2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS)最新文献_第4页

Electrostatic/triboelectric hybrid power generator using folded electrets 使用折叠驻极体的静电/摩擦电混合发电机

2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2017-02-23 DOI: 10.1109/MEMSYS.2017.7863335

K. Tao, J. Wu, A. Kottapalli, L.H. Tang, L.X. Hu, N. Wang, S. Lye, M. Triantafyllou, J. Miao

{"title":"Electrostatic/triboelectric hybrid power generator using folded electrets","authors":"K. Tao, J. Wu, A. Kottapalli, L.H. Tang, L.X. Hu, N. Wang, S. Lye, M. Triantafyllou, J. Miao","doi":"10.1109/MEMSYS.2017.7863335","DOIUrl":"https://doi.org/10.1109/MEMSYS.2017.7863335","url":null,"abstract":"Recently, electret-based electrostatic and triboelectric energy harvesting devices have demonstrated their great potential in converting ambient mechanical energy to electrical energy due to their merits of low cost, easy formation and long-term stability. For electret-based generators, the performance of the state-of-the-art MEMS energy harvesters mostly falls into the range of nW or μW level, limiting their potential applications. For triboelectric generators, the output power is severely constrained by the effective surface charge density that only relies on the contact triboelectrification. Herein, we demonstrate a hybrid power generator with folded electrets, which takes the merits of non-contact electrostatic induction by high residue charge within electrets as well as contact triboelectrification by increased surface area. High output power can be readily achieved. Triggered by gentle finger tapping, the instantaneous peak-to-peak output voltage and short-circuit current of up to 1000 V and 0.11 mA have been achieved, which are capable of directly lighting up hundreds of off-the-shelf LEDs. The outcome of this work demonstrates the possibility of using such hybrid generators for wearable and portable electronics.","PeriodicalId":257460,"journal":{"name":"2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"30 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-02-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114175562","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 5

Effects of heterostructure stacking on acoustic dissipation in coupled-ring resonators 异质结构叠加对耦合环谐振器声耗散的影响

2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2017-02-23 DOI: 10.1109/MEMSYS.2017.7863568

A. Peczalski, Xu-Qian Zheng, Jaesung Lee, P. Feng, M. Rais-Zadeh

{"title":"Effects of heterostructure stacking on acoustic dissipation in coupled-ring resonators","authors":"A. Peczalski, Xu-Qian Zheng, Jaesung Lee, P. Feng, M. Rais-Zadeh","doi":"10.1109/MEMSYS.2017.7863568","DOIUrl":"https://doi.org/10.1109/MEMSYS.2017.7863568","url":null,"abstract":"We describe a systematic study on quantifying the effects of heterostructure layer stacking upon measured dissipation and quality factors (Qs) of AlN-on-Si coupled-ring breathing mode micromechanical resonators. For the first time, we design and fabricate resonators of the same lateral dimensions but with different stacking layers, namely, Si, AlN-on-Si, and Al-on-AlN-on-Si. With both optical and electrical readout techniques, we measure the fundamental radial-extensional mode and its Q values and compare the observed and simulated energy dissipation. For the same device geometry, the results show that the bare Si device has the highest Q (11,304). Adding an AlN layer leads to a reduction in Q for the AlN-on-Si device by a factor of ∼1.46 compared to bare Si device. Top layer metallization further compromises the Q by a factor of ∼1.85. Modeling of the dissipation processes suggests that neither the thermoelastic damping (TED) nor the anchor loss is the limiting loss factor. A piezoelectric-specific loss mechanism known as charge redistribution loss and interface loss are both possible limiting mechanisms.","PeriodicalId":257460,"journal":{"name":"2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"49 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-02-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131002719","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 2

Flexible piezoelectric strain energy harvester responsive to multi-directional input forces and its application to self-powered motion sensor 响应多向输入力的柔性压电应变能采集器及其在自供电运动传感器中的应用

2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2017-02-23 DOI: 10.1109/MEMSYS.2017.7863333

Min-Ook Kim, Yongkeun Oh, Yunsung Kang, Kyung-Ho Cho, Jungwook Choi, Jongbaeg Kim

{"title":"Flexible piezoelectric strain energy harvester responsive to multi-directional input forces and its application to self-powered motion sensor","authors":"Min-Ook Kim, Yongkeun Oh, Yunsung Kang, Kyung-Ho Cho, Jungwook Choi, Jongbaeg Kim","doi":"10.1109/MEMSYS.2017.7863333","DOIUrl":"https://doi.org/10.1109/MEMSYS.2017.7863333","url":null,"abstract":"A design of flexible piezoelectric strain energy harvester responsive to multi-directional forces from arbitrary human motions was developed by using polydimethylsiloxane (PDMS) and polyvinylidene fluoride (PVDF). Unlike the most of conventional strain energy harvesters designed to be functional only for single directional motion, our suggested design demonstrated the energy harvesting capability for all the input forces applied in multiple different directions. The measured output voltage was 1.75, 1.29, and 0.98 V for the input force of 4 N at 2 Hz applied in the direction of 0°, 45°, and 90°, respectively. The variation of output peak voltage was within 54% of the maximum value for the identical magnitude of forces when the applied direction varies from pure normal direction to pure shear direction. The harvester could keep output voltage in the similar order of magnitude upon diverse directional forces applied. Through the harvester mounted on a curved human body, the motion between body and arm was successfully converted to electricity.","PeriodicalId":257460,"journal":{"name":"2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"45 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-02-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114837816","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 4

A 3-bit digitally operated MEMS rotational accelerometer 一个3位数字操作的MEMS旋转加速度计

2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2017-02-23 DOI: 10.1109/MEMSYS.2017.7863602

Varun Kumar, A. Ramezany, Saeed Mazrouei, R. Jafari, S. Pourkamali

引用次数: 1

Stimuli-responsive hydrogel microsprings for multiple and complex actuation 刺激响应水凝胶微弹簧的多重和复杂的驱动

2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2017-02-23 DOI: 10.1109/MEMSYS.2017.7863538

Koki Yoshida, S. Nakajima, R. Kawano, H. Onoe

引用次数: 2

A bidirectional Knudsen pump with superior thermal management for micro-gas chromatography applications 一个双向克努森泵优越的热管理微气相色谱应用

2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2017-02-23 DOI: 10.1109/MEMSYS.2017.7863367

Qisen Cheng, Yutao Qin, Y. Gianchandani

引用次数: 10

Ultrasensitive micro sensor based on layer-by-layer self-assembled graphene and bismuth nanoparticles for trace lead ions determination 基于单层自组装石墨烯和铋纳米粒子的超灵敏微传感器用于痕量铅离子的测定

2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2017-02-23 DOI: 10.1109/MEMSYS.2017.7863601

Zonghao Wu, G. Jing, T. Cui

引用次数: 0

Rapid antibiotic susceptibility test: Commercialization of life saving MEMS devices 快速抗生素药敏试验:挽救生命的MEMS器件商业化

2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2017-02-23 DOI: 10.1109/MEMSYS.2017.7863349

Hyun Yong Jeong, Eun-Geun Kim, Sangkwon Han, Gi Yoon Lee, Shinhoon Han, Bonghwan Jin, T. Lim, Hee Chan Kim, Taek Soo Kim, Dongyoung Kim, Sunghoon Kwon

引用次数: 0

Piezoelectric and electromagnetic hybrid energy harvester using two cantilevers for frequency up-conversion 压电和电磁混合能量采集器，采用两个悬臂梁进行频率上变频

2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2017-02-23 DOI: 10.1109/MEMSYS.2017.7863336

D. Kwon, H. Ko, Jongbaeg Kim

引用次数: 15

Polymer MEMS sensor for flow monitoring in biomedical device applications 用于生物医学设备流量监测的聚合物MEMS传感器

2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2017-02-23 DOI: 10.1109/MEMSYS.2017.7863487

A. Kottapalli, Z. Shen, M. Asadnia, Siyu Tian, K. Tao, J. Miao, M. Triantafyllou

引用次数: 6