IEEE Sensors Journal最新文献_第3页

Ultrasensitive and Superfast Response Time NiCr Thin-Film Strain Rosettes Fabricated on Inconel 718 Substrates 在Inconel 718衬底上制备超灵敏和超快速响应时间的NiCr薄膜应变莲座

IF 4.3 2区综合性期刊

IEEE Sensors Journal Pub Date : 2025-03-28 DOI: 10.1109/JSEN.2025.3553880

Junwei Yin;Qi Cui;Hao Chen;Xin Li;Xingshu Wang;Yunxian Cui;Fengyuan Ma;Jinghao Yang

{"title":"Ultrasensitive and Superfast Response Time NiCr Thin-Film Strain Rosettes Fabricated on Inconel 718 Substrates","authors":"Junwei Yin;Qi Cui;Hao Chen;Xin Li;Xingshu Wang;Yunxian Cui;Fengyuan Ma;Jinghao Yang","doi":"10.1109/JSEN.2025.3553880","DOIUrl":"https://doi.org/10.1109/JSEN.2025.3553880","url":null,"abstract":"The turbine blades in aeroengines are subjected to high-temperature stress fields, making them vulnerable to fatigue cracks, which can undermine engine performance. Rapid and precise strain monitoring is crucial for evaluating material properties’ deterioration and determining the lifespan of components. Existing strain measurement methods, predominantly noncontact-based, face certain limitations in practical applications. This article proposes a dynamic strain measurement system designed for NiCr thin-film strain rosettes utilizing a two-axis overlapping (0°/90°) technique. The strain sensor employs 0°/90° NiCr thin film fabricated using direct current (dc) pulsed magnetron sputtering and a thermal annealing strategy. Inconel 718 equal-strength beams were utilized as test specimens and finite element analysis optimized the sensitive grid design. A comparative investigation was conducted into the high-temperature insulating properties of single-layer Al2O3, single-layer SiO2, bilayer SiO2/Al2O3, and four-layer SiO2/Al2O3/SiO2/Al2O3 composite films. The four-layer composite insulating films, patterned 0°/90° NiCr thin-film sensitive grids, and Al2O3 protective films were sequentially deposited on Inconel 718 equal-strength beams. Post-annealing, the temperature coefficient of resistance (TCR) decreased by 21.28% from 353.038 to 277.906 ppm/°C, the gauge factor (GF) improved by 1.29% from 1.945 to 1.97, and the hysteresis error was reduced to 0.817%FS. The strain peak accurately tracked load variations with millisecond-level response and recovery times, demonstrating excellent dynamic response. The proposed thin-film strain sensors provide an effective solution for high-precision and rapid strain measurements for critical components such as aeroengine turbine blades.","PeriodicalId":447,"journal":{"name":"IEEE Sensors Journal","volume":"25 9","pages":"14911-14928"},"PeriodicalIF":4.3,"publicationDate":"2025-03-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143900456","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"综合性期刊","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Design of a Novel Vibration Sensor Based on Quartz MEMS Resonant Accelerometer 基于石英MEMS谐振加速度计的新型振动传感器设计

IF 4.3 2区综合性期刊

IEEE Sensors Journal Pub Date : 2025-03-27 DOI: 10.1109/JSEN.2025.3552776

Zeyu Yang;Han Zhang;Shengshou Lin;Chengcheng Xu;Ran Tao;Zhe Li;Jinxing Liang

引用次数: 0

sEMG-Based Knee Angle Prediction: An Efficient Framework With XGBoost Feature Selection and Multiattention LSTM 基于表面肌电信号的膝关节角度预测：基于XGBoost特征选择和多注意LSTM的有效框架

IF 4.3 2区综合性期刊

IEEE Sensors Journal Pub Date : 2025-03-27 DOI: 10.1109/JSEN.2025.3553533

Liuyi Ling;Liyu Wei;Bin Feng;Zhipeng Yu;Long Wang

{"title":"sEMG-Based Knee Angle Prediction: An Efficient Framework With XGBoost Feature Selection and Multiattention LSTM","authors":"Liuyi Ling;Liyu Wei;Bin Feng;Zhipeng Yu;Long Wang","doi":"10.1109/JSEN.2025.3553533","DOIUrl":"https://doi.org/10.1109/JSEN.2025.3553533","url":null,"abstract":"Accurate prediction of lower limb joint angles is essential for enabling natural human-exoskeleton interaction in rehabilitation robotics. This study proposes a novel framework for knee joint angle prediction using surface electromyography (sEMG) signals, integrating an XGBoost-driven feature selection algorithm and a multiattention hybrid-enhanced long short-term memory (LSTM) network. First, sEMG signals were acquired from healthy participants during dynamic lower limb movements. After preprocessing, temporal and spectral features were extracted, after which the eXtreme Gradient Boosting (XGBoost) algorithm was applied to eliminate redundant features, reducing input dimensionality while maintaining predictive accuracy. Finally, the reduced features were fed into the proposed model, which leverages hybrid attention mechanisms to enhance temporal dependencies and feature relevance. The experimental results validate that the XGBoost-driven feature selection framework significantly minimizes redundancy in sEMG feature extraction. When evaluating the performance of joint angle prediction, the mean absolute error (MAE), root mean square error (RMSE), adjusted <inline-formula> <tex-math>${R}^{{2}}$ </tex-math></inline-formula>, and Pearson correlation coefficient (CC) of the proposed model were 2.47°, 3.55°, 0.95, and 0.98, outperforming traditional machine learning (ML) algorithms and the benchmarks CNN, LSTM, TCN, and CNN-BiLSTM. The framework’s superior computational efficiency and prediction accuracy highlight its potential for real-time implementation in exoskeleton systems, addressing critical limitations in existing control paradigms. This advancement paves the way for adaptive human-robot collaboration in clinical rehabilitation settings.","PeriodicalId":447,"journal":{"name":"IEEE Sensors Journal","volume":"25 9","pages":"16501-16514"},"PeriodicalIF":4.3,"publicationDate":"2025-03-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143896319","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"综合性期刊","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Pixel-Level Multidirectional Image Sharpness Linear Assessment for Optical Image Stabilizer Performance Monitoring 用于光学稳像器性能监测的像素级多向图像清晰度线性评估

IF 4.3 2区综合性期刊

IEEE Sensors Journal Pub Date : 2025-03-27 DOI: 10.1109/JSEN.2025.3553532

Yuhang Zhou;Zhe Zhang;Bokang Yang;Jie Ma

{"title":"Pixel-Level Multidirectional Image Sharpness Linear Assessment for Optical Image Stabilizer Performance Monitoring","authors":"Yuhang Zhou;Zhe Zhang;Bokang Yang;Jie Ma","doi":"10.1109/JSEN.2025.3553532","DOIUrl":"https://doi.org/10.1109/JSEN.2025.3553532","url":null,"abstract":"Linear quantification of blur intensity in different directions of an image and blur-type classification are crucial for the detection of anomalies and optimization calibration of widely used optical image stabilizer (OIS). However, previous image quality assessment methods mainly focused on isotropic blur, emphasizing the correlation with subjective ratings, making it difficult to provide multidirectional linear sharpness assessment. Moreover, they invariably offer a single evaluation score regardless of the kind of fuzziness. In this article, we propose a pixel-level multidirectional image sharpness (PMIS) linear assessment method that, to our knowledge, is the first to provide the capability to linearly quantify blur across multiple directions and distinguish blur types in an end-to-end manner while assessing the degree of image blur. We introduce a novel method for extracting edge information to characterize image blur, significantly enhancing correlation with the human visual system (HVS) in blur perception by filtering out high-frequency edge noise. Uniform edge block selection and data postprocessing are introduced to adapt to HVS characteristics and enhance robustness. Using blur results from four different directions and simply setting thresholds, we are able to achieve an 84.5% classification accuracy in distinguishing between defocus blur, motion blur, and clear images. In addition, we creatively make a motion blur image quality (MBIQ) database, accurately representing motion blur through the concrete physical quantity of rotational speed. Experimental results confirm that PMIS achieves significant improvements over the previous methods especially on databases with anisotropic motion blur.","PeriodicalId":447,"journal":{"name":"IEEE Sensors Journal","volume":"25 9","pages":"15204-15215"},"PeriodicalIF":4.3,"publicationDate":"2025-03-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143896331","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"综合性期刊","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Temperature Resolution Analysis of Resonant MEMS Temperature Sensor Based on Quality Factor Optimization 基于品质因子优化的谐振式MEMS温度传感器温度分辨率分析

IF 4.3 2区综合性期刊

IEEE Sensors Journal Pub Date : 2025-03-27 DOI: 10.1109/JSEN.2025.3553577

Zheng Fan;Zhu Li;Renguang Tang;Guanhua Wu;Shanqing Yang;Liangcheng Tu;Yuan Wang;Pui-In Mak

{"title":"Temperature Resolution Analysis of Resonant MEMS Temperature Sensor Based on Quality Factor Optimization","authors":"Zheng Fan;Zhu Li;Renguang Tang;Guanhua Wu;Shanqing Yang;Liangcheng Tu;Yuan Wang;Pui-In Mak","doi":"10.1109/JSEN.2025.3553577","DOIUrl":"https://doi.org/10.1109/JSEN.2025.3553577","url":null,"abstract":"The TianQin mission, as a space-based gravitational wave detection, aims to establish a gravitational wave observation window in the megahertz (mHz) frequency band. The temperature control for the core payload in this context demands extreme precision, needing to be better than <inline-formula> <tex-math>$5~mu $ </tex-math></inline-formula>K/Hz1/2. Compared to resistive and optical temperature sensors, resonant MEMS temperature sensors (RMTSs) offer advantages such as small-size, low-power consumption, and dense integration. However, existing works hitherto indicate that RMTS need further enhancement in temperature resolution to meet this requirement. This study proposes an optimization approach for the temperature resolution of RMTS by quality factor optimization of a double-ended tuning fork (DETF) resonant structure. A theoretical modeling of RMTS incorporated with frequency noise analysis and amalgamated a temperature sensitivity simulation render an accurate analytical model for the temperature resolution of RMTS. Further analysis and optimization of the quality factor are conducted encompassing the relationship between mechanical thermal noise and quality factor. Moreover, the frequency background noise and temperature resolution of the optimized RMTS with respect to variations of geometric parameters of the resonant structures were evaluated, in terms of quality factor and resonant frequency ratios. Compared to RMTS without optimization, the frequency background noise of optimized RMTS is reduced by up to 7.35 times, whereby in the frequency range of 0.1 mHz–1 Hz, the temperature resolution is better than <inline-formula> <tex-math>$5~mu $ </tex-math></inline-formula>K/Hz1/2. Additionally, noise suppression and sensitivity enhancement strategies in this study can also be applied to other types of resonant sensors.","PeriodicalId":447,"journal":{"name":"IEEE Sensors Journal","volume":"25 9","pages":"14902-14910"},"PeriodicalIF":4.3,"publicationDate":"2025-03-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143900580","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"综合性期刊","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Novel Planar Waveguide-Coupled D-Shaped Optical Fiber Sensor to Generate Fano Resonance for Enhanced Refractive Index Sensing Applications 用于增强折射率传感的新型平面波导耦合d形光纤传感器产生Fano共振

IF 4.3 2区综合性期刊

IEEE Sensors Journal Pub Date : 2025-03-27 DOI: 10.1109/JSEN.2025.3552984

Rajiv Maurya;Ankit Mishra;Chandan Singh Yadav;Abhishek Upadhyay;Gaurav Sharma;Vivek Singh

{"title":"Novel Planar Waveguide-Coupled D-Shaped Optical Fiber Sensor to Generate Fano Resonance for Enhanced Refractive Index Sensing Applications","authors":"Rajiv Maurya;Ankit Mishra;Chandan Singh Yadav;Abhishek Upadhyay;Gaurav Sharma;Vivek Singh","doi":"10.1109/JSEN.2025.3552984","DOIUrl":"https://doi.org/10.1109/JSEN.2025.3552984","url":null,"abstract":"In this article, the generation of Fano resonance (FR) in a novel optical fiber platform, which addresses a significant challenge within the scientific community, is theoretically investigated. The proposed sensor is designed with a D-shaped surface plasmon resonance (SPR) fiber coupled with a three-layer planar waveguide (PWG) structure for inline and enhanced refractive index (RI) sensing applications. Our analysis demonstrates that an optimum thickness of low index dielectric material, i.e., cytop fluoropolymer, as a coupling layer is required to generate FR in association with SPR. It is observed that the FR demonstrates a significant enhancement in the figure of merit (FOM), achieving 6383 RIU-1 for wavelength interrogation and 13 195 a.u./RIU for intensity interrogation at <inline-formula> <tex-math>${d} _{f} ,, =520$ </tex-math></inline-formula> nm and <inline-formula> <tex-math>${d} _{c} ,, =700$ </tex-math></inline-formula> nm. These values greatly surpass the FOM of conventional SPR-based sensors, which are 34.90 RIU-1 and 39.96 a.u./RIU. Also, the FOM increases by increasing the thickness of coupling layer. Furthermore, FWHM of the FR is consistent with the length of D-shaped region, whereas FWHM of SPR increases as the length of D-shaped region increases. The penetration depth of FR mode’s evanescent field in the sensing region also increases with the film layer thickness, consistently exceeding the penetration depth of SPR (122.47 nm). Hence, the FR mode is proposed as the sensing signal instead of conventional SPR mode because it offers superior performance compared in terms of FOM and penetration depth.","PeriodicalId":447,"journal":{"name":"IEEE Sensors Journal","volume":"25 9","pages":"15109-15115"},"PeriodicalIF":4.3,"publicationDate":"2025-03-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143896541","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"综合性期刊","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

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Methods for Single-Biomolecule Translocation Event Detection From Nanopore Current Signal: A Review 基于纳米孔电流信号的单分子易位事件检测方法综述

IF 4.3 2区综合性期刊

IEEE Sensors Journal Pub Date : 2025-03-27 DOI: 10.1109/JSEN.2025.3551262

Pratima Upretee;Wouter Botermans;Koen Martens;Sanjin Marion;Jan Fostier;Nilesh Madhu

{"title":"Methods for Single-Biomolecule Translocation Event Detection From Nanopore Current Signal: A Review","authors":"Pratima Upretee;Wouter Botermans;Koen Martens;Sanjin Marion;Jan Fostier;Nilesh Madhu","doi":"10.1109/JSEN.2025.3551262","DOIUrl":"https://doi.org/10.1109/JSEN.2025.3551262","url":null,"abstract":"With rapid advancements in nanopore technology, research on single-biomolecule identification using nanopores has been significantly expedited. Nanopore sensing is based on detecting the change in ionic current in a nanopore as a molecule traverses through it. Single-biomolecule identification, with nanopores, involves two key steps. First, detecting the start and end of biomolecule translocations (termed as events) and second, extracting features from these events to uniquely identify the molecules. Robust event detection is critical as incorrect or partial event detection can increase computational load and hinder correct identification of biomolecules. This article reviews the state-of-the-art (SOTA) for event detection, starting from simple models to more sophisticated, stochastic approaches. Following a discussion on the core methodology, the algorithms are benchmarked on common, real datasets. The strengths, limitations, and tradeoffs for each algorithm are highlighted—which can serve as a guide for interested researchers in the field to help select and tune suitable algorithms for their use-cases.","PeriodicalId":447,"journal":{"name":"IEEE Sensors Journal","volume":"25 9","pages":"14505-14521"},"PeriodicalIF":4.3,"publicationDate":"2025-03-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143900578","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"综合性期刊","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Drift Error Compensation for a High-Precision 2-D Angle Sensor Based on EEMD and Multiple Lag Regression 基于EEMD和多元滞后回归的高精度二维角度传感器漂移误差补偿

IF 4.3 2区综合性期刊

IEEE Sensors Journal Pub Date : 2025-03-27 DOI: 10.1109/JSEN.2025.3552773

Xin-Fa Zhou;Li-Ying Liu;Cheng-Yao Zhang;Wei Ye;Rui-Jun Li;Zhen-Ying Cheng

{"title":"Drift Error Compensation for a High-Precision 2-D Angle Sensor Based on EEMD and Multiple Lag Regression","authors":"Xin-Fa Zhou;Li-Ying Liu;Cheng-Yao Zhang;Wei Ye;Rui-Jun Li;Zhen-Ying Cheng","doi":"10.1109/JSEN.2025.3552773","DOIUrl":"https://doi.org/10.1109/JSEN.2025.3552773","url":null,"abstract":"Drift issues are commonly encountered in precision instruments operating in standard measurement environments due to temperature fluctuations, material property variations, and environmental disturbances, which represent a significant bottleneck to achieving high measurement accuracy. To address this limitation, a drift error compensation method based on ensemble empirical mode decomposition (EEMD) and multivariate lag regression has been proposed in this article. The structure, principles, and working environment of a high-precision 2-D angle sensor have been analyzed, and the primary influencing factors and mechanisms contributing to drift errors have been systematically investigated. Drift and error source signals have been decomposed and denoised using EEMD, and effective intrinsic mode function (IMF) components have been extracted. The lag characteristics of these components have been analyzed and incorporated into a multivariate regression model for drift error compensation. Partial regression analysis and significance testing have been employed to optimize the model, reducing complexity and enhancing generalization. Experimental results show that drift errors in the yaw and pitch directions have been reduced by more than 60.01% and 67.51%, respectively, after compensation. When compared with classical multivariate regression, LSTM, and support vector machine (SVM) methods, the proposed approach demonstrates certain advantages in error compensation performance, robustness, and complexity. In addition, the method is also suitable for broader applications to other high-precision measurement instruments.","PeriodicalId":447,"journal":{"name":"IEEE Sensors Journal","volume":"25 9","pages":"16468-16479"},"PeriodicalIF":4.3,"publicationDate":"2025-03-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143899420","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"综合性期刊","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

A High-Sensitivity Strain Sensor With Femtosecond Fiber Bragg Grating for Pipeline Deformation Monitoring 用于管道变形监测的飞秒光纤光栅高灵敏度应变传感器

IF 4.3 2区综合性期刊

IEEE Sensors Journal Pub Date : 2025-03-27 DOI: 10.1109/JSEN.2025.3551731

Yongjian Gong;Yongxing Guo;Li Xiong;Chang Liu;Wanhuan Zhou;Zhongchun Hu;Xiudong Li;Yu Zhang

{"title":"A High-Sensitivity Strain Sensor With Femtosecond Fiber Bragg Grating for Pipeline Deformation Monitoring","authors":"Yongjian Gong;Yongxing Guo;Li Xiong;Chang Liu;Wanhuan Zhou;Zhongchun Hu;Xiudong Li;Yu Zhang","doi":"10.1109/JSEN.2025.3551731","DOIUrl":"https://doi.org/10.1109/JSEN.2025.3551731","url":null,"abstract":"Structural health monitoring (SHM) of hydraulic pipelines plays a crucial role in preventing catastrophic failures, particularly when measuring large strains with high sensitivity. This study presents a novel high-sensitivity strain sensor utilizing femtosecond fiber Bragg grating (FS-FBG) technology to overcome the limitations of conventional monitoring techniques in extreme conditions. The sensor incorporates two key components: sensing and measuring members, featuring an innovative skeletonized sensitized shaft design. A pre-stressed FS-FBG is suspended axially within the structure. The relationship between fiber Bragg grating (FBG) wavelength displacement and pipe surface strain was validated using Bernoulli-Euler beam theory and finite element analysis. In order to accurately calibrate the performance of the sensor, a precision pipe deformation device was designed. Experimental results demonstrate that the sensor achieves a sensitivity of 4.19 pm/ <inline-formula> <tex-math>$mu varepsilon $ </tex-math></inline-formula>, which is 3.4 times higher than that of the FBG sensor, in the range of 0–<inline-formula> <tex-math>$1650~mu varepsilon $ </tex-math></inline-formula> of the pipe surface microstrain, and at the same time, it has excellent linearity, creep-resistant performance, and temperature compensation effect. The results provide a reliable solution for large strain monitoring of hydraulic pipelines under severe conditions.","PeriodicalId":447,"journal":{"name":"IEEE Sensors Journal","volume":"25 9","pages":"14830-14841"},"PeriodicalIF":4.3,"publicationDate":"2025-03-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143900487","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"综合性期刊","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Topology and Size Optimization of MEMS Electrothermal U-Shaped Actuator MEMS电热u型致动器的拓扑与尺寸优化

IF 4.3 2区综合性期刊

IEEE Sensors Journal Pub Date : 2025-03-27 DOI: 10.1109/JSEN.2025.3553105

He Wang;Weirong Nie;Yun Cao;Zhanwen Xi;Shenghong Lei;Junlin Lu

{"title":"Topology and Size Optimization of MEMS Electrothermal U-Shaped Actuator","authors":"He Wang;Weirong Nie;Yun Cao;Zhanwen Xi;Shenghong Lei;Junlin Lu","doi":"10.1109/JSEN.2025.3553105","DOIUrl":"https://doi.org/10.1109/JSEN.2025.3553105","url":null,"abstract":"To improve the overloading resistibility of the electrothermal U-shaped actuator, this article employs size and topology optimization to realize the multiobjective optimization of the U-shaped actuator. The micro-electromechanical system (MEMS) pin puller based on the U-shaped actuator is optimized to verify its effectiveness. The pin of the MEMS pin puller was lightweighted first, and the finite element method (FEM) simulation was used to compare the strength and function of MEMS pin puller before and after the pin optimization. After pin optimization, the optimization combining multiphysics field-coupled FEM, impact FEM, and NSGA-II is established to realize the multiobjective optimization of U-shaped actuator. The radius of the flexure round corner and the mass distribution of the cold arm are used as design variables, and the optimization objectives are the displacement of the pin, the maximum stress of the flexure, and the maximum temperature of actuator. The impact experiment and function experiment of the MEMS pin puller are carried out to verify its overloading resistibility under impact load and output displacement under driving voltage. The results show that the overloading resistibility of the optimized MEMS pin puller increased from 9000 to 16100 g, with a 78% improvement. The overloading resistibility of the U-shaped actuator is increased from 9000 to 20300 g, with a 125% improvement. Meanwhile, the output displacement is reduced from 186 to <inline-formula> <tex-math>$90~mu $ </tex-math></inline-formula>m, with a 52% reduction. The response time is not affected. Therefore, the method in this article is suitable for the optimization of U-shaped actuators under complex conditions. It can provide guidance for improving the overloading resistibility of U-shaped actuators.","PeriodicalId":447,"journal":{"name":"IEEE Sensors Journal","volume":"25 9","pages":"14893-14901"},"PeriodicalIF":4.3,"publicationDate":"2025-03-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143900496","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"综合性期刊","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0