T. Mizuno, M. Iwase, H. Niiyama, T. Shibata, K. Fujisaki, T. Nakasugi, A. Toriumi, Y. Ushiku
{"title":"Performance fluctuations of 0.10 /spl mu/m MOSFETs-limitation of 0.1 /spl mu/m ULSIs","authors":"T. Mizuno, M. Iwase, H. Niiyama, T. Shibata, K. Fujisaki, T. Nakasugi, A. Toriumi, Y. Ushiku","doi":"10.1109/VLSIT.1994.324401","DOIUrl":"https://doi.org/10.1109/VLSIT.1994.324401","url":null,"abstract":"The authors have recently demonstrated that 0.1 /spl mu/m gate length CMOS devices normally operate at room temperature. Moreover, they have experimentally shown that the threshold voltage of MOSFETs fluctuates due to the statistical fluctuations of channel dopant number, n/sub a/, which increases by reducing the gate length. Even if the individual 0.1 /spl mu/m MOSFETs operate normally, can one succeed in fabricating 0.1 /spl mu/m region ULSIs without failure ? To obtain the answer, it is necessary to study the performance fluctuations of 0.1 /spl mu/m region MOSFETs. This paper discusses the peculiar fluctuations of the threshold voltage and the transconductance of 0.10 /spl mu/m gate length NMOSFETs, using an 8 k MOSFET array and mentions their physical mechanism. Finally, the performance fluctuations of 0.1 /spl mu/m region ULSIs are estimated.<<ETX>>","PeriodicalId":378128,"journal":{"name":"Proceedings of 1994 VLSI Technology Symposium","volume":"24 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1994-06-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126524264","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Novel annular illumination using controlled phase and transparency","authors":"T. Sugihara, S. Mori, T. Fukushima, J. Takagi","doi":"10.1109/VLSIT.1994.324438","DOIUrl":"https://doi.org/10.1109/VLSIT.1994.324438","url":null,"abstract":"An off axis illumination is valid to enlarge resolution limit and depth of focus (DOF) for narrow pitch patterns. While in wide pitch patterns, the DOF is remarkably inferior to conventional illumination. A novel annular illumination has been achieved by amplitude superposition of off axis and on axis illuminations which are controlled inverse phases with appropriate transmittance. It has been confirmed, using a new optical filter, that this method can improve the DOF over wide range of pattern pitches maintaining resolution capability of under 0.25 /spl mu/m.<<ETX>>","PeriodicalId":378128,"journal":{"name":"Proceedings of 1994 VLSI Technology Symposium","volume":"79 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1994-06-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126315292","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
U. Sharma, Kuo-Tung Chang, M. Woo, Ko-Min Chang, J.R. Yeargain
{"title":"A 0.5 /spl mu/m technology for advanced microcontroller applications","authors":"U. Sharma, Kuo-Tung Chang, M. Woo, Ko-Min Chang, J.R. Yeargain","doi":"10.1109/VLSIT.1994.324374","DOIUrl":"https://doi.org/10.1109/VLSIT.1994.324374","url":null,"abstract":"The paper describes a modular 0.5 /spl mu/m, n+/p+ poly, Ti-salicided, double poly, triple metal technology combining high performance digital logic, precision analog components and non-volatile memory. The non-volatile memory is a simple, split-gate flash EEPROM which consumes little power during program, erase and read operations. Because of the low power/low voltage operation of individual devices, the overall technology is ideally suited for applications in high speed communication, computing and battery powered portable systems.<<ETX>>","PeriodicalId":378128,"journal":{"name":"Proceedings of 1994 VLSI Technology Symposium","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1994-06-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133571090","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
K. Imai, Y. Kinoshita, T. Yamazaki, T. Tatsumi, T. Tashiro
{"title":"A low donor concentration retrograde profile Si bipolar transistor for low-temperature BiCMOS LSI's","authors":"K. Imai, Y. Kinoshita, T. Yamazaki, T. Tatsumi, T. Tashiro","doi":"10.1109/VLSIT.1994.324408","DOIUrl":"https://doi.org/10.1109/VLSIT.1994.324408","url":null,"abstract":"To improve low-temperature characteristics of n-p-n Si homojunction bipolar transistors (BJT's), an epitaxial base with a low donor concentration and a retrograde boron profile, is proposed. A fabricated device represents a 3 times higher current gain (/spl beta/) and a 2 times higher cutoff frequency (f/sub T/) than those for a conventional base Si BJT at 83 K.<<ETX>>","PeriodicalId":378128,"journal":{"name":"Proceedings of 1994 VLSI Technology Symposium","volume":"50 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1994-06-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132941101","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
T. Hashimoto, M. Aoki, T. Yamanaka, Y. Kamigaki, T. Nishida
{"title":"1/f noise in poly-Si MOSFET and strong correlation with oxide traps and grain boundaries","authors":"T. Hashimoto, M. Aoki, T. Yamanaka, Y. Kamigaki, T. Nishida","doi":"10.1109/VLSIT.1994.324442","DOIUrl":"https://doi.org/10.1109/VLSIT.1994.324442","url":null,"abstract":"The poly-Si MOSFET has become a key device for mega-bit SRAMs. Performance and stability are, however, still insufficient owing to the poor quality of active poly-Si films, gate oxides and their interfaces. We have studied 1/f noise in poly-Si MOSFETs, since this noise measurement is an effective approach to characterizing the MOS interface and gate oxides. We found the noise very strong compared with that in single crystalline-Si (bulk-Si) MOSFETs. It is important to clarify the generation mechanism of such large noise, in order to realize high-performance, high-stability, low-noise devices. In this paper, we introduce a noise-generation mechanism that is characteristic of poly-Si MOSFETs. It is related to the quality of gate oxides and poly-Si films, that is, the oxide trap and grain boundary properties. Also we explain a method for reducing the noise. Furthermore, we demonstrate that the 1/f noise measurement is very useful for process monitoring.<<ETX>>","PeriodicalId":378128,"journal":{"name":"Proceedings of 1994 VLSI Technology Symposium","volume":"111 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1994-06-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132233809","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Y. Mii, S. Wind, Y. Taur, Y. Lii, D. Klaus, J. Bucchignano
{"title":"An ultra-low power 0.1 /spl mu/m CMOS","authors":"Y. Mii, S. Wind, Y. Taur, Y. Lii, D. Klaus, J. Bucchignano","doi":"10.1109/VLSIT.1994.324403","DOIUrl":"https://doi.org/10.1109/VLSIT.1994.324403","url":null,"abstract":"Ultra-low power operation of 0.1 /spl mu/m CMOS is demonstrated at power supply voltages well below 1 V. Design trade-offs among gate delay, active power, and standby power are carried out in a power supply-threshold voltage design space. Experimental results show a ring oscillator delay of 106 ps at a power supply voltage of 0.5 V, and a minimum power-delay product of 0.03 fJ/stage (switching factor=0.01) at 0.4 V. A 20X reduction in power/circuit is achieved at the same performance level as 0.25 /spl mu/m CMOS.<<ETX>>","PeriodicalId":378128,"journal":{"name":"Proceedings of 1994 VLSI Technology Symposium","volume":"26 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1994-06-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125586981","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Y. Okada, P. Tobin, K. Reid, R. Hegde, B. Maiti, S. Ajuria
{"title":"Gate oxynitride grown in nitric oxide (NO)","authors":"Y. Okada, P. Tobin, K. Reid, R. Hegde, B. Maiti, S. Ajuria","doi":"10.1109/VLSIT.1994.324433","DOIUrl":"https://doi.org/10.1109/VLSIT.1994.324433","url":null,"abstract":"Gate oxynitride was grown in NO for the first time. This approach can provide a tight N accumulation near the Si/SiO/sub 2/ interface. Much lower thermal budget is required for an NO process than an N/sub 2/O process to produce an oxynitride with useful properties. Submicron MOSFET's with NO oxynitride showed superior current drive characteristics and comparable hot carrier immunity to those with N/sub 2/O oxynitride.<<ETX>>","PeriodicalId":378128,"journal":{"name":"Proceedings of 1994 VLSI Technology Symposium","volume":"27 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1994-06-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124939989","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Jiyoung Kim, R. Khamankar, C. Sudhama, B. Jiang, J. Lee, P. Maniar, R. Moazzami, R. Jones, C. Mogab
{"title":"La doped PZT films for gigabit DRAM technology","authors":"Jiyoung Kim, R. Khamankar, C. Sudhama, B. Jiang, J. Lee, P. Maniar, R. Moazzami, R. Jones, C. Mogab","doi":"10.1109/VLSIT.1994.324412","DOIUrl":"https://doi.org/10.1109/VLSIT.1994.324412","url":null,"abstract":"Very low leakage current density (5/spl times/10/sup -7/ A/cm/sup 2/ even at 125/spl deg/C) and high charge storage density (100 fCspl mu/m/sup 2/) under V/sub DD2=1 V conditions have been achieved using 5% La doped PZT films for gigabit DRAM capacitor dielectrics. In addition, the fatigue and TDDB measurements indicate good reliability of this capacitor.<<ETX>>","PeriodicalId":378128,"journal":{"name":"Proceedings of 1994 VLSI Technology Symposium","volume":"92 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1994-06-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121585896","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
K. Ishimaru, H. Gojohbori, H. Koike, Y. Unno, M. Sai, F. Matsuoka, M. Kakumu
{"title":"Trench isolation technology with 1 /spl mu/m depth n- and p-wells for a full-CMOS SRAM cell with a 0.4 /spl mu/m n/sup +p/sup +/ spacing","authors":"K. Ishimaru, H. Gojohbori, H. Koike, Y. Unno, M. Sai, F. Matsuoka, M. Kakumu","doi":"10.1109/VLSIT.1994.324437","DOIUrl":"https://doi.org/10.1109/VLSIT.1994.324437","url":null,"abstract":"This paper shows that 0.7 /spl mu/m depth shallow trench isolation with SiO/sub 2/ filling can achieve 0.4 /spl mu/m n+/p+ spacing, utilizing shallow p- and n-wells formation with retrograde profiles. An 80 degree taper trench with rounded edge accompanied by HCl ambient oxidation improves subthreshold characteristics and junction leakage. A 7.65 /spl mu/m/sup 2/ full-CMOS cell competitive to TFT cell size at 0.35 /spl mu/m design rule has been realized and a 256k bit SRAM has been fabricated.<<ETX>>","PeriodicalId":378128,"journal":{"name":"Proceedings of 1994 VLSI Technology Symposium","volume":"58 26 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1994-06-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126746222","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
S. Mori, E. Sakagami, Y. Yamaguchi, E. Kamiya, M. Tanimoto, H. Tsunoda, K. Hisatomi, H. Egawa, N. Arai, Y. Hiura, K. Yoshikawa, K. Hashimoto
{"title":"High speed sub-halfmicron flash memory technology with simple stacked gate structure cell","authors":"S. Mori, E. Sakagami, Y. Yamaguchi, E. Kamiya, M. Tanimoto, H. Tsunoda, K. Hisatomi, H. Egawa, N. Arai, Y. Hiura, K. Yoshikawa, K. Hashimoto","doi":"10.1109/VLSIT.1994.324381","DOIUrl":"https://doi.org/10.1109/VLSIT.1994.324381","url":null,"abstract":"This paper describes the novel process/device technology for high speed sub-halfmicron flash memories with 0.4 /spl mu/m design rules. Some new structures and operating methods for future flash memories have been proposed. However, the most suitable structure to realize large memory capacity for magnetic disk replacement will be different from that for fast random access speed for EPROM replacement, flash-memory-embedded logic devices, and other high speed applications. To realize high speed random access operation, conventional NOR-type flash memory technology with CHE program and source erase scheme will be the most suitable because of its simple fabrication process, relatively small cell size, sufficiently high read current, and relatively low operation voltages for program and erase procedures. The low voltage program/erase operation results in high performance peripheral transistors. On the other hand, NAND flash EEPROM will be the most suitable for low-cost large memory capacity applications. This paper, for the first time, demonstrates the scalability of cell gate length down to 0.4 /spl mu/m for simple stacked gate NOR flash cell.<<ETX>>","PeriodicalId":378128,"journal":{"name":"Proceedings of 1994 VLSI Technology Symposium","volume":"37 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1994-06-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127528283","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}