仿真与加速力学试验相结合的铜球键可靠性评估

M. Lederer, A. Lassnig, G. Khatibi, M. Delshadmanesh
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引用次数: 2

摘要

我们研究了覆盖铝金属化层的硅片上的铜球键的疲劳强度。在使用条件下,芯片暴露于反复的温度变化导致热机械应力。为了预测其寿命,在超声频率下进行了加速力学试验。因此,测试了不同的设置来优化方法。由机械测试产生的应力与由不同材料的热失配引起的偏应力进行了比较。为此,进行了有限元计算机模拟。结果表明,不同设置下的应力分布有较大差异。然而,最薄弱的环节始终是铝金属化层。因此,加载循环次数到破坏可能与在铝膜中观察到的von Mises应力有关。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Reliability assessment of copper ball bonds by combination of simulation and accelerated mechanical testing
We have investigated the fatigue strength of copper ball bonds attached to silicon chips covered with an aluminum metallization layer. Under service conditions, the chips are exposed to repeated temperature changes leading to thermo-mechanical stresses. In order to predict their lifetime, accelerated mechanical tests were performed at ultrasonic frequency. Thereby, different setups were tested to optimize the method. The stresses resulting from mechanical tests were compared to deviatoric stresses originating from thermal mismatch of the different materials involved. For this purpose, FEM computer simulations were performed. It was found that the stress distributions of the different setups are quite different. Nevertheless, the weakest link of the construction was always the aluminum metallization layer. In consequence, the number of loading cycles to failure could be related to the von Mises stress observed in the aluminum film.
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