Optics and Lasers in Engineering最新文献

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Parallel phase-shifting digital ghost holography 平行相移数字幽灵全息术
IF 3.7 2区 工程技术
Optics and Lasers in Engineering Pub Date : 2025-09-01 DOI: 10.1016/j.optlaseng.2025.109290
Shuhei Yoshida
{"title":"Parallel phase-shifting digital ghost holography","authors":"Shuhei Yoshida","doi":"10.1016/j.optlaseng.2025.109290","DOIUrl":"10.1016/j.optlaseng.2025.109290","url":null,"abstract":"<div><div>The ghost imaging (GI) technique, which has attracted attention as a highly sensitive and noise-resistant technique, employs a spatially modulated illuminating light and a single-pixel detector. Generally, the information acquired by GI is the transmittance or reflectance distribution of an object. A method has also been proposed to measure the complex amplitude by applying digital holography (DH) techniques. These methods irradiate phase-modulated illuminating lights onto an object, and the intensities of the interference lights between the lights interacting with the object and the reference light are measured. Then, the complex amplitude of the object light is reconstructed based on the correlation between the light intensities and the phase patterns. In DH-based GI, it is necessary to remove unwanted components from the interferograms by phase shifting, which requires more measurements than the conventional GI method. Thus, we propose a technique to reconstruct the complex amplitude in DH-based GI without increasing the number of measurements using parallel phase-shifting optics. In the proposed method, interferograms phase-shifted in steps of <span><math><mi>π</mi><mo>/</mo><mn>2</mn></math></span> with waveplates are divided into four using polarization beam splitters (PBS), and their intensities are measured simultaneously. The object light component can be extracted from the intensities of these four interferograms. We demonstrate the effectiveness of the proposed method through experiments.</div></div>","PeriodicalId":49719,"journal":{"name":"Optics and Lasers in Engineering","volume":"195 ","pages":"Article 109290"},"PeriodicalIF":3.7,"publicationDate":"2025-09-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144922465","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Dual-band terahertz metasurface biosensor based on electromagnetically induced transparency effects for antibiotic detection 基于电磁诱导透明效应的双频太赫兹超表面生物传感器用于抗生素检测
IF 3.7 2区 工程技术
Optics and Lasers in Engineering Pub Date : 2025-08-31 DOI: 10.1016/j.optlaseng.2025.109305
Binggang Xiao , Yichun Wang , Xiuran Zuo , Luqi Liu , Jianyuan Qin , Wanshun Jiang , Yumei Zhang , Lihua Xiao
{"title":"Dual-band terahertz metasurface biosensor based on electromagnetically induced transparency effects for antibiotic detection","authors":"Binggang Xiao ,&nbsp;Yichun Wang ,&nbsp;Xiuran Zuo ,&nbsp;Luqi Liu ,&nbsp;Jianyuan Qin ,&nbsp;Wanshun Jiang ,&nbsp;Yumei Zhang ,&nbsp;Lihua Xiao","doi":"10.1016/j.optlaseng.2025.109305","DOIUrl":"10.1016/j.optlaseng.2025.109305","url":null,"abstract":"<div><div>This study presents a dual-band terahertz metasurface biosensor based on the electromagnetically induced transparency (EIT) effect. The sensor employs copper resonant rings and a quartz dielectric substrate, enabling switching between single and dual-EIT (D-EIT) modes by altering the polarization direction of incident terahertz waves. The physical mechanism of the dual-EIT effect was elucidated through electric field analysis, revealing bright-dark mode coupling (0.53 THz) and bright-bright mode coupling (0.76 THz). Simulations demonstrated a refractive index sensitivity of up to 220 GHz/RIU. Experimentally, the metasurfacel fabricated via laser engraving exhibited dual-frequency sensing capabilities for lactose and chlortetracycline hydrochloride, with a minimum detectable concentration of 0.1 mg/L in both aqueous and milk solutions. Despite limitations in low-concentration detection within complex media due to increased optical loss, this sensor shows significant potential for applications in food safety and antibiotic residue monitoring.</div></div>","PeriodicalId":49719,"journal":{"name":"Optics and Lasers in Engineering","volume":"195 ","pages":"Article 109305"},"PeriodicalIF":3.7,"publicationDate":"2025-08-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144920410","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Terahertz tuning devices based on a wedge-shaped defect of aluminum plates 基于铝板楔形缺陷的太赫兹调谐装置
IF 3.7 2区 工程技术
Optics and Lasers in Engineering Pub Date : 2025-08-31 DOI: 10.1016/j.optlaseng.2025.109311
Qiao-Chu Zhang , Huan Liu , Jing Ma , Cheng-Guo Tong , Ya-Xian Fan , Zhi-Yong Tao
{"title":"Terahertz tuning devices based on a wedge-shaped defect of aluminum plates","authors":"Qiao-Chu Zhang ,&nbsp;Huan Liu ,&nbsp;Jing Ma ,&nbsp;Cheng-Guo Tong ,&nbsp;Ya-Xian Fan ,&nbsp;Zhi-Yong Tao","doi":"10.1016/j.optlaseng.2025.109311","DOIUrl":"10.1016/j.optlaseng.2025.109311","url":null,"abstract":"<div><div>Although terahertz (THz) spectrum has been opened for the next generation (6 G) communication to meet the currently explosive growth of communication bandwidth, efficiently manipulating THz radiation to fulfil the conceptual network communication technology is still difficult due to the lack of functional devices. As a kind of communication technology, frequency division multiplexing and tuning are essential in the THz frequency range. We adopt laser ablation method to fabricate a kind of parallel aluminum plate waveguides with wedge-shaped defects and realize narrow band frequency selecting and tuning to mimic a traditional radio. When we turn the knob, the working frequency of the waveguide device shifts accordingly, whose mechanism is attributed to the local resonances at defects. The proposed simple fabrication method paves the way for creating various THz functional devices.</div></div>","PeriodicalId":49719,"journal":{"name":"Optics and Lasers in Engineering","volume":"195 ","pages":"Article 109311"},"PeriodicalIF":3.7,"publicationDate":"2025-08-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144919666","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Refractive-metasurface hybrid design enhances polarization-maintaining performance in optical systems 折射-超表面混合设计提高了光学系统的保偏性能
IF 3.7 2区 工程技术
Optics and Lasers in Engineering Pub Date : 2025-08-29 DOI: 10.1016/j.optlaseng.2025.109291
Feifan Shi , Dong Yao
{"title":"Refractive-metasurface hybrid design enhances polarization-maintaining performance in optical systems","authors":"Feifan Shi ,&nbsp;Dong Yao","doi":"10.1016/j.optlaseng.2025.109291","DOIUrl":"10.1016/j.optlaseng.2025.109291","url":null,"abstract":"<div><div>Polarization aberrations reduce the polarization-maintaining performance of optical systems. This degradation adversely affects detection accuracy in laser communication, which necessitates suppression. In this paper, a novel approach is proposed to address this issue by integrating metasurfaces into the optical system design. Simulation results indicate that after implementing the hybrid design, the average diattenuation of the optical system is reduced by <strong>91.8%</strong>, and the average retardance is reduced by <strong>95.0%</strong>. This design method is shown to significantly enhance the polarization-maintaining performance of optical systems. As an innovative application of metasurfaces, this design markedly improves the coherent mixing efficiency in laser communication.</div></div>","PeriodicalId":49719,"journal":{"name":"Optics and Lasers in Engineering","volume":"195 ","pages":"Article 109291"},"PeriodicalIF":3.7,"publicationDate":"2025-08-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144912656","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Two-stage random forest fusion for multi-source point clouds in underground 3D reconstruction 地下三维重建中多源点云两阶段随机森林融合
IF 3.7 2区 工程技术
Optics and Lasers in Engineering Pub Date : 2025-08-29 DOI: 10.1016/j.optlaseng.2025.109301
Haonan Pang, Hongtao Yang, Lili Mu, Tianfeng Wu, Changjiu Huang, Ruilin Fan
{"title":"Two-stage random forest fusion for multi-source point clouds in underground 3D reconstruction","authors":"Haonan Pang,&nbsp;Hongtao Yang,&nbsp;Lili Mu,&nbsp;Tianfeng Wu,&nbsp;Changjiu Huang,&nbsp;Ruilin Fan","doi":"10.1016/j.optlaseng.2025.109301","DOIUrl":"10.1016/j.optlaseng.2025.109301","url":null,"abstract":"<div><div>Camera sensors are highly sensitive to factors such as lighting, dust, fog, and lack of texture in underground environments, introducing measurement noise and significantly affecting 3D reconstruction accuracy. Existing point cloud regression and denoising models often struggle with the high-dimensional and unstructured nature of point clouds, increasing data processing complexity and limiting prediction accuracy. Furthermore, while fusing multi-line LiDAR and camera data can improve reconstruction accuracy, it introduces challenges related to data redundancy and computational burden. This paper proposes a fusion method using single-line LiDAR and depth cameras based on two-stage random forest regression. In the first stage, a dense 3D point cloud is constructed from LiDAR data, which serves as the reference for initial denoising of the depth camera point cloud using random forest regression. The second stage refines the denoising by incorporating spatial coordinates and FPFH descriptors through a second application of random forest regression. Experimental results demonstrate that the proposed method achieved at least a 77.42% improvement in noise suppression across five representative tunnel scenarios. In terms of dimensional accuracy, the maximum absolute error was reduced by 72.97% to 95.86%, while the average absolute error decreased by 71.91% to 96.92%, with final absolute errors remaining below 10 mm. These results confirm the method's strong generalization capability and high-precision performance in challenging underground reconstruction tasks. The associated dataset and source code are publicly available at: <span><span>https://github.com/phn0315/LiDAR-Vision-fusion.git</span><svg><path></path></svg></span>.</div></div>","PeriodicalId":49719,"journal":{"name":"Optics and Lasers in Engineering","volume":"195 ","pages":"Article 109301"},"PeriodicalIF":3.7,"publicationDate":"2025-08-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144912782","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
A comprehensive scatter correction model for dual-source computed tomography: Combining ambient scatter, cross-scatter, and forward scatter compensation 双源计算机断层扫描的综合散射校正模型:结合环境散射、交叉散射和正向散射补偿
IF 3.7 2区 工程技术
Optics and Lasers in Engineering Pub Date : 2025-08-29 DOI: 10.1016/j.optlaseng.2025.109302
Jianing Sun , Jigang Duan , Guangyin Li , Xu Jiang , Xing Zhao
{"title":"A comprehensive scatter correction model for dual-source computed tomography: Combining ambient scatter, cross-scatter, and forward scatter compensation","authors":"Jianing Sun ,&nbsp;Jigang Duan ,&nbsp;Guangyin Li ,&nbsp;Xu Jiang ,&nbsp;Xing Zhao","doi":"10.1016/j.optlaseng.2025.109302","DOIUrl":"10.1016/j.optlaseng.2025.109302","url":null,"abstract":"<div><div>Compared to single-source computed tomography (CT), dual-source CT equipped with two cross-distributed X-ray beams enhances temporal resolution and acquires more comprehensive volumetric data. Nevertheless, the interaction between the two X-ray beams introduces more complex scatter signals into the acquired projection data. Existing methods typically model these scatter signals as the sum of cross-scatter and forward scatter, with cross-scatter estimation limited to single scatter along primary paths. We performed measurements on both phantoms and real objects using a custom-built dual-source CT at 120 kV. Results from a Yin-Yang phantom (9.6 cm in diameter) revealed that the peak ratio of hardware-induced ambient scatter to single-source projection intensity exceeds 60%, a factor often overlooked in existing methods. To achieve high-precision imaging in dual-source CT, it is essential to account for the ambient scatter component in acquired projection intensity. Therefore, we develop a more comprehensive model that decomposes the total scatter signals into three distinct components: ambient scatter, cross-scatter, and forward scatter. During the model solution process, we propose a cross-scatter kernel superposition (xSKS) module to enhance the accuracy of cross-scatter estimation by additionally modeling cross-scatter events along non-primary paths. Meanwhile, we introduce a fast object-adaptive scatter kernel superposition (FOSKS) module for efficient forward scatter estimation. In Monte Carlo (MC) simulations conducted on a modified numerical Catphan® 500 phantom, our model achieves a scatter-to-primary-weighted mean absolute percentage error (SPMAPE) of 1.32%, which is significantly lower than the 12.99% achieved by the state-of-the-art method. Physical experiments further validate its superior scatter artifact correction capability.</div></div>","PeriodicalId":49719,"journal":{"name":"Optics and Lasers in Engineering","volume":"195 ","pages":"Article 109302"},"PeriodicalIF":3.7,"publicationDate":"2025-08-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144912655","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
High-security computational optical encryption enabled by single-pixel imaging and reconfigurable meta-holograms 通过单像素成像和可重构元全息图实现高安全性计算光学加密
IF 3.7 2区 工程技术
Optics and Lasers in Engineering Pub Date : 2025-08-29 DOI: 10.1016/j.optlaseng.2025.109304
Wenya Chen, Huan Yuan, Zheqiang Zhong, Bin Zhang
{"title":"High-security computational optical encryption enabled by single-pixel imaging and reconfigurable meta-holograms","authors":"Wenya Chen,&nbsp;Huan Yuan,&nbsp;Zheqiang Zhong,&nbsp;Bin Zhang","doi":"10.1016/j.optlaseng.2025.109304","DOIUrl":"10.1016/j.optlaseng.2025.109304","url":null,"abstract":"<div><div>The increasing demand for data security in the digital age has exposed the limitations of traditional data-at-rest encryption, including vulnerabilities in key management and insufficient ability to withstand attacks. Here, we propose a hybrid optical cryptography framework that integrates dynamic optical hardware with algorithmic co-design to provide multi-level protection. In the encryption process, the target information is encrypted using the single pixel imaging (SPI) principle, and the ciphertext is generated by mixing the false information with the bucket signal obtained by SPI. The decryption key is generated by the reconfigurable metasurface. This metasurface is based on the phase change material (PCM) Sb₂Se₃, which can be laser-induced to enable key switching for each encryption process, thus realizing \"one-time pad\" (OTP). In the decryption process, the key obtained from loading at the metasurface can decrypt the information from the ciphertext. The target image is finally decrypted through different channels using Visual Secret Sharing (VSS) scheme. Decryption requires superposition of all shares, thereby enhancing resistance against brute-force and eavesdropping attacks. Furthermore, we analyze the reconfigurability of the metasurface as well as the fabrication tolerance. The results show the strong robustness and high security of our encryption scheme. This approach not only addresses the limitations of fixed-function metasurfaces but also establishes a scalable paradigm for high-security optical encryption in real applications.</div></div>","PeriodicalId":49719,"journal":{"name":"Optics and Lasers in Engineering","volume":"195 ","pages":"Article 109304"},"PeriodicalIF":3.7,"publicationDate":"2025-08-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144912752","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Spin-decoupled perovskite metasurfaces for multi-channel beam shaping and holographic imaging 用于多通道光束成形和全息成像的自旋去耦钙钛矿超表面
IF 3.7 2区 工程技术
Optics and Lasers in Engineering Pub Date : 2025-08-29 DOI: 10.1016/j.optlaseng.2025.109312
Zifeng Zhang , Zhibo Fang , Wenhui Dong , Rongquan Chen , Jinbo He , Jinbiao Liu , Ming Chen
{"title":"Spin-decoupled perovskite metasurfaces for multi-channel beam shaping and holographic imaging","authors":"Zifeng Zhang ,&nbsp;Zhibo Fang ,&nbsp;Wenhui Dong ,&nbsp;Rongquan Chen ,&nbsp;Jinbo He ,&nbsp;Jinbiao Liu ,&nbsp;Ming Chen","doi":"10.1016/j.optlaseng.2025.109312","DOIUrl":"10.1016/j.optlaseng.2025.109312","url":null,"abstract":"<div><div>This paper presents spin-decoupled perovskite metasurfaces for multi-channel beam shaping and holographic imaging, capable of simultaneously executing both functions within a single device. The work addresses the challenges associated with complex structures, limited functionality, and inadequate independent phase control for different polarized lights in existing coded metasurfaces. By leveraging the reversible switching between insulating and metallic states of perovskite materials, we achieve independent dynamic control over four polarization states: x-linear polarization (x-LP), y-linear polarization (y-LP), left circular polarization (LCP), and right circular polarization (RCP). In the insulating state of the perovskite, x-LP and y-LP are focused at distinct focal lengths; conversely, when switched to the metallic state, LCP and RCP transform into vortex beams characterized by different topological charges. The introduction of the spin decoupling principle that combines the propagation phase and the Pancharatnam-Berry (PB) phase makes wavefront processing possible and generates polarization-selective holograms in specific reflection channels. Regarding holographic display applications, the engineered metasurface can dynamically present various holograms based on differing polarization states and material conditions. This innovation offers novel perspectives for advancements in holographic display technology and encryption methods.</div></div>","PeriodicalId":49719,"journal":{"name":"Optics and Lasers in Engineering","volume":"195 ","pages":"Article 109312"},"PeriodicalIF":3.7,"publicationDate":"2025-08-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144912751","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Accurate and efficient phase unwrapping using Poisson-coupled Fourier method 用泊松耦合傅立叶方法精确高效地展开相位
IF 3.7 2区 工程技术
Optics and Lasers in Engineering Pub Date : 2025-08-28 DOI: 10.1016/j.optlaseng.2025.109295
Yan Sun , Zhi Zhong , Yanjun Xu , Diyao Song , Lei Yu , Lei Liu , Bin Liu , Mingguang Shan
{"title":"Accurate and efficient phase unwrapping using Poisson-coupled Fourier method","authors":"Yan Sun ,&nbsp;Zhi Zhong ,&nbsp;Yanjun Xu ,&nbsp;Diyao Song ,&nbsp;Lei Yu ,&nbsp;Lei Liu ,&nbsp;Bin Liu ,&nbsp;Mingguang Shan","doi":"10.1016/j.optlaseng.2025.109295","DOIUrl":"10.1016/j.optlaseng.2025.109295","url":null,"abstract":"<div><div>Phase unwrapping in fringe projection profilometry remains challenged by low computational efficiency and limited accuracy, particularly in the presence of phase discontinuities. To address these issues, an accurate and efficient phase unwrapping using Poisson-coupled Fourier method is proposed. By applying a modified Laplacian operator to the wrapped phase, a path-independent Poisson equation can be formulated to reconstruct the phase distribution, inherently avoiding error propagation across discontinuities. The Poisson equation is solved in the frequency domain using fast Fourier transform, with boundary extension and windowing applied to satisfy the periodic boundary condition, thereby enhancing reconstruction accuracy and computational performance. Both simulation and experimental results verify that the proposed method significantly improves unwrapping accuracy and computational efficiency, especially under conditions involving noise and phase discontinuities.</div></div>","PeriodicalId":49719,"journal":{"name":"Optics and Lasers in Engineering","volume":"195 ","pages":"Article 109295"},"PeriodicalIF":3.7,"publicationDate":"2025-08-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144912750","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Transverse differential confocal freeform surface measurement method with normal vector tracking and large linear sensing range 横向微分共焦自由曲面法向量跟踪和大线性传感范围测量方法
IF 3.7 2区 工程技术
Optics and Lasers in Engineering Pub Date : 2025-08-28 DOI: 10.1016/j.optlaseng.2025.109299
Xin Zheng , Yuhan Liu , Yuan Fu , Ronghui Ying , Ruizhe Zhao , Lirong Qiu
{"title":"Transverse differential confocal freeform surface measurement method with normal vector tracking and large linear sensing range","authors":"Xin Zheng ,&nbsp;Yuhan Liu ,&nbsp;Yuan Fu ,&nbsp;Ronghui Ying ,&nbsp;Ruizhe Zhao ,&nbsp;Lirong Qiu","doi":"10.1016/j.optlaseng.2025.109299","DOIUrl":"10.1016/j.optlaseng.2025.109299","url":null,"abstract":"<div><div>Freeform surfaces are widely applied in various fields, including aerospace, biomedical engineering, and optical communications. Their high degrees of design freedom facilitate the high-performance integration of complex functionalities within limited spaces. However, freeform surfaces lack rotational symmetry and exhibit significant variations in surface height and inclination angles, making it challenging for existing measurement methods to achieve high-precision measurements of surfaces with large gradient variations. In this study, we proposed a transverse differential confocal method with the capability of tracking normal vectors and a large linear sensing range for the high-precision measurement of freeform surface profiles. To adapt to the height variations of the freeform surface, a multi-element detector was adopted to transversely segment the spot and detect the intensity of the focal spots on the focal plane. Normal vector tracking based on a 2D position-sensitive detector was used to acquire angular information accurately. This method successfully balanced the range and precision of the measurements. The theoretical analyses and experimental results indicate that the sensors that were designed based on this method could represent an axial resolution of 0.5 nm, a normal resolution of 0.1°, and a maximum measurable local angle of 20°. In particular, the proposed method enables the high-precision measurement of freeform surface profiles without requiring strict initial pose adjustments. The measured peak to valley (PV) value obtained using this method differed from the result obtained using a ZYGO interferometer by only 9.5 nm. The method ensures measurement accuracy while providing higher versatility than interferometry, providing a novel and effective approach for high-precision measurement of freeform surface profiles. Owing to its excellent measurement performance and adaptability, it exhibits potential for the ultra-precision measurement of micro- or nano-structures.</div></div>","PeriodicalId":49719,"journal":{"name":"Optics and Lasers in Engineering","volume":"195 ","pages":"Article 109299"},"PeriodicalIF":3.7,"publicationDate":"2025-08-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144908529","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
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