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2019 International Conference on Optical MEMS and Nanophotonics (OMN)最新文献

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Highly Doped Semiconductor Plasmonic Nanoantenna for Biomedical Sensing 用于生物医学传感的高掺杂半导体等离子体纳米天线
2019 International Conference on Optical MEMS and Nanophotonics (OMN) Pub Date : 2019-07-01 DOI: 10.1109/OMN.2019.8925062
Ahmed S. Abdeen, A. M. Attyia, D. Khalil
{"title":"Highly Doped Semiconductor Plasmonic Nanoantenna for Biomedical Sensing","authors":"Ahmed S. Abdeen, A. M. Attyia, D. Khalil","doi":"10.1109/OMN.2019.8925062","DOIUrl":"https://doi.org/10.1109/OMN.2019.8925062","url":null,"abstract":"In this paper, we present the analysis and design of an efficient analyte sensor based on Surface Plasmon Resonance. These analytes can be used as biomarkers to detect molecules that lie in mid-infrared. This sensor is based on an array of plasmonic nanoantennas of highly doped Germanium on Silicon Substrate. The proposed plasmonic nanoantenna is CMOS compatible and designed to detect and amplify the molecular absorption lines of a condensed phase analyte called Polydimethylsiloxane. Furthermore, the proposed design demonstrate field enhancement in order up to 20 times of the input signal which leads to detect the fingerprint of different substances with high efficiency and paves the way to integrate for Lab-on-chip applications.","PeriodicalId":353010,"journal":{"name":"2019 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":"25 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125977609","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
2x2 Silicon Photonic 3-dB Adiabatic Coupler with Optimized Taper Curvature 优化锥曲率的2x2硅光子3db绝热耦合器
2019 International Conference on Optical MEMS and Nanophotonics (OMN) Pub Date : 2019-07-01 DOI: 10.1109/OMN.2019.8925109
I. Kim, Hữu Vinh Nguyễn, T. J. Seok
{"title":"2x2 Silicon Photonic 3-dB Adiabatic Coupler with Optimized Taper Curvature","authors":"I. Kim, Hữu Vinh Nguyễn, T. J. Seok","doi":"10.1109/OMN.2019.8925109","DOIUrl":"https://doi.org/10.1109/OMN.2019.8925109","url":null,"abstract":"We report a 2x2 3-dB adiabatic coupler with the coupler gap of 400 nm and the taper length of 90 μm. The designed curved taper enables 8-times shorter coupler length than a conventional line ar taper. The fabricated device exhibits 50 ± 2% power splitting ratio over the wavelength range from 1580 nm to 1620 nm.","PeriodicalId":353010,"journal":{"name":"2019 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":"30 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127725836","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Electromagnetic FPCB micromirror scanning laser rangefinder 电磁FPCB微镜扫描激光测距仪
2019 International Conference on Optical MEMS and Nanophotonics (OMN) Pub Date : 2019-07-01 DOI: 10.1109/OMN.2019.8925110
Joshua Vixen Tan, Siyuan He
{"title":"Electromagnetic FPCB micromirror scanning laser rangefinder","authors":"Joshua Vixen Tan, Siyuan He","doi":"10.1109/OMN.2019.8925110","DOIUrl":"https://doi.org/10.1109/OMN.2019.8925110","url":null,"abstract":"This paper proposes a Flexible Printed Circuit(FPCB) micromirror scanning laser rangefinder, which consists of a laser source, a scanning FPCB micromirror, a lens and a PSD (Position Sensing Detector). The FPCB micromirror scans the laser beam and the triangulation method is used to measure the distance of points along the laser scanned line. The achieved performance is: Range detection 8-70 cm with less than 10 percent error. Total optical scanning FOV of 40 degrees. 100 distance measurements collected with a refresh rate of 10 Hz.","PeriodicalId":353010,"journal":{"name":"2019 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129912567","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 4
Fully Integrated Ultrathin Camera for Contact Fingerprint Imaging 完全集成的超薄相机接触指纹成像
2019 International Conference on Optical MEMS and Nanophotonics (OMN) Pub Date : 2019-07-01 DOI: 10.1109/OMN.2019.8925154
Kyung-Won Jang, Kisoo Kim, K. Jeong
{"title":"Fully Integrated Ultrathin Camera for Contact Fingerprint Imaging","authors":"Kyung-Won Jang, Kisoo Kim, K. Jeong","doi":"10.1109/OMN.2019.8925154","DOIUrl":"https://doi.org/10.1109/OMN.2019.8925154","url":null,"abstract":"We reports a fully integrated ultrathin camera with lens plate on CMOS image sensor for contact fingerprint imaging. The ultrathin camera consists of inverted type microlens array (MLA) and multiple block layers (MBLs) on CMOS image sensor. The MBLs consist of alternating transparent and black multiple layers of SU8/black SU-8 and reduce the optical crosstalk between neighboring images and control the field of view (FOV) of each microlens by adjusting the aperture diameter of the block layer. Contact fingerprint image was successfully captured by using frustrated total internal reflection method and reconstructed to one large image by stitching the partial images from the individual optical channels. This ultrathin camera can be utilized in various miniaturized optical devices including mobile or endoscopes.","PeriodicalId":353010,"journal":{"name":"2019 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":"10 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129943185","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Silicon Photonics with MEMS for Efficient Light Manipulation 硅光子学与MEMS的高效光操纵
2019 International Conference on Optical MEMS and Nanophotonics (OMN) Pub Date : 2019-07-01 DOI: 10.1109/OMN.2019.8925260
T. J. Seok, Ming C. Wu
{"title":"Silicon Photonics with MEMS for Efficient Light Manipulation","authors":"T. J. Seok, Ming C. Wu","doi":"10.1109/OMN.2019.8925260","DOIUrl":"https://doi.org/10.1109/OMN.2019.8925260","url":null,"abstract":"Silicon photonic MEMS technology offers innovative features of low loss, low crosstalk, low power consumption, and simple digital control. In this talk, we describe the overview of silicon photonic MEMS technology and review the current state of the art of silicon photonic MEMS devices, focusing on large-scale photonic switch application.","PeriodicalId":353010,"journal":{"name":"2019 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129499613","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Optical MEMS based micromirror arrays: fabrication,characterization and potential applications in smart active windows 基于光学MEMS的微镜阵列:制造、表征及其在智能有源窗口中的潜在应用
2019 International Conference on Optical MEMS and Nanophotonics (OMN) Pub Date : 2019-07-01 DOI: 10.1109/omn.2019.8925046
H. Hillmer, Basim Al-Qargholi, Muhammad Mohsin Khan, M. S. Q. Iskhandar, H. Wilke, A. Tatzel
{"title":"Optical MEMS based micromirror arrays: fabrication,characterization and potential applications in smart active windows","authors":"H. Hillmer, Basim Al-Qargholi, Muhammad Mohsin Khan, M. S. Q. Iskhandar, H. Wilke, A. Tatzel","doi":"10.1109/omn.2019.8925046","DOIUrl":"https://doi.org/10.1109/omn.2019.8925046","url":null,"abstract":"Millions of micromirrors inside building glazing are envisaged to guide and control light by electrostatic actuation, enabling energy saving and tailored personalized lighting in smart buildings. The amount, direction and degree of steering of the guided light are tailored to winter, summer, variable daytime requirements and presence and position of persons. Micromirror arrays have been designed, fabricated, characterized and finally placed in a modern quadruple insulation glazing inside a miniature room. Experimental data on actuation voltages, lifetime, power consumption and heat impact regulation are presented.","PeriodicalId":353010,"journal":{"name":"2019 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":"7 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129775451","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
Freestanding Silicon Photonic Ring and Disk Resonators 独立式硅光子环盘谐振器
2019 International Conference on Optical MEMS and Nanophotonics (OMN) Pub Date : 2019-07-01 DOI: 10.1109/OMN.2019.8925106
Yu Zhang, A. Takabayashi, H. Sattari, N. Quack
{"title":"Freestanding Silicon Photonic Ring and Disk Resonators","authors":"Yu Zhang, A. Takabayashi, H. Sattari, N. Quack","doi":"10.1109/OMN.2019.8925106","DOIUrl":"https://doi.org/10.1109/OMN.2019.8925106","url":null,"abstract":"We report freestanding silicon photonic ring and disk resonators fabricated in a simplified silicon photonics process based on IMEC’s iSiPP50G standard platform that have been released by a custom MEMS post- processing step. Experimental results show high optical Q- factors up to $3.6times 10^{4}$ for both ring and disk resonators, and extinction ratios larger than 20 dB. These functional, free- standing resonators demonstrate the compatibility of MEMS processing within a silicon photonics platform and open the possibility for large-scale integration of more complex photonic devices.","PeriodicalId":353010,"journal":{"name":"2019 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":"15 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128016484","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Plasmonic Tip Internally Excited via Cylindrical Vector Beam for Surface Enhanced Raman Spectroscopy 表面增强拉曼光谱的圆柱形矢量束内激等离子体尖端
2019 International Conference on Optical MEMS and Nanophotonics (OMN) Pub Date : 2019-07-01 DOI: 10.1109/OMN.2019.8925029
Min Liu, Fanfan Lu, Wending Zhang, T. Mei
{"title":"Plasmonic Tip Internally Excited via Cylindrical Vector Beam for Surface Enhanced Raman Spectroscopy","authors":"Min Liu, Fanfan Lu, Wending Zhang, T. Mei","doi":"10.1109/OMN.2019.8925029","DOIUrl":"https://doi.org/10.1109/OMN.2019.8925029","url":null,"abstract":"Plasmonic tips i.e. silver-film coated fiber tip and silver-nanoparticles coated fiber tip are presented to have the ability of significantly enhancing Raman intensity under the internal illumination of cylindrical vector beams i.e. radial vector beam and azimuthal vector beam respectively. In the case of radial vector beam illumination, the Raman intensity of malachite green is 15 times as strong as that illuminated via the linear polarization beam. In the case of azimuthal vector beam illumination, the magnification of Raman intensity can reach ~8.","PeriodicalId":353010,"journal":{"name":"2019 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":"120 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121532932","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
A Large Aperture 2-Axis Electrothermal MEMS Mirror for Compact 3D LiDAR 用于紧凑型3D激光雷达的大孔径2轴电热MEMS反射镜
2019 International Conference on Optical MEMS and Nanophotonics (OMN) Pub Date : 2019-07-01 DOI: 10.1109/OMN.2019.8925039
Dingkang Wang, Connor Watkins, Medini Aradhya, S. Koppal, Huikai Xie
{"title":"A Large Aperture 2-Axis Electrothermal MEMS Mirror for Compact 3D LiDAR","authors":"Dingkang Wang, Connor Watkins, Medini Aradhya, S. Koppal, Huikai Xie","doi":"10.1109/OMN.2019.8925039","DOIUrl":"https://doi.org/10.1109/OMN.2019.8925039","url":null,"abstract":"Low-cost LiDAR with long distance, high resolution, and stable laser scanning are needed for robotics and automobiles. This paper reports a large-aperture, 2-axis electrothermal MEMS mirror for LiDAR applications. The MEMS mirror has a mirror plate of 2 × 2.5 mm2 and an optical field view (FoV) of 15° by 12°. The beam divergence of 0.5 mrad is achieved with a 1.3-mm laser beam. The rotational scanning resonant mode is at 0.7 kHz, which is achieved by the meshed bimorph actuators with improved stiffness.","PeriodicalId":353010,"journal":{"name":"2019 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":"119 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122475573","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 9
3D-printed Microsystems for Opto-medical Imaging 光学医学成像的3d打印微系统
2019 International Conference on Optical MEMS and Nanophotonics (OMN) Pub Date : 2019-07-01 DOI: 10.1109/OMN.2019.8925093
O. Ferhanoğlu
{"title":"3D-printed Microsystems for Opto-medical Imaging","authors":"O. Ferhanoğlu","doi":"10.1109/OMN.2019.8925093","DOIUrl":"https://doi.org/10.1109/OMN.2019.8925093","url":null,"abstract":"3D printing has become a mainstream manufacturing technology for a wide number of applications. With its rapid manufacturing capability, material palette, minimum feature size dimension that is improving day-by-day, low cost, and ability to form surfaces at any given angle 3D printing has become an inevitable technology for fabricating micro-electro-mechanical-systems. Here, I'll summarize the recent advances in the field of 3D printed microsystems for miniaturized opto-medical imaging probes, conducted by our research group and collaborators. Specifically, progress on 3D-printed laser scanning electro-magnetic actuators, miniaturized confocal imagers with nearly fully 3D-printed parts, a tunable lens, and a hydraulic axial actuator will be summarized. Moreover, initial cyclic testing of these devices highlights the potential of these devices for reliable use within disposable minimally invasive tools in the clinic.","PeriodicalId":353010,"journal":{"name":"2019 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":"24 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115509762","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
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