2015 IEEE International Symposium on Inertial Sensors and Systems (ISISS) Proceedings最新文献

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Yet another tuning fork gyroscope 又一个音叉陀螺仪

2015 IEEE International Symposium on Inertial Sensors and Systems (ISISS) Proceedings Pub Date : 2015-03-23 DOI: 10.1109/ISISS.2015.7102359

R. Forke, K. Hiller, S. Hahn, S. Konietzka, T. Motl, D. Köhler, S. Heinz, D. Billep, T. Gessner

引用次数: 3

How to invent (or not invent) the first silicon MEMS gyroscope 如何发明(或不发明)第一个硅MEMS陀螺仪

2015 IEEE International Symposium on Inertial Sensors and Systems (ISISS) Proceedings Pub Date : 2015-03-23 DOI: 10.1109/ISISS.2015.7102372

M. Weinberg

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引用次数: 6

Origami-like folded mems for realization of TIMU: fabrication technology and initial demonstration 实现TIMU的类折纸折叠mems:制造技术和初步演示

2015 IEEE International Symposium on Inertial Sensors and Systems (ISISS) Proceedings Pub Date : 2015-03-23 DOI: 10.1109/ISISS.2015.7102373

A. Efimovskaya, D. Senkal, Sina Askari, A. Shkel

引用次数: 7

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