Nature Chemical Engineering最新文献_第2页

Membrane synthesis charges ahead 膜合成领先一步

Nature Chemical Engineering Pub Date : 2025-09-18 DOI: 10.1038/s44286-025-00280-0

Suzana Nunes

引用次数: 0

Membrane synthesis charges ahead 膜合成领先一步

Nature Chemical Engineering Pub Date : 2025-09-18 DOI: 10.1038/s44286-025-00280-0

Suzana Nunes

引用次数: 0

Hot off the press 刚印出来的

Nature Chemical Engineering Pub Date : 2025-09-11 DOI: 10.1038/s44286-025-00265-z

Sui Zhang

引用次数: 0

Spin-on deposition of amorphous zeolitic imidazolate framework films for lithography applications 光刻用非晶咪唑酸沸石骨架膜的自旋沉积

Nature Chemical Engineering Pub Date : 2025-09-11 DOI: 10.1038/s44286-025-00273-z

Yurun Miao, Shunyi Zheng, Kayley E. Waltz, Mueed Ahmad, Xinpei Zhou, Yegui Zhou, Heting Wang, J. Anibal Boscoboinik, Qi Liu, Kumar Varoon Agrawal, Oleg Kostko, Liwei Zhuang, Michael Tsapatsis

{"title":"Spin-on deposition of amorphous zeolitic imidazolate framework films for lithography applications","authors":"Yurun Miao, Shunyi Zheng, Kayley E. Waltz, Mueed Ahmad, Xinpei Zhou, Yegui Zhou, Heting Wang, J. Anibal Boscoboinik, Qi Liu, Kumar Varoon Agrawal, Oleg Kostko, Liwei Zhuang, Michael Tsapatsis","doi":"10.1038/s44286-025-00273-z","DOIUrl":"10.1038/s44286-025-00273-z","url":null,"abstract":"Amorphous zeolitic imidazolate framework (aZIF) films have been recently introduced as resists for electron beam and extreme ultraviolet lithography. aZIFs are also being considered for separation applications, including thin film membranes. However, the reported methods for aZIF deposition are currently based on highly empirical trial-and-error approaches that hinder control of film composition, thickness and uniformity as well as scale-up and transferability to different coating geometries. This work presents a method for depositing aZIF films with controllable thickness using dilute precursors mixed immediately before encountering the substrate. Importantly, the method is amenable to quantitative analysis by computational fluid dynamics to extract intrinsic deposition rates and limiting reactant transport diffusivities, enabling predictive physics-based modeling of the deposition process. This allows the deposition method to be adapted for spin coating on silicon wafers to prepare high-quality aZIF films with consistently controlled thickness. Using this approach, high-resolution resist performance and wafer-scale use for beyond extreme-ultraviolet lithography of aZIF films is demonstrated. The lack of reliable coating methods for amorphous zeolitic imidazolate framework (aZIF) materials hinders their development for applications such as photolithography and separation membranes. Supported by computational fluid dynamics modeling, the authors develop a spin-coating technique to deposit aZIF films from dilute precursors and demonstrate their wafer-scale use in advanced lithographic processes.","PeriodicalId":501699,"journal":{"name":"Nature Chemical Engineering","volume":"2 9","pages":"594-607"},"PeriodicalIF":0.0,"publicationDate":"2025-09-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145123504","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Hot off the press 刚印出来的

Nature Chemical Engineering Pub Date : 2025-09-11 DOI: 10.1038/s44286-025-00265-z

Sui Zhang

引用次数: 0

Spin-on deposition of amorphous zeolitic imidazolate framework films for lithography applications 光刻用非晶咪唑酸沸石骨架膜的自旋沉积

Nature Chemical Engineering Pub Date : 2025-09-11 DOI: 10.1038/s44286-025-00273-z

Yurun Miao, Shunyi Zheng, Kayley E. Waltz, Mueed Ahmad, Xinpei Zhou, Yegui Zhou, Heting Wang, J. Anibal Boscoboinik, Qi Liu, Kumar Varoon Agrawal, Oleg Kostko, Liwei Zhuang, Michael Tsapatsis

{"title":"Spin-on deposition of amorphous zeolitic imidazolate framework films for lithography applications","authors":"Yurun Miao, Shunyi Zheng, Kayley E. Waltz, Mueed Ahmad, Xinpei Zhou, Yegui Zhou, Heting Wang, J. Anibal Boscoboinik, Qi Liu, Kumar Varoon Agrawal, Oleg Kostko, Liwei Zhuang, Michael Tsapatsis","doi":"10.1038/s44286-025-00273-z","DOIUrl":"10.1038/s44286-025-00273-z","url":null,"abstract":"Amorphous zeolitic imidazolate framework (aZIF) films have been recently introduced as resists for electron beam and extreme ultraviolet lithography. aZIFs are also being considered for separation applications, including thin film membranes. However, the reported methods for aZIF deposition are currently based on highly empirical trial-and-error approaches that hinder control of film composition, thickness and uniformity as well as scale-up and transferability to different coating geometries. This work presents a method for depositing aZIF films with controllable thickness using dilute precursors mixed immediately before encountering the substrate. Importantly, the method is amenable to quantitative analysis by computational fluid dynamics to extract intrinsic deposition rates and limiting reactant transport diffusivities, enabling predictive physics-based modeling of the deposition process. This allows the deposition method to be adapted for spin coating on silicon wafers to prepare high-quality aZIF films with consistently controlled thickness. Using this approach, high-resolution resist performance and wafer-scale use for beyond extreme-ultraviolet lithography of aZIF films is demonstrated. The lack of reliable coating methods for amorphous zeolitic imidazolate framework (aZIF) materials hinders their development for applications such as photolithography and separation membranes. Supported by computational fluid dynamics modeling, the authors develop a spin-coating technique to deposit aZIF films from dilute precursors and demonstrate their wafer-scale use in advanced lithographic processes.","PeriodicalId":501699,"journal":{"name":"Nature Chemical Engineering","volume":"2 9","pages":"594-607"},"PeriodicalIF":0.0,"publicationDate":"2025-09-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145123527","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Rapid solid-phase synthesis of highly crystalline covalent organic framework platelets 高结晶共价有机骨架片的快速固相合成

Nature Chemical Engineering Pub Date : 2025-09-11 DOI: 10.1038/s44286-025-00277-9

Yehao Jin, Haozhi Wang, Hongfei Cheng, Mengchu Feng, Meng Zhang, Qingling Fu, Zhibing Sun, Xiantao Zeng, Yuze Sun, Wenjun Tuo, Bingbing Cheng, Shan Wang, Qianyou Wang, Qinglang Ma, Bo Wang

{"title":"Rapid solid-phase synthesis of highly crystalline covalent organic framework platelets","authors":"Yehao Jin, Haozhi Wang, Hongfei Cheng, Mengchu Feng, Meng Zhang, Qingling Fu, Zhibing Sun, Xiantao Zeng, Yuze Sun, Wenjun Tuo, Bingbing Cheng, Shan Wang, Qianyou Wang, Qinglang Ma, Bo Wang","doi":"10.1038/s44286-025-00277-9","DOIUrl":"10.1038/s44286-025-00277-9","url":null,"abstract":"Covalent organic frameworks (COFs) have demonstrated superior performance in wide-ranging applications, yet their practical deployment has been long hindered by their inconvenient synthesis protocols. Toxic solvents, tedious procedures and long reaction times are typically involved in their synthesis, and microcrystalline powders are commonly obtained, which are unfavorable in practical use. Unfortunately, newly developed methods aiming to resolve these challenges often lead to deteriorated COF crystallinity and porosity. Here we develop a solid-phase hot-pressing method to fabricate 15 types of highly crystalline COF platelet of various linkage types, including imine-, hydrazone-, β-ketoenamine- and imide-linked COFs. Moreover, COF platelets with complex chemical structures, including a COF with three-dimensional geometry and a COF with multiple monomer components, have been successfully obtained. In particular, all COF platelets can be obtained within a short processing time of 0.5–5 min, with high crystallinity and porosity. Finally, as a proof-of-concept application, a β-ketoenamine-linked COF platelet is directly assembled into an atmospheric water harvesting device, demonstrating excellent water collecting performance. A solid-phase hot-pressing method is introduced, which can rapidly produce highly crystalline covalent organic framework platelets in a convenient, solvent-free manner. Fifteen platelets of various linkage types are produced, with a proof-of-concept demonstration of the resulting high-performing platelet type in an atmospheric water harvesting device.","PeriodicalId":501699,"journal":{"name":"Nature Chemical Engineering","volume":"2 9","pages":"581-593"},"PeriodicalIF":0.0,"publicationDate":"2025-09-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145123299","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Rapid solid-phase synthesis of highly crystalline covalent organic framework platelets 高结晶共价有机骨架片的快速固相合成

Nature Chemical Engineering Pub Date : 2025-09-11 DOI: 10.1038/s44286-025-00277-9

Yehao Jin, Haozhi Wang, Hongfei Cheng, Mengchu Feng, Meng Zhang, Qingling Fu, Zhibing Sun, Xiantao Zeng, Yuze Sun, Wenjun Tuo, Bingbing Cheng, Shan Wang, Qianyou Wang, Qinglang Ma, Bo Wang

{"title":"Rapid solid-phase synthesis of highly crystalline covalent organic framework platelets","authors":"Yehao Jin, Haozhi Wang, Hongfei Cheng, Mengchu Feng, Meng Zhang, Qingling Fu, Zhibing Sun, Xiantao Zeng, Yuze Sun, Wenjun Tuo, Bingbing Cheng, Shan Wang, Qianyou Wang, Qinglang Ma, Bo Wang","doi":"10.1038/s44286-025-00277-9","DOIUrl":"10.1038/s44286-025-00277-9","url":null,"abstract":"Covalent organic frameworks (COFs) have demonstrated superior performance in wide-ranging applications, yet their practical deployment has been long hindered by their inconvenient synthesis protocols. Toxic solvents, tedious procedures and long reaction times are typically involved in their synthesis, and microcrystalline powders are commonly obtained, which are unfavorable in practical use. Unfortunately, newly developed methods aiming to resolve these challenges often lead to deteriorated COF crystallinity and porosity. Here we develop a solid-phase hot-pressing method to fabricate 15 types of highly crystalline COF platelet of various linkage types, including imine-, hydrazone-, β-ketoenamine- and imide-linked COFs. Moreover, COF platelets with complex chemical structures, including a COF with three-dimensional geometry and a COF with multiple monomer components, have been successfully obtained. In particular, all COF platelets can be obtained within a short processing time of 0.5–5 min, with high crystallinity and porosity. Finally, as a proof-of-concept application, a β-ketoenamine-linked COF platelet is directly assembled into an atmospheric water harvesting device, demonstrating excellent water collecting performance. A solid-phase hot-pressing method is introduced, which can rapidly produce highly crystalline covalent organic framework platelets in a convenient, solvent-free manner. Fifteen platelets of various linkage types are produced, with a proof-of-concept demonstration of the resulting high-performing platelet type in an atmospheric water harvesting device.","PeriodicalId":501699,"journal":{"name":"Nature Chemical Engineering","volume":"2 9","pages":"581-593"},"PeriodicalIF":0.0,"publicationDate":"2025-09-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145123531","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Reflecting on barriers to continuous pharmaceutical crystallization 反思药物连续结晶的障碍

Nature Chemical Engineering Pub Date : 2025-09-10 DOI: 10.1038/s44286-025-00268-w

Giovanni Aprile, Cedric Devos, Thomas Vetter, Gerard Capellades, Kevin P. Girard, Christopher L. Burcham, Venkateswarlu Bhamidi, Daniel Green, Torsten Stelzer, Richard D. Braatz, Allan S. Myerson

引用次数: 0

Reflecting on barriers to continuous pharmaceutical crystallization 反思药物连续结晶的障碍

Nature Chemical Engineering Pub Date : 2025-09-10 DOI: 10.1038/s44286-025-00268-w

Giovanni Aprile, Cedric Devos, Thomas Vetter, Gerard Capellades, Kevin P. Girard, Christopher L. Burcham, Venkateswarlu Bhamidi, Daniel Green, Torsten Stelzer, Richard D. Braatz, Allan S. Myerson

引用次数: 0