{"title":"STI fill effect on poly-poly comb IL","authors":"T. Dao, T. Roggenbauer, Jim Colclasure","doi":"10.1109/ICICDT.2014.6838581","DOIUrl":"https://doi.org/10.1109/ICICDT.2014.6838581","url":null,"abstract":"Increasing ETD ratio for HDP oxide from 0.10 to 0.16 resulted in increasing film stress; film became more compressive. An increase in HF RF setting typically causes an increase in sputtering that may cause additional process induced damage or defects resulting in poorer oxide film quality, but the oxide wet etch rate ratio remain similar with increase in ETD which indicated no change in oxide quality. However, increasing etch to deposition ratio of HDP CVD film was demonstrated to improve gap fill of STI as indicated by a reduction in poly-poly comb shorts.","PeriodicalId":325020,"journal":{"name":"2014 IEEE International Conference on IC Design & Technology","volume":"4 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-05-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124958353","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Thermal-driven 3D floorplanning using localized TSV placement","authors":"Puskar Budhathoki, Andreas Henschel, I. Elfadel","doi":"10.1109/ICICDT.2014.6838582","DOIUrl":"https://doi.org/10.1109/ICICDT.2014.6838582","url":null,"abstract":"While 3D-ICs help to improve circuit performance and energy efficiency through the reduction of average wirelength and the increase in communication bandwidth of on-chip wiring, their thermal management remains one of the most challenging obstacles to their productization. Placement of thermal through-silicon-vias (TSVs) has been proposed to improve the vertical heat flow in the chip stack and this alleviate the negative impact of heat dissipation on chip performance and reliability. In this paper, we present a novel physical design flow that integrates thermal-driven 3D floorplanning with a novel algorithm for thermal TSVs placement that we call localized TSV placement. The essence of the algorithm is to analyze the layered thermal map of the chip stack and then insert thermal TSVs iteratively until the maximal on-chip temperature is below a pre-selected target. The algorithm is implemented within a full flow for thermal-driven 3D floorplanning. The implementation is tested using several standard benchmarks for physical design, and the experimental results show the suitability of our algorithm for significantly reducing maximum chip temperature at reasonable density levels for thermal TSVs (100° Kelvin reduction at 0.5% TSV density). The larger the die size, the more beneficial the localized placement of thermal TSV's.","PeriodicalId":325020,"journal":{"name":"2014 IEEE International Conference on IC Design & Technology","volume":"51 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-05-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122765198","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Design layout optimization in the presence of proximity-dependent stress effects","authors":"A. Sultan, R. Ramzan, D. Wristers","doi":"10.1109/ICICDT.2014.6838594","DOIUrl":"https://doi.org/10.1109/ICICDT.2014.6838594","url":null,"abstract":"In this paper, we present Minimized Layout Effect (MINLAYEF) guidelines for reducing the layout and process variations in critical analog circuits. We also present digital design guidelines to minimize the effect of process variations by eliminating stress sources. We also propose a layout for a reference device for a dual stress liner (DSL) device architecture to improve the accuracy of simulations. Si results from circuit layout designed with and without layout guidelines are also presented.","PeriodicalId":325020,"journal":{"name":"2014 IEEE International Conference on IC Design & Technology","volume":"24 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-05-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127987499","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Random telegraph noise as a new measure of plasma-induced charging damage in MOSFETs","authors":"M. Kamei, Y. Takao, K. Eriguchi, K. Ono","doi":"10.1109/ICICDT.2014.6838598","DOIUrl":"https://doi.org/10.1109/ICICDT.2014.6838598","url":null,"abstract":"Random telegraph noise (RTN) has been recently of great importance in designing ultimately scaled MOSFETs. We address in this paper how RTN characteristics are altered by plasma process-induced charging damage (PCD). MOSFETs with SiO<sub>2</sub> and high-k gate dielectric were prepared and exposed to an inductively coupled plasma (ICP) with Ar gas. From the time evolution of I<sub>ds</sub> fluctuation defined as I<sub>ds</sub>/μ<sub>Ids</sub>, where μ<sub>Ids</sub> is the mean I<sub>ds</sub>, we comprehensively investigated the details of RTN features such as the statistical distribution of I<sub>ds</sub>/μ<sub>Ids</sub>, power spectral density, and the time constants for carrier capture and emission. It was found that the statistical distribution width of I<sub>ds</sub>/μ<sub>Ids</sub>, δ(I<sub>ds</sub>/μ<sub>Ids</sub>), increased by PCD for both MOSFETs with the SiO<sub>2</sub> and high-k gate dielectrics, suggesting that RTN characteristics can be used as a potential measure of PCD. These features were consistent with Δ V<sub>th</sub> results. However, the slope in power spectral density and the time constants exhibited complicated behaviors owing to the nature of created traps by PCD. It is confirmed that PCD alters RTN characteristics, and that, in evaluating the amount of PCD, δ(I<sub>ds</sub>/μ<sub>Ids</sub>) should be used as a straightforward measure.","PeriodicalId":325020,"journal":{"name":"2014 IEEE International Conference on IC Design & Technology","volume":"44 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-05-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129758380","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}