ABC-polishing

A. Haberl, J. Liebl, R. Rascher
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Abstract

In the past, steadily increasing demands on the imaging properties of optics have led more and more precise spherical apertures. For a long time, these optical components have been produced in a satisfying quality using classic polishing methods such as pitch polishing. The advance of computer-controlled subaperture (SA) polishing techniques improved the accuracy of spheres. However, this new machine technology also made it possible to produce new lens geometries, such as aspheres. In contrast to classic polishing methods, the high determinism of SA polishing allows a very specific correction of the surface defect. The methods of magneto-rheological finishing (MRF) [1], [2] and ion beam figuring (IBF) [3], [4] stand out in particular because of the achievable shape accuracy. However, this leads to the fact that a principle of manufacturing "As exact as possible, as precise as necessary" [5] is often ignored. The optical surfaces often produced with unnecessary precision, result at least in increased processing times. The increasing interconnection of the production machines and the linking with databases already enables a consistent database to be established. It is possible to store measurements, process characteristics or tolerances for the individual production steps in a structured way. The difficulty, however, lies in the reasonable evaluation of the measurement data. This is where this publication comes in. The smart evaluation of the measurement data with the widespread Zernike polynomials should result in a classification, depending on the required manufacturing tolerance. In combination with the so-called ABC analysis, all surface defects can be categorized. In this way, an analytic breakdown of a - initially confusing - overall problem is made. With the aid of cost functions [6] an evaluation and consequently a deduction of actions is made possible. Thus, for example, the isolated processing of rotationally symmetrical errors in spiral mode, setup times and machining times can be reduced while avoiding mid spatial frequency errors (MSFE) at the same time.
ABC-polishing
过去,对光学成像性能的要求不断提高,导致越来越多的精确的球面孔径。长期以来,这些光学元件一直使用经典的抛光方法,如沥青抛光,以令人满意的质量生产。计算机控制子孔径(SA)抛光技术的发展提高了球体的精度。然而,这种新的机器技术也使生产新的透镜几何形状成为可能,例如球面。与经典抛光方法相比,SA抛光的高确定性允许对表面缺陷进行非常具体的修正。磁流变精加工(MRF)[1],[2]和离子束成形(IBF)[3],[4]的方法尤其突出,因为可以实现形状精度。然而,这导致了“尽可能精确,必要时尽可能精确”的制造原则[5]经常被忽视。光学表面通常以不必要的精度生产,至少导致加工时间的增加。生产机器的日益相互连接和与数据库的联系已经能够建立一个一致的数据库。可以以结构化的方式存储单个生产步骤的测量值、工艺特性或公差。但难点在于对测量数据的合理评价。这就是这本出版物的由来。使用广泛的泽尼克多项式对测量数据进行智能评估,应根据所需的制造公差进行分类。结合所谓的ABC分析,所有的表面缺陷都可以被分类。通过这种方式,对一个最初令人困惑的总体问题进行了分析分解。在成本函数[6]的帮助下,可以对行为进行评估,从而推导出行为。因此,例如,在螺旋模式下的旋转对称误差的隔离加工,设置时间和加工时间可以减少,同时避免中频误差(MSFE)。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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