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International Conference on Thin Film Physics and Applications最新文献

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Optical properties of Ni(1-x)Mn(2+x)O4 films studied by spectroscopic ellipsometry 用椭偏光谱法研究了Ni(1-x)Mn(2+x)O4薄膜的光学性质
International Conference on Thin Film Physics and Applications Pub Date : 2010-10-11 DOI: 10.1117/12.888207
Leibo Zhang, Y. Hou, Zhiming Huang, Wei Zhou, Yanqing Gao
{"title":"Optical properties of Ni(1-x)Mn(2+x)O4 films studied by spectroscopic ellipsometry","authors":"Leibo Zhang, Y. Hou, Zhiming Huang, Wei Zhou, Yanqing Gao","doi":"10.1117/12.888207","DOIUrl":"https://doi.org/10.1117/12.888207","url":null,"abstract":"Transition metal oxide (TMO) has been extensively focused in recent years. In this paper, we investigate the optical properties of a typical TMO material of Ni(1-x)Mn(2+x)O4 (x=0-1) thin films. Different compositions of x=0, 0.1, 0.2, 0.3 thin films are grown on Pt/Ti/SiO2/Si substrates by chemical solution deposition method under annealing temperature of 750°C. X-ray diffraction patterns indicate that Ni(1-x)Mn(2+x)O4 thin films are polycrystalline with spinel structure. The optical properties are investigated using spectroscopic ellipsometry at room temperature in the wavelength range of 400-1700nm. By fitting the measured ellipsometric data with a three-phase model (air/sample/Pt), the optical constants of thin films are determined. The refractive index and extinction coefficient don't show apparent variation with different composition. The obtained optical constants are very significant in the potential applications of optoelectronic devices.","PeriodicalId":316559,"journal":{"name":"International Conference on Thin Film Physics and Applications","volume":"60 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-10-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127970448","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Silicon nitride thin films deposited by DC pulse reactive magnetron sputtering 直流脉冲反应磁控溅射沉积氮化硅薄膜
International Conference on Thin Film Physics and Applications Pub Date : 2010-10-11 DOI: 10.1117/12.888164
Xiaofeng Zhang, Pei-Gang Wen, Yue Yan
{"title":"Silicon nitride thin films deposited by DC pulse reactive magnetron sputtering","authors":"Xiaofeng Zhang, Pei-Gang Wen, Yue Yan","doi":"10.1117/12.888164","DOIUrl":"https://doi.org/10.1117/12.888164","url":null,"abstract":"Silicon nitride (SiNx) thin films were deposited by DC pulse reactive magnetron sputtering at ambient temperature. These films were characterized by spectroscopic ellipsometry(SE), X-ray photoelectron spectroscopy (XPS) and Auger electron spectroscopy (AES). It is found that among several regulable parameters, pulse frequency, target power density, reactive gas flow rate (or working pressure) could significantly influence the optical properties and compositions of SiNx thin film more than the reverse time. The rotation of substrate which used to improve the uniformity in the radial direction also can be utilized to alter the in-depth composition distribution of the films. SiNx film with high refractive index (~2.00) and ultra low extinction coefficient (<10-3) were obtained on the optimal deposition conditions. It could be concluded that, compared to many disadvantages existing in various chemical vapour deposition (CVD) or radio frequency (RF) magnetron sputtering, DC pulse reactive magnetron sputtering is an alternative method to produce SiNxfilms for the increasing application especially as the moisture barriers for flexible electronics and optoelectronics.","PeriodicalId":316559,"journal":{"name":"International Conference on Thin Film Physics and Applications","volume":"04 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-10-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129175457","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Structure and luminescence properties of Tb3+-doped Lu3Al5O12 films prepared by Pechini sol-gel method Pechini溶胶-凝胶法制备Tb3+掺杂Lu3Al5O12薄膜的结构和发光性能
International Conference on Thin Film Physics and Applications Pub Date : 2010-10-11 DOI: 10.1117/12.888433
Jian Wang, Siqing Shen, Jianjun Xie, Ying Shi, F. Ai
{"title":"Structure and luminescence properties of Tb3+-doped Lu3Al5O12 films prepared by Pechini sol-gel method","authors":"Jian Wang, Siqing Shen, Jianjun Xie, Ying Shi, F. Ai","doi":"10.1117/12.888433","DOIUrl":"https://doi.org/10.1117/12.888433","url":null,"abstract":"Tb3+-doped Lu3Al5O12(hereinafter referred to as LuAG:Tb) films were successfully prepared by Pechini sol-gel process and spin-coating technique on carefully cleaned (111) silicon wafer. The microstructure and optical properties of the LuAG:Tb films were studied by X-ray diffraction (XRD), atomic force microscopy(AFM), as well as photoluminescence (PL) spectra. The XRD results showed that the precursor films started to crystallize at about 900°C. All as-calcined LuAG:Tb films showed the Tb3+ characteristic emission bands.","PeriodicalId":316559,"journal":{"name":"International Conference on Thin Film Physics and Applications","volume":"151 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-10-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123408173","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Silicon quantum dots: photoluminescence controlling and solar cell application 硅量子点:光致发光控制及太阳能电池应用
International Conference on Thin Film Physics and Applications Pub Date : 2010-10-11 DOI: 10.1117/12.888167
W. Shen
{"title":"Silicon quantum dots: photoluminescence controlling and solar cell application","authors":"W. Shen","doi":"10.1117/12.888167","DOIUrl":"https://doi.org/10.1117/12.888167","url":null,"abstract":"In this invited paper, we report the effect of different annealing environments on the changeable radiative recombination characteristics of Si quantum dots (QDs), which not only provides ways to identify the photoluminescence mechanism, but also realizes the possibility to control the origin of the luminescence. We also focus on the application of Si QDs in the third-generation solar cells, with the emphasis on growth of well-ordered Si QDs, on photoresponse control of Si QDs, and on approaches to reduce the lattice thermalization loss in Si QDs solar cells.","PeriodicalId":316559,"journal":{"name":"International Conference on Thin Film Physics and Applications","volume":"67 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-10-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122544770","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
Guided-mode resonance in tunable orthogonal grating 可调谐正交光栅中的导模共振
International Conference on Thin Film Physics and Applications Pub Date : 2010-10-11 DOI: 10.1117/12.887614
Zhenhua Wang, Yonggang Wu, Zihuan Xia, N. Chen, Leijie Ling, Heyun Wu, G. Lv
{"title":"Guided-mode resonance in tunable orthogonal grating","authors":"Zhenhua Wang, Yonggang Wu, Zihuan Xia, N. Chen, Leijie Ling, Heyun Wu, G. Lv","doi":"10.1117/12.887614","DOIUrl":"https://doi.org/10.1117/12.887614","url":null,"abstract":"In this paper, we present a new tunable orthogonal grating consisting of two weakly modulated subwavelength gratings perpendicularly to one another. Using the rigorous coupled-wave analysis (RCWA), we calculate and analyze the characteristics of guided-mode resonance on incident angle for TE/TM polarization. We demonstrate that a wide range tunability of such structure accomplished with only a nanoscale variation of the spacing between the gratings. For a normally incident wave of both TE and TM polarization, the structure turns out the same spectrum and resonance peaks. A gap of reflection peaks is found, and electric field distributions manifest that this gap is due to the interaction between the leaky modes of TE0-TE0, TM0-TM0 or TE0-TM0. We investigate the reflection efficiency of TE/TM polarization as a function of the wavelength with the angle of incidence as a parameter. As incident angle increases, the separation of the resonances increases also. At the same time, some specific wavelengths are maintained.","PeriodicalId":316559,"journal":{"name":"International Conference on Thin Film Physics and Applications","volume":"81 3-4","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-10-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"120909169","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
EUV multilayer optics for space science and ultrafast science 用于空间科学和超快科学的EUV多层光学
International Conference on Thin Film Physics and Applications Pub Date : 2010-10-11 DOI: 10.1117/12.888199
F. Delmotte, S. de Rossi, C. Bourassin-Bouchet, E. Meltchakov, A. Ziani, F. Choueikani, F. Bridou, A. Jérôme, F. Varnière
{"title":"EUV multilayer optics for space science and ultrafast science","authors":"F. Delmotte, S. de Rossi, C. Bourassin-Bouchet, E. Meltchakov, A. Ziani, F. Choueikani, F. Bridou, A. Jérôme, F. Varnière","doi":"10.1117/12.888199","DOIUrl":"https://doi.org/10.1117/12.888199","url":null,"abstract":"In this paper, we present a brief history of EUV multilayer mirrors and recent results achieved at Institut d'Optique in the fields of space science and ultra-fast pulses. Concerning space science, we present two solutions to improve reflectivity of EUV multilayer for solar imaging: three material multilayers and Al-based multilayers. Concerning attosecond pulses, we demonstrate the possibility to realize multilayer mirrors for an efficient transport of high harmonics on a broad energy band with high efficiency.","PeriodicalId":316559,"journal":{"name":"International Conference on Thin Film Physics and Applications","volume":"95 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-10-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121728934","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
The influence of micron-sized nodules on the electric-field districution in thin-film polarizers 微米级结核对薄膜偏振器中电场分布的影响
International Conference on Thin Film Physics and Applications Pub Date : 2010-10-11 DOI: 10.1117/12.887565
N. Chen, Yonggang Wu, Zhenhua Wang, Leijie Ling, Zihuan Xia, Heyun Wu, G. Lv
{"title":"The influence of micron-sized nodules on the electric-field districution in thin-film polarizers","authors":"N. Chen, Yonggang Wu, Zhenhua Wang, Leijie Ling, Zihuan Xia, Heyun Wu, G. Lv","doi":"10.1117/12.887565","DOIUrl":"https://doi.org/10.1117/12.887565","url":null,"abstract":"The influence of micron-sized nodules on the electric-field enhancement in the HfO2/SiO2 thin-film polarizers with non-quarter- wave layers at 1053nm and 56° is studied using the finite-difference time-domain electromagnetic modeling. The theoretical results show that the electric-field enhancements in HfO2 material are greater at s polarization than those at ppolarization. Nodular defect originating from the large, shallow seed leads to the highest electric-field enhancement while that containing the small, deep seed leads to the lowest electric-field enhancement. The TFP coating designed with the electric-field peaks located in the SiO2 layers has no obvious advantage in decreasing the laser-induced damage than that designed with the electric-field peaks located in the HfO2 layers, once they have the similar nodular defects in them.","PeriodicalId":316559,"journal":{"name":"International Conference on Thin Film Physics and Applications","volume":"284 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-10-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122726200","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Preparation of an optically activated field effect transistor based on diamond film 一种基于金刚石薄膜的光激活场效应晶体管的制备
International Conference on Thin Film Physics and Applications Pub Date : 2010-10-11 DOI: 10.1117/12.888360
Lingyun Shi, K. Tang, Jian Huang, Qinkai Zeng, Linjun Wang
{"title":"Preparation of an optically activated field effect transistor based on diamond film","authors":"Lingyun Shi, K. Tang, Jian Huang, Qinkai Zeng, Linjun Wang","doi":"10.1117/12.888360","DOIUrl":"https://doi.org/10.1117/12.888360","url":null,"abstract":"Freestanding diamond (FSD) film with p-type hydrogen-terminated nucleation surface was prepared by microwave plasma chemical vapour deposition (MPCVD) method. The post-treatment (wet chemical etch and annealing process) on the property of diamond film was investigated. The preparation and characterization of hydrogen-terminated diamond film p-type channel metal-semiconductor field effect transistors (MESFETs) was studied. The device was also used for photodetector application. The results showed the potential of high switching speed and high sensitivity to ultraviolet (UV).","PeriodicalId":316559,"journal":{"name":"International Conference on Thin Film Physics and Applications","volume":"21 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-10-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127580081","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Synthesis and optical properties of CdS quantum dot-embedded silica film for luminescent down-shifting layer 发光降移层CdS量子点嵌入二氧化硅薄膜的合成及其光学性能
International Conference on Thin Film Physics and Applications Pub Date : 2010-10-11 DOI: 10.1117/12.888425
Zhenyi Chen, Juan Qin, Xiao-lei Zhang, M. Zhang, Wei-min Shi, Linjun Wang
{"title":"Synthesis and optical properties of CdS quantum dot-embedded silica film for luminescent down-shifting layer","authors":"Zhenyi Chen, Juan Qin, Xiao-lei Zhang, M. Zhang, Wei-min Shi, Linjun Wang","doi":"10.1117/12.888425","DOIUrl":"https://doi.org/10.1117/12.888425","url":null,"abstract":"In this paper, silica thin films with different CdS quantum dot concentrations are deposited on glass substrates by a sol-gel dip-coating process, followed by thermal treatment at different annealing temperatures. The effects of CdS concentration and annealing temperature on the structural and optical properties of the composite films are investigated through X-ray diffraction, UV-Vis spectroscopy and photoluminescence spectra. Results show that the CdS crystallites with diameter of several nanometers in silica matrix are in cubic phase and shows preferred orientation of (200). The Stokes shift of about 0.3eV between its absorption peak and emission peak makes the CdS composite film be possible as an efficient light shifter to solar cells.","PeriodicalId":316559,"journal":{"name":"International Conference on Thin Film Physics and Applications","volume":"336 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-10-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131492687","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Research on the reflection coating at three wavelengths for primary reflector of the optical antenna in the laser communication systems 激光通信系统中光学天线主反射面三波长反射涂层的研究
International Conference on Thin Film Physics and Applications Pub Date : 2010-10-11 DOI: 10.1117/12.888406
Hua-song Liu, Muxiao Liu, Zhanshan Wang, Yi-qin Ji, Jiangtao Lu
{"title":"Research on the reflection coating at three wavelengths for primary reflector of the optical antenna in the laser communication systems","authors":"Hua-song Liu, Muxiao Liu, Zhanshan Wang, Yi-qin Ji, Jiangtao Lu","doi":"10.1117/12.888406","DOIUrl":"https://doi.org/10.1117/12.888406","url":null,"abstract":"Primary reflector of the optical antenna is a key component in the space laser communication systems, and multi-wavelengths laser need to be worked in the common aperture. Reflection coating is designed for the primary reflector of a laser communication system, which can work at three wavelengths (633nm, 808nm, 1550nm), the designed target reflectance are R633nm≥50%, R808nm≥99% and R1550nm≥99% at angle of incidence from 0 to 20 deg. We selected Ta2O5 and SiO2 as the high refractive index and low refractive index coating materials, analyzed the impact on the reflection coating of the systemic errors and random errors, and determined the manufacture error of the coater system which can't greater than 1%. The Ion beam sputtering deposition technique was used to manufacture reflection coating for three-wavelengths and a LAMBDA900 spectrophotometer was used to analysis the reflectance at three wavelengths which achieved the design requirements. Finally we give the origin of manufacture error source for this high reflection coating. The reflection coating component was successfully used in the primary reflector of the optical antenna of the laser communication systems.","PeriodicalId":316559,"journal":{"name":"International Conference on Thin Film Physics and Applications","volume":"118 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-10-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132313418","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
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