200mm高性能惯性传感器制造工艺

2018 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2018-03-01 DOI:10.1109/ISISS.2018.8358158

F. Dion, S. Martel, J. DeNatale

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引用次数: 7

摘要

本文介绍了一种高性能的200mm晶圆惯性传感器制造工艺，适用于工业、航空航天、海军、海洋和国防市场。给出了谐振频率、频率分裂和质量因数的电学结果，以证明该工艺的性能。该工艺集成了密封晶圆级封装(WLP)，而不需要吸气器。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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200mm High performance inertial sensor manufacturing process

This paper presents a high performance inertial sensor manufacturing process on 200mm wafers, adapted for applications in the industrial, aerospace, naval, offshore and defense markets. Electrical results for resonant frequency, frequency splits and quality factor are presented to demonstrate the process performance. The process integrates hermetic Wafer Level Packaging (WLP) without requiring a getter.

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2018 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)

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