硅光子学与MEMS的高效光操纵

2019 International Conference on Optical MEMS and Nanophotonics (OMN) Pub Date : 2019-07-01 DOI:10.1109/OMN.2019.8925260

T. J. Seok, Ming C. Wu

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引用次数: 0

摘要

硅光子MEMS技术具有低损耗、低串扰、低功耗和简单的数字控制等创新特点。在本次演讲中，我们介绍了硅光子MEMS技术的概况，并回顾了硅光子MEMS器件的现状，重点是大规模光子开关的应用。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Silicon Photonics with MEMS for Efficient Light Manipulation

Silicon photonic MEMS technology offers innovative features of low loss, low crosstalk, low power consumption, and simple digital control. In this talk, we describe the overview of silicon photonic MEMS technology and review the current state of the art of silicon photonic MEMS devices, focusing on large-scale photonic switch application.

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2019 International Conference on Optical MEMS and Nanophotonics (OMN)

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