{"title":"闭环下一代激光抛光","authors":"R. Rascher, C. Vogt, O. Fähnle, Daewook Kim","doi":"10.1117/12.2318749","DOIUrl":null,"url":null,"abstract":"A novel fabrication parameter controlling method for laser polishing processes called CLasso (Control of LASer Surface Optimization) is presented, monitoring within the footprint the smoothening process as well as the removal of ssd in situ. Therefore, it is possible to determine and control the optimum dwell time a footprint needs to stay at a certain point before moving further enabling a more stable and cost optimized polishing.","PeriodicalId":422212,"journal":{"name":"Precision Optics Manufacturing","volume":"11 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2018-08-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Closed-loop next generation laser polishing\",\"authors\":\"R. Rascher, C. Vogt, O. Fähnle, Daewook Kim\",\"doi\":\"10.1117/12.2318749\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"A novel fabrication parameter controlling method for laser polishing processes called CLasso (Control of LASer Surface Optimization) is presented, monitoring within the footprint the smoothening process as well as the removal of ssd in situ. Therefore, it is possible to determine and control the optimum dwell time a footprint needs to stay at a certain point before moving further enabling a more stable and cost optimized polishing.\",\"PeriodicalId\":422212,\"journal\":{\"name\":\"Precision Optics Manufacturing\",\"volume\":\"11 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2018-08-07\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Precision Optics Manufacturing\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1117/12.2318749\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Precision Optics Manufacturing","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.2318749","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1
摘要
提出了一种新的激光抛光工艺参数控制方法——激光表面优化控制(CLasso, Control of laser Surface Optimization)，该方法可以在光足迹内监测光滑过程以及原位ssd的去除。因此，在进一步实现更稳定和成本优化的抛光之前，可以确定和控制足迹需要停留在某一点上的最佳停留时间。
A novel fabrication parameter controlling method for laser polishing processes called CLasso (Control of LASer Surface Optimization) is presented, monitoring within the footprint the smoothening process as well as the removal of ssd in situ. Therefore, it is possible to determine and control the optimum dwell time a footprint needs to stay at a certain point before moving further enabling a more stable and cost optimized polishing.
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