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2015 IEEE International Symposium on Inertial Sensors and Systems (ISISS) Proceedings最新文献

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A novel model order reduction approach for generating efficient nonlinear verilog-a models of mems gyroscopes 一种新的模型降阶方法用于生成高效的mems陀螺仪非线性verilog-a模型
2015 IEEE International Symposium on Inertial Sensors and Systems (ISISS) Proceedings Pub Date : 2015-03-23 DOI: 10.1109/ISISS.2015.7102377
A. Parent, A. Krust, G. Lorenz, T. Piirainen
{"title":"A novel model order reduction approach for generating efficient nonlinear verilog-a models of mems gyroscopes","authors":"A. Parent, A. Krust, G. Lorenz, T. Piirainen","doi":"10.1109/ISISS.2015.7102377","DOIUrl":"https://doi.org/10.1109/ISISS.2015.7102377","url":null,"abstract":"This paper reports a novel model-order reduction (MOR) approach for creating fast-running, nonlinear, multiphysics models in Verilog-A. This new approach differs from previous work by creating the reduced order model (ROM) directly from an accurate, nonlinear, multi-physics representation. The mechanical and electrical nonlinearities of the MEMS structure are persevered to capture effects such as quadrature, amplitude-dependent frequency shifting and electrostatic softening. The reduction algorithm has been implemented in the commercial MEMS/IC co-design tool MEMS+. The approach's effectiveness is validated for a state-of-the-art, three-axis, capacitive gyroscope from Murata Electronics by comparing simulations of the created Verilog-A model with experimental data.","PeriodicalId":430128,"journal":{"name":"2015 IEEE International Symposium on Inertial Sensors and Systems (ISISS) Proceedings","volume":"4 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-03-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127806769","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 14
A low-power interface circuit for multi-sensor applications 用于多传感器应用的低功耗接口电路
2015 IEEE International Symposium on Inertial Sensors and Systems (ISISS) Proceedings Pub Date : 2015-03-23 DOI: 10.1109/ISISS.2015.7102367
Po-Chang Wu, Bin-Da Liu, C. Yeh, Sih-Yu Chen, H. Tsai, Y. Juang
{"title":"A low-power interface circuit for multi-sensor applications","authors":"Po-Chang Wu, Bin-Da Liu, C. Yeh, Sih-Yu Chen, H. Tsai, Y. Juang","doi":"10.1109/ISISS.2015.7102367","DOIUrl":"https://doi.org/10.1109/ISISS.2015.7102367","url":null,"abstract":"This paper presents a low-power generic readout circuit for capacitive and resistive complementary metaloxide- semiconductor (CMOS) micro-electro-mechanical-system (MEMS) sensors. This readout architecture can be scaled to even more sensors to achieve chip area and power consumption efficient. An incremental sigma-delta analog-to-digital converter (ΣΔ ADC) is used for providing multiplexed digital output. A demonstration chip was implemented in a 0.18-μm CMOS MEMS process, which integrates a three-axis accelerometer, the readout circuit, and an ARM M0 microprocessor. The chip area is 3.5×2.5 mm2 and the interface circuit with ADC draw only 120 mA of current from a 1.8-V supply. A magneto-resistance-type three-axis magnetic sensor is manufactured via extra post processes. This chip is designed to demonstrate a monolithic virtual gyroscope, which is a popular solution for low-power and low-cost inertial applications.","PeriodicalId":430128,"journal":{"name":"2015 IEEE International Symposium on Inertial Sensors and Systems (ISISS) Proceedings","volume":"88 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-03-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122042865","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Multi-modal mechanical stimuli stage for in-situ calibration of MEMS gyroscopes MEMS陀螺仪原位标定的多模态机械刺激台
2015 IEEE International Symposium on Inertial Sensors and Systems (ISISS) Proceedings Pub Date : 2015-03-23 DOI: 10.1109/ISISS.2015.7102393
S. Nadig, V. Pinrod, S. Ardanuc, A. Lal
{"title":"Multi-modal mechanical stimuli stage for in-situ calibration of MEMS gyroscopes","authors":"S. Nadig, V. Pinrod, S. Ardanuc, A. Lal","doi":"10.1109/ISISS.2015.7102393","DOIUrl":"https://doi.org/10.1109/ISISS.2015.7102393","url":null,"abstract":"We report a multi-axis piezoelectric multi-modal mechanical stimuli stage capable of in-situ calibration of MEMS gyroscopes attached to the stage. The system is fully self-contained with electronics for portable operation. In this work, we demonstrate active calibration of a commercial Z-axis gyroscope ADXRS646 for high bandwidth applications. The dithered stage is capable of pure sinusoidal angular rates at 0-300 deg/s even after being loaded with a gyroscope die, to extract the scale factor and the bias. The stage has the added capability of X-Y in-plane acceleration stimulus 0-90 m/s2 to extract the cross-axis sensitivities which are essential parameters. The measured maximum in-plane cross-axis sensitivity for unpackaged gyro ~ 13.64% (Sx/Sy x 100) operated at ~800Hz bandwidth, providing high bandwidth calibration data useful for personal navigation. The maximum power consumption of the unloaded calibration stage is ~396mWatts during calibration.","PeriodicalId":430128,"journal":{"name":"2015 IEEE International Symposium on Inertial Sensors and Systems (ISISS) Proceedings","volume":"47 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-03-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129988124","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 10
Simultaneous exploitation of the fundamental and higher order wineglass modes in a vibratory gyro 振动陀螺中基阶和高阶酒杯模态的同时开发
2015 IEEE International Symposium on Inertial Sensors and Systems (ISISS) Proceedings Pub Date : 2015-03-23 DOI: 10.1109/ISISS.2015.7102387
Howard H. Ge, Dennis Kim, R. M’Closkey
{"title":"Simultaneous exploitation of the fundamental and higher order wineglass modes in a vibratory gyro","authors":"Howard H. Ge, Dennis Kim, R. M’Closkey","doi":"10.1109/ISISS.2015.7102387","DOIUrl":"https://doi.org/10.1109/ISISS.2015.7102387","url":null,"abstract":"This paper reports the first step towards simultaneously operating the n = 2 and n = 3 pairs of modes in a disk resonator for two independent measurements of angular rate. A model based approach is adopted to estimate the resonator imbalance parameters and an iterative mass perturbation technique is developed to simultaneously reduce the frequency mismatch of the n = 2 mode pair as well as the n = 3 mode pair. At the termination of mass deposition process, each pair of modes exhibits a residual frequency mismatch of approximately 100 mHz.","PeriodicalId":430128,"journal":{"name":"2015 IEEE International Symposium on Inertial Sensors and Systems (ISISS) Proceedings","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-03-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130895782","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 5
Wafer-scale etch process for precision frequency tuning of MEMS gyros 用于MEMS陀螺精密频率调谐的晶圆级蚀刻工艺
2015 IEEE International Symposium on Inertial Sensors and Systems (ISISS) Proceedings Pub Date : 2015-03-23 DOI: 10.1109/ISISS.2015.7102391
Dennis Kim, A. Behbahani, R. M’Closkey, P. Stupar, J. DeNatale
{"title":"Wafer-scale etch process for precision frequency tuning of MEMS gyros","authors":"Dennis Kim, A. Behbahani, R. M’Closkey, P. Stupar, J. DeNatale","doi":"10.1109/ISISS.2015.7102391","DOIUrl":"https://doi.org/10.1109/ISISS.2015.7102391","url":null,"abstract":"A technique which retains wafer-scale processing and packaging compatibility is described for customizing the dynamics of individual silicon resonators. The approach uses laser ablation of a protective conformal layer (parylene) to expose silicon in regions that are targeted for mass removal by subsequent DRIE. The technique is demonstrated on a planar axisymmetric resonator design whereby the frequency mismatches of a subset of the wafer's resonators are reduced to less than 100 mHz.","PeriodicalId":430128,"journal":{"name":"2015 IEEE International Symposium on Inertial Sensors and Systems (ISISS) Proceedings","volume":"234 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-03-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132327527","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 9
Accurately measuring human movement using magneto-inertial sensors: techniques and challenges 使用磁惯性传感器精确测量人体运动:技术和挑战
2015 IEEE International Symposium on Inertial Sensors and Systems (ISISS) Proceedings Pub Date : 2015-03-23 DOI: 10.1109/ISISS.2015.7102390
A. Cereatti, D. Trojaniello, U. della Croce
{"title":"Accurately measuring human movement using magneto-inertial sensors: techniques and challenges","authors":"A. Cereatti, D. Trojaniello, U. della Croce","doi":"10.1109/ISISS.2015.7102390","DOIUrl":"https://doi.org/10.1109/ISISS.2015.7102390","url":null,"abstract":"An overview of conceptual, analytical and experimental elements to quantitatively describe human kinematics, with specific focus on gait, using magneto-inertial sensors is presented. It includes a review and a taxonomy scheme of the techniques for the estimation of joint kinematics and spatio-temporal gait parameters.","PeriodicalId":430128,"journal":{"name":"2015 IEEE International Symposium on Inertial Sensors and Systems (ISISS) Proceedings","volume":"48 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-03-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115614775","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 42
Wake up MEMS for inertial sensors 唤醒惯性传感器的MEMS
2015 IEEE International Symposium on Inertial Sensors and Systems (ISISS) Proceedings Pub Date : 2015-03-23 DOI: 10.1109/ISISS.2015.7102385
C. Stoeckel, D. Billep, S. Konietzka, S. Zimmermann, T. Otto
{"title":"Wake up MEMS for inertial sensors","authors":"C. Stoeckel, D. Billep, S. Konietzka, S. Zimmermann, T. Otto","doi":"10.1109/ISISS.2015.7102385","DOIUrl":"https://doi.org/10.1109/ISISS.2015.7102385","url":null,"abstract":"A piezoelectric MEMS with wake up function, Power down interrupt generator (PDIG), for inertial sensor systems is reported. The aluminum nitride based MEMS generates electric signals intrinsically in result of an inertial accelerations. The PDIG is optimized for maximum charge and voltage sensitivity. The charge sensitivity for a single electrode designed PDIG is measured with 40.1 pC/g and the maximum voltage sensitivity with 1.273 V/g. The device shows a high linearity and reproducibility. The PDIG is merged with a CMOS electronic, designed for low current consumption in sleeping mode. The minimum acceleration to wake up the system is adjustable and measured with 0.08 g.","PeriodicalId":430128,"journal":{"name":"2015 IEEE International Symposium on Inertial Sensors and Systems (ISISS) Proceedings","volume":"6 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-03-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130597488","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
An inertial and environmental wireless platform with advanced energy harvesting capabilities 具有先进能量收集能力的惯性和环境无线平台
2015 IEEE International Symposium on Inertial Sensors and Systems (ISISS) Proceedings Pub Date : 2015-03-23 DOI: 10.1109/ISISS.2015.7102374
M. Galizzi, D. Comotti, A. Gasparini, B. Nodari, S. Ramorini, V. Re, A. Vitali
{"title":"An inertial and environmental wireless platform with advanced energy harvesting capabilities","authors":"M. Galizzi, D. Comotti, A. Gasparini, B. Nodari, S. Ramorini, V. Re, A. Vitali","doi":"10.1109/ISISS.2015.7102374","DOIUrl":"https://doi.org/10.1109/ISISS.2015.7102374","url":null,"abstract":"This work presents neMEMSi-TEG, an ultra-low power MEMS based inertial and magnetic platform with embedded processing and wireless communication capabilities. The platform embeds an advanced energy management IC that allows an extremely high efficiency energy harvesting suitable for low-power and miniaturized Thermoelectric Generators. This paper aims to provide a description of the architecture of the system, the embedded orientation estimation algorithm and the performance in terms of power consumption and orientation accuracy.","PeriodicalId":430128,"journal":{"name":"2015 IEEE International Symposium on Inertial Sensors and Systems (ISISS) Proceedings","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-03-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131272479","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Synchronous integrator based on digital control system for silicon micromachined gyroscope 基于同步积分器的硅微机械陀螺仪数字控制系统
2015 IEEE International Symposium on Inertial Sensors and Systems (ISISS) Proceedings Pub Date : 2015-03-23 DOI: 10.1109/ISISS.2015.7102389
Cheng Yang, Hongsheng Li
{"title":"Synchronous integrator based on digital control system for silicon micromachined gyroscope","authors":"Cheng Yang, Hongsheng Li","doi":"10.1109/ISISS.2015.7102389","DOIUrl":"https://doi.org/10.1109/ISISS.2015.7102389","url":null,"abstract":"For the decoupled dual-mass silicon Micromachined gyroscope developed by Southeast University, drive mode and sense mode are analyzed. In order to improve the precision of silicon Micromachined gyroscope, the demodulation algorithm based on synchronous integrator circuit for gyroscope digital control system is proposed. Combining with Automatic Gain Control (AGC) and Phase-Locked Loop (PLL) technology, the closed-loop control of drive mode and high precision output of sense mode of silicon Micromachined gyroscope have been implemented. In order to verify the effect of the synchronous integrator circuit applied in gyroscope control system, the Print Circuit Board (PCB) based on Field Programmable Gate-Array (FPGA) digital circuit is manufactured and the corresponding experiment is carried out. The results of test show that the synchronous integrator demodulation algorithm of digital control system for silicon Micromachined gyroscope has achieved good performance. The bias stability of tested gyroscope is 0.2o/hr and the angle random walk is measured to be 0.14o/√hr. The results demonstrate that the proposed synchronous integrator demodulation scheme is effective.","PeriodicalId":430128,"journal":{"name":"2015 IEEE International Symposium on Inertial Sensors and Systems (ISISS) Proceedings","volume":"13 9","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-03-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"113962946","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Design and implementation of map system for indoor navigation - An example of an application of a platform which collects and provides indoor positions - 室内导航地图系统的设计与实现。一个收集和提供室内位置的平台的应用示例
2015 IEEE International Symposium on Inertial Sensors and Systems (ISISS) Proceedings Pub Date : 2015-03-23 DOI: 10.1109/ISISS.2015.7102376
C. Yara, Yuta Noriduki, S. Ioroi, Hiroshi Tanaka
{"title":"Design and implementation of map system for indoor navigation - An example of an application of a platform which collects and provides indoor positions -","authors":"C. Yara, Yuta Noriduki, S. Ioroi, Hiroshi Tanaka","doi":"10.1109/ISISS.2015.7102376","DOIUrl":"https://doi.org/10.1109/ISISS.2015.7102376","url":null,"abstract":"Many kinds of indoor positioning systems have been investigated, and location-based services have been developed and introduced. They are individually designed and developed based on the requirements for each service. This paper presents a map platform that accommodates any positioning system in order to utilize the platform for various application systems. The requirement conditions are summarized and the platform has been implemented using open source software. The software allows the required functions to be assigned into two servers, realizes the independence of each function and allows for future function expansion. The study has verified the basic functions required for a mapping system that can incorporate several indoor positioning systems including dead reckoning calculated by inertia sensors installed in a smartphone and an odometry system operated by the rotary encoders installed in an electric wheel chair.","PeriodicalId":430128,"journal":{"name":"2015 IEEE International Symposium on Inertial Sensors and Systems (ISISS) Proceedings","volume":"6 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-03-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115501938","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 4
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