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2009 IEEE International Conference on Automation Science and Engineering最新文献

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Optimum sampling for track PEB CD Integrated Metrology 轨道PEB CD综合计量的最佳采样
2009 IEEE International Conference on Automation Science and Engineering Pub Date : 2009-08-22 DOI: 10.1109/COASE.2009.5234083
Argon Chen, Sean Hsueh, J. Blue
{"title":"Optimum sampling for track PEB CD Integrated Metrology","authors":"Argon Chen, Sean Hsueh, J. Blue","doi":"10.1109/COASE.2009.5234083","DOIUrl":"https://doi.org/10.1109/COASE.2009.5234083","url":null,"abstract":"In semiconductor manufacturing, metrology of critical dimension (CD) is to ensure the quality of complicated processing steps and thus the quality of the fabricated chips by discovering faults or improvement opportunities. CD metrology has been considered the integrated part of the IC design and fabrication processes. Integrated Metrology (IM) is an enabler to achieve wafer-level control for technology nodes below 45nm because of its capability of using the tool queue time to collect CD measurements and to avoid sampling lag to the control algorithms. How to maneuver the CD IM capability becomes a great challenge to the litho/etch processes. Focus of this research will be on the CD IM for the Coater/Developer Track systems. We develop an IM sampling strategy with an optimum sampling plan to maximize the wafer-level control effectiveness subjected to the throughput, APC and SPC constraints. The optimum sampling problem is formulated and solved as an Integer Programming problem. Actual CD data are used to demonstrate and verify the proposed sampling methods.","PeriodicalId":386046,"journal":{"name":"2009 IEEE International Conference on Automation Science and Engineering","volume":"253 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-08-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133358433","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
A modular petri net based architecture to model manufacturing systems exhibiting resource and timing uncertainties 基于模块化petri网的制造系统资源和时间不确定性建模体系结构
2009 IEEE International Conference on Automation Science and Engineering Pub Date : 2009-08-22 DOI: 10.1109/COASE.2009.5234151
Hyunsoo Lee, A. Banerjee
{"title":"A modular petri net based architecture to model manufacturing systems exhibiting resource and timing uncertainties","authors":"Hyunsoo Lee, A. Banerjee","doi":"10.1109/COASE.2009.5234151","DOIUrl":"https://doi.org/10.1109/COASE.2009.5234151","url":null,"abstract":"Modeling of a manufacturing system consisting of many processes typically requires extensive assumptions and approximations during design stage. A modeling methodology that can capture the complexities of a process and existing uncertainties in a reconfigurable manner is needed to reduce the extent of the assumptions and approximations. A Petri Net approach is one of the effective methodologies for modeling reconfigurable manufacturing system (RMS). A fuzzy colored Petri Net with stochastic time delay (FCPN-std) concept is proposed here, which is shown as an effective modeling methodology to incorporate different types of uncertainties using fuzzy logic and stochastic time delay. A 5-stage modeling method is proposed to capture complexities in manufacturing processes with the help of FCPN-std and parametric Petri Net modules.","PeriodicalId":386046,"journal":{"name":"2009 IEEE International Conference on Automation Science and Engineering","volume":"55 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-08-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132423387","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 12
Automated modular bacterial filtering system with embeddable microfluidic chips 可嵌入微流控芯片的自动化模块化细菌过滤系统
2009 IEEE International Conference on Automation Science and Engineering Pub Date : 2009-08-22 DOI: 10.1109/COASE.2009.5234162
P. Saketi, J. Kreutzer, Katja Niemelä, L. Välimaa, P. Kallio
{"title":"Automated modular bacterial filtering system with embeddable microfluidic chips","authors":"P. Saketi, J. Kreutzer, Katja Niemelä, L. Välimaa, P. Kallio","doi":"10.1109/COASE.2009.5234162","DOIUrl":"https://doi.org/10.1109/COASE.2009.5234162","url":null,"abstract":"This paper introduces an automated bacterial filtering system which has three unique advantages comparing to current available systems. Firstly, it is an automatic system which minimizes the human interaction with potentially hazardous bacterial samples, eliminates human errors and makes it suitable for frequent bacterial filtering procedures. Secondly, it provides an interface between milliliter volumes of sample and microfluidic chips requiring samples in microliter volumes. Thirdly, both bacteria collected on the filter and filtrate passed through the filter can be collected for analysis. The modular design of the system provides a large variety of filters for different applications.","PeriodicalId":386046,"journal":{"name":"2009 IEEE International Conference on Automation Science and Engineering","volume":" 36","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-08-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"113949206","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Knowledge sciences in services automation: Integration models and perspectives for service centers 服务自动化中的知识科学:服务中心的集成模型和观点
2009 IEEE International Conference on Automation Science and Engineering Pub Date : 2009-08-22 DOI: 10.1109/COASE.2009.5234085
R. Akella, Zuobing Xu, Joel Barajas, Karla L. Caballero Barajas
{"title":"Knowledge sciences in services automation: Integration models and perspectives for service centers","authors":"R. Akella, Zuobing Xu, Joel Barajas, Karla L. Caballero Barajas","doi":"10.1109/COASE.2009.5234085","DOIUrl":"https://doi.org/10.1109/COASE.2009.5234085","url":null,"abstract":"We provide an automation perspective on modeling knowledge services. We consider a service center as the atomic unit for building networks of enterprises, suppliers, and customers. We provide an approach to integrate knowledge and resource management in service centers. We describe specific models and solutions for optimized information and knowledge retrieval, relevance feedback and active learning and associated performance results. We also outline an approach for incorporating topic detection, context, social networks and collaboration, and combined document and expert ranking/identification. We also sketch an approach for combining knowledge retrieval with system resource optimization of the service engineers and experts to provide optimized responsiveness.","PeriodicalId":386046,"journal":{"name":"2009 IEEE International Conference on Automation Science and Engineering","volume":"73 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-08-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116824619","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
Efficient optimization of building emergency evacuation considering social bond of evacuees 考虑疏散人员社会关系的应急疏散建筑的高效优化
2009 IEEE International Conference on Automation Science and Engineering Pub Date : 2009-08-22 DOI: 10.1109/COASE.2009.5234131
Peng Wang, P. Luh, Shi-Chung Chang, K. L. Marsh
{"title":"Efficient optimization of building emergency evacuation considering social bond of evacuees","authors":"Peng Wang, P. Luh, Shi-Chung Chang, K. L. Marsh","doi":"10.1109/COASE.2009.5234131","DOIUrl":"https://doi.org/10.1109/COASE.2009.5234131","url":null,"abstract":"In building emergency evacuation, the social bond of evacuees is a critical feature related to blocking in egress, and effective crowd guidance should consider this feature to prevent or mitigate such undesired blocking. Besides, the time-criticality of emergencies also requires an efficient computation method, and how to efficiently optimize crowd guidance considering the social bond effect is then identified as a problem to be addressed. By extending the egress model of Wang et al., 2008, this paper parameterizes the relation between the social bond of evacuees and the blocking event in egress. The optimization problem is then formulated to optimize crowd guidance with such advance of modeling. To efficiently optimize the guidance, our original computation method is improved in several aspects: reducing decision variables by infrequent update of guidance, reducing the decision space based on the prior information on the building layout, and approximating the state transition probability by discretizing probability measures. An example in the literature is tested to demonstrate improvement on our modeling and methods.","PeriodicalId":386046,"journal":{"name":"2009 IEEE International Conference on Automation Science and Engineering","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-08-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132370473","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 23
Towards a sociable robot guide which respects and supports the human activity 走向尊重和支持人类活动的社交机器人向导
2009 IEEE International Conference on Automation Science and Engineering Pub Date : 2009-08-22 DOI: 10.1109/COASE.2009.5234148
A. Pandey, R. Alami
{"title":"Towards a sociable robot guide which respects and supports the human activity","authors":"A. Pandey, R. Alami","doi":"10.1109/COASE.2009.5234148","DOIUrl":"https://doi.org/10.1109/COASE.2009.5234148","url":null,"abstract":"This paper presents a framework to provide the human with the flexibility to behave naturally, while being guided by a mobile robot. A sociable robot should not expect that the human will always follow the exact trajectory of the robot or will always maintain a fixed distance with robot. Moreover human can choose either to accompany or to follow the robot during the guiding. Robot should also not expect that human will always support the guiding. Human may temporarily suspend the joint commitment of guiding process, due to other interesting tasks and may completely abandon the path expected by robot. As a 'social' guide, robot should not only tolerate human diverse behaviors but also try to adapt its path to support the human activity as well as influence the human path towards the goal. It should take appropriate decision about when, where and how to deviate, as the very frequent or unnatural maneuvers of robot will make the human feel uncomfortable. In this paper we present a framework of monitoring and adapting to the human commitment on the joint task, and carrying out appropriate and goal oriented re-engagement attempts, if required, from the view point of guiding.","PeriodicalId":386046,"journal":{"name":"2009 IEEE International Conference on Automation Science and Engineering","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-08-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133490244","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 7
Second-order optimal estimation of slip state for a simple slip-steered vehicle 简单滑移转向车辆滑移状态的二阶最优估计
2009 IEEE International Conference on Automation Science and Engineering Pub Date : 2009-08-22 DOI: 10.1109/COASE.2009.5234155
T. Caldwell, T. Murphey
{"title":"Second-order optimal estimation of slip state for a simple slip-steered vehicle","authors":"T. Caldwell, T. Murphey","doi":"10.1109/COASE.2009.5234155","DOIUrl":"https://doi.org/10.1109/COASE.2009.5234155","url":null,"abstract":"We present a method to optimally estimate when a slip state transition occurs for a slip-steered vehicle. A slip-steered vehicle's contact state with the ground must slip sideways in order for the vehicle to turn. This slipping generates uncertainties for an autonomous controller. These uncertainties can be be reduced if an estimate of when the vehicle switches between slipping and sticking is provided to the controller. We present an estimator that optimally determines when a switch between slipping and sticking occurs by comparing simulations of the slip-steered vehicle with its measured configurations. We demonstrate that steepest descent-based optimization has slow convergence and show how this issue can be rectified by using Newton's Method. This is a primary stress of our paper. The paper concludes with the introduction of an algorithm that uses second-order optimization in a manner that is appropriate for online implementation.","PeriodicalId":386046,"journal":{"name":"2009 IEEE International Conference on Automation Science and Engineering","volume":"139 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-08-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127212515","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 7
A path planning approach to (dis)assembly sequencing 一种(非)装配序列的路径规划方法
2009 IEEE International Conference on Automation Science and Engineering Pub Date : 2009-08-22 DOI: 10.1109/COASE.2009.5234177
D. Le, Juan Cortés, T. Siméon
{"title":"A path planning approach to (dis)assembly sequencing","authors":"D. Le, Juan Cortés, T. Siméon","doi":"10.1109/COASE.2009.5234177","DOIUrl":"https://doi.org/10.1109/COASE.2009.5234177","url":null,"abstract":"The paper describes a new method for simultaneously (dis)assembly sequencing and path planning. Indeed, both are parts of a same problem that can be formulated in a general path planning framework. Based on this formulation, the algorithm proposed in this paper extends a popular sampling-based path planner, RRT, to solve general (dis)assembly planning problems involving objects with arbitrary shapes, and possibly requiring non-monotonic (dis)assembly sequences. The method does not require complex geometric computations, and is easy to implement. Experimental results show the efficiency of the method for solving a large class of problems.","PeriodicalId":386046,"journal":{"name":"2009 IEEE International Conference on Automation Science and Engineering","volume":"44 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-08-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127235251","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 37
Hybrid Input Output Automata for composable conveyor systems 可组合输送系统的混合输入输出自动机
2009 IEEE International Conference on Automation Science and Engineering Pub Date : 2009-08-22 DOI: 10.1109/COASE.2009.5234093
S. Mitra, Shivakumar Sastry
{"title":"Hybrid Input Output Automata for composable conveyor systems","authors":"S. Mitra, Shivakumar Sastry","doi":"10.1109/COASE.2009.5234093","DOIUrl":"https://doi.org/10.1109/COASE.2009.5234093","url":null,"abstract":"We present Hybrid Input/Output Automata (HIOA) models as a basis for the design and analysis of a class of composable conveyor systems. These conveyor systems are realized by composing instances of two kinds of units, namely segments and turns. A microcontroller, which is physically wired to the sensors and actuators on the unit, regulates the local operations at the unit level. Microcontrollers that regulate physically adjacent units interact with each other over wireless links.","PeriodicalId":386046,"journal":{"name":"2009 IEEE International Conference on Automation Science and Engineering","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-08-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129824265","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Abstractions and algorithms for assembly tasks with large numbers of robots and parts 具有大量机器人和零件的装配任务的抽象和算法
2009 IEEE International Conference on Automation Science and Engineering Pub Date : 2009-08-22 DOI: 10.1109/COASE.2009.5234096
S. Berman, Vijay R. Kumar
{"title":"Abstractions and algorithms for assembly tasks with large numbers of robots and parts","authors":"S. Berman, Vijay R. Kumar","doi":"10.1109/COASE.2009.5234096","DOIUrl":"https://doi.org/10.1109/COASE.2009.5234096","url":null,"abstract":"We present a decentralized, scalable approach to designing a reconfigurable manufacturing system in which a swarm of robots assembles heterogeneous parts into target amounts of products. The sequence of part assemblies is determined by interactions between robots in a decentralized manner in real time. Our methodology is based on deriving a continuous abstraction of the system from chemical reaction models and formulating the strategy as a problem of selecting rates of assembly and disassembly. The rates are mapped onto probabilities that define stochastic control policies for individual robots, which then produce the desired aggregate performance. We illustrate our approach using a physics-based simulator with examples involving 15 robots and two types of final products.","PeriodicalId":386046,"journal":{"name":"2009 IEEE International Conference on Automation Science and Engineering","volume":"118 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-08-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129064215","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
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