
A highly stretchable pH sensor array using elastomer-embedded laser carbonized patterns 使用弹性体嵌入激光碳化图案的高度可拉伸pH传感器阵列
2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) Pub Date : 2015-06-21 DOI: 10.1109/TRANSDUCERS.2015.7181321
R. Rahimi, M. Ochoa, W. Yu, B. Ziaie
{"title":"A highly stretchable pH sensor array using elastomer-embedded laser carbonized patterns","authors":"R. Rahimi, M. Ochoa, W. Yu, B. Ziaie","doi":"10.1109/TRANSDUCERS.2015.7181321","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2015.7181321","url":null,"abstract":"This paper reports on a facile and low cost method to fabricate highly stretchable potentiometric pH sensor arrays for biomedical and wearable applications. The technique uses laser carbonization of a thermoset polymer followed by transfer and embedment of carbonized nanomaterial onto an elastomeric matrix. The process combines selective laser pyrolization/carbonization with meander interconnect methodology to fabricate stretchable conductive composites with which pH sensors can be realized. The stretchable pH sensors display a sensitivity of -51 mV/pH over the clinically-relevant range of pH 4-10. The sensors remain stable for strains of up to 50 %.","PeriodicalId":6465,"journal":{"name":"2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2015-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"76126532","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 5
A MEMS tunable photonic ring resonator with small footprint and large free spectral range 一种占地面积小、自由光谱范围大的MEMS可调谐光子环谐振器
2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) Pub Date : 2015-06-21 DOI: 10.1109/TRANSDUCERS.2015.7181094
Carlos Errando-Herranz, F. Niklaus, G. Stemme, K. Gylfason
{"title":"A MEMS tunable photonic ring resonator with small footprint and large free spectral range","authors":"Carlos Errando-Herranz, F. Niklaus, G. Stemme, K. Gylfason","doi":"10.1109/TRANSDUCERS.2015.7181094","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2015.7181094","url":null,"abstract":"We demonstrate a MEMS tunable silicon photonic ring resonator with a 20 μm radius and a 5 nm free spectral range (FSR) for wavelength selection in reconfigurable optical networks. The device shows a loaded Q of 12000, and 300 pm tuning range at a wavelength of 1544 nm.","PeriodicalId":6465,"journal":{"name":"2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2015-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"78165868","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 10
Micromanipulation tool replaceable soft actuator with gripping force enhancing and output motion converting mechanisms 带有夹持力增强和输出运动转换机构的微操作工具可更换软执行器
2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) Pub Date : 2015-06-21 DOI: 10.1109/TRANSDUCERS.2015.7181316
G. Feng, S. Yen
{"title":"Micromanipulation tool replaceable soft actuator with gripping force enhancing and output motion converting mechanisms","authors":"G. Feng, S. Yen","doi":"10.1109/TRANSDUCERS.2015.7181316","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2015.7181316","url":null,"abstract":"This paper presents an innovative arched ionic polymer metal composite (IPMC) actuator for micromanipulating soft matters (e.g. cells). With a pair of through-hole structures at two front ends of the actuator, versatile designed micro-tools can be individually installed onto and replaced from the actuator. Two micro-tools of scissor-type gripper and elastic pin structure are developed to strengthen the clamping force of the gripper and convert a squeeze/pull motion to forward/backward motion, respectively. Through the location design of a hinge joint on the scissor-type gripping tool, the gripper tip can produce several times larger force on than at the end of the assembled actuator. A microneedle can be mounted onto the pin of arc-shaped PDMS tool to manipulate a single cell in a linear motion through electrically controlling IPMC actuation.","PeriodicalId":6465,"journal":{"name":"2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2015-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"79151971","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 11
Investigation of a broadband micromachined thermoelectric microwave power sensor with a cantilever beam 悬臂梁式宽带微机械热电微波功率传感器的研究
2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) Pub Date : 2015-06-21 DOI: 10.1109/TRANSDUCERS.2015.7181139
D. B. Wang, Y. M. Fang
{"title":"Investigation of a broadband micromachined thermoelectric microwave power sensor with a cantilever beam","authors":"D. B. Wang, Y. M. Fang","doi":"10.1109/TRANSDUCERS.2015.7181139","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2015.7181139","url":null,"abstract":"This paper reports a novel thermoelectric microwave power sensor with a MEMS cantilever beam in order to improve the measurement dynamic range and the band width. The measured results show that the MEMS cantilever beam can improve the dynamic range by increasing the top end of the range into no less than 200mW, and enhance the band width by increasing the top end of the range into no less than 36GHz.","PeriodicalId":6465,"journal":{"name":"2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2015-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"81361918","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Particle separation under the co-action of Brownian motion and optical force in near-field speckle patterns 近场散斑图中布朗运动和光力共同作用下的粒子分离
2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) Pub Date : 2015-06-21 DOI: 10.1109/TRANSDUCERS.2015.7181018
H. T. Zhao, G. Zhang, L. K. Chin, H. Cai, J. F. Song, Z. Yang, E. Yap, W. Ser, D. Kwong, A. Liu
{"title":"Particle separation under the co-action of Brownian motion and optical force in near-field speckle patterns","authors":"H. T. Zhao, G. Zhang, L. K. Chin, H. Cai, J. F. Song, Z. Yang, E. Yap, W. Ser, D. Kwong, A. Liu","doi":"10.1109/TRANSDUCERS.2015.7181018","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2015.7181018","url":null,"abstract":"Continuous separation of nano-sized molecules has great importance in biomedical applications. This paper represents a near-field optical approach to separate nanoparticles using speckle patterns. Near-field random light patterns (speckle pattern) are generated by the repeated coupling and interference of light in nano-waveguide arrays. The movements of 2-μm and 0.5-μm particles are studied under the co-action of Brownian motion and the exerted optical force. The experimental results show that the 2-μm particle has an average lateral displacement of 10 μm, which is considerably larger than that of the 0.5-μm particle. This method avoids the stringent optical systems and broadens the perspectives of optical manipulation in real-life applications.","PeriodicalId":6465,"journal":{"name":"2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2015-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"81878986","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
A portable, paper-based multiplexing immunosensor for detection of HIV and HCV markers in serum 一种用于检测血清中HIV和HCV标记物的便携式、纸质多路免疫传感器
2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) Pub Date : 2015-06-21 DOI: 10.1109/TRANSDUCERS.2015.7181100
Chen Zhao, Xinyu Liu
{"title":"A portable, paper-based multiplexing immunosensor for detection of HIV and HCV markers in serum","authors":"Chen Zhao, Xinyu Liu","doi":"10.1109/TRANSDUCERS.2015.7181100","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2015.7181100","url":null,"abstract":"This paper reports an integrated diagnostic platform, including a paper-based electrochemical immunosensor array and a customized handheld potentiostat, for detecting protein markers of human immunodeficiency virus (HIV) and hepatitis C virus (HCV) in serum. To our best knowledge, this is the first paper-based electrochemical immunosensing platform, with multiplexing and telemedicine capabilities, for diagnosing HIV/HCV co-infection. The platform can perform simultaneous enzyme-linked immunesorbent assays (ELISAs) on 8 serum samples, produce multiple measurement data for HIV and HCV markers from a single run, and transmit the results to remote sites for telemedicine. The unique integration of paper-based microfluidics and mobile instrumentation renders our tests portable, low-cost, user-friendly, and high-throughput.","PeriodicalId":6465,"journal":{"name":"2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2015-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"85205660","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
NEMS spectrometer-on-a-chip NEMS spectrometer-on-a-chip
2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) Pub Date : 2015-06-21 DOI: 10.1109/TRANSDUCERS.2015.7181370
B. Dong, H. Cai, M. Tang, Y. D. Gu, Z. Yang, Y. Jin, Y. Hao, D. Kwong, A. Liu
{"title":"NEMS spectrometer-on-a-chip","authors":"B. Dong, H. Cai, M. Tang, Y. D. Gu, Z. Yang, Y. Jin, Y. Hao, D. Kwong, A. Liu","doi":"10.1109/TRANSDUCERS.2015.7181370","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2015.7181370","url":null,"abstract":"This paper reports a NEMS spectrometer-on-a-chip, which integrates fiber-waveguide coupler and photo detector on a single silicon chip. Spectrometer based on Fourier transform, for the first time, has been miniaturized into a waveguide based silicon photonic chip. The on-chip spectrometer is fabricated by nano-silicon-photonic fabrication processes. It also eliminates moving parts and confine light in nano-waveguides, which can effectively reduce the spectrometer chip size (1 cm × 1 cm) and lower the power consumption (<; 10 mW), while maintaining high resolution (<; 40 cm-1). It has high potential applications in biomedical and physical spectroscopy field.","PeriodicalId":6465,"journal":{"name":"2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2015-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"85601827","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Employing piezojunction effect for ultra-low power resonant microdevice applications 利用压电结效应在超低功率谐振微器件中的应用
2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) Pub Date : 2015-06-21 DOI: 10.1109/TRANSDUCERS.2015.7181352
A. Rasouli, M. Syrzycki, B. Bahreyni
{"title":"Employing piezojunction effect for ultra-low power resonant microdevice applications","authors":"A. Rasouli, M. Syrzycki, B. Bahreyni","doi":"10.1109/TRANSDUCERS.2015.7181352","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2015.7181352","url":null,"abstract":"We are reporting on application of the piezojunction effect as a viable mechanism for detection of resonance frequency in silicon microdevices. In this technique, the sensing pn-junction is reverse-biased, therefore, due to low sensing current, the required power for detection of resonance is rather small. A bulk extensional resonator with an embedded pn-junction has been designed, fabricated, and characterized to serve as a proof-of-concept structure. The experiments have shown that a power consumption as low as 37nW was needed for detection of extensional-mode of the resonator at a resonant frequency of 9MHz.","PeriodicalId":6465,"journal":{"name":"2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2015-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"85758135","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 4
Detachable ultrasonic enabled inserter for neural probe insertion using biodissolvable Polyethylene Glycol 可拆卸的超声波插入器，用于神经探针插入，使用生物可溶解的聚乙二醇
2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) Pub Date : 2015-06-21 DOI: 10.1109/TRANSDUCERS.2015.7180877
Po-Cheng Chen, A. Lal
{"title":"Detachable ultrasonic enabled inserter for neural probe insertion using biodissolvable Polyethylene Glycol","authors":"Po-Cheng Chen, A. Lal","doi":"10.1109/TRANSDUCERS.2015.7180877","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2015.7180877","url":null,"abstract":"We report on a method to reversibly bond and debond silicon neural probes to a silicon ultrasonic horn to enable ultrasonic actuation during neural probe insertion. Neural probes can be attached using Poly-Ethylene Glycol (PEG), a bio-dissolvable polymer, and consequently debonded from the ultrasonic driver by aqueous dissolution. We demonstrate reduced force during probe insertion corresponding to ultrasonically micro-cutting of tissue. Reduced insertion forces can lead to less damage and reduced immune response for longer life neural interfaces. Three different configurations of neural probes were tested demonstrating insertion force reduction significantly by a factor of 4.3. The probes were driven by 30 Vpp at 101.7 kHz. Our approach can potentially help inserting neural probes made in any new technology ultrasonically and increase the lifetime of neural probe recording sites.","PeriodicalId":6465,"journal":{"name":"2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2015-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"85761930","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 11
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