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2018 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)最新文献

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Auto-zero baseline correction circuit for MEMS accelerometer based seismic sensor 基于MEMS加速度计的地震传感器零基线自动校正电路
2018 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2018-03-01 DOI: 10.1109/ISISS.2018.8358160
P. Ioakim, I. Triantis
{"title":"Auto-zero baseline correction circuit for MEMS accelerometer based seismic sensor","authors":"P. Ioakim, I. Triantis","doi":"10.1109/ISISS.2018.8358160","DOIUrl":"https://doi.org/10.1109/ISISS.2018.8358160","url":null,"abstract":"Data from seismic instruments utilizing MEMS accelerometric inertial sensors require two numerical integrations in order for ground motion over time trends to be derived. The noise, offsets and drifts in the interfacing electronics and within the MEMS sensor, manifest themselves as considerable cumulative errors on the post-integration derived displacement data. Currently, these errors are tackled by pre-event data averaging and digital correction algorithms on the accelerometric digitized data, requiring careful interpretation and manual manipulation, inevitably leading to undetermined displacement trends. The work presented herein practically demonstrates an instrument based circuit solution, facilitating baseline error correction at the source, and thus greatly reducing the otherwise prominent cumulative errors in the derived displacement trends.","PeriodicalId":237642,"journal":{"name":"2018 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"79 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114289400","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
A novel compensation method of damping asymmetry based on piezoelectric electrodes for cylindrical resonators 基于压电电极的圆柱谐振器阻尼不对称补偿方法
2018 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2018-03-01 DOI: 10.1109/ISISS.2018.8358131
Jiangkun Sun, Yulie Wu, X. Xi, Yongmeng Zhang, Xuezhong Wu, Luozhen Qu
{"title":"A novel compensation method of damping asymmetry based on piezoelectric electrodes for cylindrical resonators","authors":"Jiangkun Sun, Yulie Wu, X. Xi, Yongmeng Zhang, Xuezhong Wu, Luozhen Qu","doi":"10.1109/ISISS.2018.8358131","DOIUrl":"https://doi.org/10.1109/ISISS.2018.8358131","url":null,"abstract":"The damping asymmetry of cylindrical resonators is one of the major sources which result in the gyroscope's drift. In this paper, a new approach for compensating the damping asymmetry of cylindrical resonators is proposed. The damping asymmetry compensation model is established to analyze the additional damping's influences. Furthermore, piezoelectric electrodes' effects on the cylindrical resonator's damping characteristic are figured out through the finite element simulation. At last, these theoretical analysis and simulation results are utilized to compensate the damping asymmetry of cylindrical resonators, which is also verified by experiments.","PeriodicalId":237642,"journal":{"name":"2018 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"51 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115083541","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Theoretical model and experiments of glass reflow process in TGV for 3D wafer-level packaging 三维圆片级封装TGV玻璃回流工艺的理论模型与实验
2018 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2018-03-01 DOI: 10.1109/ISISS.2018.8358134
Yunbin Kuang, D. Xiao, Jian Zhou, Wenyin Li, Z. Hou, H. Cui, Xuezhong Wu
{"title":"Theoretical model and experiments of glass reflow process in TGV for 3D wafer-level packaging","authors":"Yunbin Kuang, D. Xiao, Jian Zhou, Wenyin Li, Z. Hou, H. Cui, Xuezhong Wu","doi":"10.1109/ISISS.2018.8358134","DOIUrl":"https://doi.org/10.1109/ISISS.2018.8358134","url":null,"abstract":"TGV (Through Glass Via) substrate plays an important role in wafer-level vacuum packaging. And glass reflow is the critical step of fabricating TGV. To describe the process, the theoretical formula was deduced through the analogy of fluid equation and circuit equation. Parameters of glass reflow process, such as heating treatment time and temperature for a certain width mold et al. were comprised in theoretical model, which significantly influence the reflow speed. Simulations were conducted and compatible to the theoretical results. Moreover, in all the three types of fabricating process including wet etching, laser burning and DRIE, the theoretical formula shows the feasibility for providing parameters for glass reflow process. Finally, hermetic packaging experiments were performed by sealing a gyroscope, and the Q factor measured was 9119, which indicates the feasibility of the TGV substrate for wafer-level hermetic packaging.","PeriodicalId":237642,"journal":{"name":"2018 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"5 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123684381","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Predicting height and determining mass of foaming agents for glass shell resonators 玻璃壳谐振器发泡剂的高度预测和质量测定
2018 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2018-03-01 DOI: 10.1109/ISISS.2018.8358152
Bin Luo, J. Shang, Zhaoxi Su, C. Wong
{"title":"Predicting height and determining mass of foaming agents for glass shell resonators","authors":"Bin Luo, J. Shang, Zhaoxi Su, C. Wong","doi":"10.1109/ISISS.2018.8358152","DOIUrl":"https://doi.org/10.1109/ISISS.2018.8358152","url":null,"abstract":"This paper aims to determine the mass of foaming agents for shaping 3D glass shell resonators in the foaming process. A simplified analytical model coupled with finite element analysis is established to relate the shell height with the mass of foaming agents. The experimental results are in good agreement with the values predicted by the model. This model provides a way for controlling shell height in the foaming process.","PeriodicalId":237642,"journal":{"name":"2018 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"12 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122255927","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
200mm High performance inertial sensor manufacturing process 200mm高性能惯性传感器制造工艺
2018 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2018-03-01 DOI: 10.1109/ISISS.2018.8358158
F. Dion, S. Martel, J. DeNatale
{"title":"200mm High performance inertial sensor manufacturing process","authors":"F. Dion, S. Martel, J. DeNatale","doi":"10.1109/ISISS.2018.8358158","DOIUrl":"https://doi.org/10.1109/ISISS.2018.8358158","url":null,"abstract":"This paper presents a high performance inertial sensor manufacturing process on 200mm wafers, adapted for applications in the industrial, aerospace, naval, offshore and defense markets. Electrical results for resonant frequency, frequency splits and quality factor are presented to demonstrate the process performance. The process integrates hermetic Wafer Level Packaging (WLP) without requiring a getter.","PeriodicalId":237642,"journal":{"name":"2018 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"13 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129458484","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 7
Simulation-based approach for fabrication of micro-shell resonators with controllable stiffness and mass distribution 基于仿真的刚度和质量分布可控微壳谐振器制造方法
2018 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2018-03-01 DOI: 10.1109/ISISS.2018.8358146
B. Shiari, T. Nagourney, Sajal Singh, J. Cho, K. Najafi
{"title":"Simulation-based approach for fabrication of micro-shell resonators with controllable stiffness and mass distribution","authors":"B. Shiari, T. Nagourney, Sajal Singh, J. Cho, K. Najafi","doi":"10.1109/ISISS.2018.8358146","DOIUrl":"https://doi.org/10.1109/ISISS.2018.8358146","url":null,"abstract":"This paper presents a precision shell integrating (PSI) gyroscope design and fabrication based on an upfront simulation of a modified micro-blowtorching technique. The PSI resonator is designed to achieve low frequency n = 2 wine-glass mode and high parasitic mode frequencies to improve shock and vibration tolerance. The resonator has also larger effective mass than other MEMS gyroscope resonator designs. A non-isothermal model is developed to simulate reflow molding dynamics and solve the key challenge of PSI resonator fabrication, which is designing a patterned substrate geometry whose various regions stretch to the desired final thickness and land at the appropriate locations along a graphite mold. Our upfront process simulation model saves significant cost and time by eliminating the trial-and-error approach to fabricating PSI resonators with the desired mass and stiffness distribution.","PeriodicalId":237642,"journal":{"name":"2018 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"34 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130484974","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 4
FOG based INS for satellite launcher application 用于卫星发射装置的基于光纤陀螺的惯性导航系统
2018 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2018-03-01 DOI: 10.1109/ISISS.2018.8358115
D. Grifi, R. Senatore, E. Quatraro, M. Verola, A. Pizzarulli
{"title":"FOG based INS for satellite launcher application","authors":"D. Grifi, R. Senatore, E. Quatraro, M. Verola, A. Pizzarulli","doi":"10.1109/ISISS.2018.8358115","DOIUrl":"https://doi.org/10.1109/ISISS.2018.8358115","url":null,"abstract":"Spatial missions begin with orbit immission of a satellite in parking orbit by means of a satellite launcher. Civitanavi Systems developed an Inertial Navigation Systems (INS), based on proprietary FOG technology, for stabilization and navigation of satellite launcher during its mission. Rather than adopting the NED reference frame and a 3-2-1 Euler angles, which are mostly used in atmospheric flights for attitude determination, in space flight (satellite carrier rockets) the LPI (Launch-Point-Inertial) reference frame is preferred with 2-3-1 Euler angles orientation representation; hence different inertial navigation equations are derived for this special application. Main characteristics required for a satellite launcher INS are its capability to withstand harsh operating environment in terms of mechanical vibrations and shocks. Lateral booster detachment by means of propellant (explosive charges) induces a 10000g pyroshock on the INS unit exciting frequencies up to 5000 Hz; indeed if for other electronic components, such as FCC, mechanical isolation is not a problem, it becomes the main problem for a system that “work” with the inertial movements of the rocket. Special requirements are derived in terms of mechanical design and FOG control law enhancement in order to stabilize closed-loop FOG during high angular acceleration phase (shock) and to reject spurious dynamic measurements. Mechanical and special firmware has been developed in order to “follows” inertial movements and at the same time protect sensors while very high shock (pyrotechnic shock of 10000g) happens. Finally some experimental results on achieved accuracy are presented.","PeriodicalId":237642,"journal":{"name":"2018 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"32 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122468876","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Compact atomic magnetometer for global navigation (NAV-CAM) 紧凑型全球导航原子磁力计(NAV-CAM)
2018 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2018-03-01 DOI: 10.1109/ISISS.2018.8358161
D. Bevan, M. Bulatowicz, Philip R. Clark, R. Griffith, Michael S. Larsen, M. Luengo-Kovac, J. Pavell
{"title":"Compact atomic magnetometer for global navigation (NAV-CAM)","authors":"D. Bevan, M. Bulatowicz, Philip R. Clark, R. Griffith, Michael S. Larsen, M. Luengo-Kovac, J. Pavell","doi":"10.1109/ISISS.2018.8358161","DOIUrl":"https://doi.org/10.1109/ISISS.2018.8358161","url":null,"abstract":"Northrop Grumman is developing an atom-based magnetometer technology that has the potential for providing a global position reference independent of GPS. The NAV-CAM sensor is a direct outgrowth of the Nuclear Magnetic Resonance Gyro under development by the same technical team. It is capable of providing simultaneous measurements of all 3 orthogonal axes of magnetic vector field components using a single compact vapor cell. The vector sum determination of the whole-field scalar measurement achieves similar precision to the individual vector components. By using a single sensitive element (vapor cell) this approach eliminates many of the problems encountered when using physically separate sensors or sensing elements.","PeriodicalId":237642,"journal":{"name":"2018 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128856514","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Effect of fabrication imperfections on energy loss through mechanical mode coupling in MEMS 制造缺陷对MEMS机械模式耦合能量损失的影响
2018 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2018-03-01 DOI: 10.1109/ISISS.2018.8358155
D. Vatanparvar, A. Shkel
{"title":"Effect of fabrication imperfections on energy loss through mechanical mode coupling in MEMS","authors":"D. Vatanparvar, A. Shkel","doi":"10.1109/ISISS.2018.8358155","DOIUrl":"https://doi.org/10.1109/ISISS.2018.8358155","url":null,"abstract":"We identified the mechanical mode coupling as a major energy loss mechanism limiting the quality factor of MEMS resonators, such as gyroscopes. An analytical model was derived to quantify the effect of fabrication imperfections on the phenomenon of intermode energy exchange. Using both finite element analysis and analytical modeling, the mechanical coupling between in-plane and out-of-plane modes of resonators with fabrication imperfections was studied and the decrement in the quality factor due to mode coupling was predicted. The analysis was used to explain why some low frequency designs are exhibiting a quality factor close to their fundamental TED limit, while others are showing the quality factor with orders of magnitude lower than their TED limit. Our analytical predictions are supported experimentally.","PeriodicalId":237642,"journal":{"name":"2018 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"48 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116376951","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 9
Electro-mechanical chopping & modulation of acceleration: The geometry-modulated accelerometer 加速度的机电斩波和调制:几何调制加速度计
2018 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2018-03-01 DOI: 10.1109/ISISS.2018.8358138
A. Tocchio, F. Rizzini, C. R. Marra, Filippo M. Ferrari, G. Langfelder
{"title":"Electro-mechanical chopping & modulation of acceleration: The geometry-modulated accelerometer","authors":"A. Tocchio, F. Rizzini, C. R. Marra, Filippo M. Ferrari, G. Langfelder","doi":"10.1109/ISISS.2018.8358138","DOIUrl":"https://doi.org/10.1109/ISISS.2018.8358138","url":null,"abstract":"This paper reports, to the authors' knowledge, the first MEMS accelerometer capable of modulating the acceleration signal from DC to AC frequencies: the geometry-modulated accelerometer. In this innovative scheme of operation, the geometry of the movable mass is changed during operation by means of electrostatic actuation, resulting in the modulation of the moment of inertia and thus of the inertial force. A first prototype of an in-plane geometry-modulated accelerometer having −0.3 fF/g sensitivity for an in-plane area of about (500 μm × 500 μm) is presented and demonstrated.","PeriodicalId":237642,"journal":{"name":"2018 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"29 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125352734","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
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