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[1991] Proceedings. IEEE Micro Electro Mechanical Systems最新文献

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Mating and piercing micromechanical structures for surface bonding applications 表面粘合应用的配合和穿孔微机械结构
[1991] Proceedings. IEEE Micro Electro Mechanical Systems Pub Date : 1991-01-30 DOI: 10.1109/MEMSYS.1991.114806
H. Han, L. Weiss, M. Reed
{"title":"Mating and piercing micromechanical structures for surface bonding applications","authors":"H. Han, L. Weiss, M. Reed","doi":"10.1109/MEMSYS.1991.114806","DOIUrl":"https://doi.org/10.1109/MEMSYS.1991.114806","url":null,"abstract":"The authors have developed two types of micromechanical structures, using silicon micromachining techniques, which act as mechanical adhesives. Arrays of structures are fabricated on standard silicon wafers, with an areal density of approximately 200000 per cm/sup 2/, resulting in very strong bonds. Individual components are 4-18 mu m wide, and 4-15 mu m high above the substrate. Mating structures, which interlock with themselves, and piercing structures, which interlock with biological tissues, have been fabricated and tested. The mechanical behavior of this micromechanical velcro is in approximate agreement with the calculated strength.<<ETX>>","PeriodicalId":258054,"journal":{"name":"[1991] Proceedings. IEEE Micro Electro Mechanical Systems","volume":"9 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1991-01-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127983679","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 19
Crystalline lattice for metrology and positioning control 用于计量和定位控制的晶格
[1991] Proceedings. IEEE Micro Electro Mechanical Systems Pub Date : 1991-01-30 DOI: 10.1109/MEMSYS.1991.114803
H. Kawakatsu, Y. Hoshi, H. Kitano, T. Higuchi
{"title":"Crystalline lattice for metrology and positioning control","authors":"H. Kawakatsu, Y. Hoshi, H. Kitano, T. Higuchi","doi":"10.1109/MEMSYS.1991.114803","DOIUrl":"https://doi.org/10.1109/MEMSYS.1991.114803","url":null,"abstract":"An important area in research on microelectromechanical systems (MEMS) is the introduction of a well-defined scale reference for measurements of fabricated objects and control of positioning. As an approach to high-accuracy measurements in the submicron region, the authors propose the use of regular lattice spacings of crystals as scale reference. A scanning tunneling microscope (STM) with two tunneling-units (dual tunneling-unit STM, or DTU STM) was developed to study the feasibility of comparison measurements with crystals. Measurement errors were found to be around 0.1%, which was evaluated through comparison of two highly oriented pyrolytic graphite (HOPG) chips with the DTU STM. As for the study of positioning control, an HOPG chip was attached to an XY table, and a probe tip was used to observe the lattice image of the chip. With this configuration, the HOPG chip can be used as a linear scale for displacement detection. Dither vibration (amplitude 70 pm (p-p), frequency 3.3 kHz) was applied to the XY table to implement positioning control. Experiments confirmed such functions as prolonged positioning of the XY table to the tip with sub-atomic resolution and relative stepping action of the XY table to the tip, where the step pitch is defined by the lattice spacing. Both functions were confirmed to be robust and practical.<<ETX>>","PeriodicalId":258054,"journal":{"name":"[1991] Proceedings. IEEE Micro Electro Mechanical Systems","volume":"52 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1991-01-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132104442","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 8
Electrohydrodynamic pumping and flow measurement 电液动力泵送及流量测量
[1991] Proceedings. IEEE Micro Electro Mechanical Systems Pub Date : 1991-01-30 DOI: 10.1109/MEMSYS.1991.114809
A. Richter, A. Plettner, K. Hofmann, H. Sandmaier
{"title":"Electrohydrodynamic pumping and flow measurement","authors":"A. Richter, A. Plettner, K. Hofmann, H. Sandmaier","doi":"10.1109/MEMSYS.1991.114809","DOIUrl":"https://doi.org/10.1109/MEMSYS.1991.114809","url":null,"abstract":"A micromachined electrohydrodynamic (EHD) injection pump with improved characteristics and a novel method for flow measurement with the same structure are presented. Based on the structure of the EHD injection pump, an improved design with grid distances in the range between 10 mu m and 60 mu m was achieved, yielding a reduction in the required driving voltage. Grid areas of 2.5*2.5 mm/sup 2/ and 1*1 mm/sup 2/ were accomplished. The outer dimensions of the smallest pumps are 3*3*1.0 mm/sup 3/. One of the grids is etched back from the frontside and mounted upside down on the lower grid in order to reduce the grid distance. The two grids are bounded together by anodic bonding. The pump is mounted in a ceramic housing with two fluid ports. Based on this structure, a novel method for the measurement of fluid flow and velocity was developed. This technique is well suited for small flow rates below 100 mL/min down to some mu L/min. Volumetric flow rates down to 8 mu L/min were measured with a 2.5*2.5 mm/sup 2/ grid area.<<ETX>>","PeriodicalId":258054,"journal":{"name":"[1991] Proceedings. IEEE Micro Electro Mechanical Systems","volume":"2013 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1991-01-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127322892","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 58
Friction and wear studies on lubricants and materials applicable to MEMS 适用于MEMS的润滑剂和材料的摩擦磨损研究
[1991] Proceedings. IEEE Micro Electro Mechanical Systems Pub Date : 1991-01-30 DOI: 10.1109/MEMSYS.1991.114785
S. Suzuki, T. Matsuura, M. Uchizawa, S. Yura, H. Shibata, H. Fujita
{"title":"Friction and wear studies on lubricants and materials applicable to MEMS","authors":"S. Suzuki, T. Matsuura, M. Uchizawa, S. Yura, H. Shibata, H. Fujita","doi":"10.1109/MEMSYS.1991.114785","DOIUrl":"https://doi.org/10.1109/MEMSYS.1991.114785","url":null,"abstract":"A simple method is proposed to evaluate the friction and wear of thin films which can be applied as lubricants to moving surfaces in MEMS (microelectromechanical systems). Thin films of solid and liquid were studied. Large friction coefficient and large wear rate are observed for an SiN/polysilicon combination. Large friction coefficient and slight wear were observed for an SiN/SiN combination. DLC (diamond-like carbon) has a low friction coefficient of 0.2 approximately 0.3 with SiN and polysilicon. It is shown that a DLC film and a liquid lubricant film are very effective in reducing friction and wear at the SiN/polysilicon interface.<<ETX>>","PeriodicalId":258054,"journal":{"name":"[1991] Proceedings. IEEE Micro Electro Mechanical Systems","volume":"354 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1991-01-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"117034088","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 46
A development of micro sheath flow chamber 微护套流室的研制
[1991] Proceedings. IEEE Micro Electro Mechanical Systems Pub Date : 1991-01-30 DOI: 10.1109/MEMSYS.1991.114808
R. Miyake, H. Ohki, I. Yamazaki, R. Yabe
{"title":"A development of micro sheath flow chamber","authors":"R. Miyake, H. Ohki, I. Yamazaki, R. Yabe","doi":"10.1109/MEMSYS.1991.114808","DOIUrl":"https://doi.org/10.1109/MEMSYS.1991.114808","url":null,"abstract":"A micro-sheath flow chamber for a particle analyzer was developed using micro-machining. Sheath flow geometry is formed in a two-dimensional passage configuration. A viscous flow analysis using the finite element method helps to examine the inside flow of a small passage and design the passage configuration. The micro-sheath flow chamber consists of bent passages for sheath fluid, a constricted passage, and a capillary tube. The height of these passages is 300 mu m. The viscous flow analysis reveals that swirl flow is generated at the constricted passage, causing the sample flow to scatter. This result suggests that a sample flow guide plate is needed to eliminate the swirl flow and induce a flow to envelope the sample fluid. Experimental measurement of the sample flow using a guide plate shows that smooth constricted sheath flow is obtained and that the velocity reaches 3.0 m/s, nearly the same speed as the value obtained by the viscous analysis.<<ETX>>","PeriodicalId":258054,"journal":{"name":"[1991] Proceedings. IEEE Micro Electro Mechanical Systems","volume":"37 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1991-01-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133014350","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 39
Micro-step XY-stage using piezoelectric tube actuator 微步x级采用压电管作动器
[1991] Proceedings. IEEE Micro Electro Mechanical Systems Pub Date : 1991-01-30 DOI: 10.1109/MEMSYS.1991.114784
R. Matsuda, R. Kaneko
{"title":"Micro-step XY-stage using piezoelectric tube actuator","authors":"R. Matsuda, R. Kaneko","doi":"10.1109/MEMSYS.1991.114784","DOIUrl":"https://doi.org/10.1109/MEMSYS.1991.114784","url":null,"abstract":"A novel small and simple mu m-order-step XY-stage has been developed. It consists of a cylindrical piezoelectric actuator fixed at one end to a baseplate, with one electrode inside the tube and two pairs of diametrical electrodes on the outside. A support is attached to the free end. The actuator is powered by a single cosine waveform voltage by friction force. An analysis shows that the trajectory of the substance is determined by the parameter gamma = alpha omega /sup 2//( mu g), which has no relation to its weight, where alpha is the amplitude of the support stroke, omega is the angular frequency of the single wave, mu is the friction coefficient, and g is the gravity. The final displacement of the substance has its maximum at x/sub 5//(2 alpha )=0.626 when gamma =3.76. The actuator drives the substance on the support two-dimensionally. The stroke and direction of movement are controlled with a joystick.<<ETX>>","PeriodicalId":258054,"journal":{"name":"[1991] Proceedings. IEEE Micro Electro Mechanical Systems","volume":"28 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1991-01-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132158861","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 21
A piezo-electric pump driven by a flexural progressive wave 一种由弯曲进行波驱动的压电泵
[1991] Proceedings. IEEE Micro Electro Mechanical Systems Pub Date : 1991-01-30 DOI: 10.1109/MEMSYS.1991.114811
S. Miyazaki, T. Kawai, M. Araragi
{"title":"A piezo-electric pump driven by a flexural progressive wave","authors":"S. Miyazaki, T. Kawai, M. Araragi","doi":"10.1109/MEMSYS.1991.114811","DOIUrl":"https://doi.org/10.1109/MEMSYS.1991.114811","url":null,"abstract":"An effort was made to confirm the possibility of pumping fluids by flexural progressive waves on a thin pipe. A piezoelectric ceramic plate whose composition changes periodically can generate a flexural progressive wave when two sinusoidal voltages (V/sub 0/ sin omega t and V/sub 0/ cos omega t) are applied. A thin metal pipe that has been flattened is bonded to an FGM piezoelectric ceramic plate. Both ends of the pipe are closed and two glass pipes are joined perpendicularly to the metal pipe. The pipes are then filled with purified water. When a flexural progressive wave is excited on the plate, pressure is generated between the glass pipes. The pressure is about 10 mm H/sub 2/O. When the phase difference between the two sinusoidal voltages is changed by 180 degrees , the pressure difference is inverted. The size of the plate is 230*50*0.6 mm/sup 3/, the diameter of the metal pipe is 1.4 mm, the thickness of the wall is 18 mu m, and the pipe is flattened to 300 mu m.<<ETX>>","PeriodicalId":258054,"journal":{"name":"[1991] Proceedings. IEEE Micro Electro Mechanical Systems","volume":"26 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1991-01-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130341258","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 50
Surface-machined micromechanical membrane pump 表面加工微机械膜泵
[1991] Proceedings. IEEE Micro Electro Mechanical Systems Pub Date : 1991-01-30 DOI: 10.1109/MEMSYS.1991.114792
J. Judy, T. Tamagawa, D. Polla
{"title":"Surface-machined micromechanical membrane pump","authors":"J. Judy, T. Tamagawa, D. Polla","doi":"10.1109/MEMSYS.1991.114792","DOIUrl":"https://doi.org/10.1109/MEMSYS.1991.114792","url":null,"abstract":"An electrostatic micromechanical membrane pump for fluids and gases has been designed and fabricated with a process that is compatible with integrated circuits. The process consists of six photolithography steps and eight low-pressure chemical vapor depositions. No bulk silicon etchants or wafer bonding techniques are used. Each pump consists of an input valve, a pumping membrane, and an output valve. All parts are encapsulated by silicon nitride and are actuated by electrostatic forces. Actuation voltages of approximately 50 V are required for observable valve closure and membrane deflections. Typical gas pumping displacements are between 12 to 640 nL per cycle.<<ETX>>","PeriodicalId":258054,"journal":{"name":"[1991] Proceedings. IEEE Micro Electro Mechanical Systems","volume":"22 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1991-01-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124012759","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 63
Ultrasonically induced microtransport 超声诱导微运输
[1991] Proceedings. IEEE Micro Electro Mechanical Systems Pub Date : 1991-01-30 DOI: 10.1109/MEMSYS.1991.114810
R. Moroney, R. White, R. Howe
{"title":"Ultrasonically induced microtransport","authors":"R. Moroney, R. White, R. Howe","doi":"10.1109/MEMSYS.1991.114810","DOIUrl":"https://doi.org/10.1109/MEMSYS.1991.114810","url":null,"abstract":"Fluid motion induced by traveling flexural waves in 4 mu m thick membranes was observed using 2.5 mu m diameter polystyrene spheres in water to make the fluid motion visible. Visual observation of the spheres indicates that they move in the direction of wave propagation with a speed proportional to the square of the acoustic amplitude. The maximum speed is 130 mu m/s for an RF drive voltage of 7.1 Vrms at 3.5 MHz; the wavelength is 100 mu m. Standing Lamb waves, which can be seen visually with a phase-contrast microscope, are found to trap particles, including bacteria located in a drop of water that contacts the membrane. A first order model of Lamb-wave micropumping is presented, based on acoustic streaming theory. Important parameters for device design and operation are discussed, along with options for integrating the device into microflow systems. Possible applications include temperature redistribution in ICs and miniature chemical processing systems.<<ETX>>","PeriodicalId":258054,"journal":{"name":"[1991] Proceedings. IEEE Micro Electro Mechanical Systems","volume":"17 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1991-01-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129672269","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 107
Micromachined, silicon based electrode arrays for electrical stimulation of or recording from cerebral cortex 用于大脑皮层电刺激或记录的微机械硅基电极阵列
[1991] Proceedings. IEEE Micro Electro Mechanical Systems Pub Date : 1991-01-30 DOI: 10.1109/MEMSYS.1991.114805
R. Normann, P. Campbell, K. E. Jones
{"title":"Micromachined, silicon based electrode arrays for electrical stimulation of or recording from cerebral cortex","authors":"R. Normann, P. Campbell, K. E. Jones","doi":"10.1109/MEMSYS.1991.114805","DOIUrl":"https://doi.org/10.1109/MEMSYS.1991.114805","url":null,"abstract":"Previous work has indicated that electrical stimulation of the visual cortex via penetrating electrodes may be a viable approach to providing a functional visual sense for the blind. Key to this concept is the development of a three-dimensional microstructure that contains an array of electrodes intended to be inserted into the visual cortex. Such a structure has been created, with electrodes designed to penetrate 1.5 mm into the visual cortex. The array consists of 100 needles, each of which is 1.5 mm long and 0.08 mm on a side at its base. The needles, which emerge from a 0.2 mm thick, 4.2 mm*4.2 mm silicon substrate, have center to center spacings of 0.4 mm. The fabrication methodologies consist of preliminary shaping with a computer-controlled diamond dicing saw and final shaping and polishing with a two-step chemical etching process. Preliminary work to investigate the biocompatibility of these silicon structures in cortical tissues indicates that the cortex tolerates implantation and the materials used in the arrays very well.<<ETX>>","PeriodicalId":258054,"journal":{"name":"[1991] Proceedings. IEEE Micro Electro Mechanical Systems","volume":"8 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1991-01-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128506221","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 19
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