Friction and wear studies on lubricants and materials applicable to MEMS

[1991] Proceedings. IEEE Micro Electro Mechanical Systems Pub Date : 1991-01-30 DOI:10.1109/MEMSYS.1991.114785

S. Suzuki, T. Matsuura, M. Uchizawa, S. Yura, H. Shibata, H. Fujita

引用次数: 46

Abstract

A simple method is proposed to evaluate the friction and wear of thin films which can be applied as lubricants to moving surfaces in MEMS (microelectromechanical systems). Thin films of solid and liquid were studied. Large friction coefficient and large wear rate are observed for an SiN/polysilicon combination. Large friction coefficient and slight wear were observed for an SiN/SiN combination. DLC (diamond-like carbon) has a low friction coefficient of 0.2 approximately 0.3 with SiN and polysilicon. It is shown that a DLC film and a liquid lubricant film are very effective in reducing friction and wear at the SiN/polysilicon interface.<>

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适用于MEMS的润滑剂和材料的摩擦磨损研究

提出了一种简单的方法来评估薄膜的摩擦磨损，薄膜可以作为MEMS(微机电系统)运动表面的润滑剂。对固体薄膜和液体薄膜进行了研究。在硅/多晶硅复合材料中观察到较大的摩擦系数和磨损率。SiN/SiN复合材料的摩擦系数大，磨损小。DLC(类金刚石碳)与SiN和多晶硅的摩擦系数较低，约为0.2。结果表明，DLC膜和液体润滑膜可以有效地减少硅/多晶硅界面处的摩擦和磨损。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

[1991] Proceedings. IEEE Micro Electro Mechanical Systems

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