2009 IEEE SensorsPub Date : 2009-10-01DOI: 10.1109/ICSENS.2009.5398201
R. Walmsley, Lennie Kiyama, D. Milligan, R. Alley, David L Erickson, Peter G Hartwell1
{"title":"Micro-G silicon accelerometer using surface electrodes","authors":"R. Walmsley, Lennie Kiyama, D. Milligan, R. Alley, David L Erickson, Peter G Hartwell1","doi":"10.1109/ICSENS.2009.5398201","DOIUrl":"https://doi.org/10.1109/ICSENS.2009.5398201","url":null,"abstract":"We present a new technology platform for silicon inertial sensors. The platform combines three technology features to set new performance and manufacturability standards for MEMS sensors. First, bonding three silicon wafers creates wafer level packaging and a homogenous stack of silicon material improving device temperature stability. Second, through-wafer etching is used to define the mechanical structure creating a proof mass with 1000x larger mass than a typical MEMS sensor. Finally, we use surface electrode technology to create a lateral capacitance-based transducer enabling large capacitance change per acceleration and allowing a large dynamic range without electrode contact. The large mass together with reduced damping of a lateral sensor result in substantially reduced thermal-mechanical noise. We present a two axis, in-plane, MEMS accelerometer having nG/√Hz noise performance, over 130 dB dynamic range, 300 Hz bandwidth, and a chip size comparable to other MEMS accelerometers. The platform is extensible to gyroscopes and single chip IMU.","PeriodicalId":262591,"journal":{"name":"2009 IEEE Sensors","volume":"24 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125105509","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
2009 IEEE SensorsPub Date : 2009-10-01DOI: 10.1109/ICSENS.2009.5398346
E. Bustabad, G. Garcia, L. Rodríguez-Pardo, J. Faria, H. Perrot, C. Gabrielli, B. Bucur, M. Lazerges, Doug Rose, C. Compère, A. Arnau
{"title":"A biosensor for detection of DNA sequences based on a 50MHz QCM electronic oscillator circuit","authors":"E. Bustabad, G. Garcia, L. Rodríguez-Pardo, J. Faria, H. Perrot, C. Gabrielli, B. Bucur, M. Lazerges, Doug Rose, C. Compère, A. Arnau","doi":"10.1109/ICSENS.2009.5398346","DOIUrl":"https://doi.org/10.1109/ICSENS.2009.5398346","url":null,"abstract":"This work deals with the development of a high sensibility DNA biosensor based on a 50MHz Quartz Crystal Microbalance (QCM) Oscillator Electronic Circuit. The designed QCM oscillator sensor is able to detect the presence of complementary DNAs in a solution that match the sequence on a given strand in function of the changes in the output frequency of the oscillator. The design is adapted so that the Barkhausen condition is satisfied even when the quartz is immerged in liquid media. Also a comparative study of the developed 50MHz biosensor in front of a QCM oscillator with smaller frequency is carried out, with object of checking if the sensibility of the oscillator increases, allowing to detect smaller concentrations of the complementary DNA.","PeriodicalId":262591,"journal":{"name":"2009 IEEE Sensors","volume":"57 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123453812","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
2009 IEEE SensorsPub Date : 2009-10-01DOI: 10.1109/ICSENS.2009.5398452
H. Furuhashi, Y. Uchida, M. Shimizu
{"title":"Imaging sensor system using a composite ultrasonic array","authors":"H. Furuhashi, Y. Uchida, M. Shimizu","doi":"10.1109/ICSENS.2009.5398452","DOIUrl":"https://doi.org/10.1109/ICSENS.2009.5398452","url":null,"abstract":"This paper describes an imaging sensor system that uses a composite ultrasonic array. Side lobes and grating lobes in sensor directivity appear in conventional ultrasonic arrays. However, these lobes are reduced in this new sensor system. The sensor system consists of four wide-area ultrasonic array units, which are each made up of eight small-area ultrasonic receivers. After applying delay-and-sum operations to each unit, delay-and-multiply operations are applied to the signals from the units. The characteristics of the system are evaluated and its advantages are experimentally demonstrated. As this system minimizes the possibility of privacy violations, it is suitable for measuring the shapes of three-dimensional objects in residential areas.","PeriodicalId":262591,"journal":{"name":"2009 IEEE Sensors","volume":"94 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123456109","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
2009 IEEE SensorsPub Date : 2009-10-01DOI: 10.1109/ICSENS.2009.5398478
G. Mistlberger, K. Koren, S. Borisov, I. Klimant
{"title":"Magnetic sensor macrospheres as easy-to-use, remote-controlled, optical sensors in bioprocess monitoring","authors":"G. Mistlberger, K. Koren, S. Borisov, I. Klimant","doi":"10.1109/ICSENS.2009.5398478","DOIUrl":"https://doi.org/10.1109/ICSENS.2009.5398478","url":null,"abstract":"Optical sensor patches immobilized in cultivation flasks or tank reactors are nowadays state-of-the-art for monitoring process parameters in real-time. We produced magnetic sensor macrospheres (MagSeMac) as mobile, remote-controlled sensor patches by coating soft-magnetic steel spheres with an indicator dye which is incorporated in a polymer support matrix. Depending on the matrix polymer and the incorporated dyes, the sensors can be utilized for real-time monitoring (oxygen as analyte) or even for delayed readout (pH). The chosen sensor chemistry allows signal readout with the same commercially available fiber phase fluorimeter for both pH and oxygen. The sensor spheres typically have diameters of 1-4 mm and can be trapped in front of an optical fiber by specially designed magnetic separators. The attachment is very firm and can withstand even strong shear forces induced by stirred liquid inside a vessel. This approach makes it possible to measure process parameters in places and cavities otherwise hardly accessible. After usage, these mobile sensor patches can be recovered from the medium and used for a second time or simply be disposed and replaced by a new sphere. Moreover, the sensor sphere can be kept at a constant position relative to the optical fiber even when the flask or vessel is moving.","PeriodicalId":262591,"journal":{"name":"2009 IEEE Sensors","volume":"41 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125507856","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
2009 IEEE SensorsPub Date : 2009-10-01DOI: 10.1109/ICSENS.2009.5398342
B. Alfeeli, M. A. Zareian-Jahromi, M. Agah
{"title":"Micro preconcentrator with seedless electroplated gold as self-heating adsorbent","authors":"B. Alfeeli, M. A. Zareian-Jahromi, M. Agah","doi":"10.1109/ICSENS.2009.5398342","DOIUrl":"https://doi.org/10.1109/ICSENS.2009.5398342","url":null,"abstract":"This paper introduces, for the first time, electrodeposited gold as a new adsorbent material for micro preconcentration applications. The thin film gold layer serves as both an adsorbent and a resistive heater thus allowing self-heating capability without the need for additional off or on-chip heaters. The self-heating adsorbent enhances the desorption efficiency, reduces power consumption, and is simple to fabricate. The gold layer is deposited by seedless electroplating on silicon microstructures embedded in the cavity of microfabricated preconcentrators (μPCs). The presented devices have outer dimensions of 7 mm × 7 mm, total inner surface area of ∼10 m2, total inner volume of ∼6.5 µL, and encompass more than 3500 high-aspect-ratio (30 µm × 120 µm × 240 µm) pillars. The μPC design provided high surface to volume ratio, high adsorption capacity, and improved sample distribution. The performance of these μPCs has been evaluated by using the preconcentration factor of several samples as a performance metric. Preconcentration factors of 810, 6156, 405 has been determined for 1-propanol, methanol and acetone, respectively.","PeriodicalId":262591,"journal":{"name":"2009 IEEE Sensors","volume":"73 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114955899","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
2009 IEEE SensorsPub Date : 2009-10-01DOI: 10.1109/ICSENS.2009.5398337
P. Reimann, S. Horras, A. Schutze
{"title":"Field-test system for underground fire detection based on semiconductor gas sensor","authors":"P. Reimann, S. Horras, A. Schutze","doi":"10.1109/ICSENS.2009.5398337","DOIUrl":"https://doi.org/10.1109/ICSENS.2009.5398337","url":null,"abstract":"Based on a single semiconductor (sc) gas sensor and sensors for temperature, relative humidity and gas flow we developed a system for fire detection in coal mines. These sensors are read-out by a high-dynamic-range hardware control and data acquisition platform, in which the sc-sensor is operated with an application-optimized temperature cycle to improve the stability and selectivity. A hierarchical evaluation strategy not only allows identification of smoldering fires (signified by CO and ethene in a specific ratio) but is also suitable for separating or quantifying typical interfering compounds (such as CH4, CO, NOX or H2) caused by operational situations thus helping to avoid costly false alarms. Currently, the developed field test system is running underground at different control points in the production line. After initial calibration, which is carried out in the lab, special algorithms for online re-calibration were developed.","PeriodicalId":262591,"journal":{"name":"2009 IEEE Sensors","volume":"70 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116171050","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
2009 IEEE SensorsPub Date : 2009-10-01DOI: 10.1109/ICSENS.2009.5398252
D. Paladino, G. Quero, A. Cutolo, A. Cusano, C. Caucheteur, P. Mégret
{"title":"All-fiber hybrid cavity for sensing applications","authors":"D. Paladino, G. Quero, A. Cutolo, A. Cusano, C. Caucheteur, P. Mégret","doi":"10.1109/ICSENS.2009.5398252","DOIUrl":"https://doi.org/10.1109/ICSENS.2009.5398252","url":null,"abstract":"By now, fiber Bragg gratings (FBGs) represent a well assessed technology in both communications and sensing fields. In particular, thanks to their small signal bandwidth and wavelength encoded information, they allow simple measurements in reflection for sensing purposes and also easy multiplexing capability in realizing sensors arrays. Unfortunately, to make FBGs sensitive to surrounding-medium refractive index (SRI), hosting fiber structuring is needed. In last years, also tilted FBGs (TFBGs) - intrinsically SRI sensitive structures - have been proposed as promising technological platform for several sensing applications. However, complex spectral features combined with the difficulty to be configured as quasi distributed or multi-point sensors network limit the practical exploitation of this assessed and mature technology. It would be extremely useful to merge the peculiar spectral characteristics of both grating types. To address this issue, here, we propose a hybrid cavity involving two unbalanced uniform FBGs written at both sides of a TFBG to form an all-fiber interferometer. The proposed configuration provides a wavelength gated reflection signal with interference fringes depending on the cavity features modulated by spectral dips associated to the wavelength dependent optical losses due to cladding mode coupling occurring along the TFBG. Such a structure preserves the advantages of uniform FBGs in terms of interrogation methods and allows the possibility to contemporarily measure multiple parameters.","PeriodicalId":262591,"journal":{"name":"2009 IEEE Sensors","volume":"5 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122390344","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
2009 IEEE SensorsPub Date : 2009-10-01DOI: 10.1109/ICSENS.2009.5398246
Y. Rao, Binghuo Xu, Z. Ran, Y. Gong
{"title":"Novel in-line fiber-optic Fabry-Perot sensors based on etched Erbium- and Boron-doped optical fibers","authors":"Y. Rao, Binghuo Xu, Z. Ran, Y. Gong","doi":"10.1109/ICSENS.2009.5398246","DOIUrl":"https://doi.org/10.1109/ICSENS.2009.5398246","url":null,"abstract":"Novel in-line fiber-optic extrinsic Fabry-Perot interferometers (EFPIs), with cavity lengths of up to ∼9µm, are fabricated by chemically etching the Erbium- and Boron-doped optical fibers and splicing the etched optical fiber to a single-mode fiber, respectively. The strain and temperature responses of the EFPI sensors are investigated by experiments. Both good linearity and high sensitivity are achieved. Such types of EFPI sensors are very cost-effective and suitable for mass production, offering great potentials for wide applications where the sensor cost is essential.","PeriodicalId":262591,"journal":{"name":"2009 IEEE Sensors","volume":"25 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122749531","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
2009 IEEE SensorsPub Date : 2009-10-01DOI: 10.1109/ICSENS.2009.5398472
N. Bu, N. Ueno, Cao-nan Xu, O. Fukuda
{"title":"Measurement of weak light emitted from mechanoluminescence materials using Si photodiode and light concentrator","authors":"N. Bu, N. Ueno, Cao-nan Xu, O. Fukuda","doi":"10.1109/ICSENS.2009.5398472","DOIUrl":"https://doi.org/10.1109/ICSENS.2009.5398472","url":null,"abstract":"Mechanoluminescence (ML) is light emission induced by mechanical deformation. Strain/stress monitoring using ML materials has been developed as a non-destructive method for diagnosis of deterioration in structures; this method is promising and is expected to find broad application in the field of structural health monitoring (SHM). This paper proposes a light measurement system for the weak and diffusive light emitted from ML materials considering applications for crack detection. Si photodiode (PD) is used as the light detector with respect to the cost when dealing with practical applications. In addition, light concentrators are developed in order to (1) increase light beams arriving at the PD surface and (2) enlarge the detecting area of a single PD. In this study, light concentrators are designed using flat reflective surfaces, and the size of concentrators is investigated. In the experiments, increase of PD's output current was achieved with a light concentrator.","PeriodicalId":262591,"journal":{"name":"2009 IEEE Sensors","volume":"162 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114143445","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
2009 IEEE SensorsPub Date : 2009-10-01DOI: 10.1109/ICSENS.2009.5398278
Xu Mao, Yumin Wei, Zhenchuan Yang, G. Yan
{"title":"Fabrication of SOI MEMS inertial sensors with dry releasing process","authors":"Xu Mao, Yumin Wei, Zhenchuan Yang, G. Yan","doi":"10.1109/ICSENS.2009.5398278","DOIUrl":"https://doi.org/10.1109/ICSENS.2009.5398278","url":null,"abstract":"In this paper, a dry releasing process for making high aspect ratio SOI MEMS devices is presented. The proposed process can not only avoid the stiction effects which will cause the device failure, but also partially suppress the footing effect during the deep reactive ion etching (DRIE) of the de vice structures. The basic idea is to use the pre-defined releasing hole to completely remove the buried oxide underneath the device just before the final structure etching, therefore avoid the wet process during the structure release. The on-chip testing structures for etching end point of DRIE are also designed to precisely monitor the etching results. A capacitive accelerometer was fabricated and tested using the proposed process. The preliminary results imply the dry releasing process can effectively avoid the stiction problem.","PeriodicalId":262591,"journal":{"name":"2009 IEEE Sensors","volume":"31 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"117009665","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}