基于光学MEMS的微镜阵列:制造、表征及其在智能有源窗口中的潜在应用

2019 International Conference on Optical MEMS and Nanophotonics (OMN) Pub Date : 2019-07-01 DOI:10.1109/omn.2019.8925046

H. Hillmer, Basim Al-Qargholi, Muhammad Mohsin Khan, M. S. Q. Iskhandar, H. Wilke, A. Tatzel

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引用次数: 3

摘要

建筑玻璃内部的数百万面微镜被设想通过静电驱动来引导和控制光线，从而在智能建筑中实现节能和量身定制的个性化照明。导光的数量、方向和转向程度可根据冬季、夏季、不同的白天要求以及人员的存在和位置进行定制。微镜阵列已经被设计、制造、表征，并最终放置在微型房间内的现代四层隔热玻璃中。给出了驱动电压、寿命、功耗和热冲击调节的实验数据。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Optical MEMS based micromirror arrays: fabrication,characterization and potential applications in smart active windows

Millions of micromirrors inside building glazing are envisaged to guide and control light by electrostatic actuation, enabling energy saving and tailored personalized lighting in smart buildings. The amount, direction and degree of steering of the guided light are tailored to winter, summer, variable daytime requirements and presence and position of persons. Micromirror arrays have been designed, fabricated, characterized and finally placed in a modern quadruple insulation glazing inside a miniature room. Experimental data on actuation voltages, lifetime, power consumption and heat impact regulation are presented.

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2019 International Conference on Optical MEMS and Nanophotonics (OMN)

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