{"title":"On the metrology of the MSF errors","authors":"Olga Kukso, R. Rascher, R. Börret, M. Pohl","doi":"10.1117/12.2318675","DOIUrl":"https://doi.org/10.1117/12.2318675","url":null,"abstract":"The aim of our research is to study middle spatial frequency errors (MSFE) on optical surfaces. We investigate the surfaces after all manufacturing processes to find out the main affecting factors and to choose the proper processing parameters to minimize the size of the errors. In this paper we describe some middle spatial frequency errors, which occur during grinding. As there are limited possibilities to measure ground surfaces, their analysis from the point of measurement is most difficult. Therefore, it is of utmost importance to optimally organize the measurement guaranteeing sufficient data for the reconstruction of the toolpath and avoidance of aliasing effects. In the paper discuss possible classifications and some difficulties during measuring of grinded surfaces.","PeriodicalId":422212,"journal":{"name":"Precision Optics Manufacturing","volume":"6 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-08-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125103740","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Efficient assembly of lens objectives using sub-cell alignment turning","authors":"C. Buss","doi":"10.1117/12.2318687","DOIUrl":"https://doi.org/10.1117/12.2318687","url":null,"abstract":"Increasing demands for single lenses and lens systems influence in particular their production technology. It has become unfeasible – both technologically as well as financially – to manually adjust lenses in pre-assembled objective lenses. In recent years, it has thus become desirable to automate many steps of the process to chain. This enables new assembly strategies that allow for tilt and air gap accuracies in the micron range and drastically reduce the time and labor of manually correcting for astigmatism and coma at the same time.","PeriodicalId":422212,"journal":{"name":"Precision Optics Manufacturing","volume":"75 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-08-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122486531","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Tilted wave interferometry for testing large surfaces","authors":"A. Harsch, C. Pruss, A. Haberl, W. Osten","doi":"10.1117/12.2318573","DOIUrl":"https://doi.org/10.1117/12.2318573","url":null,"abstract":"Measuring large surfaces interferometrically is a straight forward established technology, as long as they are concave and spherical. The situation chnages completely if aspheres and freeforms have to be measured. The application of a Tilted Wave Interferometer opens up possibilities to measure large concave surfaces of any shape without compensation optics. For the investigation of large convex aspheres, it is necessary to make use of stitching methods. Due to the freeform capability of the Tilted Wave Interefrometer, it is possible to acquire larger subapertures compared to null interferometers. Therefore measurement and computation time are reduced.","PeriodicalId":422212,"journal":{"name":"Precision Optics Manufacturing","volume":"99 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-08-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125042010","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Testing high accuracy optics using the phase shifting point diffraction interferometer","authors":"N. Voznesenskiy, Mariia Voznesenskaia, D. Jha","doi":"10.1117/12.2316330","DOIUrl":"https://doi.org/10.1117/12.2316330","url":null,"abstract":"Advanced figuring technology has enabled manufacturing of high accuracy optics for precision applications. The measurement technologies to verify them are largely based on Fizeau interferometry, which is limited in terms of accuracy because of external accessories such as reference flat. Lack of appropriate verification method is adversely affecting the manufacturing and optimization of precision optics. In this paper, we explore a fundamentally different interferometry arrangement, D7 produced by Difrotec. A phase shifting point diffraction interferometer (PSPDI) and present measurement results for concave spheres with an accuracy of λ/1000 PV, and compared this full-shot result with wavefront maps obtained by subaperture stitching (SAS) to verify stitching accuracy. We also describe measurement of asphere cavity using SAS, with higher accuracy, λ/500 RMS, discuss strategies to measure concave/convex spheres and aspheres with R-number ≥ 0.5 with nanometer accuracy, and conclude with perspectives on the future applications of PSPDI D7.","PeriodicalId":422212,"journal":{"name":"Precision Optics Manufacturing","volume":"34 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-08-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"117320031","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"ABC-polishing","authors":"A. Haberl, J. Liebl, R. Rascher","doi":"10.1117/12.2318549","DOIUrl":"https://doi.org/10.1117/12.2318549","url":null,"abstract":"In the past, steadily increasing demands on the imaging properties of optics have led more and more precise spherical apertures. For a long time, these optical components have been produced in a satisfying quality using classic polishing methods such as pitch polishing. The advance of computer-controlled subaperture (SA) polishing techniques improved the accuracy of spheres. However, this new machine technology also made it possible to produce new lens geometries, such as aspheres. In contrast to classic polishing methods, the high determinism of SA polishing allows a very specific correction of the surface defect. The methods of magneto-rheological finishing (MRF) [1], [2] and ion beam figuring (IBF) [3], [4] stand out in particular because of the achievable shape accuracy. However, this leads to the fact that a principle of manufacturing \"As exact as possible, as precise as necessary\" [5] is often ignored. The optical surfaces often produced with unnecessary precision, result at least in increased processing times. The increasing interconnection of the production machines and the linking with databases already enables a consistent database to be established. It is possible to store measurements, process characteristics or tolerances for the individual production steps in a structured way. The difficulty, however, lies in the reasonable evaluation of the measurement data. This is where this publication comes in. The smart evaluation of the measurement data with the widespread Zernike polynomials should result in a classification, depending on the required manufacturing tolerance. In combination with the so-called ABC analysis, all surface defects can be categorized. In this way, an analytic breakdown of a - initially confusing - overall problem is made. With the aid of cost functions [6] an evaluation and consequently a deduction of actions is made possible. Thus, for example, the isolated processing of rotationally symmetrical errors in spiral mode, setup times and machining times can be reduced while avoiding mid spatial frequency errors (MSFE) at the same time.","PeriodicalId":422212,"journal":{"name":"Precision Optics Manufacturing","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-08-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125774119","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Spectrally controlled source for interferometric measurements of multiple surface cavities","authors":"C. Salsbury, J. Posthumus, Artur Olszak","doi":"10.1117/12.2318641","DOIUrl":"https://doi.org/10.1117/12.2318641","url":null,"abstract":"We present a new light source capable of locating interference fringes at an adjustable distance from the interferometer. The spectrum is electronically controlled in such a way that the fringes are limited to only one of the surfaces of the optics under test. With the new source it is straightforward, for example, to measure the parallel surfaces of thin glass plates and multiple surface cavities. Existing interferometers, as well as older systems, can be upgraded with this source. Traditional methods of interferometry are widely used and accepted for simple measurement configurations, but measurement accuracy can decrease rapidly with increasing measurement complexity. For example, coherent interferometry struggles to achieve accurate and repeatable results with the presence of any additional feedback surface in the measurement cavity due to temporally coherent back reflections. Conversely, incoherent interferometers can isolate single surfaces for measurement but require more complex interferometer system designs. As a result, many of these systems are limited in their dynamic range of measurable cavity sizes and present considerable difficulties in the alignment process, increasing total measurement time. Both methods are inherently restricted by the intrinsic properties of their respective source. Spectrally controlled interferometry (SCI) is a source driven method which inherits many advantages from both coherent and incoherent interferometry while evading typical limitations. The sources spectral properties are manipulated to produce a tunable coherence function in measurement space which allows control over the coherence envelope width, the fringe location, and the fringe phase. With this source realization, a host of measurement advantages which simplify measurement complexity and reduce total measurement time becomes available. One major application is the extinction of extraneous surface back reflections. Without any mechanical translation, realignment, or traditional piezoelectric transducers, front and back surfaces of planar optics can be isolated independently and complete phase shifting interferometric (PSI) measurements can be taken. Furthermore, because all control parameters are implemented at the source level, the spectrally controlled source is a good candidate for upgrading existing interferometer systems. In this paper, we present the theoretical background for this source and the implications of the method. Additionally, a multiple surface cavity measurement is provided as a means of demonstrating the spectrally controlled sources capability to isolate individual cavities from detrimental back reflections across a large dynamic range of measurable cavity sizes without mechanical realignment. A discussion of the implementation benefits and practical details will be included. Limitations and comparisons to alternative methods will be addressed, as well.","PeriodicalId":422212,"journal":{"name":"Precision Optics Manufacturing","volume":"77 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-08-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126240425","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Closed-loop next generation laser polishing","authors":"R. Rascher, C. Vogt, O. Fähnle, Daewook Kim","doi":"10.1117/12.2318749","DOIUrl":"https://doi.org/10.1117/12.2318749","url":null,"abstract":"A novel fabrication parameter controlling method for laser polishing processes called CLasso (Control of LASer Surface Optimization) is presented, monitoring within the footprint the smoothening process as well as the removal of ssd in situ. Therefore, it is possible to determine and control the optimum dwell time a footprint needs to stay at a certain point before moving further enabling a more stable and cost optimized polishing.","PeriodicalId":422212,"journal":{"name":"Precision Optics Manufacturing","volume":"11 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-08-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128948253","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Flatness metrology based on small-angle deflectometric procedures with electronic tiltmeters","authors":"G. Ehret, S. Laubach, M. Schulz","doi":"10.1117/12.2268288","DOIUrl":"https://doi.org/10.1117/12.2268288","url":null,"abstract":"The measurement of optical flats, e. g. synchrotron or XFEL mirrors, with single nanometer topography uncertainty is still challenging. At PTB, we apply for this task small-angle deflectometry in which the angle between the direction of the beam sent to the surface and the beam detected is small. Conventional deflectometric systems measure the surface angle with autocollimators whose light beam also represents the straightness reference. An advanced flatness metrology system was recently implemented at PTB that separates the straightness reference task from the angle detection task. We call it ‘Exact Autocollimation Deflectometric Scanning’ because the specimen is slightly tilted in such a way that at every scanning position the specimen is ‘exactly’ perpendicular to the reference light beam directed by a pentaprism to the surface under test. The tilt angle of the surface is then measured with an additional autocollimator. The advantage of the EADS method is that the two tasks (straightness reference and measurement of surface slope) are separated and each of these can be optimized independently. The idea presented in this paper is to replace this additional autocollimator by one or more electro-mechanical tiltmeters, which are typically faster and have a higher resolution than highly accurate commercially available autocollimators. We investigate the point stability and the linearity of a highly accurate electronic tiltmeter. The pros and cons of using tiltmeters in flatness metrology are discussed.","PeriodicalId":422212,"journal":{"name":"Precision Optics Manufacturing","volume":"16 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-06-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123048932","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Philipp M. Rinck, Sebastian Sitzberger, M. F. Zaeh
{"title":"Actuator design for vibration assisted machining of high performance materials with ultrasonically modulated cutting speed","authors":"Philipp M. Rinck, Sebastian Sitzberger, M. F. Zaeh","doi":"10.1117/12.2272133","DOIUrl":"https://doi.org/10.1117/12.2272133","url":null,"abstract":"In vibration assisted machining, an additional high-frequency oscillation is superimposed on the kinematics of the conventional machining process. This generates oscillations on the cutting edge in the range of a few micrometers, thereby causing a high-frequency change in the cutting speed or the feed. Consequently, a reduction of cutting forces, an increase of the tool life as well as an improvement of the workpiece quality can be achieved. In milling and grinding it has been shown that these effects are already partially present in the case of a vibration excitation in axial direction relative to the workpiece, which is perpendicular to the cutting direction. Further improvements of the process results can be achieved by superimposing a vibration in cutting direction and thus modifying the cutting speed at high frequency. The presented work shows the design of an ultrasonic actuator that enables vibration-assisted milling and grinding with ultrasonically modulated cutting speed. The actuator system superimposes a longitudinal torsional ultrasonic oscillation to the milling or grinding tool. It uses a bolt clamped Langevin transducer and a helically slotted horn, which degenerates the longitudinal vibration into a combined longitudinal torsional (L-T) vibration at the output surface. A finite element analysis is used to determine the vibration resonance frequency and mode shapes to maximize the torsional output. Afterwards, the simulation has been experimentally validated.","PeriodicalId":422212,"journal":{"name":"Precision Optics Manufacturing","volume":"29 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-06-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131909712","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
D. Walker, Guoyu Yu, A. Beaucamp, Matt Bibby, Hongyu Li, L. Mccluskey, S. Petrovic, Christina Reynolds
{"title":"More steps towards process automation for optical fabrication","authors":"D. Walker, Guoyu Yu, A. Beaucamp, Matt Bibby, Hongyu Li, L. Mccluskey, S. Petrovic, Christina Reynolds","doi":"10.1117/12.2275231","DOIUrl":"https://doi.org/10.1117/12.2275231","url":null,"abstract":"In the context of Industrie 4.0, we have previously described the roles of robots in optical processing, and their complementarity with classical CNC machines, providing both processing and automation functions. After having demonstrated robotic moving of parts between a CNC polisher and metrology station, and auto-fringe-acquisition, we have moved on to automate the wash-down operation. This is part of a wider strategy we describe in this paper, leading towards automating the decision-making operations required before and throughout an optical manufacturing cycle.","PeriodicalId":422212,"journal":{"name":"Precision Optics Manufacturing","volume":"29 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-06-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114715407","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}