2015 IEEE International Symposium on Inertial Sensors and Systems (ISISS) Proceedings最新文献

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Bias self-calibration techniques using silicon disc resonator gyroscope 硅盘谐振陀螺仪的偏置自校准技术
Howard H. Ge, John Y. Liu, Bryan Buchanan
{"title":"Bias self-calibration techniques using silicon disc resonator gyroscope","authors":"Howard H. Ge, John Y. Liu, Bryan Buchanan","doi":"10.1109/ISISS.2015.7102375","DOIUrl":"https://doi.org/10.1109/ISISS.2015.7102375","url":null,"abstract":"This paper presents several addvanced error compensation and bias self-calibration techniqques based on an extended gyro error model. The techhniques were implemented on a MEMS Disc Resonator Gyro (DRG). Preliminary test data shows the evidence off a promising navigational grade MEMS gyro.","PeriodicalId":430128,"journal":{"name":"2015 IEEE International Symposium on Inertial Sensors and Systems (ISISS) Proceedings","volume":"44 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-03-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122685978","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 12
Milli-HRG inertial sensor assembly – a reality 毫hrg惯性传感器组件-成为现实
D. Rozelle, A. D. Meyer, A. Trusov, D. Sakaida
{"title":"Milli-HRG inertial sensor assembly – a reality","authors":"D. Rozelle, A. D. Meyer, A. Trusov, D. Sakaida","doi":"10.1109/ISISS.2015.7102386","DOIUrl":"https://doi.org/10.1109/ISISS.2015.7102386","url":null,"abstract":"The Hemispherical Resonator Gyro (HRG) has proven itself to be an ultra-reliable technology for space application with over 30 million operation hours and 100% mission success. Northrop Grumman Advanced Navigation Systems is developing a small size and lightweight terrestrial inertial sensor assembly (ISA) based on the HRG approach. This ISA will be the core of future inertial measurement unit (IMU) and inertial navigation system (INS) product lines.","PeriodicalId":430128,"journal":{"name":"2015 IEEE International Symposium on Inertial Sensors and Systems (ISISS) Proceedings","volume":"168 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-03-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121400281","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 12
Measurement of angle error of gyroscopes using a rotary table enhanced by self-calibratable rotary encoder 利用自校正旋转编码器增强的转台测量陀螺仪的角度误差
W. Kokuyama, Tsukasa Watanabe, H. Nozato, A. Ota
{"title":"Measurement of angle error of gyroscopes using a rotary table enhanced by self-calibratable rotary encoder","authors":"W. Kokuyama, Tsukasa Watanabe, H. Nozato, A. Ota","doi":"10.1109/ISISS.2015.7102363","DOIUrl":"https://doi.org/10.1109/ISISS.2015.7102363","url":null,"abstract":"This paper reports a novel system to evaluate angle error of rate-integrating gyroscopes. The system equips with a self-calibratable rotary encoder (SelfA) so that it has enough angle accuracy below 10-4-degree level even in rotation at several tens of degrees per second. Angle errors in such a small level cannot be measured with ordinary rotary tables. Therefore, our system can contribute to characterization of high-performance inertial sensors.","PeriodicalId":430128,"journal":{"name":"2015 IEEE International Symposium on Inertial Sensors and Systems (ISISS) Proceedings","volume":"32 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-03-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131468434","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
Synchronously pumped NMR gyro 同步泵浦核磁共振陀螺仪
T. Walker, A. Korver, D. Thrasher, M. Bulatowicz
{"title":"Synchronously pumped NMR gyro","authors":"T. Walker, A. Korver, D. Thrasher, M. Bulatowicz","doi":"10.1109/ISISS.2015.7102366","DOIUrl":"https://doi.org/10.1109/ISISS.2015.7102366","url":null,"abstract":"We are implementing a new design for spinexchange- pumped NMR gyros that addresses the key systematic errors as compared to previous implementations. The key concept is to drive magnetic resonance using spin-exchange collisions in a reference frame rotating about a bias magnetic field. The resulting purely transverse polarization is predicted to be insensitive to spin-exchange field shifts and quadrupole interactions, both of which are prominent in designs based on conventional magnetic resonance. Preliminary studies have identified a novel type of spin-exchange broadening that can be compensated to allow the system to reach T1-limited line width.","PeriodicalId":430128,"journal":{"name":"2015 IEEE International Symposium on Inertial Sensors and Systems (ISISS) Proceedings","volume":"8 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-03-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126876886","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
The concept of "collapsed electrodes" for glassblown spherical resonators demonstrating 200:1 aspect ratio gap definition 玻璃吹制球形谐振器的“折叠电极”概念演示了200:1的宽高比间隙定义
J. Giner, A. Shkel
{"title":"The concept of \"collapsed electrodes\" for glassblown spherical resonators demonstrating 200:1 aspect ratio gap definition","authors":"J. Giner, A. Shkel","doi":"10.1109/ISISS.2015.7102382","DOIUrl":"https://doi.org/10.1109/ISISS.2015.7102382","url":null,"abstract":"We report a technique for defining high aspect ratio electrostatic gaps in micromachined glassblown spherical resonators. The approach is based on intentionally allowing a physical contact between the resonator and electrode structure, hence “collapsed electrodes”, then releasing and metalizing the electrodes and resonator. We utilized 500 um SOI electrodes in the glassblowing fabrication process, allowing to define narrow (2 um) and thick (400 um) electrostatic actuators (200:1 aspect ratio). We demonstrated a spherical resonator integrated with electrodes, blurring the boundary in complexity of fabricating conventional (2D) and glassblown (3D) resonators. The test resonator demonstrated 866kHz, 1.46MHz and 1.59MHz for N=1, N=2, and N=3 modes and the corresponding Q-factors of 1500, 1300 and 1600, all in vacuum of 0.4mT.","PeriodicalId":430128,"journal":{"name":"2015 IEEE International Symposium on Inertial Sensors and Systems (ISISS) Proceedings","volume":"2675 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-03-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132164895","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 5
High performance fog: an industrial feedback from mass production 高性能雾:大规模生产的工业反馈
Y. Paturel, A. Couderette
{"title":"High performance fog: an industrial feedback from mass production","authors":"Y. Paturel, A. Couderette","doi":"10.1109/ISISS.2015.7102364","DOIUrl":"https://doi.org/10.1109/ISISS.2015.7102364","url":null,"abstract":"iXblue has manufactured more than 14000 high performance fiber-optic gyros (FOG) over the last 15 years. This production amount spreads over only over 4 different types of FOG with performance (to make it simple) of 0.1, 0.05, 0.01 and 0.001 degree per hour. This paper presents different aspects of the manufacturing process control: Vertical integration of technologies for key components performance control, statistical analysis of FOG performance over a large production quantity, yield of the whole manufacturing process.","PeriodicalId":430128,"journal":{"name":"2015 IEEE International Symposium on Inertial Sensors and Systems (ISISS) Proceedings","volume":"600 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-03-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123158282","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 4
A single mass two-axis capacitive MEMS accelerometer with force rebalance 具有力平衡的单质量双轴电容式MEMS加速度计
Talha Köse, Yunus Terzioglu, K. Azgın, T. Akin
{"title":"A single mass two-axis capacitive MEMS accelerometer with force rebalance","authors":"Talha Köse, Yunus Terzioglu, K. Azgın, T. Akin","doi":"10.1109/ISISS.2015.7102371","DOIUrl":"https://doi.org/10.1109/ISISS.2015.7102371","url":null,"abstract":"This paper presents a single mass 2-axis MEMS capacitive accelerometer with a unique force rebalance method achieved with the readout circuit developed for the simultaneous 2-axis acceleration sensing. Using a single mass structure with extra fingers for reading multiple axes allows better sensor performances when compared to multi-axis accelerometers with individual proof masses occupying the same die area. Test results show 274 mV/g scale factor for x-axis, and 280 mV/g scale factor for y-axis, while the cross-axis sensitivity for x-axis is calculated as 3.4 mV/g (% 1.26), and the cross-axis sensitivity for y-axis is -3.9 mV/g (% 1.4). Additionally, the bias instability values are measured as 22 μg and 23 μg, and the velocity random walk values are determined as 9.8μg/ √Hz and 9.9 μg/ √Hz for x and y axes, respectively. This sensing and readout approach can easily be adapted to achieve a high performance single mass 3-axis accelerometer in a small die area.","PeriodicalId":430128,"journal":{"name":"2015 IEEE International Symposium on Inertial Sensors and Systems (ISISS) Proceedings","volume":"54 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-03-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134453641","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 6
Effect of substrate thickness on quality factor of mechanical resonators 衬底厚度对机械谐振器质量因子的影响
A. Darvishian, B. Shiari, G. He, K. Najafi
{"title":"Effect of substrate thickness on quality factor of mechanical resonators","authors":"A. Darvishian, B. Shiari, G. He, K. Najafi","doi":"10.1109/ISISS.2015.7102379","DOIUrl":"https://doi.org/10.1109/ISISS.2015.7102379","url":null,"abstract":"This paper investigates effect of substrate thickness on energy drift from anchor of mechanical resonators. A finite element (FE) method is utilized to capture energy loss from the anchor. To eliminate wave reflection from the outer boundaries of the resonator substrate model, a perfectly matched layer is used. This artificial layer absorbs waves before they reach to the outer boundaries of truncated computational regions. Simulation results reveal that the resonators, which are connected to the thicker substrates show higher quality (Q) factor. It is found that among the modes, torsional mode is the most sensitive one to the substrate thickness. Such that as substrate thickness is increased 18 times, the Q-factor of the torsional mode is increased 6587 times. The results demonstrate that the Q-factor of the out-of-plane mode is also highly sensitive to the substrate thickness. However, the Q-factor of in-plane type modes is not as sensitive as other modes. The agreement between the simulation results and experimental data for anchor loss of cantilever type resonators validates the simulation method.","PeriodicalId":430128,"journal":{"name":"2015 IEEE International Symposium on Inertial Sensors and Systems (ISISS) Proceedings","volume":"11 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-03-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131635173","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 11
Optomechanical sensing of wine-glass modes of a BAW resonator BAW谐振器酒杯模式的光机械传感
A. Bhat, M. Storey, S. Bhave
{"title":"Optomechanical sensing of wine-glass modes of a BAW resonator","authors":"A. Bhat, M. Storey, S. Bhave","doi":"10.1109/ISISS.2015.7102384","DOIUrl":"https://doi.org/10.1109/ISISS.2015.7102384","url":null,"abstract":"A critical element for inertial navigation is precise knowledge of the angular kinematics which are measured using gyroscopes. Optomechanics has been shown to be the most sensitive scheme for measuring mechanical motion [1, 2]. In this paper, we demonstrate electrostatic actuation and optical sensing of orthogonal wineglass modes on a silicon-on-insulator (SOI) platform as a fundamental building block for a Coriolis force measuring z-axis bulk acoustic wave (BAW) gyroscope [3]. To measure the wineglass modes, we monitor the laser light modulation from changes in the waveguide to ring resonator coupling due to the mechanical motion.","PeriodicalId":430128,"journal":{"name":"2015 IEEE International Symposium on Inertial Sensors and Systems (ISISS) Proceedings","volume":"11 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-03-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127662988","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 4
Measurement technique of vibrational distribution using static electricity and capacitance 利用静电和电容测量振动分布的技术
K. Kikunaga, H. Yamashita, Masahiro Egashira, K. Nonaka
{"title":"Measurement technique of vibrational distribution using static electricity and capacitance","authors":"K. Kikunaga, H. Yamashita, Masahiro Egashira, K. Nonaka","doi":"10.1109/ISISS.2015.7102370","DOIUrl":"https://doi.org/10.1109/ISISS.2015.7102370","url":null,"abstract":"We propose a noncontact vibrational distribution measurement technique using static electricity and a capacitance sensor array. A vibrating object was intentionally charged, and a time-varying electric field was induced in this study. The vibrational amplitude and frequency of the object were measured by detecting a change in the capacitance between the object and a sensor. The sensor used for detection comprises a parallel plate of sensors of diameter Φ1 mm. The vibrational distribution over an area of 25 mm × 25 mm with an amplitude of 100 μm was measured in 1 s by simultaneously processing the detected signal using a capacitance sensor array.","PeriodicalId":430128,"journal":{"name":"2015 IEEE International Symposium on Inertial Sensors and Systems (ISISS) Proceedings","volume":"65 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-03-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128070625","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
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