Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components最新文献_第8页

Antireflective surface patterned by rolling mask lithography 用滚动掩模光刻制成的抗反射表面

Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components Pub Date : 2014-03-07 DOI: 10.1117/12.2037415

O. Seitz, J. Geddes, Mukti Aryal, Joseph Perez, Jonathan K. Wassei, I. Mcmackin, B. Kobrin

{"title":"Antireflective surface patterned by rolling mask lithography","authors":"O. Seitz, J. Geddes, Mukti Aryal, Joseph Perez, Jonathan K. Wassei, I. Mcmackin, B. Kobrin","doi":"10.1117/12.2037415","DOIUrl":"https://doi.org/10.1117/12.2037415","url":null,"abstract":"A growing number of commercial products such as displays, solar panels, light emitting diodes (LEDs and OLEDs), automotive and architectural glass are driving demand for glass with high performance surfaces that offer anti-reflective, self-cleaning, and other advanced functions. State-of-the-art coatings do not meet the desired performance characteristics or cannot be applied over large areas in a cost-effective manner. “Rolling Mask Lithography” (RML™) enables highresolution lithographic nano-patterning over large-areas at low-cost and high-throughput. RML is a photolithographic process performed using ultraviolet (UV) illumination transmitted through a soft cylindrical mask as it rolls across a substrate. Subsequent transfer of photoresist patterns into the substrate is achieved using an etching process, which creates a nanostructured surface. The current generation exposure tool is capable of patterning one-meter long substrates with a width of 300 mm. High-throughput and low-cost are achieved using continuous exposure of the resist by the cylindrical photomask. Here, we report on significant improvements in the application of RML™ to fabricate anti-reflective surfaces. Briefly, an optical surface can be made antireflective by “texturing” it with a nano-scale pattern to reduce the discontinuity in the index of refraction between the air and the bulk optical material. An array of cones, similar to the structure of a moth’s eye, performs this way. Substrates are patterned using RML™ and etched to produce an array of cones with an aspect ratio of 3:1, which decreases the reflectivity below 0.1%.","PeriodicalId":395835,"journal":{"name":"Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components","volume":"35 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128864562","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 5

Structural colour of porous dielectrics processed by direct laser write technique 用激光直接刻写技术加工多孔介质的结构颜色

Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components Pub Date : 2014-03-07 DOI: 10.1117/12.2038666

V. Mizeikis, V. Purlys, R. Buividas, S. Juodkazis

引用次数: 1

Isolating the negative stiffness region of a buckled Si/SiO2 membrane 隔离屈曲Si/SiO2膜的负刚度区

Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components Pub Date : 2014-03-07 DOI: 10.1117/12.2037383

Kyle K. Ziegler, R. Lake, R. Coutu

引用次数: 0

Wafer-level vacuum-packaged two-axis MEMS scanning mirror for pico-projector application 用于微型投影仪的晶圆级真空封装双轴MEMS扫描镜

Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components Pub Date : 2014-03-07 DOI: 10.1117/12.2038249

U. Hofmann, F. Senger, J. Janes, C. Mallas, V. Stenchly, T. von Wantoch, H. Quenzer, M. Weiss

引用次数: 18

MEMS tactile display: from fabrication to characterization MEMS触觉显示器:从制造到表征

Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components Pub Date : 2014-03-07 DOI: 10.1117/12.2044127

N. Miki, Yumi Kosemura, J. Watanabe, H. Ishikawa

{"title":"MEMS tactile display: from fabrication to characterization","authors":"N. Miki, Yumi Kosemura, J. Watanabe, H. Ishikawa","doi":"10.1117/12.2044127","DOIUrl":"https://doi.org/10.1117/12.2044127","url":null,"abstract":"We report fabrication and characterization of MEMS-based tactile display that can display users various tactile information, such as Braille codes and surface textures. The display consists of 9 micro-actuators that are equipped with hydraulic displacement amplification mechanism (HDAM) to achieve large enough displacement to stimulate the human tactile receptors. HDAM encapsulates incompressible liquids. We developed a liquid encapsulation process, which we termed as Bonding-in-Liquid Technique, where bonding with a UV-curable resin in glycerin is conducted in the liquid, which prevented interfusion of air bubbles and deformation of the membrane during the bonding. HDAM successfully amplified the displacement generated by piezoelectric actuators by a factor of 6. The display could virtually produce “rough” and “smooth” surfaces, by controlling the vibration frequency, displacement, and the actuation periods of an actuator until the adjacent actuator was driven. We introduced a sample comparison method to characterize the surfaces, which involves human tactile sensation. First, we prepared samples whose mechanical properties are known. We displayed a surface texture to the user by controlling the parameters and then, the user selects a sample that has the most similar surface texture. By doing so, we can correlate the parameters with the mechanical properties of the sample as well as find the sets of the parameters that can provide similar tactile information to many users. The preliminary results with respect to roughness and hardness is presented.","PeriodicalId":395835,"journal":{"name":"Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components","volume":"14 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121316576","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 2

MEMS Fabry-Perot interferometer with Si-air mirrors for mid- and thermal infrared 用于中红外和热红外的硅空气反射镜MEMS法布里-珀罗干涉仪

Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components Pub Date : 2014-03-07 DOI: 10.1117/12.2037915

M. Tuohiniemi, A. Näsilä, A. Akujärvi

{"title":"MEMS Fabry-Perot interferometer with Si-air mirrors for mid- and thermal infrared","authors":"M. Tuohiniemi, A. Näsilä, A. Akujärvi","doi":"10.1117/12.2037915","DOIUrl":"https://doi.org/10.1117/12.2037915","url":null,"abstract":"We studied how a surface-micromachined Fabry-Perot interferometer, realized with Si / air-gap distributed Bragg reflectors, would perform at the middle-infrared wavelengths. Compared with traditional solid-film pairs, this Si-FPI technology features better index contrast, which enables wider stop band and potentially higher resolution. Four different designs of interferometers were prepared and compared. Two designs apply the solid-film reflectors of Si/SiO2 structure. Their data is exploited as a reference of a middle-infrared interferometer and, as a template for mapping the performance from the simulation results to the measured data. The third design operates at the thermal infrared and it was our first embodiment with the Si/air-gap mirrors. The performance, reported earlier, is here referred to for estimating the technology scalability down to shorter wavelengths. Finally, we realized a non-tunable proof-of-concept version of the Si/air-gap technology for middle infrared. The measured data is mapped into an estimate of the achievable performance of a tunable version. We present the transmission and resolution data and argument the simulation models that reproduce the data. The prediction for the tunable middle-infrared Si-FPI is then presented. The results indicate that such a device is expected to have two-fold better resolution and a clearly wider stop band, compared with the prior art.","PeriodicalId":395835,"journal":{"name":"Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components","volume":"35 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116739482","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 2

Use of high-radiant flux, high-resolution DMD light engines in industrial applications 在工业应用中使用高辐射通量，高分辨率DMD光引擎

Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components Pub Date : 2014-03-07 DOI: 10.1117/12.2037565

A. Müller, S. Ram

{"title":"Use of high-radiant flux, high-resolution DMD light engines in industrial applications","authors":"A. Müller, S. Ram","doi":"10.1117/12.2037565","DOIUrl":"https://doi.org/10.1117/12.2037565","url":null,"abstract":"The field of application of industrial projectors is growing day by day. New Digital Micromirror Device (DMD) - based applications like 3D printing, 3D scanning, Printed Circuit Board (PCB) board printing and others are getting more and more sophisticated. The technical demands for the projection system are rising as new and more stringent requirements appear. The specification for industrial projection systems differ substantially from the ones of business and home beamers. Beamers are designed to please the human eye. Bright colors and image enhancement are far more important than uniformity of the illumination or image distortion. The human eye, followed by the processing of the brain can live with quite high intensity variations on the screen and image distortion. On the other hand, a projector designed for use in a specialized field has to be tailored regarding its unique requirements in order to make no quality compromises. For instance, when the image is projected onto a light sensitive resin, a good uniformity of the illumination is crucial for good material hardening (curing) results. The demands on the hardware and software are often very challenging. In the following we will review some parameters that have to be considered carefully for the design of industrial projectors in order to get the optimum result without compromises.","PeriodicalId":395835,"journal":{"name":"Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components","volume":"106 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121121669","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Dynamically reconfigurable framework for pixel-level visible light communication projector 像素级可见光通信投影仪的动态可重构框架

Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components Pub Date : 2014-03-07 DOI: 10.1117/12.2041936

Leijie Zhou, S. Fukushima, T. Naemura

引用次数: 15

Laser micromachining of oxygen reduced graphene-oxide films 氧还原氧化石墨烯薄膜的激光微加工

Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components Pub Date : 2014-03-07 DOI: 10.1117/12.2038423

Dogan Sinar, G. Knopf, S. Nikumb, A. Andrushchenko

{"title":"Laser micromachining of oxygen reduced graphene-oxide films","authors":"Dogan Sinar, G. Knopf, S. Nikumb, A. Andrushchenko","doi":"10.1117/12.2038423","DOIUrl":"https://doi.org/10.1117/12.2038423","url":null,"abstract":"Non-conductive graphene-oxide (GO) inks can be synthesized from inexpensive graphite powders and deposited on functionalized flexible substrates using inkjet printing technology. Once deposited, the electrical conductivity of the GO film can be restored through laser assisted thermal reduction. Unfortunately, the inkjet nozzle diameter (~40μm) places a limit on the printed feature size. In contrast, a tightly focused femtosecond pulsed laser can create precise micro features with dimensions in the order of 2 to 3 μm. The smallest feature size produced by laser microfabrication is a function of the laser beam diameter, power level, feed rate, material characteristics and spatial resolution of the micropositioning system. Laser micromachining can also remove excess GO film material adjacent to the electrode traces and passive electronic components. Excess material removal is essential for creating stable oxygen-reduced graphene-oxide (rGO) printed circuits because electron buildup along the feature edges will alter the conductivity of the non-functional film. A study on the impact of laser ablation on the GO film and the substrate are performed using a 775nm, 120fs pulsed laser. The average laser power was 25mW at a spot size of ~ 5μm, and the feed rate was 1000-1500mm/min. Several simple microtraces were fabricated and characterized in terms of electrical resistance and surface topology.","PeriodicalId":395835,"journal":{"name":"Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components","volume":"13 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126635804","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 4

Microsecond reconfigurable NxN data-communication switch using DMD 使用DMD的微秒可重构NxN数据通信交换机

Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components Pub Date : 2014-03-07 DOI: 10.1117/12.2036780

P. Blanche, A. Miles, B. Lynn, J. Wissinger, D. Carothers, R. Norwood, N. Peyghambarian

{"title":"Microsecond reconfigurable NxN data-communication switch using DMD","authors":"P. Blanche, A. Miles, B. Lynn, J. Wissinger, D. Carothers, R. Norwood, N. Peyghambarian","doi":"10.1117/12.2036780","DOIUrl":"https://doi.org/10.1117/12.2036780","url":null,"abstract":"We present here the use the DMD as a diffraction-based optical switch, where Fourier diffraction patterns are used to steer the incoming beams to any output configuration. We have implemented a single-mode fiber coupled N X N switch and demonstrated its ability to operate over the entire telecommunication C-band centered at 1550 nm. The all-optical switch was built primarily with off-the-shelf components and a Texas Instruments DLP7000™with an array of 1024 X 768 micromirrors. This DMD is capable of switching 100 times faster than currently available technology (3D MOEMS). The switch is robust to typical failure modes, protocol and bit-rate agnostic, and permits full reconfigurable optical add drop multiplexing (ROADM). The switch demonstrator was inserted into a networking testbed for the majority of the measurements. The testbed assembled under the Center for Integrated Access Networks (ClAN), a National Science Foundation (NSF) Engineering Research Center (ERC), provided an environment in which to simulate and test the data routing functionality of the switch. A Fujitsu Flashwave 9500 PS was used to provide the data signal, which was sent through the switch and received by a second Flashwave node. We successfully transmitted an HD video stream through a switched channel without any measurable data loss.","PeriodicalId":395835,"journal":{"name":"Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components","volume":"53 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127475751","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 2