无籽电镀金自热吸附剂微型预富集装置

B. Alfeeli, M. A. Zareian-Jahromi, M. Agah
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引用次数: 11

摘要

本文首次介绍了电沉积金作为一种新型吸附材料在微富集中的应用。薄膜金层作为吸附剂和电阻加热器,从而允许自加热能力,而不需要额外的片内或片外加热器。该自热吸附剂提高了解吸效率,降低了能耗,制作简单。采用无籽电镀的方法,在微细预富集剂(μPCs)腔内嵌入的硅微结构上沉积了金层。该器件的外部尺寸为7 mm × 7 mm,总内表面积为~ 10 m2,总内部体积为~ 6.5 μ L,并包含3500多个高纵横比(30 μ m × 120 μ m × 240 μ m)柱。μPC设计具有高表面体积比、高吸附量、改善样品分布的特点。用几个样品的预富集系数作为性能指标来评价这些μPCs的性能。测定了1-丙醇、甲醇和丙酮的预富集系数分别为810、6156、405。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Micro preconcentrator with seedless electroplated gold as self-heating adsorbent
This paper introduces, for the first time, electrodeposited gold as a new adsorbent material for micro preconcentration applications. The thin film gold layer serves as both an adsorbent and a resistive heater thus allowing self-heating capability without the need for additional off or on-chip heaters. The self-heating adsorbent enhances the desorption efficiency, reduces power consumption, and is simple to fabricate. The gold layer is deposited by seedless electroplating on silicon microstructures embedded in the cavity of microfabricated preconcentrators (μPCs). The presented devices have outer dimensions of 7 mm × 7 mm, total inner surface area of ∼10 m2, total inner volume of ∼6.5 µL, and encompass more than 3500 high-aspect-ratio (30 µm × 120 µm × 240 µm) pillars. The μPC design provided high surface to volume ratio, high adsorption capacity, and improved sample distribution. The performance of these μPCs has been evaluated by using the preconcentration factor of several samples as a performance metric. Preconcentration factors of 810, 6156, 405 has been determined for 1-propanol, methanol and acetone, respectively.
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