悬臂梁式宽带微机械热电微波功率传感器的研究

2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) Pub Date : 2015-06-21 DOI:10.1109/TRANSDUCERS.2015.7181139

D. B. Wang, Y. M. Fang

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引用次数: 1

摘要

为了提高测量动态范围和带宽，本文报道了一种新型的MEMS悬臂梁热电微波功率传感器。测量结果表明，MEMS悬臂梁可以通过将动态范围的上限增加到不小于200mW来提高动态范围，并通过将范围的上限增加到不小于36GHz来提高带宽。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Investigation of a broadband micromachined thermoelectric microwave power sensor with a cantilever beam

This paper reports a novel thermoelectric microwave power sensor with a MEMS cantilever beam in order to improve the measurement dynamic range and the band width. The measured results show that the MEMS cantilever beam can improve the dynamic range by increasing the top end of the range into no less than 200mW, and enhance the band width by increasing the top end of the range into no less than 36GHz.

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2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)

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