{"title":"Thermal analysis of micro-hotplates for catalytic gas microsensors","authors":"A. Kozlov","doi":"10.1109/EUROSIME.2015.7103094","DOIUrl":"https://doi.org/10.1109/EUROSIME.2015.7103094","url":null,"abstract":"The analytical method is presented to conduct thermal analysis of micro-hot plates for catalytic gas microsensors. The 2D structure of a micro-hotplate is divided into the regions, the temperature distribution in which is found by the eigenfunction method. To take into account the temperature dependencies parameters the iteration procedure is used. The values of the parameters are determined using the weighted mean temperature in each region. The application of this method is considered on the example of the catalytic gas microsensors based on the square plates supported by two cantilever beams in various places: at centre of two opposite sides; at two opposite corners; at two adjacent corners. For these micro-hotplates the following characteristics were determined: the dependencies of the weighted mean overheating temperature, the difference between the maximum and minimum temperatures and the ratio of the weighted mean overheating temperature to the difference between the maximum and minimum temperatures on the length of the cantilever beams, the dimensions of the micro-hotplate and the supply voltage of the microsensor.","PeriodicalId":250897,"journal":{"name":"2015 16th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-04-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130049796","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Latching MEMS switch matrices for telecommunication applications","authors":"D. Dellaert, J. Doutreloigne","doi":"10.1109/EUROSIME.2015.7103079","DOIUrl":"https://doi.org/10.1109/EUROSIME.2015.7103079","url":null,"abstract":"This paper describes the design and characterization of a 2 × 2 latching MEMS switch matrix for switching twisted pairs in telecommunication applications. The RF performance of this fabricated prototype was very promising so larger virtual prototypes of 16 × 16 were designed and their performance was simulated. From these simulations it is shown that the RF performance of a crossbar switch matrix is not suitable for high frequency access technologies. In order to improve these RF characteristics, a switch matrix with disconnectable stubs is presented and its characteristics are simulated. From these results, the designed 16 × 16 switch matrix could be used for FTTdp (fiber to the distribution point) deployments using the next generation access technology: G.fast.","PeriodicalId":250897,"journal":{"name":"2015 16th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems","volume":"115 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-04-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130319872","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Rida Kheirallah, J. Gallière, A. Todri-Sanial, N. Azémard, G. Ducharme
{"title":"Statistical energy study for 28nm FDSOI devices","authors":"Rida Kheirallah, J. Gallière, A. Todri-Sanial, N. Azémard, G. Ducharme","doi":"10.1109/EUROSIME.2015.7103149","DOIUrl":"https://doi.org/10.1109/EUROSIME.2015.7103149","url":null,"abstract":"Due to the effects of the Moore's law, the process variations in current technologies are increasing and have a major impact on power and performance which results in parametric yield loss. Due to this, process variability and the difficulty of modeling accurately transistor behavior impede the dimensions scaling benefits. The Fully Depleted Silicon-On-Insulator (FDSOI) technology is one of the main contenders for deep submicron devices as they can operate at low voltage with superior energy efficiency compared with bulk CMOS. In this paper, we study the static energy on 28nm FDSOI devices to implement sub-threshold circuits. Study of delay vs. static power trade-off reveals the FDSOI robustness with respect to process variations.","PeriodicalId":250897,"journal":{"name":"2015 16th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems","volume":"15 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-04-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131693180","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
E. Bertarelli, Alice Colnago, R. Ardito, G. Dubini, A. Corigliano
{"title":"Modelling and characterization of circular microplate electrostatic actuators for micropump applications","authors":"E. Bertarelli, Alice Colnago, R. Ardito, G. Dubini, A. Corigliano","doi":"10.1109/EUROSIME.2015.7103121","DOIUrl":"https://doi.org/10.1109/EUROSIME.2015.7103121","url":null,"abstract":"In the last decades, an increasing interest is being directed towards micropumps, the main component of active microfluidic systems. A current research aim is to pursue compact dimensions and low power consumption; a viable alternative is to exploit MEMS manufacturing techniques. This work presents the modelling and the characterization of microplate electrostatic actuators for micropump applications. A one degree-of-freedom model is proposed to describe deformable plate electro-mechanics. The well-established ThELMA technique (STMicroelectronics) is adopted to manufacture the actuator prototypes. The effective plate flexural stiffness is extracted from pull-in tests on a series of plate actuators. The structural model is calibrated accordingly and successfully used to describe the electromechanical response of actuators where an annular electrode is introduced in order to obtain a higher actuator stroke.","PeriodicalId":250897,"journal":{"name":"2015 16th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems","volume":"42 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-04-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130901946","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
M. Stiebing, D. Vogel, W. Steller, M. Wolf, B. Wunderle
{"title":"Challenges in the reliability of 3D integration using TSVs","authors":"M. Stiebing, D. Vogel, W. Steller, M. Wolf, B. Wunderle","doi":"10.1109/EUROSIME.2015.7103129","DOIUrl":"https://doi.org/10.1109/EUROSIME.2015.7103129","url":null,"abstract":"One of the possible target applications of 3D-integration is the high performance computing (HPC). The improved performance of 3D-integrating can base on an Interposer with heterogeneous integration of special high performance fluidic cooling, individual power supply next to the microprocessor and a tailored packaging approach. This paper focuses on the reliability assessment of the interposer regarding the interaction of TSV, wiring and fluid channel integration based on current publications in correlation with the selected specifications for Interposer manufacturing. A further part is the correlation with initial results of stress simulation and measurements applied to the Interposer design specifications of cavities and interconnect features (used for sealing the cooling channels and as electrical interconnect). We give an overview of a new level of complexity of 3D integration and discuss certain failure mechanisms that can influence the performance of 3D integrated devices. We show that the prediction of failure locations becomes possible by the method of finite element modeling but with the necessity to obtain process specific material data as an input for the simulation. An overview shows the possibilites of residual stresses analyses on test vehicles by using special methods of Raman spectroscopy and fibDAC including interpretation challenges of gathered measurement data. Furthermore the application of a new method for fatigue testing is proposed and discussed.","PeriodicalId":250897,"journal":{"name":"2015 16th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems","volume":"109 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-04-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133519328","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
M. Lederer, A. Lassnig, G. Khatibi, M. Delshadmanesh
{"title":"Reliability assessment of copper ball bonds by combination of simulation and accelerated mechanical testing","authors":"M. Lederer, A. Lassnig, G. Khatibi, M. Delshadmanesh","doi":"10.1109/EUROSIME.2015.7103137","DOIUrl":"https://doi.org/10.1109/EUROSIME.2015.7103137","url":null,"abstract":"We have investigated the fatigue strength of copper ball bonds attached to silicon chips covered with an aluminum metallization layer. Under service conditions, the chips are exposed to repeated temperature changes leading to thermo-mechanical stresses. In order to predict their lifetime, accelerated mechanical tests were performed at ultrasonic frequency. Thereby, different setups were tested to optimize the method. The stresses resulting from mechanical tests were compared to deviatoric stresses originating from thermal mismatch of the different materials involved. For this purpose, FEM computer simulations were performed. It was found that the stress distributions of the different setups are quite different. Nevertheless, the weakest link of the construction was always the aluminum metallization layer. In consequence, the number of loading cycles to failure could be related to the von Mises stress observed in the aluminum film.","PeriodicalId":250897,"journal":{"name":"2015 16th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems","volume":"16 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-04-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121311414","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
E. Merten, T. von Essen, F. Luczack, A. Otto, A. Lunding, P. Lurkens, M. Bast, M. Abo Ras, S. Rzepka
{"title":"Reliability investigation and design of high power rectifier modules based on material characterization, simulation and experimental verification","authors":"E. Merten, T. von Essen, F. Luczack, A. Otto, A. Lunding, P. Lurkens, M. Bast, M. Abo Ras, S. Rzepka","doi":"10.1109/EUROSIME.2015.7103128","DOIUrl":"https://doi.org/10.1109/EUROSIME.2015.7103128","url":null,"abstract":"Increasing demands on efficiency, reliability and sustainability of high power electronics combined with the accompanying need of suitable new materials, raise the necessity to not only reconsider common designs and design strategies, but also to shorten and minimize the associated work on re-design and optimisation. Virtual prototyping might be an appropriate solution to this task but needs a strong, reliable and valid foundation based on precise material data, fast and coherent simulation models and last but not least also an experimental verification.","PeriodicalId":250897,"journal":{"name":"2015 16th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems","volume":"137 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-04-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122933217","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Current load capacity of electrical conductor tracks evaluated by simulation and thermographic imaging","authors":"T. Tetzlaff, U. Witkowski","doi":"10.1109/EUROSIME.2015.7103133","DOIUrl":"https://doi.org/10.1109/EUROSIME.2015.7103133","url":null,"abstract":"Today's LEDs operate with high current, causing a significant increase in the device's temperature despite the LEDs being highly energy efficient. Important for having a long LED lifetime is accurate temperature management which requires sensing the device temperature and knowing the temperature distribution. The underlying aim of the project is to simulate the temperature distribution in LED devices mounted on printed circuit boards and to compare the data with simulation results. The focus of this paper is the modelling and simulation of PCB tracks of different widths that are typically used in board designs and device interconnections. Based on the finite element method, the surface temperature of electrical tracks is simulated using the tool COMSOL. For comparison with real world measurements, the simulated structures have been fabricated and analysed via contact-free infrared thermography. The main challenge is the mechanical modelling of the track structure and the setup of the material parameters to have a good match between simulation results and measurements. In a future step, the simulation results will be used to allow for integrated temperature management of LED devices which include power supply structures to avoid overheating at the p-n junctions and at the light conversion material on top of the LED.","PeriodicalId":250897,"journal":{"name":"2015 16th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems","volume":"443 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-04-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131641848","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"B-Spline X-Ray Diffraction Imaging techniques for die warpage and stress monitoring inside fully encapsulated packaged chips","authors":"P. McNally","doi":"10.1109/EUROSIME.2015.7103166","DOIUrl":"https://doi.org/10.1109/EUROSIME.2015.7103166","url":null,"abstract":"Advanced More than Moore integrated circuit chip packaging is leading to the development of multiply stacked silicon die and these die are becoming ever thinner. This is leading to reliability problems. One of these is process induced die strain/warpage and there is no compelling metrology which can non-destructively measure the warpage of the die inside the packaged chips. In this paper we report on a series of techniques, which we call B-Spline X-Ray Diffraction Imaging (B-XRDI). These techniques allow for the rapid reconstruction of strain fields and lattice warpage data from x-ray diffraction images (also known as x-ray topographs) and they can provide for in situ and non-destructive analysis of stresses, strains and deformations inside packaged chip systems for single and multiple die. The technique, which uses synchrotron x-ray sources can be applied, under certain circumstances, to laboratory-based tools.","PeriodicalId":250897,"journal":{"name":"2015 16th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems","volume":"34 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-04-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125715947","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"The influence of PBGAs post-manufacturing warpage simulation, viscoelastic material properties and evaluation methodology on accuracy of solder joints damage prediction","authors":"M. Kuczynska, N. Schafet, M. Spraul, U. Becker","doi":"10.1109/EUROSIME.2015.7103083","DOIUrl":"https://doi.org/10.1109/EUROSIME.2015.7103083","url":null,"abstract":"Two Plastic Ball Grid Array (PBGA) designs were stressed with Temperature Cycles (TC) in the Board Level Reliability (BLR) test, and simulated using FEM. The test result for one of the PBGAs was not in line with original expectation, but it was confirmed by FE-simulation. The simulation incorporated manufacturing process (the real post-cure shape verified by measurement) and viscoelastic material properties. The impact of model simplifications (i.e. omitting manufacturing process simulation or viscoelastic material properties) on the thermo-mechanical load of the solder joints was investigated. The opportunities and restrictions of these simplifications are shown and discussed. The current work also describes an improvement of the strategy for evaluation of the simulation results. The correlation between the test result (crack lengths observed via cross sections) and the local damage-related state variables from the FE-simulation was improved when effects of hydrostatic stress and cross section direction were included in the evaluation.","PeriodicalId":250897,"journal":{"name":"2015 16th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems","volume":"89 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-04-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129329425","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}