光谱控制源干涉测量多个表面腔

C. Salsbury, J. Posthumus, Artur Olszak
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引用次数: 1

摘要

我们提出了一种新的光源,能够在距离干涉仪可调的距离上定位干涉条纹。光谱是电子控制的,这样条纹就被限制在被测光学器件的一个表面上。例如,有了新的光源,测量薄玻璃板的平行表面和多个表面空腔就很简单了。现有的干涉仪,以及旧的系统,可以用这个源升级。传统的干涉测量方法由于测量结构简单而被广泛使用和接受,但随着测量复杂性的增加,测量精度会迅速下降。例如,当测量腔中存在任何额外的反馈面时,由于时间相干反射,相干干涉测量难以获得准确和可重复的结果。相反,非相干干涉仪可以隔离单个表面进行测量,但需要更复杂的干涉仪系统设计。因此,许多这些系统在其可测量腔尺寸的动态范围内受到限制,并且在校准过程中存在相当大的困难,增加了总测量时间。这两种方法都受到各自源的内在特性的固有限制。光谱控制干涉法是一种源驱动的干涉方法,它既继承了相干干涉法和非相干干涉法的许多优点,又避免了典型的局限性。在测量空间中,对源的光谱特性进行操作,以产生可调谐的相干函数,从而可以控制相干包络宽度、条纹位置和条纹相位。通过这种源的实现,简化了测量复杂性,缩短了总测量时间,从而获得了一系列测量优势。一个主要的应用是消除无关表面的反射。无需任何机械平移、调整或传统的压电换能器,可以独立地隔离平面光学器件的前后表面,并进行完整的相移干涉测量(PSI)。此外,由于所有控制参数都在源级实现,因此光谱控制源是升级现有干涉仪系统的良好候选者。在本文中,我们介绍了这一来源的理论背景和该方法的含义。此外,提供了一个多表面空腔测量作为一种手段,证明光谱控制源能够在可测量的空腔尺寸的大动态范围内隔离单个空腔,而不需要机械调整。将包括对实现好处和实际细节的讨论。局限性和比较替代方法也将解决。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Spectrally controlled source for interferometric measurements of multiple surface cavities
We present a new light source capable of locating interference fringes at an adjustable distance from the interferometer. The spectrum is electronically controlled in such a way that the fringes are limited to only one of the surfaces of the optics under test. With the new source it is straightforward, for example, to measure the parallel surfaces of thin glass plates and multiple surface cavities. Existing interferometers, as well as older systems, can be upgraded with this source. Traditional methods of interferometry are widely used and accepted for simple measurement configurations, but measurement accuracy can decrease rapidly with increasing measurement complexity. For example, coherent interferometry struggles to achieve accurate and repeatable results with the presence of any additional feedback surface in the measurement cavity due to temporally coherent back reflections. Conversely, incoherent interferometers can isolate single surfaces for measurement but require more complex interferometer system designs. As a result, many of these systems are limited in their dynamic range of measurable cavity sizes and present considerable difficulties in the alignment process, increasing total measurement time. Both methods are inherently restricted by the intrinsic properties of their respective source. Spectrally controlled interferometry (SCI) is a source driven method which inherits many advantages from both coherent and incoherent interferometry while evading typical limitations. The sources spectral properties are manipulated to produce a tunable coherence function in measurement space which allows control over the coherence envelope width, the fringe location, and the fringe phase. With this source realization, a host of measurement advantages which simplify measurement complexity and reduce total measurement time becomes available. One major application is the extinction of extraneous surface back reflections. Without any mechanical translation, realignment, or traditional piezoelectric transducers, front and back surfaces of planar optics can be isolated independently and complete phase shifting interferometric (PSI) measurements can be taken. Furthermore, because all control parameters are implemented at the source level, the spectrally controlled source is a good candidate for upgrading existing interferometer systems. In this paper, we present the theoretical background for this source and the implications of the method. Additionally, a multiple surface cavity measurement is provided as a means of demonstrating the spectrally controlled sources capability to isolate individual cavities from detrimental back reflections across a large dynamic range of measurable cavity sizes without mechanical realignment. A discussion of the implementation benefits and practical details will be included. Limitations and comparisons to alternative methods will be addressed, as well.
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